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1. 发明授权

US08546712B2 MEMS devices 有权
标题翻译： MEMS器件
公开(公告)号：US08546712B2
公开(公告)日：2013-10-01
申请号：US13203624
申请日：2010-03-04
申请人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Jozef Thomas Martinus van Beek
发明人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Jozef Thomas Martinus van Beek
IPC分类号： H01H57/00
CPC分类号： B81B3/0078 , B81B2201/014 , B81B2201/016 , H01G5/011 , H01G5/16
摘要： A MEMS device comprises first and second opposing electrode arrangements (22,28), wherein the second electrode arrangement (28) is electrically movable to vary the electrode spacing between facing sides of the first and second electrode arrangements. At least one of the facing sides has a non-flat surface with at least one peak and at least one trough. The height of the peak and depth of the trough is between 0.01t and 0.1t where t is the thickness of the movable electrode.
摘要翻译： MEMS器件包括第一和第二相对电极布置（22,28），其中第二电极布置（28）可电可移动以改变第一和第二电极布置的相对侧之间的电极间距。至少一个相对侧具有具有至少一个峰和至少一个槽的非平坦表面。槽的高度和深度在0.01t到0.1t之间，其中t是可动电极的厚度。

2. 发明申请

US20120043188A1 MEMS DEVICES 有权
标题翻译： MEMS设备
公开(公告)号：US20120043188A1
公开(公告)日：2012-02-23
申请号：US13203624
申请日：2010-03-04
申请人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Jozef Thomas Martinus van Beek
发明人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Jozef Thomas Martinus van Beek
IPC分类号： H01H59/00 , H01H11/00
CPC分类号： B81B3/0078 , B81B2201/014 , B81B2201/016 , H01G5/011 , H01G5/16
摘要： A MEMS device comprises first and second opposing electrode arrangements (22,28), wherein the second electrode arrangement (28) is electrically movable to vary the electrode spacing between facing sides of the first and second electrode arrangements. At least one of the facing sides has a non-flat surface with at least one peak and at least one trough. The height of the peak and depth of the trough is between 0.01t and 0.1t where t is the thickness of the movable electrode.
摘要翻译： MEMS器件包括第一和第二相对电极布置（22,28），其中第二电极布置（28）可电可移动以改变第一和第二电极布置的相对侧之间的电极间距。至少一个相对侧具有具有至少一个峰和至少一个槽的非平坦表面。槽的高度和深度在0.01t到0.1t之间，其中t是可动电极的厚度。

3. 发明授权

US08716619B2 MEMS switch 有权
标题翻译： MEMS开关
公开(公告)号：US08716619B2
公开(公告)日：2014-05-06
申请号：US13306675
申请日：2011-11-29
申请人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Klaus Reimann
发明人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Klaus Reimann
IPC分类号： H01H13/62
CPC分类号： H01H59/0009 , H01H2059/0054
摘要： A MEMS switch in which at least first, second and third signal lines are provided over the substrate, which each terminate at a connection region. A lower actuation electrode arrangement is over the substrate. A movable contact electrode is suspended over the connection regions for making or breaking electrical contact between at least two of the three connection regions and an upper actuation electrode provided over the lower actuation electrode. The use of three of more signal lines enables a symmetrical actuation force to be achieved or enables multiple switch functions to be implemented by the single movable electrode, or both.
摘要翻译：一种MEMS开关，其中至少第一，第二和第三信号线设置在衬底上，每个终止于连接区域。下部致动电极布置在衬底上方。可移动接触电极悬挂在连接区域上，用于制造或断开三个连接区域中的至少两个之间的电接触，以及设置在下部致动电极上的上部致动电极。使用三条更多的信号线使得能够实现对称的致动力，或者使单个可移动电极或两者都能实现多个开关功能。

4. 发明授权

US08513745B2 MEMS switch and fabrication method 有权
标题翻译： MEMS开关和制造方法
公开(公告)号：US08513745B2
公开(公告)日：2013-08-20
申请号：US12996505
申请日：2009-05-29
申请人： Peter Gerard Steeneken , Hilco Suy , Martijn Goossens , Olaf Wunnicke
发明人： Peter Gerard Steeneken , Hilco Suy , Martijn Goossens , Olaf Wunnicke
IPC分类号： H01L29/84
CPC分类号： H01H59/0009
摘要： A MEMS switch (1, 81), and methods of fabricating thereof, the switch comprising: a sealed cavity (24); and a membrane (26); wherein the sealed cavity (24) is defined in part by the membrane (26); and the membrane is a 5 metallic membrane (26), for example consisting of a single type of metal or metal alloy. The MEMS switch (1, 81) may comprise a top electrode (30), for example extending into the cavity (24), located in a hole (32) in the metallic membrane (26). Fabrication may include providing a sacrificial layer (22) in a partly defined cavity (24). The bending stiffness of the membrane (26) may be 10 higher along an RF line (102) than along a line (104) perpendicular to the RF line (102), for example by virtue of the cavity (24) being elliptical.
摘要翻译：一种MEMS开关（1,81）及其制造方法，所述开关包括：密封空腔（24）; 和膜（26）; 其中所述密封空腔（24）部分地由所述膜（26）限定; 并且膜是例如由单一类型的金属或金属合金组成的5金属膜（26）。 MEMS开关（1,81）可以包括位于金属膜（26）中的孔（32）中的顶部电极（30），例如延伸到空腔（24）中。制造可以包括在部分限定的空腔（24）中提供牺牲层（22）。沿着RF线（102），例如通过空腔（24）是椭圆形的，膜（26）的弯曲刚度可以比垂直于RF线（102）的线（104）高10。

5. 发明申请

US20110147861A1 MEMS SWITCH AND FABRICATION METHOD 有权
标题翻译： MEMS开关和制造方法
公开(公告)号：US20110147861A1
公开(公告)日：2011-06-23
申请号：US12996505
申请日：2009-05-29
申请人： Peter Gerard Steeneken , Hilco Suy , Martijn Goossens , Olaf Wunnicke
发明人： Peter Gerard Steeneken , Hilco Suy , Martijn Goossens , Olaf Wunnicke
IPC分类号： H01L29/66 , H01L21/50
CPC分类号： H01H59/0009
摘要： A MEMS switch (1, 81), and methods of fabricating thereof, the switch comprising: a sealed cavity (24); and a membrane (26); wherein the sealed cavity (24) is defined in part by the membrane (26); and the membrane is a 5 metallic membrane (26), for example consisting of a single type of metal or metal alloy. The MEMS switch (1, 81) may comprise a top electrode (30), for example extending into the cavity (24), located in a hole (32) in the metallic membrane (26). Fabrication may include providing a sacrificial layer (22) in a partly defined cavity (24). The bending stiffness of the membrane (26) may be 10 higher along an RF line (102) than along a line (104) perpendicular to the RF line (102), for example by virtue of the cavity (24) being elliptical.
摘要翻译：一种MEMS开关（1,81）及其制造方法，所述开关包括：密封空腔（24）; 和膜（26）; 其中所述密封空腔（24）部分地由所述膜（26）限定; 并且膜是例如由单一类型的金属或金属合金组成的5金属膜（26）。 MEMS开关（1,81）可以包括位于金属膜（26）中的孔（32）中的顶部电极（30），例如延伸到空腔（24）中。制造可以包括在部分限定的空腔（24）中提供牺牲层（22）。沿着RF线（102），例如通过空腔（24）是椭圆形的，膜（26）的弯曲刚度可以比垂直于RF线（102）的线（104）高10。

6. 发明申请

US20120305374A1 MEMS SWITCH 有权
标题翻译： MEMS开关
公开(公告)号：US20120305374A1
公开(公告)日：2012-12-06
申请号：US13306675
申请日：2011-11-29
申请人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Klaus Reimann
发明人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Klaus Reimann
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0054
摘要： A MEMS switch in which at least first, second and third signal lines are provided over the substrate, which each terminate at a connection region. A lower actuation electrode arrangement is over the substrate. A movable contact electrode is suspended over the connection regions for making or breaking electrical contact between at least two of the three connection regions and an upper actuation electrode provided over the lower actuation electrode.The use of three of more signal lines enables a symmetrical actuation force to be achieved, and/or enables multiple switch functions to be implemented by the single movable electrode.
摘要翻译：一种MEMS开关，其中至少第一，第二和第三信号线设置在衬底上，每个终止于连接区域。下部致动电极布置在衬底上方。可移动接触电极悬挂在连接区域上，用于制造或断开三个连接区域中的至少两个之间的电接触，以及设置在下部致动电极上的上部致动电极。使用三条更多的信号线使得能够实现对称的致动力，和/或使单个可移动电极实现多个开关功能。

7. 发明申请

US20110187347A1 ELECTROMECHANICAL TRANSDUCER AND A METHOD OF PROVIDING AN ELECTROMECHANICAL TRANSDUCER 有权
标题翻译：机电传感器和提供机电传感器的方法
公开(公告)号：US20110187347A1
公开(公告)日：2011-08-04
申请号：US13058114
申请日：2009-07-28
申请人： Martijn Goossens , Jozef Thomas Martinus van Beek
发明人： Martijn Goossens , Jozef Thomas Martinus van Beek
IPC分类号： G01R29/22
CPC分类号： H03H9/02275 , H03H9/02259 , H03H9/02338 , H03H9/2457 , H03H2009/02511
摘要： The invention relates to an electromechanical transducer (100). The electromechanical transducer (100) comprises a cantilever beam (101) and an excitation unit (102) that is adapted for exciting a motion of the cantilever beam (101). A detection unit (103) is adapted for detecting an electrical signal (iout) in response to the excited motion of the cantilever beam (101).
摘要翻译：本发明涉及机电换能器（100）。机电换能器（100）包括悬臂梁（101）和适于激发悬臂梁（101）的运动的激励单元（102）。检测单元（103）适于响应于悬臂梁（101）的激发的运动来检测电信号（iout）。

8. 发明授权

US08686714B2 Electromechanical transducer and a method of providing an electromechanical transducer 有权
标题翻译：机电换能器和提供机电换能器的方法
公开(公告)号：US08686714B2
公开(公告)日：2014-04-01
申请号：US13058114
申请日：2009-07-28
申请人： Martijn Goossens , Jozef Thomas Martinus Van Beek
发明人： Martijn Goossens , Jozef Thomas Martinus Van Beek
IPC分类号： G01R29/22
CPC分类号： H03H9/02275 , H03H9/02259 , H03H9/02338 , H03H9/2457 , H03H2009/02511
摘要： The invention relates to an electromechanical transducer (100). The electromechanical transducer (100) comprises a cantilever beam (101) and an excitation unit (102) that is adapted for exciting a motion of the cantilever beam (101). A detection unit (103) is adapted for detecting an electrical signal (iout) in response to the excited motion of the cantilever beam (101).
摘要翻译：本发明涉及机电换能器（100）。机电换能器（100）包括悬臂梁（101）和适于激发悬臂梁（101）的运动的激励单元（102）。检测单元（103）适于响应于悬臂梁（101）的激发的运动来检测电信号（iout）。

9. 发明授权

US08339764B2 MEMs devices 有权
标题翻译： MEMs设备
公开(公告)号：US08339764B2
公开(公告)日：2012-12-25
申请号：US12990158
申请日：2009-05-07
申请人： Peter G. Steeneken , Hilco Suy , Martijn Goossens
发明人： Peter G. Steeneken , Hilco Suy , Martijn Goossens
IPC分类号： H01G7/00
CPC分类号： H01H1/0036 , B81B3/0078 , B81B2201/016 , B81B2203/0109 , H01H59/0009 , H01H2057/006
摘要： A MEMS device comprises first and second opposing electrodes (42,46), wherein the second electrode (46) is electrically movable to vary the electrode spacing between facing first sides of the first and second electrodes. A first gas chamber (50) is provided between the electrodes, at a first pressure, and a second gas chamber (52) is provided on the second, opposite, side of the second electrode at a second pressure which is higher than the first pressure. This arrangement provides rapid switching and with damping of oscillations so that settling times are reduced.
摘要翻译： MEMS器件包括第一和第二相对电极（42,46），其中第二电极（46）可电可移动以改变第一和第二电极的相对的第一侧之间的电极间隔。第一气室（50）在第一压力下设置在电极之间，第二气室（52）以比第一压力高的第二压力设置在第二电极的第二相对侧上。这种布置提供了快速切换和振荡的阻尼，从而降低了沉降时间。

10. 发明申请

US20110051312A1 MEMS DEVICES 有权
标题翻译： MEMS器件
公开(公告)号：US20110051312A1
公开(公告)日：2011-03-03
申请号：US12990158
申请日：2009-05-07
申请人： Peter G. Steeneken , Hilco Suy , Martijn Goossens
发明人： Peter G. Steeneken , Hilco Suy , Martijn Goossens
IPC分类号： H01G7/00 , H01H57/00
CPC分类号： H01H1/0036 , B81B3/0078 , B81B2201/016 , B81B2203/0109 , H01H59/0009 , H01H2057/006
摘要： A MEMS device comprises first and second opposing electrodes (42,46), wherein the second electrode (46) is electrically movable to vary the electrode spacing between facing first sides of the first and second electrodes. A first gas chamber (50) is provided between the electrodes, at a first pressure, and a second gas chamber (52) is provided on the second, opposite, side of the second electrode at a second pressure which is higher than the first pressure. This arrangement provides rapid switching and with damping of oscillations so that settling times are reduced.
摘要翻译： MEMS器件包括第一和第二相对电极（42,46），其中第二电极（46）可电可移动以改变第一和第二电极的相对的第一侧之间的电极间隔。第一气室（50）在第一压力下设置在电极之间，第二气室（52）以比第一压力高的第二压力设置在第二电极的第二相对侧上。这种布置提供了快速切换和振荡的阻尼，从而降低了沉降时间。

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