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1. 发明授权

US10041940B2 Analyte detection method and analyte detection integrated circuit 有权
公开(公告)号：US10041940B2
公开(公告)日：2018-08-07
申请号：US13570864
申请日：2012-08-09
申请人： Filip Frederix , Friso Jacobus Jedema , David Van Steenwinckel , Hilco Suy
发明人： Filip Frederix , Friso Jacobus Jedema , David Van Steenwinckel , Hilco Suy
IPC分类号： G01N33/543 , C12Q1/6825 , G01N27/414
摘要： A method for providing an integrated circuit such that first and second sensing electrodes respectively have at their surfaces first and second receptor molecules for selectively binding to first and second analytes of interest; exposing the integrated circuit to a sample potentially comprising at least one of the first and second analytes, providing a first bead having a first electrical signature attached to a first molecule having a conformation/affinity for binding to the first sensing electrode dependent on the presence of the first analyte; providing a second bead having a second electrical signature attached to a second molecule having a conformation/affinity for binding to the second sensing electrode dependent on the presence of the second analyte; and determining the presence of the electrical signature of the first and/or second bead(s) on the first and second sensing electrodes respectively. An IC for implementing this method.

2. 发明授权

US08513745B2 MEMS switch and fabrication method 有权
标题翻译： MEMS开关和制造方法
公开(公告)号：US08513745B2
公开(公告)日：2013-08-20
申请号：US12996505
申请日：2009-05-29
申请人： Peter Gerard Steeneken , Hilco Suy , Martijn Goossens , Olaf Wunnicke
发明人： Peter Gerard Steeneken , Hilco Suy , Martijn Goossens , Olaf Wunnicke
IPC分类号： H01L29/84
CPC分类号： H01H59/0009
摘要： A MEMS switch (1, 81), and methods of fabricating thereof, the switch comprising: a sealed cavity (24); and a membrane (26); wherein the sealed cavity (24) is defined in part by the membrane (26); and the membrane is a 5 metallic membrane (26), for example consisting of a single type of metal or metal alloy. The MEMS switch (1, 81) may comprise a top electrode (30), for example extending into the cavity (24), located in a hole (32) in the metallic membrane (26). Fabrication may include providing a sacrificial layer (22) in a partly defined cavity (24). The bending stiffness of the membrane (26) may be 10 higher along an RF line (102) than along a line (104) perpendicular to the RF line (102), for example by virtue of the cavity (24) being elliptical.
摘要翻译：一种MEMS开关（1,81）及其制造方法，所述开关包括：密封空腔（24）; 和膜（26）; 其中所述密封空腔（24）部分地由所述膜（26）限定; 并且膜是例如由单一类型的金属或金属合金组成的5金属膜（26）。 MEMS开关（1,81）可以包括位于金属膜（26）中的孔（32）中的顶部电极（30），例如延伸到空腔（24）中。制造可以包括在部分限定的空腔（24）中提供牺牲层（22）。沿着RF线（102），例如通过空腔（24）是椭圆形的，膜（26）的弯曲刚度可以比垂直于RF线（102）的线（104）高10。

3. 发明申请

US20120048709A1 RF MEMS SWITCH WITH A GRATING AS MIDDLE ELECTRODE 有权
标题翻译： RF MEMS开关作为中间电极
公开(公告)号：US20120048709A1
公开(公告)日：2012-03-01
申请号：US13319034
申请日：2010-05-07
申请人： Peter Gerard Steeneken , Hilco Suy , Rodolf Herfst , Twan Van Lippen
发明人： Peter Gerard Steeneken , Hilco Suy , Rodolf Herfst , Twan Van Lippen
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0018
摘要： The present invention provides a capacitive MEMS device comprising a first electrode lying in a plane, and a second electrode suspended above the first electrode and movable with respect to the first electrode. The first electrode functions as an actuation electrode. A gap is present between the first electrode and the second electrode. A third electrode is placed intermediate the first and second electrode with the gap between the third electrode and the second electrode. The third electrode has one or a plurality of holes therein, preferably in an orderly or irregular array. An aspect of the present invention integration of a conductive, e.g. metallic grating as a middle (or third) electrode. An advantage of the present invention is that it can reduce at least one problem of the prior art. This advantage allows an independent control over the pull-in and release voltage of a switch.
摘要翻译：本发明提供了一种电容MEMS器件，其包括位于平面中的第一电极和悬挂在第一电极上方并可相对于第一电极移动的第二电极。第一电极用作致动电极。在第一电极和第二电极之间存在间隙。第三电极被放置在第一和第二电极之间，第三电极和第二电极之间具有间隙。第三电极在其中具有一个或多个孔，优选为有序或不规则的阵列。本发明的一个方面是导电的，例如，金属光栅作为中间（或第三）电极。本发明的优点在于它可以减少至少一个现有技术的问题。这个优点允许独立控制开关的拉入和释放电压。

4. 发明申请

US20110147861A1 MEMS SWITCH AND FABRICATION METHOD 有权
标题翻译： MEMS开关和制造方法
公开(公告)号：US20110147861A1
公开(公告)日：2011-06-23
申请号：US12996505
申请日：2009-05-29
申请人： Peter Gerard Steeneken , Hilco Suy , Martijn Goossens , Olaf Wunnicke
发明人： Peter Gerard Steeneken , Hilco Suy , Martijn Goossens , Olaf Wunnicke
IPC分类号： H01L29/66 , H01L21/50
CPC分类号： H01H59/0009
摘要： A MEMS switch (1, 81), and methods of fabricating thereof, the switch comprising: a sealed cavity (24); and a membrane (26); wherein the sealed cavity (24) is defined in part by the membrane (26); and the membrane is a 5 metallic membrane (26), for example consisting of a single type of metal or metal alloy. The MEMS switch (1, 81) may comprise a top electrode (30), for example extending into the cavity (24), located in a hole (32) in the metallic membrane (26). Fabrication may include providing a sacrificial layer (22) in a partly defined cavity (24). The bending stiffness of the membrane (26) may be 10 higher along an RF line (102) than along a line (104) perpendicular to the RF line (102), for example by virtue of the cavity (24) being elliptical.
摘要翻译：一种MEMS开关（1,81）及其制造方法，所述开关包括：密封空腔（24）; 和膜（26）; 其中所述密封空腔（24）部分地由所述膜（26）限定; 并且膜是例如由单一类型的金属或金属合金组成的5金属膜（26）。 MEMS开关（1,81）可以包括位于金属膜（26）中的孔（32）中的顶部电极（30），例如延伸到空腔（24）中。制造可以包括在部分限定的空腔（24）中提供牺牲层（22）。沿着RF线（102），例如通过空腔（24）是椭圆形的，膜（26）的弯曲刚度可以比垂直于RF线（102）的线（104）高10。

5. 发明授权

US08546712B2 MEMS devices 有权
标题翻译： MEMS器件
公开(公告)号：US08546712B2
公开(公告)日：2013-10-01
申请号：US13203624
申请日：2010-03-04
申请人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Jozef Thomas Martinus van Beek
发明人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Jozef Thomas Martinus van Beek
IPC分类号： H01H57/00
CPC分类号： B81B3/0078 , B81B2201/014 , B81B2201/016 , H01G5/011 , H01G5/16
摘要： A MEMS device comprises first and second opposing electrode arrangements (22,28), wherein the second electrode arrangement (28) is electrically movable to vary the electrode spacing between facing sides of the first and second electrode arrangements. At least one of the facing sides has a non-flat surface with at least one peak and at least one trough. The height of the peak and depth of the trough is between 0.01t and 0.1t where t is the thickness of the movable electrode.
摘要翻译： MEMS器件包括第一和第二相对电极布置（22,28），其中第二电极布置（28）可电可移动以改变第一和第二电极布置的相对侧之间的电极间距。至少一个相对侧具有具有至少一个峰和至少一个槽的非平坦表面。槽的高度和深度在0.01t到0.1t之间，其中t是可动电极的厚度。

6. 发明授权

US08456260B2 MEMS switch 有权
标题翻译： MEMS开关
公开(公告)号：US08456260B2
公开(公告)日：2013-06-04
申请号：US12942051
申请日：2010-11-09
申请人： Peter Gerard Steeneken , Hilco Suy
发明人： Peter Gerard Steeneken , Hilco Suy
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H1/20 , Y10T29/49105
摘要： A MEMS switch comprises a substrate, first and second signal lines over the substrate, which each terminate at a connection region, a lower actuation electrode over the substrate and movable contact electrode suspended over the connection regions of the first and second signal lines. An upper actuation electrode is provided over the lower actuation electrode. The connection regions of the first and second signal lines are at a first height from the substrate, wherein signal line portions extending from the connection regions are at a lower height from the substrate, and the lower actuation electrode is provided over the lower height signal line portions, so that the lower height signal line portions are buried. The area available for the actuation electrodes becomes larger and undesired forces and interference are reduced.
摘要翻译： MEMS开关包括衬底，衬底上的第一和第二信号线，其每个终止于连接区域，衬底上的下部致动电极和悬挂在第一和第二信号线的连接区域上的可动接触电极。上致动电极设置在下致动电极上。第一信号线和第二信号线的连接区域处于距离基板的第一高度，其中从连接区域延伸的信号线部分处于距离基板的较低高度，并且下部致动电极设置在下部高度信号线使得下部高度信号线部分被埋入。可用于致动电极的面积变大，并且减少了不期望的力和干扰。

7. 发明授权

US08339764B2 MEMs devices 有权
标题翻译： MEMs设备
公开(公告)号：US08339764B2
公开(公告)日：2012-12-25
申请号：US12990158
申请日：2009-05-07
申请人： Peter G. Steeneken , Hilco Suy , Martijn Goossens
发明人： Peter G. Steeneken , Hilco Suy , Martijn Goossens
IPC分类号： H01G7/00
CPC分类号： H01H1/0036 , B81B3/0078 , B81B2201/016 , B81B2203/0109 , H01H59/0009 , H01H2057/006
摘要： A MEMS device comprises first and second opposing electrodes (42,46), wherein the second electrode (46) is electrically movable to vary the electrode spacing between facing first sides of the first and second electrodes. A first gas chamber (50) is provided between the electrodes, at a first pressure, and a second gas chamber (52) is provided on the second, opposite, side of the second electrode at a second pressure which is higher than the first pressure. This arrangement provides rapid switching and with damping of oscillations so that settling times are reduced.
摘要翻译： MEMS器件包括第一和第二相对电极（42,46），其中第二电极（46）可电可移动以改变第一和第二电极的相对的第一侧之间的电极间隔。第一气室（50）在第一压力下设置在电极之间，第二气室（52）以比第一压力高的第二压力设置在第二电极的第二相对侧上。这种布置提供了快速切换和振荡的阻尼，从而降低了沉降时间。

8. 发明申请

US20120056282A1 MEMS Transducer for an Audio Device 审中-公开
标题翻译：用于音频设备的MEMS传感器
公开(公告)号：US20120056282A1
公开(公告)日：2012-03-08
申请号：US13262609
申请日：2010-03-30
申请人： Twan Van Lippen , Geert Langereis , Josef Lutz , Hilco Suy , Cas Van Der Avoort , Andreas Bernardus Maria Jansman
发明人： Twan Van Lippen , Geert Langereis , Josef Lutz , Hilco Suy , Cas Van Der Avoort , Andreas Bernardus Maria Jansman
IPC分类号： H01L29/84 , H04R31/00
CPC分类号： H04R19/00 , H04R2499/11 , Y10T29/49005
摘要： A MEMS transducer (10) for an audio device comprises a substrate (12), a membrane (14) attached to the substrate (12), and a back-electrode (18) attached to the substrate (12), wherein a resonant frequency of the back-electrode (18) is matched to a resonant frequency of the membrane (14). Further, a method of manufacturing a MEMS transducer (19) for an audio device comprises attaching a membrane to a substrate (12), attaching a back-electrode (18) to the substrate (12), matching a resonant frequency of the back-electrode (18) to a resonant frequency of the membrane (14).
摘要翻译：用于音频装置的MEMS换能器（10）包括基板（12），附着到基板（12）的膜（14）和附接到基板（12）的背电极（18），其中谐振频率（18）的谐振频率匹配。此外，制造用于音频装置的MEMS换能器（19）的方法包括将膜附接到基板（12），将背电极（18）附接到基板（12），匹配背面电极（18）的谐振频率，电极（18）到膜（14）的共振频率。

9. 发明申请

US20120043188A1 MEMS DEVICES 有权
标题翻译： MEMS设备
公开(公告)号：US20120043188A1
公开(公告)日：2012-02-23
申请号：US13203624
申请日：2010-03-04
申请人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Jozef Thomas Martinus van Beek
发明人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Jozef Thomas Martinus van Beek
IPC分类号： H01H59/00 , H01H11/00
CPC分类号： B81B3/0078 , B81B2201/014 , B81B2201/016 , H01G5/011 , H01G5/16
摘要： A MEMS device comprises first and second opposing electrode arrangements (22,28), wherein the second electrode arrangement (28) is electrically movable to vary the electrode spacing between facing sides of the first and second electrode arrangements. At least one of the facing sides has a non-flat surface with at least one peak and at least one trough. The height of the peak and depth of the trough is between 0.01t and 0.1t where t is the thickness of the movable electrode.
摘要翻译： MEMS器件包括第一和第二相对电极布置（22,28），其中第二电极布置（28）可电可移动以改变第一和第二电极布置的相对侧之间的电极间距。至少一个相对侧具有具有至少一个峰和至少一个槽的非平坦表面。槽的高度和深度在0.01t到0.1t之间，其中t是可动电极的厚度。

10. 发明授权

US08716619B2 MEMS switch 有权
标题翻译： MEMS开关
公开(公告)号：US08716619B2
公开(公告)日：2014-05-06
申请号：US13306675
申请日：2011-11-29
申请人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Klaus Reimann
发明人： Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Klaus Reimann
IPC分类号： H01H13/62
CPC分类号： H01H59/0009 , H01H2059/0054
摘要： A MEMS switch in which at least first, second and third signal lines are provided over the substrate, which each terminate at a connection region. A lower actuation electrode arrangement is over the substrate. A movable contact electrode is suspended over the connection regions for making or breaking electrical contact between at least two of the three connection regions and an upper actuation electrode provided over the lower actuation electrode. The use of three of more signal lines enables a symmetrical actuation force to be achieved or enables multiple switch functions to be implemented by the single movable electrode, or both.
摘要翻译：一种MEMS开关，其中至少第一，第二和第三信号线设置在衬底上，每个终止于连接区域。下部致动电极布置在衬底上方。可移动接触电极悬挂在连接区域上，用于制造或断开三个连接区域中的至少两个之间的电接触，以及设置在下部致动电极上的上部致动电极。使用三条更多的信号线使得能够实现对称的致动力，或者使单个可移动电极或两者都能实现多个开关功能。

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