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1. 发明申请

US20100001615A1 Reduction of Air Damping in MEMS Device 有权
标题翻译：减少MEMS器件中的空气阻尼
公开(公告)号：US20100001615A1
公开(公告)日：2010-01-07
申请号：US11718142
申请日：2005-10-24
申请人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theo Rijks
发明人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theo Rijks
IPC分类号： H02N11/00
CPC分类号： H01H59/0009 , B81B3/0059 , B81B2201/0257 , B81B2201/0264 , H01G5/16 , H01H2001/0084
摘要： A micro-electromechanical device has a substrate (10), a movable element, movable towards the substrate by electrostatic forces on electrodes, facing surfaces of the movable element and the substrate being shaped such that one or more venting channels (VC) are defined by the facing surfaces when they are in a closed position, configured to enable fluid between the facing surfaces to flow across the facing surfaces, to enter or exit the area between the facing surfaces. Such channels can enable fluid damping of the movement of the moveable element to be controlled. Increasing the flow entering or exiting the area between the facing surfaces, can reduce such damping, and hence increase speed of opening and closing of the device. The channels can connect to holes in the electrodes.
摘要翻译：微机电装置具有基板（10），可移动元件，其可通过电极上的静电力朝向基板移动，可移动元件和基板的相对表面被成形为使得一个或多个排气通道（VC）由所述对置表面当它们处于关闭位置时，被配置为使所述相对表面之间的流体能够流过所述相对表面，以进入或离开所述相对表面之间的区域。这样的通道能够使待控制的可移动元件的运动的流体阻尼。增加进入或离开相对表面之间的区域的流量可以减少这种阻尼，从而增加装置的打开和关闭速度。通道可以连接到电极中的孔。

2. 发明授权

US08339764B2 MEMs devices 有权
标题翻译： MEMs设备
公开(公告)号：US08339764B2
公开(公告)日：2012-12-25
申请号：US12990158
申请日：2009-05-07
申请人： Peter G. Steeneken , Hilco Suy , Martijn Goossens
发明人： Peter G. Steeneken , Hilco Suy , Martijn Goossens
IPC分类号： H01G7/00
CPC分类号： H01H1/0036 , B81B3/0078 , B81B2201/016 , B81B2203/0109 , H01H59/0009 , H01H2057/006
摘要： A MEMS device comprises first and second opposing electrodes (42,46), wherein the second electrode (46) is electrically movable to vary the electrode spacing between facing first sides of the first and second electrodes. A first gas chamber (50) is provided between the electrodes, at a first pressure, and a second gas chamber (52) is provided on the second, opposite, side of the second electrode at a second pressure which is higher than the first pressure. This arrangement provides rapid switching and with damping of oscillations so that settling times are reduced.
摘要翻译： MEMS器件包括第一和第二相对电极（42,46），其中第二电极（46）可电可移动以改变第一和第二电极的相对的第一侧之间的电极间隔。第一气室（50）在第一压力下设置在电极之间，第二气室（52）以比第一压力高的第二压力设置在第二电极的第二相对侧上。这种布置提供了快速切换和振荡的阻尼，从而降低了沉降时间。

3. 发明申请

US20100182731A1 TUNABLE MEMS CAPACITOR 有权
标题翻译：可控MEMS电容器
公开(公告)号：US20100182731A1
公开(公告)日：2010-07-22
申请号：US12663829
申请日：2008-06-06
申请人： Peter G. Steeneken , Klaus Reimann
发明人： Peter G. Steeneken , Klaus Reimann
IPC分类号： H01G7/06
CPC分类号： H01G5/16 , H01G5/013 , H01G5/0136 , H01G7/06 , H01G2005/02 , H03J5/248
摘要： A MEMS tunable capacitor comprises first and second opposing capacitor electrodes (10,12), wherein the second capacitor electrode (12) is movable by a MEMS switch to vary the capacitor dielectric spacing, and thereby tune the capacitance. A tunable dielectric material (14) and a non-tunable dielectric material are in series between the first and second electrodes. The tunable dielectric material occupies a dimension gd of the electrode spacing, and the non-tunable dielectric material occupies a dimension g of the electrode spacing. A third electrode (20) faces the movable second electrode (12) for electrically controlling tunable dielectric material. A controller is adapted to vary the capacitor dielectric spacing for a first continuous range of adjustment of the capacitance of the MEMS capacitor, and to tune the dielectric material (14) for a second continuous range of adjustment of the capacitance of the MEMS capacitor, thereby to provide a continuous analogue range of adjustment including the first and second ranges. This arrangement provides independent control of the MEMS function and the dielectric tuning function, and enables a continuous adjustability.
摘要翻译： MEMS可调谐电容器包括第一和第二相对电容器电极（10,12），其中第二电容器电极（12）可通过MEMS开关移动以改变电容器介电间距，从而调谐电容。可调电介质材料（14）和不可调电介质材料串联在第一和第二电极之间。可调电介质材料占电极间距的尺寸gd，不可调电介质材料占电极间距的尺寸g。第三电极（20）面向可动第二电极（12），用于电控制可调电介质材料。控制器适于改变用于MEMS电容器的电容的第一连续调节范围的电容器电介质间隔，并且调谐电介质材料（14）用于MEMS电容器的电容的第二连续调节范围，从而以提供包括第一和第二范围的连续模拟调节范围。这种布置提供了对MEMS功能和介质调谐功能的独立控制，并且实现了连续可调性。

4. 发明授权

US08890543B2 Tunable MEMS capacitor 有权
标题翻译：可调MEMS电容器
公开(公告)号：US08890543B2
公开(公告)日：2014-11-18
申请号：US12663829
申请日：2008-06-09
申请人： Peter G. Steeneken , Klaus Reimann
发明人： Peter G. Steeneken , Klaus Reimann
IPC分类号： G01R27/26 , H01G5/16 , H03J5/24
CPC分类号： H01G5/16 , H01G5/013 , H01G5/0136 , H01G7/06 , H01G2005/02 , H03J5/248
摘要： A MEMS tunable capacitor comprises first and second opposing capacitor electrodes, wherein the second capacitor electrode is movable by a MEMS switch to vary the capacitor dielectric spacing, and thereby tune the capacitance. A tunable dielectric material and a non-tunable dielectric material are in series between the first and second electrodes. The tunable dielectric material occupies a dimension gd of the electrode spacing, and the non-tunable dielectric material occupies a dimension g of the electrode spacing. A third electrode faces the movable second electrode for electrically controlling tunable dielectric material. A controller is adapted to vary the capacitor dielectric spacing for a first continuous range of adjustment of the capacitance of the MEMS capacitor, and to tune the dielectric material for a second continuous range of adjustment of the capacitance of the MEMS capacitor, thereby to provide a continuous analogue range of adjustment including the first and second ranges. This arrangement provides independent control of the MEMS function and the dielectric tuning function, and enables a continuous adjustability.
摘要翻译： MEMS可调电容器包括第一和第二相对电容器电极，其中第二电容器电极可通过MEMS开关移动以改变电容器介电间距，从而调谐电容。可调电介质材料和不可调电介质材料串联在第一和第二电极之间。可调电介质材料占电极间距的尺寸gd，不可调电介质材料占电极间距的尺寸g。第三电极面对可移动的第二电极，用于电控制可调电介质材料。控制器适于改变用于MEMS电容器的电容的第一连续调节范围的电容器电介质间隔，并且调谐电介质材料用于MEMS电容器的电容的第二连续调节范围，从而提供连续的模拟调整范围包括第一和第二范围。这种布置提供了对MEMS功能和介质调谐功能的独立控制，并且实现了连续可调性。

5. 发明授权

US08680951B2 MEMS resonator 有权
标题翻译： MEMS谐振器
公开(公告)号：US08680951B2
公开(公告)日：2014-03-25
申请号：US12993486
申请日：2009-05-08
申请人： Peter G. Steeneken
发明人： Peter G. Steeneken
IPC分类号： H03H9/00 , H01P7/00
CPC分类号： H03H9/2436 , H03H9/02244 , H03H9/02433 , H03H2009/0237 , H03H2009/2442 , Y10T29/49002
摘要： A micro-electromechanical resonator comprising a material having anisotropic directional elasticity characteristics. A shape of the resonator is such that a first distance in a first direction from a centroid of the resonator to a first point on a peripheral edge of the resonator is greater than a second distance in a second direction from the centroid to a second different point on the edge. This is true for every first direction and every second direction wherein the material has a lesser modulus of elasticity in the first direction than the second direction.
摘要翻译：包括具有各向异性方向弹性特性的材料的微机电谐振器。谐振器的形状使得从谐振器的质心到谐振器的周边边缘上的第一点的第一方向上的第一距离大于从质心到第二不同点的第二方向上的第二距离在边缘。对于每个第一方向和每第二方向都是如此，其中材料在第一方向上具有比第二方向更小的弹性模量。

6. 发明授权

US08194386B2 Arrangement of MEMS devices having series coupled capacitors 有权
标题翻译：具有串联耦合电容器的MEMS器件的布置
公开(公告)号：US08194386B2
公开(公告)日：2012-06-05
申请号：US12158668
申请日：2006-12-18
申请人： Peter G. Steeneken , Kevin R. Boyle , Antonius J. M. De Graauw , Theodoor G. S. M. Rijks , Jozef T. M. Van Beek
发明人： Peter G. Steeneken , Kevin R. Boyle , Antonius J. M. De Graauw , Theodoor G. S. M. Rijks , Jozef T. M. Van Beek
IPC分类号： H01G5/00
CPC分类号： H01G5/38
摘要： A tuneable capacitor arrangement for RF use has two series coupled MEMS variable capacitors (C1,C2;C4,C5,C6,C7), varied according to a control signal. The series coupling enables the capacitor to withstand a higher voltage since this is shared by the individual capacitors in a series coupled arrangement. An increase in size of electrodes for each capacitor is compensated by a reduction in size of the springs supporting movable electrodes. These springs can have a larger stiffness value since the capacitance is larger. This means shorter springs, which can also result in a reduction in problems of stiction, resistance, and slow switching. The capacitances have a fixed and a movable electrode, with the RF signal coupled to the fixed electrode to avoid the springs needing to carry an RF signal. This can reduce the problems of inductance and resistance in the springs.
摘要翻译：用于RF使用的可调谐电容器布置具有根据控制信号而变化的两个串联耦合的MEMS可变电容器（C1，C2; C4，C5，C6，C7）。串联耦合使得电容器能够承受更高的电压，因为这是由串联耦合布置的各个电容器共享的。通过减少支撑可动电极的弹簧的尺寸来补偿每个电容器的电极尺寸的增加。这些弹簧可以具有较大的刚度值，因为电容较大。这意味着较短的弹簧，这也可能导致静电，电阻和慢速切换的问题的减少。电容具有固定和可移动电极，RF信号耦合到固定电极以避免弹簧需要携带RF信号。这可以减少弹簧中电感和电阻的问题。

7. 发明申请

US20110063052A1 MEMS RESONATOR 有权
标题翻译： MEMS谐振器
公开(公告)号：US20110063052A1
公开(公告)日：2011-03-17
申请号：US12993486
申请日：2009-05-08
申请人： Peter G. Steeneken
发明人： Peter G. Steeneken
IPC分类号： H03H9/02 , H05K13/00
CPC分类号： H03H9/2436 , H03H9/02244 , H03H9/02433 , H03H2009/0237 , H03H2009/2442 , Y10T29/49002
摘要： A micro-electromechanical resonator comprising a material having anisotropic directional elasticity characteristics. A shape of the resonator is such that a first distance in a first direction from a centroid of the resonator to a first point on a peripheral edge of the resonator is greater than a second distance in a second direction from the centroid to a second different point on the edge. This is true for every first direction and every second direction wherein the material has a lesser modulus of elasticity in the first direction than the second direction.
摘要翻译：包括具有各向异性方向弹性特性的材料的微机电谐振器。谐振器的形状使得从谐振器的质心到谐振器的周边边缘上的第一点的第一方向上的第一距离大于从质心到第二不同点的第二方向上的第二距离在边缘。对于每个第一方向和每第二方向都是如此，其中材料在第一方向上具有比第二方向更小的弹性模量。

8. 发明申请

US20080135385A1 Spring Structure For Mems Device 有权
标题翻译： Mems设备的弹簧结构
公开(公告)号：US20080135385A1
公开(公告)日：2008-06-12
申请号：US11718130
申请日：2005-10-24
申请人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theo Rijks
发明人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theo Rijks
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01G5/40 , H01H1/24 , H01H2059/0063
摘要： A MEM device has a movable element (30), a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel, and thus reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate.
摘要翻译： MEM器件具有可移动元件（30），一对电极（e 1，e 2），用于移动可移动元件，一个电极具有可独立移动的部分（e 3），弹性地联接到相应电极的其余部分提供对电极拉动的附加阻力。这可以实现更高的释放电压Vrel，从而降低静电的风险。此外，可以减小Vpi与Vrel的比率，因此更大的电压范围可用于可移动元件的移动。这样可以实现更快的切换。可独立移动部分的面积小于电极的其余部分，并且弹性联接件的弹簧常数大于柔性支撑件的弹簧常数。或者，可移动元件可以具有弹性耦合并朝向基板突出的可移动的印模部分，以在其接触基板时提供额外的拉入阻力。

9. 发明授权

US08203402B2 Electronic device 有权
标题翻译：电子设备
公开(公告)号：US08203402B2
公开(公告)日：2012-06-19
申请号：US11718137
申请日：2005-10-24
申请人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theodoor Rijks
发明人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theodoor Rijks
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/40 , H01H1/06 , H01H57/00 , H01H2057/006 , H01H2059/0072
摘要： The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate. The MEMS element includes a first electrode and a second electrode, that is part of a movable element and movable towards and from the first electrode between a first and a second position. The second electrode is separated from the first electrode by an air gap in its first position. The movable element includes a mechanical layer and an intermediate layer, in which the second electrode is defined. The second electrode is constituted by a plurality of sections in the intermediate layer, each of which is mechanically connected by a separate vertical interconnect to the mechanical layer.
摘要翻译：该电子设备包括在基板的第一侧的微机电系统（MEMS）元件。 MEMS元件包括第一电极和第二电极，其是可移动元件的一部分并且可在第一和第二位置之间朝向和离开第一电极移动。第二电极通过其第一位置的气隙与第一电极分离。可移动元件包括机械层和中间层，其中限定第二电极。第二电极由中间层中的多个部分构成，每个部分通过单独的垂直互连机械连接到机械层。

10. 发明授权

US08098120B2 Spring structure for MEMS device 有权
标题翻译：用于MEMS器件的弹簧结构
公开(公告)号：US08098120B2
公开(公告)日：2012-01-17
申请号：US11718130
申请日：2005-10-24
申请人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theo Rijks
发明人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theo Rijks
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01G5/40 , H01H1/24 , H01H2059/0063
摘要： A MEM device has a movable element (30), a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel, and thus reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate.
摘要翻译： MEM器件具有可移动元件（30），一对电极（e1，e2）以移动可移动元件，一个电极具有可独立移动的部分（e3），弹性地联接到相应电极的其余部分以提供额外的电阻到电极的拉。这可以实现更高的释放电压Vrel，从而降低静电的风险。此外，可以减小Vpi与Vrel的比率，因此更大的电压范围可用于可移动元件的移动。这样可以实现更快的切换。可独立移动部分的面积小于电极的其余部分，并且弹性联接件的弹簧常数大于柔性支撑件的弹簧常数。或者，可移动元件可以具有弹性耦合并朝向基板突出的可移动的印模部分，以在与基板接触时提供额外的拉入阻力。

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