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    • 8. 发明授权
    • Pressure transducers
    • 压力传感器
    • US5317923A
    • 1994-06-07
    • US972118
    • 1992-11-05
    • Herman W. ErichsenLouis J. PanagotopulosMark LevineWilliam T. Holmes
    • Herman W. ErichsenLouis J. PanagotopulosMark LevineWilliam T. Holmes
    • G01L9/00G01L9/06G01L7/08
    • G01L9/0052G01L9/06Y10T29/49103
    • The invention improves upon the diaphragm/beam-type transducers and method of manufacturing same described in U.S. Pat. No. 4,368,575.The new transducers and method of manufacture utilize strips or slivers of silicon or germanium which are larger than the individual strips used in the apparatus and method described in U.S. Pat. No. 4,368,575 by an amount sufficient to permit (a) the formation of two gages on each strip and (b) the forming of bonding pads on each gage. The bonding pads are formed on the gage strip before the strip is bonded to the beam, so that formation of the bonding pads and bonding of the strip to the beam can be handled automatically. The strips are mounted to one side of the midpoint of the beams, so that when a diaphragm/beam is deflected by application of a fluid pressure, one of the two gages will undergo a tension strain while the other gage will undergo a compression strain. Because both gages form part of the same silicon or germanium strip, they tend to be virtually identical in physical and electrical properties, thereby simplifying calibration of the resulting transducers.
    • 本发明改进了美国专利中描述的膜片/束型换能器及其制造方法。 第4,368,575号。 新的换能器和制造方法使用大于在美国专利No.4,650,515中描述的装置和方法中使用的各个条带的硅或锗的条或条。 (a)在每个条带上形成两个量规,和(b)在每个规格上形成焊盘。 在条被接合到光束之前,在焊盘上形成接合焊盘,从而可以自动地处理接合焊盘的形成和焊接条与焊接条的接合。 这些条带安装在梁的中点的一侧,使得当通过施加流体压力使隔膜/梁偏转时,两个量规中的一个将经受张力应变,而另一个量规将经受压缩应变。 因为两个量具都是相同硅或锗带的一部分,所以它们往往在物理和电学性质上几乎相同,从而简化了所得到的换能器的校准。