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    • 1. 发明授权
    • Differential pressure transducer
    • 差压传感器
    • US5796007A
    • 1998-08-18
    • US710814
    • 1996-09-23
    • Louis J. PanagotopulosHerman W. Erichsen
    • Louis J. PanagotopulosHerman W. Erichsen
    • G01L9/00G01L13/02
    • G01L9/006G01L9/0089
    • A differential pressure transducer for measuring a pressure differential between a first pressure source and a second pressure source. The differential pressure transducer includes a displacement element and a sensing element coupled to the displacement element. The displacement element moves in a linear direction and deflects the sensing element to provide a signal that is proportional to the movement of the displacement element when the first and second ends are subjected to the pressures at the pressure sources. The differential pressure transducer can also include a force transfer beam that connects the displacement element and the sensing element. The sensing element can include a sensing beam and a strain gauge mounted on the beam to provide an electrical signal proportional to the strain in the beam induced by the deflection of the beam. The force transfer beam and the sensing element can be portions of a unitary member formed as a stamped part. The displacement element can be a single piston or it can include a pair of force collectors attached to opposing sides of the force transfer beam. Additionally, the transducer can include overload protection to limit the movement of the displacement element and the force transfer beam. Further, the strain gauge is disposed on a portion of the beam that is externally accessible so as to improve the assembly and maintenance of the transducer.
    • 一种差压传感器,用于测量第一压力源和第二压力源之间的压力差。 压差传感器包括位移元件和联接到位移元件的感测元件。 位移元件在线性方向上移动并且使感测元件偏转以提供当第一和第二端受到压力源处的压力时位移元件的移动成比例的信号。 差压传感器还可以包括连接位移元件和传感元件的力传递梁。 感测元件可以包括传感光束和安装在光束上的应变计,以提供与由光束的偏转引起的光束中的应变成比例的电信号。 力传递束和感测元件可以是形成为冲压部件的整体构件的部分。 位移元件可以是单个活塞,或者它可以包括附接到力传递梁的相对侧的一对力收集器。 此外,换能器可以包括过载保护以限制位移元件和力传递梁的移动。 此外,应变仪设置在外部可接近的梁的一部分上,以便改进换能器的组装和维护。
    • 5. 发明授权
    • Method of manufacturing pressure transducers
    • 制造压力传感器的方法
    • US5174014A
    • 1992-12-29
    • US802011
    • 1991-12-03
    • Herman W. ErichsenLouis J. PanagotopulosMark LevineWilliam T. Holmes
    • Herman W. ErichsenLouis J. PanagotopulosMark LevineWilliam T. Holmes
    • G01L9/00G01L9/06
    • G01L9/0052G01L9/06Y10T29/49103
    • The invention improves upon the diaphragm/beam-type transducers and method of manufacturing same described in U.S. Pat. No. 4,368,575. The new transducers and method of manufacture utilize strips or slivers of silicon or germanium which are larger than the individual strips used in the apparatus and method described in U.S. Pat. No. 4,368,575 by an amount sufficient to permit (a) the formation of two gages on each strip and (b) the forming of bonding pads on each gage. The bonding pads are formed on the gage strip before the strip is bonded to the beam, so that formation of the bonding pads and bonding of the strip to the beam can be handled automatically. The strips are mounted to one side of the midpoint of the beams, so that when a diaphragm/beam is deflected by application of a fluid pressure, one of the two gages will undergo a tension strain while the other gage will undergo a compression strain. Because both gages form part of the same silicon or germanium strip, they tend to be virtually identical in physical and electrical properties, thereby simplifying calibration of the resulting transducers.
    • 本发明改进了美国专利中描述的膜片/束型换能器及其制造方法。 第4,368,575号。 新的换能器和制造方法使用大于在美国专利No.4,650,515中描述的装置和方法中使用的各个条带的硅或锗的条或条。 (a)在每个条带上形成两个量规,和(b)在每个规格上形成焊盘。 在条被接合到光束之前,在焊盘上形成接合焊盘,从而可以自动地处理接合焊盘的形成和焊接条与焊接条的接合。 这些条带安装在梁的中点的一侧,使得当通过施加流体压力使隔膜/梁偏转时,两个量规中的一个将经受张力应变,而另一个量规将经受压缩应变。 因为两个量具都是相同硅或锗带的一部分,所以它们往往在物理和电学性质上几乎相同,从而简化了所得到的换能器的校准。
    • 7. 发明授权
    • Pressure transducers
    • 压力传感器
    • US5317923A
    • 1994-06-07
    • US972118
    • 1992-11-05
    • Herman W. ErichsenLouis J. PanagotopulosMark LevineWilliam T. Holmes
    • Herman W. ErichsenLouis J. PanagotopulosMark LevineWilliam T. Holmes
    • G01L9/00G01L9/06G01L7/08
    • G01L9/0052G01L9/06Y10T29/49103
    • The invention improves upon the diaphragm/beam-type transducers and method of manufacturing same described in U.S. Pat. No. 4,368,575.The new transducers and method of manufacture utilize strips or slivers of silicon or germanium which are larger than the individual strips used in the apparatus and method described in U.S. Pat. No. 4,368,575 by an amount sufficient to permit (a) the formation of two gages on each strip and (b) the forming of bonding pads on each gage. The bonding pads are formed on the gage strip before the strip is bonded to the beam, so that formation of the bonding pads and bonding of the strip to the beam can be handled automatically. The strips are mounted to one side of the midpoint of the beams, so that when a diaphragm/beam is deflected by application of a fluid pressure, one of the two gages will undergo a tension strain while the other gage will undergo a compression strain. Because both gages form part of the same silicon or germanium strip, they tend to be virtually identical in physical and electrical properties, thereby simplifying calibration of the resulting transducers.
    • 本发明改进了美国专利中描述的膜片/束型换能器及其制造方法。 第4,368,575号。 新的换能器和制造方法使用大于在美国专利No.4,650,515中描述的装置和方法中使用的各个条带的硅或锗的条或条。 (a)在每个条带上形成两个量规,和(b)在每个规格上形成焊盘。 在条被接合到光束之前,在焊盘上形成接合焊盘,从而可以自动地处理接合焊盘的形成和焊接条与焊接条的接合。 这些条带安装在梁的中点的一侧,使得当通过施加流体压力使隔膜/梁偏转时,两个量规中的一个将经受张力应变,而另一个量规将经受压缩应变。 因为两个量具都是相同硅或锗带的一部分,所以它们往往在物理和电学性质上几乎相同,从而简化了所得到的换能器的校准。