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    • 3. 发明授权
    • Lithographic apparatus and device manufacturing method
    • 平版印刷设备和器件制造方法
    • US07230674B2
    • 2007-06-12
    • US11373503
    • 2006-03-13
    • Mark KroonMichael Cornelis Van BeekPeter DirksenRalph KurtCassandra May Owen
    • Mark KroonMichael Cornelis Van BeekPeter DirksenRalph KurtCassandra May Owen
    • G03B27/52G03B27/42G03B27/72
    • G03F7/70983G03F7/70808G03F7/70916G03F7/70933
    • A lithographic apparatus includes a radiation system that provides a beam of radiation, and a support structure that supports a patterning structure. The patterning structure is configured to pattern the beam of radiation according to a desired pattern. The apparatus also includes a substrate support that supports a substrate, and a projection system that projects the patterned beam onto a target portion of the substrate. The projection system includes an optical element that has a beam exit area through each of which the patterned beam passes. The apparatus further includes a fluid cleaning system that cleans a fluid to be introduced into a region in between the optical element and the substrate. The fluid cleaning system includes a fluid inlet, a fluid outlet, and a cleaning zone disposed between the inlet and outlet. The cleaning zone includes a nucleated surface provided with a plurality of nucleation sites.
    • 光刻设备包括提供辐射束的辐射系统和支撑图案化结构的支撑结构。 图形结构被配置为根据期望的图案对辐射束进行图案化。 该装置还包括支撑基板的基板支撑件和将图案化的光束投影到基板的目标部分上的投影系统。 投影系统包括光学元件,该光学元件具有通过图案化光束通过的每一个的光束出射区域。 该装置还包括清洁被引入到光学元件和基板之间的区域中的流体的流体清洁系统。 流体清洁系统包括流体入口,流体出口和布置在入口和出口之间的清洁区域。 清洁区包括具有多个成核位点的成核表面。
    • 4. 发明申请
    • Lithographic apparatus and device manufacturing method
    • 平版印刷设备和器件制造方法
    • US20060215132A1
    • 2006-09-28
    • US11373503
    • 2006-03-13
    • Mark KroonMichael Van BeekPeter DirksenRalph KurtCassandra Owen
    • Mark KroonMichael Van BeekPeter DirksenRalph KurtCassandra Owen
    • G03B27/52
    • G03F7/70983G03F7/70808G03F7/70916G03F7/70933
    • A lithographic apparatus includes a radiation system that provides a beam of radiation, and a support structure that supports a patterning structure. The patterning structure is configured to pattern the beam of radiation according to a desired pattern. The apparatus also includes a substrate support that supports a substrate, and a projection system that projects the patterned beam onto a target portion of the substrate. The projection system includes an optical element that has a beam exit area through each of which the patterned beam passes. The apparatus further includes a fluid cleaning system that cleans a fluid to be introduced into a region in between the optical element and the substrate. The fluid cleaning system includes a fluid inlet, a fluid outlet, and a cleaning zone disposed between the inlet and outlet. The cleaning zone includes a nucleated surface provided with a plurality of nucleation sites.
    • 光刻设备包括提供辐射束的辐射系统和支撑图案化结构的支撑结构。 图形结构被配置为根据期望的图案对辐射束进行图案化。 该装置还包括支撑基板的基板支撑件和将图案化的光束投影到基板的目标部分上的投影系统。 投影系统包括光学元件,该光学元件具有通过图案化光束通过的每一个的光束出射区域。 该装置还包括清洁被引入到光学元件和基板之间的区域中的流体的流体清洁系统。 流体清洁系统包括流体入口,流体出口和布置在入口和出口之间的清洁区域。 清洁区包括具有多个成核位点的成核表面。
    • 8. 发明授权
    • LED light source
    • US09357607B2
    • 2016-05-31
    • US14124733
    • 2012-06-04
    • Henricus Marius Joseph Maria KahlmanRalph Kurt
    • Henricus Marius Joseph Maria KahlmanRalph Kurt
    • H05B37/04H05B33/08
    • H05B33/0845H05B33/0812H05B33/0815H05B33/083H05B33/0842H05B33/0851H05B37/02Y02B20/347Y02B20/348
    • A LED light source comprises—a full bridge rectifier equipped with a first input terminal and a second input terminal for coupling to output terminals of the phase cut dimmer, —a series arrangement comprising N LED loads, a first and second end of said series arrangement being coupled to a first output terminal and a second output terminal of the full bridge rectifier respectively, —control means for during a period of the rectified AC supply voltage subsequently making the LED loads comprised in the first series arrangement carry a current, one by one and in dependency of the momentary amplitude of the rectified AC supply voltage when the momentary amplitude increases and for subsequently making the LED loads stop carrying a current, one by one, and in dependency of the momentary amplitude of the rectified AC supply voltage when the momentary amplitude decreases, said control means controlling the current through the LED loads at zero when the output voltage of the phase cut dimmer equals zero and controlling the current through the LED loads at a value that is independent from the phase angle of the phase cut dimmer when the output voltage of the phase cut dimmer differs from zero Volt. In order to make the LED light source compatible with a phase cut dimmer, the LED light source is further equipped with—a switchable bleeder current source coupled between the first and second output terminal of the full bridge rectifier, —a latch coupled between the first and second output terminals of the full rectifier bridge and comprising a series arrangement of a resistor and a capacitor to prevent the current through the dimmer from crossing zero after a leading edge generated by the phase cut dimmer, in case the phase cut dimmer is a leading edge phase cut dimmer, —a unidirectional element arranged in series with the capacitor for preventing discharging of the capacitor via the LED loads or the adjustable bleeder current source, and—a clamp circuit coupled to the capacitor and comprising a current source for discharging the capacitor and providing a low ohmic path for the dimmer current when the dimmer is off.
    • 9. 发明申请
    • LIGHT GENERATING DEVICE
    • 发光装置
    • US20150061499A1
    • 2015-03-05
    • US14117391
    • 2012-05-11
    • Christian HattrupHenricus Marius Joseph Maria KahlmanRalph KurtGeorg SauerländerBertrand Johan Edward HonteleHaimin Tao
    • Christian HattrupHenricus Marius Joseph Maria KahlmanRalph KurtGeorg SauerländerBertrand Johan Edward HonteleHaimin Tao
    • H05B33/08
    • H05B33/0824H05B33/0809H05B33/0815H05B33/083Y02B20/347
    • A light generating device (1) is provided with at least a voltage input (21) adapted for receiving a variable voltage, at least three LED circuits (10), coupled with said voltage input (21), wherein each LED circuit (10) comprises a LED unit (14) and controllable current regulator (15) to control the current through said LED circuit (10). The light generating device (1) further comprises a controllable switch matrix (30) comprising a plurality of switches (25, 26, 27), said switch matrix (30) is configured to operate in at least three different switching modes and a controller (50), connected at least with said switch matrix (30), configured to determine said variable operating voltage and to control the switching mode of said switch matrix (30) in dependence of the determined operating voltage. To provide an efficient operation of such device (1) with a variable operating voltage, such as an AC voltage, in a first switching mode, said LED units (10) are connected parallel to each other, in a second switching mode, at least two of said LED units (10) are connected in series and in a third switching mode, said LED units 10 are connected in series with each other.
    • 光发生装置(1)至少设置有用于接收可变电压的电压输入(21),与所述电压输入(21)耦合的至少三个LED电路(10),其中每个LED电路(10) 包括LED单元(14)和可控电流调节器(15),以控制通过所述LED电路(10)的电流。 光产生装置(1)还包括可控开关矩阵(30),其包括多个开关(25,26,27),所述开关矩阵(30)被配置为以至少三种不同的开关模式操作,以及控制器 至少与所述开关矩阵(30)相连接,被配置为确定所述可变工作电压并且根据所确定的工作电压来控制所述开关矩阵(30)的开关模式。 为了在第一开关模式中提供具有诸如AC电压的可变工作电压的这种装置(1)的有效操作,所述LED单元(10)以第二开关模式至少并联连接 两个所述LED单元(10)串联连接,在第三开关模式下,所述LED单元10彼此串联连接。