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    • 7. 发明授权
    • Lithographic apparatus and device manufacturing method
    • 平版印刷设备和器件制造方法
    • US07230674B2
    • 2007-06-12
    • US11373503
    • 2006-03-13
    • Mark KroonMichael Cornelis Van BeekPeter DirksenRalph KurtCassandra May Owen
    • Mark KroonMichael Cornelis Van BeekPeter DirksenRalph KurtCassandra May Owen
    • G03B27/52G03B27/42G03B27/72
    • G03F7/70983G03F7/70808G03F7/70916G03F7/70933
    • A lithographic apparatus includes a radiation system that provides a beam of radiation, and a support structure that supports a patterning structure. The patterning structure is configured to pattern the beam of radiation according to a desired pattern. The apparatus also includes a substrate support that supports a substrate, and a projection system that projects the patterned beam onto a target portion of the substrate. The projection system includes an optical element that has a beam exit area through each of which the patterned beam passes. The apparatus further includes a fluid cleaning system that cleans a fluid to be introduced into a region in between the optical element and the substrate. The fluid cleaning system includes a fluid inlet, a fluid outlet, and a cleaning zone disposed between the inlet and outlet. The cleaning zone includes a nucleated surface provided with a plurality of nucleation sites.
    • 光刻设备包括提供辐射束的辐射系统和支撑图案化结构的支撑结构。 图形结构被配置为根据期望的图案对辐射束进行图案化。 该装置还包括支撑基板的基板支撑件和将图案化的光束投影到基板的目标部分上的投影系统。 投影系统包括光学元件,该光学元件具有通过图案化光束通过的每一个的光束出射区域。 该装置还包括清洁被引入到光学元件和基板之间的区域中的流体的流体清洁系统。 流体清洁系统包括流体入口,流体出口和布置在入口和出口之间的清洁区域。 清洁区包括具有多个成核位点的成核表面。
    • 8. 发明授权
    • Spectroscopic analysis apparatus and method with excitation system and focus monitoring system
    • 光谱分析装置及方法与激励系统和焦点监测系统
    • US07583380B2
    • 2009-09-01
    • US10547971
    • 2004-03-01
    • Michael Cornelis Van BeekPeter Ferdinand Greve
    • Michael Cornelis Van BeekPeter Ferdinand Greve
    • G01J3/30
    • A61B5/0059A61B5/0068G01J3/44G01N21/65G02B21/241
    • The present invention relates to an analysis apparatus, in particular a spectroscopic analysis apparatus, for analyzing an object, such as blood of a patient, and a corresponding analysis method. To aim the confocal detection volume inside a blood vessel orthogonal polarized spectral imaging (OPSI) is used to locate blood capillaries in the skin. An imaging system (img) with slightly shifted imaging planes (i1, i2) for OPS imaging of blood vessels is proposed to provide auto-focusing. The confocal Raman detection plane (dp) is located in between these two imaging planes (i1, i2). Based on measured amount of defocus for the imaging planes (i1, i2), the focusing of the imaging system (img), the excitation system (exs) for exciting the target region and the detection plane (dp) is located inside the blood vessel (V). Thus, continuous auto-focusing with high accuracy can be achieved. The invention relates also to an optical tracking system for continuously tracking a point of a moving object (obj).
    • 本发明涉及用于分析患者血液等物体的分析装置,特别是光谱分析装置以及相应的分析方法。 为了瞄准血管内的共焦检测体积,使用正交偏振光谱成像(OPSI)来定位皮肤中的毛细血管。 提出了一种具有稍微偏移的成像平面(i1,i2)用于血管的OPS成像的成像系统(img),以提供自动聚焦。 共焦拉曼检测平面(dp)位于这两个成像平面(i1,i2)之间。 基于测量的成像平面(i1,i2)的散焦量,成像系统(img)的聚焦,用于激发目标区域的激发系统(exs)和检测平面(dp)位于血管内 (V)。 因此,可以实现高精度的连续自动聚焦。 本发明还涉及用于连续跟踪移动物体(obj)的点的光学跟踪系统。
    • 9. 发明申请
    • Method of, System For, and Medical Image Acquisition System For Imaging an Interior of a Turbid Medium Taking Into Account the Geometry of the Turbid Medium
    • US20080309940A1
    • 2008-12-18
    • US12094698
    • 2006-11-20
    • Martinus Bernardus Van Der MarkMichael Cornelis Van BeekLevinus Pieter Bakker
    • Martinus Bernardus Van Der MarkMichael Cornelis Van BeekLevinus Pieter Bakker
    • G01N21/00
    • G01N21/4795G01N2021/1787G01N2021/4766G01N2021/6439
    • The invention relates to a method of imaging an interior of a turbid medium (45) comprising the following steps: accommodation of the turbid medium (45) inside a receiving volume (20); coupling transmission input light (65) from a transmission light source into the receiving volume (12), with said transmission input light (65) being chosen such that it is capable of propagating through the turbid medium (45) and with at least a part of said transmission input light (65) passing through a matching medium (50) in the receiving volume (12), said matching medium (50) being chosen to reduce optical boundary effects at an interface between the turbid medium (45) and its surroundings; detection of transmission output light emanating from the receiving volume as a result of coupling transmission input light (65) from the transmission light source into the receiving volume (12) through use of a transmission photodetector unit. The invention also relates to a system for imaging an interior of a turbid medium (45) and a medical image acquisition system both using the method. According to the invention, the method, system for imaging an interior of a turbid medium (45), and medical image acquisition system are adapted such that data relating to the exterior of the turbid medium (45) can be obtained. This object is realized in that the method further comprises the following additional steps: coupling geometry input light (70, 75, 80) from a geometry light source into the receiving volume (12), with the receiving volume comprising the turbid medium (45), with the receiving volume (12) further comprising a geometry medium (60) for surrounding the turbid medium (45) during coupling of geometry input light (70, 75, 80) into the receiving volume (12), and with the combination of the geometry input light (70, 75, 80), the geometry medium (60), and the interface being chosen for creating a contrast between the turbid medium and its surroundings; —detection of the contrast between the turbid medium (45) and its surroundings; reconstructing an image of an interior of the turbid medium (45) using the detected contrast.