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1. 发明申请

WO2009099486A1 RADIO FREQUENCY POWER DELIVERY SYSTEM 审中-公开
标题翻译：无线电频率供电系统
公开(公告)号：WO2009099486A1
公开(公告)日：2009-08-13
申请号：PCT/US2008/087921
申请日：2008-12-22
申请人： MKS INSTRUMENTS, INC. , NAGARKATTI, Siddharth, P. , BARSKIY, Yevgeniy , TIAN, Feng , BYSTRYAK, Ilya
发明人： NAGARKATTI, Siddharth, P. , BARSKIY, Yevgeniy , TIAN, Feng , BYSTRYAK, Ilya
IPC分类号： H03F3/191 , H01J37/32 , H03H7/40
CPC分类号： H03F3/20 , H01J37/32082 , H01J37/32183 , H03F1/565 , H03F3/195 , H03F2200/321 , H03F2200/387 , H03F2200/391 , H03F2200/393 , H03F2200/451 , H03H7/40 , Y10T307/305
摘要： A system and method are provided for delivering power to a dynamic load (260). The system includes a power supply (210) providing DC power having a substantially constant power open loop response, a power amplifier (220) for converting the DC power to RF power, a sensor (240) for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system (250) to modify the impedance of the power amplifier (220) to at least a substantially matched impedance of a dynamic load (260), and a controller (252) for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
摘要翻译：提供了一种将功率传递给动态负载（260）的系统和方法。该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源（210），用于将DC功率转换成RF功率的功率放大器（220），用于测量DC功率的电压，电流和相位角的传感器（240）与RF功率相关联的电压和电流矢量，将电力可控阻抗匹配系统（250）修改为功率放大器（220）的阻抗至少为动态负载（260）的基本上匹配的阻抗;以及控制器（252）），用于控制电可控阻抗匹配系统。该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

2. 发明申请

WO2017040295A1 DIRECT THREE PHASE PARALLEL RESONANT INVERTER FOR REACTIVE GAS GENERATOR APPLICATIONS 审中-公开
标题翻译：直接三相并联共振反应器用于反应气发生器的应用
公开(公告)号：WO2017040295A1
公开(公告)日：2017-03-09
申请号：PCT/US2016/049017
申请日：2016-08-26
申请人： MKS INSTRUMENTS, INC.
发明人： TRAN, Ken , TIAN, Feng
IPC分类号： H01J37/32 , H02M5/22 , H02M5/257 , H02M5/27 , H02M5/275 , H02M5/293 , H02M5/297
CPC分类号： H05H1/24 , H01J37/32082 , H01J37/32174 , H02M5/293 , H02M5/297 , H02M7/537 , Y02B70/145
摘要： A power system for a reactive gas generator (100) can include a direct three phase inverter (101). A resonant tank (102) can further be included to receive a square wave output of the direct three phase inverter and provide a sine wave output. The power system can include an inverter controller (103) that turns on and off selected switches of the direct three phase inverter based on states of the three phases of a three phase AC power supply, where a switch is turned on with an adaptive ON time and a modulated OFF time depending on a desired output power.
摘要翻译：用于无功气体发生器（100）的电力系统可以包括直接三相逆变器（101）。还可以包括谐振槽（102）以接收直接三相逆变器的方波输出并提供正弦波输出。电力系统可以包括逆变器控制器（103），其基于三相AC电源的三相的状态来接通和断开所选直流三相逆变器的开关，其中开关通过自适应导通时间导通并根据期望的输出功率调制关断时间。

3. 发明申请

WO2012158427A1 METHOD AND SYSTEM FOR SHOOT-THROUGH PROTECTION 审中-公开
标题翻译：用于穿透保护的方法和系统
公开(公告)号：WO2012158427A1
公开(公告)日：2012-11-22
申请号：PCT/US2012/037089
申请日：2012-05-09
申请人： MKS INSTRUMENTS, INC. , TRAN, Ken , TIAN, Feng , CHEN, Xing
发明人： TRAN, Ken , TIAN, Feng , CHEN, Xing
IPC分类号： H03K17/082 , H02M1/38
CPC分类号： H03K17/0822 , H02M1/38 , H02M3/337 , H03K2217/0036
摘要： A switching apparatus includes a first transistor (102), a second transistor (104), a first circuit module (120), a first current sensor (126) and a control circuit (130). The first transistor (102) includes first, second and third terminals (112, 116, 106). The first terminal (112) of the first transistor (102) is coupled to a first power terminal (150). The third terminal (106) of the first transistor (102) includes a gate or base of the first transistor. The second transistor (104) includes first, second and third terminals (114, 118, 108). The first terminal (114) of the second transistor (104) is coupled to a second power terminal (152). The second terminal (118) of the second transistor (104) is coupled to the second terminal (116) of the first transistor (102). The third terminal (108) of the second transistor (104) includes a gate or base of the second transistor. The first circuit module (120) includes an inductor (122) in parallel with a diode (124). The first circuit module (120) is connected between the first terminal (114) of the second transistor and the second power terminal (152).
摘要翻译：开关装置包括第一晶体管（102），第二晶体管（104），第一电路模块（120），第一电流传感器（126）和控制电路（130）。第一晶体管（102）包括第一，第二和第三端子（112,116,106）。第一晶体管（102）的第一端子（112）耦合到第一电源端子（150）。第一晶体管（102）的第三端（106）包括第一晶体管的栅极或基极。第二晶体管（104）包括第一，第二和第三端子（114,118,108）。第二晶体管（104）的第一端子（114）耦合到第二电源端子（152）。第二晶体管（104）的第二端子（118）耦合到第一晶体管（102）的第二端子（116）。第二晶体管（104）的第三端子（108）包括第二晶体管的栅极或基极。第一电路模块（120）包括与二极管（124）并联的电感器（122）。第一电路模块（120）连接在第二晶体管的第一端子（114）和第二电源端子（152）之间。

4. 发明申请

WO2010151466A2 METHOD AND SYSTEM FOR CONTROLLING RADIO FREQUENCY POWER 审中-公开
标题翻译：用于控制无线电频率的方法和系统
公开(公告)号：WO2010151466A2
公开(公告)日：2010-12-29
申请号：PCT/US2010/038790
申请日：2010-06-16
申请人： MKS INSTRUMENTS, INC. , NAGARKATTI, Siddharth , TIAN, Feng , LAM, David , RASHID, Abdul , BENZERROUK, Souheil , BYSTRYAK, Ilya , MENZER, David , SCHUSS, Jack, J. , AMBROSINA, Jesse, E.
发明人： NAGARKATTI, Siddharth , TIAN, Feng , LAM, David , RASHID, Abdul , BENZERROUK, Souheil , BYSTRYAK, Ilya , MENZER, David , SCHUSS, Jack, J. , AMBROSINA, Jesse, E.
IPC分类号： H02J17/00
CPC分类号： H03K5/01 , H03F3/189 , H03F3/217 , H03F2200/105 , H03F2200/375 , H03F2200/387 , H03G3/3047
摘要： A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
摘要翻译：一种用于控制脉冲功率的方法，包括从功率放大器测量第一功率脉冲以获得数据。该方法还包括产生第一信号以调整输出功率的第二脉冲，第一信号与数据相关，以最小化功率设定点与第二脉冲的基本稳定部分之间的功率差。该方法还包括产生第二信号以调整传递功率的第二脉冲，第二信号与数据相关，以最小化第二脉冲的峰值与第二脉冲的基本上稳定的部分之间的幅度差异。

5. 发明申请

WO2013148410A2 COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING CELLS 审中-公开
标题翻译：紧凑，可配置的电源，用于激活臭氧生产细胞
公开(公告)号：WO2013148410A2
公开(公告)日：2013-10-03
申请号：PCT/US2013/032920
申请日：2013-03-19
申请人： MKS INSTRUMENTS, INC.
发明人： TRAN, Ken , TIAN, Feng , CHEN, Xing , LEE, Franklin
IPC分类号： C01B13/11
CPC分类号： H01J37/248 , C01B13/115 , C01B2201/90
摘要： Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high- voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.
摘要翻译：利用本文所述的系统和技术可以改善向臭氧生产电池供应高频电力。以基本上大于负载频率的开关频率工作的DC-DC转换器的应用支持产生用于为这种电池供电的高压AC，同时允许减小元件尺寸并降低负载调谐电路的品质因数。用于获得一个或多个开关频率和负载频率的可控功率逆变器可以使用反馈技术来控制，以在外部供电和负载条件中的一个或多个的变化下向臭氧生产单元提供稳定的高质量功率。浪涌保护电路也可以被提供以选择性地引入限流电阻，直到输入DC总线已经被充分初始化，如由从DC总线获得的测量所确定的。限流电阻可以是正温度系数热敏电阻。

6. 发明公开

EP3713072A1 COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING CELLS 无效
公开(公告)号：EP3713072A1
公开(公告)日：2020-09-23
申请号：EP20174960.3
申请日：2013-03-19
申请人： MKS Instruments, Inc.
发明人： TRAN, Ken , TIAN, Feng , CHEN, Xing , LEE, Franklin
IPC分类号： H02M7/48 , H02M3/335 , C01B13/11 , H02M1/36
摘要： Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high- voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.

7. 发明公开

EP2969134A1 TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD 审中-公开
标题翻译：环形等离子体处置装置和方法
公开(公告)号：EP2969134A1
公开(公告)日：2016-01-20
申请号：EP14724568.2
申请日：2014-03-14
申请人： MKS Instruments, Inc.
发明人： CHEN, Xing , POKIDOV, Ilya , TIAN, Feng , TRAN, Ken , LAM, David , WENZEL, Kevin, W.
IPC分类号： B01D53/32 , B01J12/00 , H01J37/32
CPC分类号： H01J37/32449 , B01D53/323 , B01D53/76 , B01D2257/2064 , H01J37/32339 , H01J37/32357 , H01J37/32458 , H01J37/32651 , H01J37/32669 , H01J37/32844 , H01J37/32935 , H01J2237/3321 , H01J2237/334 , H05H1/46 , H05H2001/4667 , H05H2245/121 , Y02C20/30
摘要： An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one chamber wall. One or more magnetic cores are disposed relative to the toroidal plasma chamber. The plasma chamber confines a toroidal plasma. A second gas inlet is positioned on the toroidal plasma chamber between a first gas inlet and the gas outlet at a distance d from the gas outlet, such that a toroidal plasma channel volume between the first gas inlet and the second gas inlet in the is substantially filled by the inert gas, the distance d based on a desired residence time of the gas to be abated.

8. 发明公开

EP2245736A1 RADIO FREQUENCY POWER DELIVERY SYSTEM 审中-公开
标题翻译：无线电频率电力传送系统
公开(公告)号：EP2245736A1
公开(公告)日：2010-11-03
申请号：EP08872109.7
申请日：2008-12-22
申请人： MKS Instruments, Inc.
发明人： NAGARKATTI, Siddharth, P. , BARSKIY, Yevgeniy , TIAN, Feng , BYSTRYAK, Ilya
IPC分类号： H03F3/191 , H01J37/32 , H03H7/40
CPC分类号： H03F3/20 , H01J37/32082 , H01J37/32183 , H03F1/565 , H03F3/195 , H03F2200/321 , H03F2200/387 , H03F2200/391 , H03F2200/393 , H03F2200/451 , H03H7/40 , Y10T307/305
摘要： A system and method are provided for delivering power to a dynamic load (260). The system includes a power supply (210) providing DC power having a substantially constant power open loop response, a power amplifier (220) for converting the DC power to RF power, a sensor (240) for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system (250) to modify the impedance of the power amplifier (220) to at least a substantially matched impedance of a dynamic load (260), and a controller (252) for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
摘要翻译：提供了一种用于将动力输送到动态负载（260）的系统和方法。该系统包括提供具有基本上恒定的功率开环响应的DC功率的电源（210），用于将DC功率转换成RF功率的功率放大器（220），用于测量电源之间的电压，电流和相位角的传感器（240）与RF功率相关联的电压和电流向量，用于将功率放大器（220）的阻抗修改为动态负载（260）的至少基本上匹配的阻抗的电可控阻抗匹配系统（250），以及控制器（252 ）用于控制电控阻抗匹配系统。该系统还包括用于确定由功率放大器传送的功率的传感器校准测量模块，用于确定传送给动态负载的功率的电子匹配系统校准模块以及用于计算电可控阻抗匹配系统中的功耗的功率耗散模块。

9. 发明公开

EP2830995A2 COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING CELLS 有权
标题翻译： KOMPAKTES UND KONFIGURIERBARES NETZTEIL ZUR SPANNUNGSVERSORGUNG OZONPRODUZIERENDER ZELLEN
公开(公告)号：EP2830995A2
公开(公告)日：2015-02-04
申请号：EP13715506.5
申请日：2013-03-19
申请人： MKS Instruments, Inc.
发明人： TRAN, Ken , TIAN, Feng , CHEN, Xing , LEE, Franklin
IPC分类号： C01B13/11
CPC分类号： H01J37/248 , C01B13/115 , C01B2201/90
摘要： Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.
摘要翻译：使用本文所述的系统和技术可以实现向产生臭氧的电池供应高频电力的改进。以明显大于负载频率的开关频率工作的DC-DC转换器的应用支持产生用于为这些电池供电的高压AC，同时允许减小元件尺寸并降低负载调整电路的品质因数。可以使用反馈技术来控制用于获得开关和负载频率中的一个或多个的可控功率逆变器，以在一个或多个外部供电和负载条件的变化下向产生臭氧的电池提供稳定的高质量功率。还可以提供浪涌保护电路以选择性地引入限流电阻，直到输入DC总线已被充分初始化，由从DC总线获得的测量值确定。限流电阻可以是正温系数热敏电阻。

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