发明申请
WO2017040295A1 DIRECT THREE PHASE PARALLEL RESONANT INVERTER FOR REACTIVE GAS GENERATOR APPLICATIONS
审中-公开
基本信息:
- 专利标题: DIRECT THREE PHASE PARALLEL RESONANT INVERTER FOR REACTIVE GAS GENERATOR APPLICATIONS
- 专利标题(中):直接三相并联共振反应器用于反应气发生器的应用
- 申请号:PCT/US2016/049017 申请日:2016-08-26
- 公开(公告)号:WO2017040295A1 公开(公告)日:2017-03-09
- 发明人: TRAN, Ken , TIAN, Feng
- 申请人: MKS INSTRUMENTS, INC.
- 申请人地址: 2 Tech Drive Suite 201 Andover, Massachusetts 01810 US
- 专利权人: MKS INSTRUMENTS, INC.
- 当前专利权人: MKS INSTRUMENTS, INC.
- 当前专利权人地址: 2 Tech Drive Suite 201 Andover, Massachusetts 01810 US
- 代理机构: KNIGHT, Sarah
- 优先权: US14/843,412 20150902
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H02M5/22 ; H02M5/257 ; H02M5/27 ; H02M5/275 ; H02M5/293 ; H02M5/297
摘要:
A power system for a reactive gas generator (100) can include a direct three phase inverter (101). A resonant tank (102) can further be included to receive a square wave output of the direct three phase inverter and provide a sine wave output. The power system can include an inverter controller (103) that turns on and off selected switches of the direct three phase inverter based on states of the three phases of a three phase AC power supply, where a switch is turned on with an adaptive ON time and a modulated OFF time depending on a desired output power.
摘要(中):
用于无功气体发生器(100)的电力系统可以包括直接三相逆变器(101)。 还可以包括谐振槽(102)以接收直接三相逆变器的方波输出并提供正弦波输出。 电力系统可以包括逆变器控制器(103),其基于三相AC电源的三相的状态来接通和断开所选直流三相逆变器的开关,其中开关通过自适应导通时间导通 并根据期望的输出功率调制关断时间。