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2. 发明专利

JP2013084606A Multipoint voltage and current probe system 有权
标题翻译：多点电压和电流探头系统
公开(公告)号：JP2013084606A
公开(公告)日：2013-05-09
申请号：JP2012253728
申请日：2012-11-19
申请人： Mks Instruments Inc , エムケーエスインスツルメンツ,インコーポレイテッドMks Instruments,Inc.
发明人： CHOUEIRY RAY , HECKLEMAN TODD , DAVID J COUMOU
IPC分类号： H05H1/00 , H01L21/3065 , H05H1/46
摘要： PROBLEM TO BE SOLVED: To provide a measurement system and a monitoring method that can synchronize or time-correlate measurement results of parameters from various positions.SOLUTION: A measurement system comprises a plurality of sensor channels and high-frequency couplers 70 and 72. Each of the plurality of sensor channels generates an output signal on the basis of electric properties of high-frequency power at one of plural positions in a circuit, and includes a probe 20 for generating a first signal on the basis of the electric properties of the high-frequency power, an oscillator 62 for generating periodic signals, and mixers 64 for mixing the first signal and the periodic signals in order to generate the output signal for the sensor channel. The high-frequency couplers 70 and 72 generate second output signals on the basis of the plurality of output signals from the sensor channels.
摘要翻译：要解决的问题：提供可以使来自各种位置的参数的测量结果同步或时间相关的测量系统和监视方法。解决方案：测量系统包括多个传感器通道和高频耦合器70和72.多个传感器通道中的每一个基于多个位置之一处的高频电力的电特性产生输出信号并且包括用于基于高频电力的电特性产生第一信号的探头20，用于产生周期性信号的振荡器62和用于混合第一信号和周期信号的混频器64 以产生传感器通道的输出信号。高频耦合器70和72基于来自传感器通道的多个输出信号产生第二输出信号。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2011211713A High reliability radio frequency generator architecture 有权
标题翻译：高可靠性无线电频率发生器架构
公开(公告)号：JP2011211713A
公开(公告)日：2011-10-20
申请号：JP2011084117
申请日：2011-04-05
申请人： Mks Instruments Inc , エムケーエスインスツルメンツ,インコーポレイテッドMks Instruments,Inc.
发明人： RADOMSKI AARON T , SMYKA JON , LINCOLN DANIEL J , CHAWLA YOGENDRA , COUMOU DAVID J , LUBOMIRSKY VADIM
IPC分类号： H04B1/04 , H04B17/00
CPC分类号： H03F3/602 , H03F1/0277 , H03F1/52 , H03F1/526 , H03F3/211 , H03F2200/451
摘要： PROBLEM TO BE SOLVED: To provide a radio frequency (RF) generator in which received data are stored for a predetermined time before receiving a defect instruction.SOLUTION: The present invention relates to a scalable RF generator including at least one power supply, at least one power amplifier receiving input from the power supply, a power supply control module, and a system controller. Output from the at least one power supply can be combined and applied to each of the power amplifiers. Output from each of the at least one power amplifiers can be combined to generate a single RF signal. A compensator module controls operation of the at least one power supply. The compensator module, the system control module and the power supply controller communicate in a daisy chain connection.
摘要翻译：要解决的问题：提供在接收到缺陷指令之前在预定时间内存储接收数据的射频（RF）发生器。解决方案：本发明涉及一种可扩展的RF发生器，至少包括一个电源一个功率放大器从电源接收输入，电源控制模块和系统控制器。可以将来自至少一个电源的输出组合并应用于每个功率放大器。可以组合来自至少一个功率放大器中的每一个的输出以产生单个RF信号。补偿器模块控制至少一个电源的操作。补偿器模块，系统控制模块和电源控制器以菊花链连接通信。

5. 发明专利

JP2011128169A Pressure control degassing system for hot cathode ionization vacuum gauge 有权
标题翻译：用于热阴离子真空计的压力控制脱水系统
公开(公告)号：JP2011128169A
公开(公告)日：2011-06-30
申请号：JP2011039836
申请日：2011-02-25
申请人： Mks Instruments Inc , エムケイエスインスツルメンツ,インコーポレイテッドMks Instruments,Inc.
发明人： PEACOCK NEIL T , WADE STACY W
IPC分类号： G01L21/32
CPC分类号： G01L21/32
摘要： PROBLEM TO BE SOLVED: To operate a hot cathode ionization vacuum gauge during a degassing operation by an electron bombardment method and a current heating method, by controlling degassing power level as a function of gauge pressure. SOLUTION: While the degassing power level is increased, the rate of change of gauge pressure is monitored. When the gauge pressure is decided as having the possibility of exceeding the upper pressure limit of the gauge pressure, by the monitoring change rate of the gauge pressure, the increase of the degassing power is stopped or the degassing power is decreased. Additionally, this operation is to be continued until a predetermined final degassing condition is satisfied. A display is activated, after the successful completion of the degassing operation. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：通过电子轰击法和电流加热法在脱气操作期间操作热阴极电离真空计，通过控制作为表压的函数的脱气功率水平。
解决方案：当脱气功率水平提高时，监测表压变化率。当表压被确定为具有超过表压的上限压力的可能性时，通过表压的监视变化率，停止脱气功率的增加或脱气功率的降低。此外，该操作将持续到达到预定的最终脱气条件。成功完成脱气操作后，显示屏将被激活。版权所有（C）2011，JPO＆INPIT

6. 发明专利

JP2008226820A Multipoint voltage and current probe system 有权
标题翻译：多点电压和电流探头系统
公开(公告)号：JP2008226820A
公开(公告)日：2008-09-25
申请号：JP2007317737
申请日：2007-12-07
申请人： Mks Instruments Inc , エムケーエスインスツルメンツ,インコーポレイテッドMks Instruments,Inc.
发明人： CHOUEIRY RAY , HECKLEMAN TODD , DAVID J COUMOU
IPC分类号： H05H1/00 , H05H1/46
CPC分类号： H01J37/32935 , H01J37/32082 , H01J37/32174 , H04B17/318
摘要： PROBLEM TO BE SOLVED: To synchronize or time-correlates measurement results of parameters from various positions. SOLUTION: A measurement system monitors a high frequency power in a plurality of positions in a circuit. The system includes a plurality of high frequency sensors for generating analogue signals based on electrical characteristics of the high frequency power, respectively, a multiplexing module for generating output signals based on the analogue signals, and an analyzing module for generating a message based on the output signals. The message includes information related to the electrical characteristics detected by the plurality of high frequency sensors. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：使来自各个位置的参数的测量结果同步或时间相关。解决方案：测量系统监测电路中多个位置的高频功率。该系统包括多个用于基于高频功率的电特性产生模拟信号的高频传感器，用于基于模拟信号产生输出信号的多路复用模块和用于基于输出产生消息的分析模块信号。该消息包括与由多个高频传感器检测到的电特性有关的信息。版权所有（C）2008，JPO＆INPIT

7. 发明专利

JP2014194433A Device capable of measuring trace gas 审中-公开
标题翻译：可测量追踪气体的装置
公开(公告)号：JP2014194433A
公开(公告)日：2014-10-09
申请号：JP2014123221
申请日：2014-06-16
申请人： Mks Instruments Inc , エムケーエスインストルメンツインコーポレーテッドMks Instruments,Incorporated
发明人： MARTIN L SPARTZ , VIDI SAPTARI
IPC分类号： G01N21/3504
CPC分类号： G01N21/031 , G01N21/05 , G01N21/09 , G01N21/3504 , G01N21/45 , G01N2021/3595
摘要： PROBLEM TO BE SOLVED: To provide a spectroscopic detection system for monitoring ambient air for toxic chemical substances, which is a compact portable multiple gas analyzer capable of detecting and discriminating a broad range of chemical constituents including various nerve gases and blister agents as well as toxic industrial chemical products at sub part per billion (ppb) levels.SOLUTION: To minimize false alarms (e.g., false positives or false negatives), feature high specificity, and allow operation with response times on the order of a few seconds to a few minutes depending on the field of application, a system can be an entirely self-contained analyzer, with a Fourier Transform Infrared (FTIR) spectrometer 18, a gas sample cell 22, a detector 30, an embedded processor 34, a display 38, power supplies, an air pump, heating elements and other components onboard the unit with an air intake to collect a sample and an electronic communications port to interface and function with external devices.
摘要翻译：要解决的问题：提供一种用于监测有毒化学物质的环境空气的光谱检测系统，该系统是能够检测和区分广泛范围的化学成分（包括各种神经气体和起泡剂）以及有毒物质的小型便携式多重气体分析仪工业化学产品在十亿分之一以上（ppb）水平。解决方案：为了尽量减少假警报（例如假阳性或假阴性），具有高度的特异性，并允许以几秒至几分钟的响应时间进行操作取决于应用领域，系统可以是完全独立的分析仪，其具有傅里叶变换红外（FTIR）光谱仪18，气体样品池22，检测器30，嵌入式处理器34，显示器38，电源，空气泵，加热元件和其他部件在机组上，带有进气口以收集样品和电子通信端口以与外部接口和功能 rnal设备。

8. 发明专利

JP2013020646A Heater control method for multiple heater control system with expandable modular functionality 有权
标题翻译：具有可扩展模块功能的多加热器控制系统的加热器控制方法
公开(公告)号：JP2013020646A
公开(公告)日：2013-01-31
申请号：JP2012229248
申请日：2012-10-16
申请人： Mks Instruments Inc , エムケイエスインストゥルメンツ, インコーポレイテッド , Watlow Electric Manufacturing Co , ワトロウエレクトリックマニュファクチュアリングカンパニー
发明人： GU YOUFAN , JEFFREY D KIERNAN , RORHEAD CHARLES C , WORRINGER WILLIAM C , ERIC E ELLIS , FOSTER CURTIS A , JAMES P HENGHES , HOVEN MARK LOUIS GUILMER , JAMES H KREISEL , SEAN REININGER , MORRAN ROBERT O , PETERSON KURT W , JASON R POWEL , DALE T WOLFE
IPC分类号： G05B9/02 , H05B3/00
CPC分类号： H05B1/0244 , G05D23/1928 , G05D23/1935 , G05D23/22 , Y10T307/469 , Y10T307/484
摘要： PROBLEM TO BE SOLVED: To provide a heater control method for a more flexible heater control system that can be configured easily, neatly, and effectively to meet a wide variety of operator requirements.SOLUTION: The method includes: placing in an AC power circuit a high-limit switch which can turn on and off AC power to a heater; and controlling the high-limit switch by a high-limit control circuit which receives low-voltage DC power from a DC power supply. The high-limit control circuit is programmed as follows: when the temperature sensed by a temperature sensor placed adjacently to the heater exceeds a preset high-limit temperature, the high-limit switch turns off the AC power to the heater; when the low-voltage DC power to the high-limit control circuit is being stopped, the high-limit switch turns on the AC power to the heater, and then restarts the heater if the sensed temperature does not exceed the preset limit temperature.
摘要翻译：要解决的问题：提供一种更灵活的加热器控制系统的加热器控制方法，其可以容易地，整齐地和有效地配置，以满足各种操作者的要求。
解决方案：该方法包括：将交流电源电路放置在可以接通和断开加热器的交流电源的高限位开关; 以及通过从直流电源接收低压直流电力的高限制控制电路来控制上限开关。上限控制电路如下编程：当与加热器相邻放置的温度传感器检测到的温度超过设定的上限温度时，上限开关关闭加热器的交流电源; 当上限控制电路的低压直流电源停止运行时，上限开关接通加热器的交流电源，如果检测到的温度不超过预设极限温度，则重启加热器。版权所有（C）2013，JPO＆INPIT

9. 发明专利

JP2013015526A Device capable of measuring trace gas 审中-公开
标题翻译：可测量追踪气体的装置
公开(公告)号：JP2013015526A
公开(公告)日：2013-01-24
申请号：JP2012180932
申请日：2012-08-17
申请人： Mks Instruments Inc , エムケーエスインストルメンツインコーポレーテッドMks Instruments,Incorporated
发明人： MARTIN L SPARTZ , VIDI SAPTARI
IPC分类号： G01N21/03 , G01N21/35
CPC分类号： G01N21/031 , G01N21/05 , G01N21/09 , G01N21/3504 , G01N21/45 , G01N2021/3595
摘要： PROBLEM TO BE SOLVED: To provide a spectroscopic detection system which monitors ambient air for toxic chemical substances.SOLUTION: A spectroscopic detection system can be a compact, portable multiple gas analyzer capable of detecting and discriminating a broad range of chemical constituents including various nerve gases and blister agents as well as toxic industrial chemicals at levels equal to or lower than one part per billion (ppb). The system minimizes false alarms (e.g., false positives or negatives), features high specificity, and can operate with response times on the order of a few seconds to a few minutes, depending on a field of application. The system can be an entirely self-contained analyzer, in which a Fourier Transform Infrared (FTIR) spectrometer 10, a gas sample cell 22, a detector 30, an embedded processor 34, a display device 38, power supplies, an air pump, heating elements, and other components are mounted on a unit comprising an air intake for collecting a sample and an electronic communication port for connecting with external devices to function.
摘要翻译：要解决的问题：提供一种用于监测环境空气中有毒化学物质的光谱检测系统。解决方案：光谱检测系统可以是一种紧凑便携的多重气体分析仪，能够检测和区分广泛的化学成分，包括各种神经气体和起泡剂以及等于或低于一个的有毒工业化学品十亿分之一（ppb）。根据应用领域，该系统使假警报（例如，假阳性或阴性）最小化，具有高特异性，并且可以以几秒至数分钟的响应时间操作。该系统可以是完全独立的分析仪，其中傅里叶变换红外（FTIR）光谱仪10，气体样品池22，检测器30，嵌入式处理器34，显示装置38，电源，空气泵，加热元件和其他部件安装在包括用于收集样品的进气口和用于与外部装置连接起作用的电子通信端口的单元上。版权所有（C）2013，JPO＆INPIT

10. 发明专利

JP2013007758A Capacitive pressure sensor 有权
标题翻译：电容式压力传感器
公开(公告)号：JP2013007758A
公开(公告)日：2013-01-10
申请号：JP2012196496
申请日：2012-09-06
申请人： Mks Instruments Inc , エムケーエスインストルメンツインコーポレーテッドMks Instruments,Incorporated
发明人： PAUL D LUCAS
IPC分类号： G01L9/12 , G01L9/00 , G01L19/04 , G01L19/14
CPC分类号： G01L19/04 , G01L9/0072
摘要： PROBLEM TO BE SOLVED: To provide an improved electrode, and a fixture for the electrode in a pressure transducer.SOLUTION: A pressure transducer assembly has: a first body; a second body; a diaphragm; and an electrode. The first body and the diaphragm form a first chamber, and the second body and the diaphragm form a second chamber. The electrode is arranged in the first chamber. Capacitance between the electrode and the diaphragm represents pressure difference between the chambers. The electrode is suspended from a hub, and spoke attachment is performed to it. In some embodiment, the electrode is completely metal. The electrode may have a disk made of ceramics, on which a conductive film is formed. The disk is connected to a housing having a rod made of ceramics. In addition, a transducer has an expansion member with a low thermal coefficient connected to the housing in order to reduce twist according to temperature variation.
摘要翻译：要解决的问题：提供改进的电极和用于压力传感器中的电极的固定装置。解决方案：压力传感器组件具有：第一主体; 第二个身体隔膜和电极。第一主体和隔膜形成第一室，第二主体和隔膜形成第二室。电极布置在第一腔室中。电极和隔膜之间的电容代表室之间的压力差。电极从轮毂悬挂，并对其进行辐条连接。在一些实施例中，电极是完全金属的。电极可以具有由陶瓷制成的盘，其上形成有导电膜。盘连接到具有由陶瓷制成的杆的壳体。此外，传感器具有与壳体连接的具有低热系数的膨胀构件，以便根据温度变化减小扭转。版权所有（C）2013，JPO＆INPIT

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