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    • 4. 发明申请
    • INTERPOSER STRUCTURES AND METHODS OF MANUFACTURING THE SAME
    • 中间件结构及其制造方法
    • US20080030209A1
    • 2008-02-07
    • US11741345
    • 2007-04-27
    • Steven CordesMatthew FarinelliSherif Goma
    • Steven CordesMatthew FarinelliSherif Goma
    • G01R31/02
    • G01R1/0735G01R3/00H05K3/06H05K3/4007H05K3/4038
    • Flexible and rigid interposers for use in the semiconductor industry and methods for manufacturing the same are described, Auto-catalytic processes are used to minimize the costs associated with the production of flexible interposers, while increasing the yield and lifetime. Electrical contact regions are easily isolated and the risk of corrosion is reduced because all portions of the interposer are plated at once. Leads projecting from the flexible portion of the interposers accommodate a greater variety of components to be tested. Rigid interposers include a pin projecting from a probe pad affixed to a substrate. The rigidity of the pin penetrates oxides on a contact pad to be tested. Readily available semiconductor materials and processes are used to manufacture the flexible and rigid interposers according to the invention. The flexible and rigid interposers can accommodate pitches down to 25 μm.
    • 描述了用于半导体工业的柔性和刚性插入件及其制造方法。自动催化方法用于最小化与柔性插入物的生产相关的成本,同时提高产量和寿命。 电接触区域容易隔离,并且由于插入器的所有部分一次镀覆,因此腐蚀的风险降低。 从插入件的柔性部分突出的引线可容纳更多种待测试的部件。 刚性插入件包括从固定到基板的探针垫突出的销。 针的刚度穿过待测接触垫上的氧化物。 易于使用的半导体材料和工艺用于制造根据本发明的柔性和刚性插入件。 柔性和刚性内插器可以容纳低至25毫米的音高。
    • 6. 发明申请
    • Interposer structures and improved processes for use in probe technologies for semiconductor manufacturing
    • 内插器结构和用于半导体制造探针技术的改进方法
    • US20060024861A1
    • 2006-02-02
    • US10909111
    • 2004-07-30
    • Steven CordesMatthew FarinelliSherif Goma
    • Steven CordesMatthew FarinelliSherif Goma
    • H01L21/50H01L21/48H01L21/44
    • G01R3/00G01R1/0735H05K3/06H05K3/4007H05K3/4038
    • Systems and method for making flexible and rigid interposers for use in the semiconductor industry. Electroless plating processes are used to minimize the costs associated with the production of flexible interposers while increasing the yield and life-cycle of the interposers. Electrical contact regions are more easily isolated using the electroless processes and risk of corrosion is reduced because all portions of the interposer are plated at once. Leads projecting from the flexible portion of the interposers accommodate a greater variety of components to be tested. The rigid interposers include a pin projecting from a probe pad affixed to a substrate. The pin is aligned with conductive vias in the underlying wafer. The rigidity of the pin penetrates oxides on a contact pad to be tested. Readily available semiconductor materials and processes are used to manufacture the flexible and rigid interposers according to the invention. The flexible and rigid interposers can accommodate pitches of as little as 25 μm.
    • 制造用于半导体行业的柔性和刚性插入件的系统和方法。 使用化学镀处理来最小化与柔性插入物的生产相关的成本,同时增加插入物的产量和生命周期。 使用无电解方法更容易隔离电接触区域,并且由于中间层的所有部分一次镀覆,因此腐蚀的风险降低。 从插入件的柔性部分突出的引线可容纳更多种待测试的部件。 刚性插入件包括从固定到基板的探针垫突出的销。 引脚与底层晶片中的导电通孔对准。 针的刚度穿过待测接触垫上的氧化物。 易于使用的半导体材料和工艺用于制造根据本发明的柔性和刚性插入件。 柔性和刚性插入件可以容纳少至25毫米的间距。