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    • 1. 发明授权
    • Circuit breaker
    • 断路器
    • US4387356A
    • 1983-06-07
    • US237597
    • 1981-02-24
    • Kunio TakemuraHideya KondoAkira Yoshio
    • Kunio TakemuraHideya KondoAkira Yoshio
    • H01H73/50H01H71/52H01H73/48H01H75/00
    • H01H71/52
    • A circuit breaker wherein one or two of circuit-breaking electric element blocks respectively including current source side and load side terminals, fixed and movable contactors, means for forcibly tripping the movable contactor away from the fixed contactor by operating at least electromagnetically responsive to an overcurrent and an arc suppressing means, and movably supporting the movable contactor at a stationary part of the tripping means is arranged in each of side spaces within a single housing, while a single mechanical contact operating mechanism for moving the movable contactor in each of the blocks between both positions of opening and closing contacts responsive to an external operating force and operatively connected with the tripping means of the blocks is contained in an intermediate space provided between the side spaces, in each of the latter of which the movable contactor of an elongated member is arranged with one end having the movable contact directed toward the source side terminal and with the other supported end directed toward the load side terminal, the arc suppressing means is arranged on the side of the source side terminal and the tripping means is arranged on the side of the load side terminal remote farthest from the arc suppressing means.
    • 一种断路器,其中一个或两个断路电气元件块分别包括电流源侧和负载侧端子,固定和可移动接触器,用于通过至少电磁响应于过电流操作来强制将活动接触器跳离固定接触器的装置 并且在单个壳体内的每个侧部空间中布置有在所述脱扣装置的静止部分可移动地支撑所述活动接触器的电弧抑制装置,而单个机械接触操作机构用于将每个所述块中的活动接触器移动到 响应于外部操作力并与块的脱扣装置可操作地连接的开启和关闭触点的两个位置都包含在设置在侧空间之间的中间空间中,每个中间空间中的细长构件的活动接触器为 其一端具有朝向所述可动触头的一端 尿素侧端子,另一个支撑端指向负载侧端子,电弧抑制装置设置在源极端子侧,并且跳闸装置设置在远离电弧抑制的远端的负载侧端子侧 手段。
    • 3. 发明授权
    • Spin coating device
    • 旋涂装置
    • US5591264A
    • 1997-01-07
    • US405133
    • 1995-03-16
    • Emi SugimotoAkira YoshioYoshinori Ito
    • Emi SugimotoAkira YoshioYoshinori Ito
    • B05C11/08G03F7/16B05B13/00
    • B05C11/08G03F7/162
    • A spin coating device for a substrate, in which a uniform thin film can be formed by applying an application liquid to a substrate and the quality of the substrate can be further improved. The spin coating device for a substrate comprises a turntable 2 for holding and rotating a substrate 1; an application liquid supply means 4 for supplying an application liquid 3 to the rotating substrate 1: splash preventing means 20, which are arranged at the periphery of the substrate 1 held by the turntable 2, prevent the droplets of the application liquid from splashing and provide with an opening portion 10 for circulating the flow A of external air in an area ranging from the central portion toward the peripheral portion of the substrate 1 held by the turntable 2. Exhaust means 8 and 9 for exhausting air from within the splash preventing means 20 are provided.
    • 用于基材的旋涂装置,其中可以通过将涂布液施加到基底上而形成均匀的薄膜,并且可以进一步提高基材的质量。 用于基板的旋涂装置包括用于保持和旋转基板1的转盘2; 向旋转基板1供给涂布液3的涂布液供给装置4:设置在由转台2保持的基板1的周围的防溅装置20,防止涂布液的液滴飞溅, 具有用于使外部空气流A在从由转台2保持的基板1的中心部分朝向周边部分的范围内循环的开口部分10.用于从防溅装置20内排出空气的排气装置8和9 被提供。
    • 4. 发明申请
    • Bioassay Substrate With Feeder Wirings
    • 生物测定基板与馈线布线
    • US20070284247A1
    • 2007-12-13
    • US10579044
    • 2004-11-11
    • Akira Yoshio
    • Akira Yoshio
    • C12M1/00
    • G01N33/54366B01L3/5085B01L2300/0645B01L2300/0803
    • A contrivance is applied to the wiring configuration for securely feeding electricity to electrodes provided in a multiplicity of reaction regions arranged on a substrate, irrespectively of the arrangement configuration of the electrodes. A bioassay substrate being a disk-shaped substrate having such a configuration that reaction regions 2 to be fields for interactions between substances are arranged in multiplicity and electrodes E are provided in the reaction regions 2, wherein feeder wirings 401, 402 which are extended from a current passing portion or portions (for example, 36) provided at a central portion of the substrate 1 and which are connected to the electrodes E1, E2 in the reaction regions 2 are extended to entirely cover the whole area of the substrate.
    • 无论电极的布置结构如何,都将布线配置应用于布置在安装在基板上的多个反应区域中的电极的电力的布线配置。 作为盘状基板的生物测定基板具有这样的结构:反应区域2设置在反应区域2内,反应区域2为从多个位置排列的用于物质之间的相互作用的反应区域2和电极E,其中馈线布线401,402从 设置在基板1的中心部分并且与反应区域2中的电极E 1,E 2连接的电流通过部分(例如36)被延伸以完全覆盖基板的整个区域。
    • 5. 发明申请
    • Polishing method, polishing apparatus, plating method, and plating apparatus
    • 抛光方法,抛光装置,电镀方法和电镀装置
    • US20070051632A1
    • 2007-03-08
    • US11590723
    • 2006-10-31
    • Shuzo SatoYuji SegawaAkira YoshioTakeshi Nogami
    • Shuzo SatoYuji SegawaAkira YoshioTakeshi Nogami
    • C25D5/02
    • C25D5/02B24B37/042C25D5/04C25D7/123C25D17/001C25D21/12C25F3/16C25F7/00H01L21/2885H01L21/32115H01L21/3212H01L21/7684H01L21/76888
    • A polishing method and polishing apparatus able to easily flatten an initial unevenness with an excellent efficiency of removal of excess copper film and suppress damage to a lower interlayer insulation film, and a plating method and plating apparatus able to deposit a flat copper film. The polishing method comprises the steps of measuring thickness equivalent data of a film on a wafer, making a cathode member smaller than the surface face a region thereof, interposing an electrolytic solution between the surface and the cathode member, applying a voltage using the cathode member as a cathode and the film an anode, performing electrolytic polishing by electrolytic elution or anodic oxidation and chelation and removal of a chelate film in the same region preferentially from projecting portions of the film until removing the target amount of film obtained from the thickness equivalent data, and repeating steps of moving the cathode member to another region to flattening the regions over the entire surface. Further, plating is performed by a reverse reaction of the above.
    • 一种抛光方法和抛光装置,其能够以极好的去除多余的铜膜的效率并且抑制对下层间绝缘膜的损坏而容易地平坦化初始凹凸,以及能够沉积扁平铜膜的电镀方法和电镀装置。 抛光方法包括以下步骤:测量晶片上的膜的厚度当量数据,使阴极部件小于表面面积的阴极部件,在电极表面和阴极部件之间插入电解液,使用阴极部件施加电压 作为阴极,膜是阳极,通过电解洗脱或阳极氧化进行电解抛光,并优先从膜的突出部分螯合并除去相同区域中的螯合膜,直到从厚度等效数据中除去目标量的膜 并且重复将阴极部件移动到另一区域以使整个表面上的区域变平的步骤。 此外,通过上述的反作用进行电镀。