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1. 发明授权

US07156975B2 Polishing method and electropolishing apparatus 有权
标题翻译：抛光方法和电抛光装置
公开(公告)号：US07156975B2
公开(公告)日：2007-01-02
申请号：US10304174
申请日：2002-11-26
申请人： Shuzo Sato , Takeshi Nogami , Zenya Yasuda , Masao Ishihara
发明人： Shuzo Sato , Takeshi Nogami , Zenya Yasuda , Masao Ishihara
IPC分类号： C25F3/16 , C25F7/00 , B23H5/06 , B23H3/02 , C25F3/22
CPC分类号： B24B37/013 , B24B49/04 , B24B49/10
摘要： A polishing method for electropolishing a metal film formed on a wafer surface so as to fill concave portions formed on the wafer surface comprises a step of determining an electropolishing end point of the metal film on the basis of a change of a current waveform resulting from electropolishing the metal film. An electropolishing apparatus comprising a current detector for detecting a current waveform resulting from electropolishing a metal film and an end point determination part for determining an electropolishing end point of the metal film on the basis of the change of a current detected with the current detector is used to realize the polishing method.
摘要翻译：电抛光形成在晶片表面上以形成在晶片表面上的凹部的金属膜的抛光方法包括基于电抛光产生的电流波形的变化来确定金属膜的电抛光终点的步骤金属膜。使用电抛光装置，其包括用于检测由电解抛光金属膜产生的电流波形的电流检测器和用于基于由电流检测器检测的电流变化来确定金属膜的电抛光终点的终点确定部件实现抛光方法。

2. 发明授权

US06797623B2 Methods of producing and polishing semiconductor device and polishing apparatus 失效
标题翻译：半导体器件和抛光装置的制造和抛光方法
公开(公告)号：US06797623B2
公开(公告)日：2004-09-28
申请号：US09800580
申请日：2001-03-08
申请人： Shuzo Sato , Yuji Segawa , Akira Yoshio , Hiizu Ootorii , Zenya Yasuda , Masao Ishihara , Takeshi Nogami , Naoki Komai
发明人： Shuzo Sato , Yuji Segawa , Akira Yoshio , Hiizu Ootorii , Zenya Yasuda , Masao Ishihara , Takeshi Nogami , Naoki Komai
IPC分类号： H01L21302
CPC分类号： B24B37/042 , B23H5/08 , B24B37/046 , B24B37/16 , B24B37/26 , C25F3/30 , C25F7/00 , H01L21/3212 , H01L21/32125 , H01L21/7684 , H01L21/76843
摘要： A method of production and a method of polishing a semiconductor device and a polishing apparatus, capable of easily flattening an initial unevenness of a metal film, excellent in efficiency of removal of an excess metal film, and capable of suppressing damage to an interlayer insulation film below the metal film when flattening the metal film by polishing, the polishing method including the steps of interposing an electrolytic solution including a chelating agent between a cathode member and the copper film, applying a voltage between the cathode member used as a cathode and the copper film used as an anode to oxidize the surface of the copper film and forming a chelate film of the oxidized copper, selectively removing a projecting portion of the chelate film corresponding to the shape of the copper film to expose the projecting portion of the copper film at its surface, and repeating the above chelate film forming step and the above chelate film removing step until the projecting portion of the copper film is flattened.
摘要翻译：一种生产方法和抛光半导体器件和抛光装置的方法，其能够容易地平坦化金属膜的初始不均匀性，除去过量金属膜的效率优异，并且能够抑制对层间绝缘膜的损伤在通过抛光使金属膜平坦化时，金属膜下方的抛光方法包括以下步骤：在阴极构件和铜膜之间插入包含螯合剂的电解液，在用作阴极的阴极构件和铜膜用作氧化铜膜的表面并形成氧化铜的螯合膜，选择性地除去与铜膜形状相对应的螯合膜的突出部分，以暴露铜膜的突出部分并重复上述螯合膜形成步骤和上述螯合膜去除步骤，直到突出使铜膜变平。

3. 发明授权

US4836324A Saddle type vehicle running on uneven ground 失效
标题翻译：鞍式车辆在不平坦的地面上行驶
公开(公告)号：US4836324A
公开(公告)日：1989-06-06
申请号：US195452
申请日：1988-05-12
申请人： Masataka Morita , Masao Ishihara , Mitsuru Tachikawa
发明人： Masataka Morita , Masao Ishihara , Mitsuru Tachikawa
IPC分类号： B60K5/00 , B62J27/00 , B62K11/04
CPC分类号： B60K5/00 , B62J27/00 , B60Y2200/124 , Y10S180/908
摘要： A saddle type vehicle for running on an uneven ground includes a swing type engine unit whose pivot is positioned before a center of the wheel base of the vehicle. The vehicle includes a lower member disposed opposite to a lower surface of the engine unit and includes a frame connected by coupling the lower member and an upper member by a bridge member surrounding a main portion of the engine unit.
摘要翻译：用于在不平坦地面上行驶的马鞍式车辆包括其枢轴位于车辆的车轮基座的中心之前的摆动式发动机单元。车辆包括与发动机单元的下表面相对设置的下部构件，并且包括通过围绕发动机单元的主要部分的桥接构件联接下部构件和上部构件而连接的框架。

4. 发明授权

US4228336A Method of manufacturing stay ring for water turbine and pump turbine 失效
标题翻译：制造水轮机和水轮机的止动环的方法
公开(公告)号：US4228336A
公开(公告)日：1980-10-14
申请号：US911081
申请日：1978-05-31
申请人： Tetsuo Okuni , Masao Ishihara , Takeshi Wada
发明人： Tetsuo Okuni , Masao Ishihara , Takeshi Wada
IPC分类号： B23K25/00 , F03B3/16
CPC分类号： F03B3/16 , B23K25/00 , Y02E10/223 , Y02P70/525
摘要： A method of manufacturing a stay ring for a water turbine or pump turbine having an upper annular disc, a lower annular disc and a plurality of circumferentially equal-distantly spaced stay vanes extending between the upper and lower annular discs. The method includes forming openings in the upper and lower annular discs at locations where the stay vanes are to be positioned, locating the upper and the lower annular discs such that the openings in the upper and lower annular discs are put in vertical alignment, placing a plurality of molds each having therein a space of a shape conforming to that of the stay vane, such that the spaces in the molds are brought into communication with respective pairs of openings of the upper and the lower discs, and effecting an electroslag welding in the space in each mold through respective openings of the upper annular disc to fill the space with the welding metal, thereby to form the stay vanes and, at the same time, to connect the upper and lower annular discs through thus formed stay vanes.
摘要翻译：一种用于制造水轮机或泵式涡轮机的止动环的方法，其具有在上环形盘和下环形盘之间延伸的上环形盘，下环形盘和多个周向相等间隔的延伸叶片。该方法包括在上下环形盘的位置上形成开口，该位置处定位上述下环形盘和上下环形盘，以使上下环形盘中的开口垂直排列，多个模具各自具有与延伸叶片的形状相一致的形状的空间，使得模具中的空间与上部和下部盘的相应的开口对连通，并且进行电渣焊接每个模具中的空间通过上部环形盘的相应开口，以与焊接金属填充空间，从而形成支撑叶片，并且同时通过如此形成的撑杆连接上部和下部环形盘。

5. 发明授权

US4149890A Diffusion transfer photographic material with fluorine containing neutralization layer 失效
标题翻译：扩散转印照相材料含氟中和层
公开(公告)号：US4149890A
公开(公告)日：1979-04-17
申请号：US804567
申请日：1977-06-08
申请人： Yuzuru Sato , Masao Asano , Masao Ishihara , Sadatugu Terada
发明人： Yuzuru Sato , Masao Asano , Masao Ishihara , Sadatugu Terada
IPC分类号： G03C8/54 , G03C8/52 , G03C7/00 , G03C1/40 , G03C1/48 , G03C5/54
CPC分类号： G03C8/52
摘要： There is disclosed an improvement in a diffusion transfer photographic material having a transparent support, a receiving layer, a silver halide emulsion layer, and a neutralization layer, wherein the neutralization layer contains a copolymer containing fluorine.
摘要翻译：公开了具有透明支撑体，接收层，卤化银乳剂层和中和层的扩散转印照相材料的改进，其中中和层含有含氟的共聚物。

6. 发明授权

US4127413A Method for the addition of photographic addenda 失效
标题翻译：添加摄影附加物的方法
公开(公告)号：US4127413A
公开(公告)日：1978-11-28
申请号：US874662
申请日：1978-02-02
申请人： Masao Ishihara , Ryoichiro Kobayashi , Tugumoto Usui , Takayoshi Omura
发明人： Masao Ishihara , Ryoichiro Kobayashi , Tugumoto Usui , Takayoshi Omura
IPC分类号： G03C7/26 , C07D207/26 , C07D207/267 , G03C1/06 , G03C1/815 , G03C7/388 , G03C1/84 , G03C1/40
CPC分类号： G03C7/3885
摘要： A method for adding oil-soluble photographic addenda in the form of their solution in a high boiling organic solvent to a hydrophilic colloidal solution for forming a layer of a light-sensitive silver halide photographic material in the homogeneously dispersed state, is described.
摘要翻译：描述了以均匀分散状态形成感光卤化银照相材料层的亲水性胶体溶液将在高沸点有机溶剂中的溶液形式的油溶性摄影添加物加入到其中的方法。

7. 发明申请

US20050082165A1 Electro-chemical machining apparatus 审中-公开
标题翻译：电化学加工设备
公开(公告)号：US20050082165A1
公开(公告)日：2005-04-21
申请号：US10983545
申请日：2004-11-08
申请人： Shuzo Sato , Zenya Yasuda , Masao Ishihara , Hiizu Ootorii , Takeshi Nogami , Naoki Komai
发明人： Shuzo Sato , Zenya Yasuda , Masao Ishihara , Hiizu Ootorii , Takeshi Nogami , Naoki Komai
IPC分类号： B23H3/00 , B24B7/22 , B24B21/04 , B24B37/04 , B24B57/02 , C25F7/00 , H01L21/3205 , H01L21/321 , H01L21/768 , B23H7/14
CPC分类号： B24B37/04 , B24B7/228 , B24B21/04 , B24B57/02 , Y10S451/908
摘要： The electrochemical machining apparatus of this invention is designed to smoothing a metal film by efficiently reducing initial rough surface and removing excessive metal film with reduced damages to the metal film. For this end, the electrochemical machining apparatus performs electrochemical machining of an object to be machined having a metal film on the surface to be machined. Such apparatus has a means for holding the object to be machined, a wiper for wiping the surface of the object to be machined, a means for supplying electrolytic solution onto the surface of the object to be machined, a first electrode disposed at a position opposed to the surface of the object to be machined, a second electrode disposed at a peripheral portion on the surface of the object to be machined, and a power supply for causing electrical current to flow between the second electrode on the surface of the object to be machined and the first electrode.
摘要翻译：本发明的电化学加工装置被设计成通过有效地减少初始粗糙表面和去除对金属膜的损坏的过量金属膜来平滑金属膜。为此，电化学加工装置对待加工表面上具有金属膜的被加工物进行电化学加工。这种装置具有用于保持待加工物体的装置，用于擦拭待加工物体的表面的擦拭器，用于将电解液供给到待加工物体的表面上的装置，设置在相对的位置的第一电极到被加工物的表面，设置在被加工物的表面的周边部分的第二电极，以及用于使电流在物体表面上的第二电极之间流动的电源为加工和第一个电极。

8. 发明授权

US4200465A Antistatic light-sensitive silver halide photographic element 失效
标题翻译：防静电感光卤化银照相材料
公开(公告)号：US4200465A
公开(公告)日：1980-04-29
申请号：US934332
申请日：1978-08-16
申请人： Norio Chiba , Hideyuki Anzai , Hisashi Yamaguchi , Koichi Horigome , Masao Ishihara , Sadatugu Terada
发明人： Norio Chiba , Hideyuki Anzai , Hisashi Yamaguchi , Koichi Horigome , Masao Ishihara , Sadatugu Terada
IPC分类号： G03C1/89 , G03C1/78 , G03C1/96
CPC分类号： G03C1/895 , G03C1/89
摘要： An antistatic light-sensitive silver halide photographic element having an addition copolymer of glycidol and ethylene oxide with a phenol-aldehyde condensate as the antistatic agent, is described.
摘要翻译：描述了具有缩水甘油和环氧乙烷的加成共聚物与酚 - 醛缩合物作为抗静电剂的抗静电感光卤化银照相元件。

9. 发明授权

US06846227B2 Electro-chemical machining appartus 失效
标题翻译：电化学加工配件
公开(公告)号：US06846227B2
公开(公告)日：2005-01-25
申请号：US10085747
申请日：2002-02-28
申请人： Shuzo Sato , Zenya Yasuda , Masao Ishihara , Hiizu Ootorii , Takeshi Nogami , Naoki Komai
发明人： Shuzo Sato , Zenya Yasuda , Masao Ishihara , Hiizu Ootorii , Takeshi Nogami , Naoki Komai
IPC分类号： B23H3/00 , B24B7/22 , B24B21/04 , B24B37/04 , B24B57/02 , C25F7/00 , H01L21/3205 , H01L21/321 , H01L21/768 , B24B29/00
CPC分类号： B24B37/04 , B24B7/228 , B24B21/04 , B24B57/02 , Y10S451/908
摘要： The electro-chemical machining apparatus of this invention is designed to smoothing a metal film by efficiently reducing initial rough surface and removing excessive metal film with reduced damages to the metal film. For this end, the electro-chemical machining apparatus performs electro-chemical machining of an object to be machined having a metal film on the surface to be machined. Such apparatus has a means for holding the object to be machined, a wiper for wiping the surface of the object to be machined, a means for supplying electrolytic solution onto the surface of the object to be machined, a first electrode disposed at a position opposed to the surface of the object to be machined, a second electrode disposed at a peripheral portion on the surface of the object to be machined, and a power supply for causing electrical current to flow between the second electrode on the surface of the object to be machined and the first electrode.
摘要翻译：本发明的电化学加工装置被设计成通过有效地降低初始粗糙表面并且减少对金属膜的损伤去除过量的金属膜来平滑金属膜。为此，电化学加工装置对待加工表面上具有金属膜的被加工物进行电化学加工。这种装置具有用于保持待加工物体的装置，用于擦拭待加工物体的表面的擦拭器，用于将电解液供给到待加工物体的表面上的装置，设置在相对的位置的第一电极到被加工物的表面，设置在被加工物的表面的周边部分的第二电极，以及用于使电流在物体表面上的第二电极之间流动的电源为加工和第一个电极。

10. 发明授权

US4142899A Color diffusion transfer photographic unit 失效
标题翻译：彩色扩散转印照相机
公开(公告)号：US4142899A
公开(公告)日：1979-03-06
申请号：US808909
申请日：1977-06-22
申请人： Yuzuru Sato , Masao Asano , Masao Ishihara , Sadatugu Terada
发明人： Yuzuru Sato , Masao Asano , Masao Ishihara , Sadatugu Terada
IPC分类号： C08F20/00 , C08F14/00 , C08F14/18 , C08F20/22 , C08F20/34 , G03C8/08 , G03C8/56 , G03C1/40 , G03C5/54
CPC分类号： G03C8/56 , Y10S430/142
摘要： The present invention relates to a color diffusion transfer photographic unit containing a silver halide photosensitive element, and an image receiving element wherein said unit contains a copolymer containing two monomers. The first monomer is noted for having quaternary nitrogen while the second monomer is required to have at least one fluorine atom.
摘要翻译：本发明涉及含有卤化银感光元件的彩色扩散转印照相装置和图像接收元件，其中所述单元包含含有两种单体的共聚物。注意到第一单体具有季氮，而第二单体需要具有至少一个氟原子。

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