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    • 7. 发明授权
    • Avalanche photodiode for light detection
    • 用于光检测的雪崩光电二极管
    • US5763903A
    • 1998-06-09
    • US516234
    • 1995-08-17
    • Masaaki MandaiTomoyuki YoshinoTadao AkamineYutaka SaitohJunko YamanakaOsamu Koseki
    • Masaaki MandaiTomoyuki YoshinoTadao AkamineYutaka SaitohJunko YamanakaOsamu Koseki
    • H01L27/144H01L31/02H01L31/0203H01L31/107H01L31/0328
    • H01L31/0203H01L27/1443H01L27/1464H01L31/107H01L2224/73265H01L2924/01322H01L2924/10158
    • An avalanche photodiode for detecting x-rays and other radiation comprises a first substrate having a portion removed therefrom, a first insulating film formed on the first substrate, a second substrate comprising a floating zone silicon semiconductor substrate disposed on the first insulating film, an impurity region selectively formed in the second substrate at a surface corresponding to the removed portion, a PN junction formed on the second substrate, a glass substrate mounted to the second substrate, a first electrode formed on the first substrate for applying a voltage to the impurity region, a second electrode formed on the second substrate for applying a voltage to the second substrate, a third electrode formed on the glass substrate and electrically connected to the second electrode, and an integrated circuit package having a lead pin connected to the third electrode. Accordingly, a shallow depletion layer may be provided on a floating zone SOI substrate. The substrates may be joined to the glass substrate using a eutectic bonding process.
    • 用于检测X射线和其它辐射的雪崩光电二极管包括:第一衬底,其具有从其中去除的部分;第一绝缘膜,形成在第一衬底上;第二衬底,包括布置在第一绝缘膜上的浮动区硅半导体衬底, 在与第二基板对应的表面上选择性地形成在第二基板上的区域,形成在第二基板上的PN结,安装到第二基板的玻璃基板,形成在第一基板上的用于向杂质区域施加电压的第一电极 形成在第二基板上的用于向第二基板施加电压的第二电极,形成在玻璃基板上并电连接到第二电极的第三电极,以及具有连接到第三电极的引脚的集成电路封装。 因此,可以在浮动区域SOI衬底上提供浅耗尽层。 可以使用共晶接合工艺将基板连接到玻璃基板。