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1. 发明申请

US20110228650A1 METHOD FOR MANUFACTURING THERMALLY-ASSISTED MAGNETIC RECORDING HEAD COMPRISING LIGHT SOURCE UNIT AND SLIDER 有权
标题翻译：用于制造包含光源单元和滑块的热辅助磁记录头的方法
公开(公告)号：US20110228650A1
公开(公告)日：2011-09-22
申请号：US12899101
申请日：2010-10-06
申请人： Koji SHIMAZAWA , Yoshihiro TSUCHIYA , Seiichi TAKAYAMA , Nobuyuki MORI , Yasuhiro ITO , Kosuke TANAKA , Osamu SHINDO , Ryuji FUJII , Takashi HONDA , Yoshitaka SASAKI
发明人： Koji SHIMAZAWA , Yoshihiro TSUCHIYA , Seiichi TAKAYAMA , Nobuyuki MORI , Yasuhiro ITO , Kosuke TANAKA , Osamu SHINDO , Ryuji FUJII , Takashi HONDA , Yoshitaka SASAKI
IPC分类号： G11B11/00 , B23K1/005
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/001 , G11B2005/0021
摘要： A method for manufacturing a thermally-assisted magnetic recording head is provided, in which a light source unit including a light source and a slider including an optical system are bonded. A unit substrate is made of a material transmitting light having a predetermined wavelength, and a unit adhesion material layer that contains Sn, Sn alloy, Pb alloy or Bi alloy is formed on the light source unit and/or the slider. The manufacturing method includes: aligning the light source unit and the slider in such a way that a light from the light source can enter the optical system and the unit adhesion material layer is sandwiched therebetween; and causing a light including the predetermined wavelength to enter the unit substrate to melt the unit adhesion material layer. The unit adhesion material layer melted by the light including the predetermined wavelength can ensure high alignment accuracy as well as higher bonding strength and less change with time.
摘要翻译：提供了一种用于制造热辅助磁记录头的方法，其中包括光源和包括光学系统的滑块的光源单元被结合。单位基板由透射具有预定波长的光的材料制成，并且在光源单元和/或滑块上形成包含Sn，Sn合金，Pb合金或Bi合金的单位粘附材料层。该制造方法包括：使光源单元和滑块对准，使得来自光源的光能够进入光学系统，并且单元粘合材料层夹在其间; 并使包含所述预定波长的光进入所述单元基板以熔化所述单元粘合材料层。由包含预定波长的光熔化的单元粘合材料层可以确保高对准精度以及更高的粘合强度和较小的随时间的变化。

2. 发明申请

US20110228653A1 LIGHT SOURCE UNIT FOR THERMALLY-ASSISTED MAGNETIC RECORDING CAPABLE OF MONITORING OF LIGHT OUTPUT 有权
标题翻译：用于监视光输出的用于热辅助磁记录的光源单元
公开(公告)号：US20110228653A1
公开(公告)日：2011-09-22
申请号：US12728510
申请日：2010-03-22
申请人： Koji SHIMAZAWA , Yoshihiro TSUCHIYA , Seiichi TAKAYAMA , Nobuyuki MORI , Yasuhiro ITO , Kosuke TANAKA , Osamu SHINDO , Ryuji FUJII , Takashi HONDA , Yoshitaka SASAKI
发明人： Koji SHIMAZAWA , Yoshihiro TSUCHIYA , Seiichi TAKAYAMA , Nobuyuki MORI , Yasuhiro ITO , Kosuke TANAKA , Osamu SHINDO , Ryuji FUJII , Takashi HONDA , Yoshitaka SASAKI
IPC分类号： G11B11/00 , G01J1/32 , B32B38/00
CPC分类号： G11B5/314 , G11B5/105 , G11B5/6088 , G11B2005/0021 , Y10T156/1052
摘要： Provided is a light source unit that is to be joined to a slider to form a thermally-assisted magnetic recording head. The light source unit comprises: a unit substrate having a source-installation surface; a light source provided in the source-installation surface and emitting thermal-assist light; and a photodetector bonded to a rear joining surface of the unit substrate in such a manner that a rear light-emission center of the light source is covered with a light-receiving surface of the photodetector. The photodetector can be sufficiently close to the light source; thus, constant feedback adjustment with high efficiency for the light output of the light source can be performed. This adjustment enables light output from the light source to be controlled in response to changes in light output due to surroundings and to changes with time to stabilize the intensity of light with which a magnetic recording medium is irradiated.
摘要翻译：提供一种光源单元，其被连接到滑块以形成热辅助磁记录头。光源单元包括：具有源安装表面的单元基板; 光源，设置在源安装表面中并发射热辅助光; 以及光电检测器，其以使得光源的后发光中心被光电检测器的光接收表面覆盖的方式结合到单元基板的后接合表面。光电检测器可以足够靠近光源; 因此，可以执行用于光源的光输出的高效率的恒定反馈调整。该调整使得能够响应于由于周围环境导致的光输出的变化而控制来自光源的光输出，并且随着时间的变化来稳定照射磁记录介质的光的强度。

3. 发明申请

US20110228649A1 METHOD FOR MANUFACTURING THERMALLY-ASSISTED MAGNETIC RECORDING HEAD COMPRISING LIGHT SOURCE UNIT AND SLIDER 有权
标题翻译：用于制造包含光源单元和滑块的热辅助磁记录头的方法
公开(公告)号：US20110228649A1
公开(公告)日：2011-09-22
申请号：US12726981
申请日：2010-03-18
申请人： Koji SHIMAZAWA , Yoshihiro TSUCHIYA , Seiichi TAKAYAMA , Nobuyuki MORI , Yasuhiro ITO , Kosuke TANAKA , Osamu SHINDO , Ryuji FUJII , Takashi HONDA , Yoshitaka SASAKI
发明人： Koji SHIMAZAWA , Yoshihiro TSUCHIYA , Seiichi TAKAYAMA , Nobuyuki MORI , Yasuhiro ITO , Kosuke TANAKA , Osamu SHINDO , Ryuji FUJII , Takashi HONDA , Yoshitaka SASAKI
IPC分类号： G11B11/00 , B23K31/02
CPC分类号： G11B5/314 , G11B5/105 , G11B5/6088 , G11B2005/001 , G11B2005/0021
摘要： A method for manufacturing a thermally-assisted magnetic recording head is provided, in which a light source unit including a light source and a slider including an optical system are bonded. A unit substrate is made of a material transmitting light having a predetermined wavelength, and an adhesion material layer is formed on the light source unit and/or the slider. The manufacturing method includes: aligning the light source unit and the slider in such a way that a light from the light source can enter the optical system and the adhesion material layer is sandwiched therebetween; irradiating the adhesion material layer with a light including the predetermined wavelength through the unit substrate; and bonding them. The adhesion material layer melted by the light including the predetermined wavelength and transmitted through the unit substrate can ensure high alignment accuracy as well as higher bonding strength and less change with time.
摘要翻译：提供了一种用于制造热辅助磁记录头的方法，其中包括光源和包括光学系统的滑块的光源单元被结合。单位基板由透射具有预定波长的光的材料制成，并且在光源单元和/或滑块上形成粘合材料层。该制造方法包括：将光源单元和滑块对准，使得来自光源的光能够进入光学系统，并且粘合材料层夹在其间; 用包含所述预定波长的光通过所述单元基板照射所述粘附材料层; 并粘合它们。由包含预定波长并透过单元基板的光熔化的粘合材料层可以确保高对准精度以及更高的粘接强度和随时间变化的变化。

4. 发明申请

US20120073120A1 METHOD FOR MANUFACTURING HEAD INCLUDING LIGHT SOURCE UNIT FOR THERMAL ASSIST 有权
标题翻译：用于制造包括用于热辅助的光源单元的头的方法
公开(公告)号：US20120073120A1
公开(公告)日：2012-03-29
申请号：US12888916
申请日：2010-09-23
申请人： Koji SHIMAZAWA , Seiichi TAKAYAMA , Nobuyuki MORI , Yoshihiro TSUCHIYA , Shinji HARA
发明人： Koji SHIMAZAWA , Seiichi TAKAYAMA , Nobuyuki MORI , Yoshihiro TSUCHIYA , Shinji HARA
IPC分类号： G11B5/127 , G11B7/22
CPC分类号： G11B5/105 , G11B5/314 , G11B5/6088 , G11B2005/0021 , Y10T29/49032 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/53165 , Y10T29/53265 , Y10T428/1143 , Y10T428/1171 , Y10T428/1193
摘要： Provided is a method for manufacturing a thermally-assisted magnetic recording head in which a light source unit including a light source and a slider including an optical system are joined. The method comprises steps of: adhering by suction the light source unit with a back holding jig; bringing the light source unit into contact with a slider back surface of the slider; applying a load to a load application surface of the light source unit by a loading means to bring a joining surface of the light source unit into conformity with the slider back surface; positioning the light source unit apart from the slider, and then aligning the light source with the optical system; bringing again the light source unit into contact with the slider; and applying a load again to the load application surface to bring the joining surface into conformity with the slider back surface. Thus, the conformity between them can be significantly increased, thereby achieving adequately strong junction and adequately high accuracy in position.
摘要翻译：提供一种制造热辅助磁记录头的方法，其中包括光源和包括光学系统的滑块的光源单元接合。该方法包括以下步骤：用后保持夹具吸附光源单元; 使光源单元与滑块的滑块后表面接触; 通过加载装置将负载施加到光源单元的负载施加表面，以使光源单元的接合表面与滑块背面一致; 将光源单元与滑块分开，然后将光源与光学系统对准; 使光源单元再次与滑块接触; 并且将负载再次施加到负载施加表面以使接合表面与滑块后表面一致。因此，它们之间的一致性可以显着增加，从而实现足够强的接合和足够高的位置精度。

5. 发明申请

US20120090162A1 METHOD FOR MANUFACTURING HEAD INCLUDING LIGHT SOURCE UNIT FOR THERMAL ASSIST 有权
标题翻译：用于制造包括用于热辅助的光源单元的头的方法
公开(公告)号：US20120090162A1
公开(公告)日：2012-04-19
申请号：US12904553
申请日：2010-10-14
申请人： Koji SHIMAZAWA , Seiichi TAKAYAMA , Nobuyuki MORI , Yoshihiro TSUCHIYA , Shinji HARA
发明人： Koji SHIMAZAWA , Seiichi TAKAYAMA , Nobuyuki MORI , Yoshihiro TSUCHIYA , Shinji HARA
IPC分类号： G11B5/127
CPC分类号： G11B5/314 , B82Y10/00 , B82Y25/00 , G11B5/1278 , G11B5/3967 , G11B5/6088 , G11B2005/001 , G11B2005/0021 , G11B2005/3996 , Y10T29/49021 , Y10T29/49032 , Y10T29/5313 , Y10T29/53191
摘要： Provided is a method for manufacturing a thermally-assisted magnetic recording head including a light source unit with a light source and a slider with an optical system. The method comprises steps of: adhering by suction the light source unit with a back holding jig; moving the back holding jig, then aligning a light-emission center of the light source with a light-receiving end surface of the optical system in directions within a slider back surface of the slider; bringing the light source unit into contact with the slider back surface, with a suction surface of the back holding jig tilted from the normal to the slider back surface; applying a load to a load application surface of the unit substrate by a loading means to bring a joining surface of the light source unit into conformity with the slider back surface; and bonding the light source unit and the slider. This method can improve the conformity, thereby achieving adequately strong junction and adequately high accuracy in position.
摘要翻译：提供一种制造包括具有光源的光源单元和具有光学系统的滑块的热辅助磁记录头的方法。该方法包括以下步骤：用后保持夹具吸附光源单元; 移动后保持夹具，然后将光源的发光中心与光学系统的光接收端面沿滑块的滑块后表面内的方向对准; 使光源单元与滑块后表面接触，后保持夹具的吸力表面从滑块后表面的法线倾斜; 通过加载装置将负载施加到单元基板的负载施加表面，以使光源单元的接合表面与滑块背面一致; 并且接合光源单元和滑块。该方法可以改善一致性，从而实现足够强的接合和足够高的位置精度。

6. 发明申请

US20080218907A1 MAGNETO-RESISTANCE EFFECT ELEMENT AND THIN-FILM MAGNETIC HEAD 有权
标题翻译：磁阻效应元件和薄膜磁头
公开(公告)号：US20080218907A1
公开(公告)日：2008-09-11
申请号：US11682421
申请日：2007-03-06
申请人： Tomohito MIZUNO , Kei HIRATA , Yoshihiro TSUCHIYA , Koji SHIMAZAWA
发明人： Tomohito MIZUNO , Kei HIRATA , Yoshihiro TSUCHIYA , Koji SHIMAZAWA
IPC分类号： G11B5/39
CPC分类号： G11B5/59683
摘要： A magneto-resistance effect element (MR element) used for a thin film magnetic head is configured by a buffer layer, an anti-ferromagnetic layer, a pinned layer, a spacer layer, a free layer, and a cap layer, which are laminated in this order, and a sense current flows through the element in a direction orthogonal to the layer surface, via a lower shield layer and a upper shield layer. The pinned layer comprises an outer layer in which a magnetization direction is fixed, a non-magnetic intermediate layer, and an inner layer which is a ferromagnetic layer. The spacer layer comprises a first non-magnetic metal layer, a semiconductor layer, and a second non-magnetic metal layer. The first non-magnetic metal layer and the second non-magnetic metal layer comprise CuPt films having a thickness ranging from a minimum of 0.2 nm to a maximum of 2.0 nm, and the Pt content ranges from a minimum of 5 at % to a maximum of 25 at %. The semiconductor layer comprises a ZnO film, ZnS film, or GaN film having a thickness ranging from a minimum of 1.0 nm to a maximum of 2.5 nm.
摘要翻译：用于薄膜磁头的磁阻效应元件（MR元件）由层叠的缓冲层，反铁磁层，钉扎层，间隔层，自由层和覆盖层构成并且感测电流经由下屏蔽层和上屏蔽层沿着与层表面正交的方向流过元件。被钉扎层包括其中磁化方向固定的外层，非磁性中间层和作为铁磁层的内层。间隔层包括第一非磁性金属层，半导体层和第二非磁性金属层。第一非磁性金属层和第二非磁性金属层包括厚度范围最小为0.2nm至最大2.0nm的CuPt膜，并且Pt含量范围为最小值5at％至最大值为25原子％。半导体层包括厚度范围为1.0nm至最大2.5nm的ZnO膜，ZnS膜或GaN膜。

7. 发明申请

US20090128965A1 CPP MAGNETO-RESISTIVE ELEMENT PROVIDED WITH A PAIR OF MAGNETIC LAYERS AND NICR BUFFER LAYER 审中-公开
标题翻译： CPP磁电元件提供一对磁性层和NICR缓冲层
公开(公告)号：US20090128965A1
公开(公告)日：2009-05-21
申请号：US11940511
申请日：2007-11-15
申请人： Tomohito MIZUNO , Yoshihiro TSUCHIYA , Shinji HARA , Koji SHIMAZAWA , Daisuke MIYAUCHI , Takahiko MACHITA , Tsutomu CHOU , Toshiyuki AYUKAWA , Hironobu MATSUZAWA , Tsuyoshi ICHIKI
发明人： Tomohito MIZUNO , Yoshihiro TSUCHIYA , Shinji HARA , Koji SHIMAZAWA , Daisuke MIYAUCHI , Takahiko MACHITA , Tsutomu CHOU , Toshiyuki AYUKAWA , Hironobu MATSUZAWA , Tsuyoshi ICHIKI
IPC分类号： G11B5/33
CPC分类号： G11B5/3912 , B82Y25/00 , G01R33/093 , G11B5/3906 , G11B5/3932 , H01L43/10
摘要： A magnetic field detecting element has a stack which includes a NiCr layer, a first magnetic layer whose magnetization direction varies in accordance with an external magnetic field, a non-magnetic spacer layer, and a second magnetic layer whose magnetization direction varies in accordance with the external magnetic field, said NiCr layer, said first magnetic layer, said spacer layer and said second magnetic layer being disposed in this order and being arranged in contact with each other, wherein a sense current is adapted to flow in a direction that is perpendicular to a film surface of said stack; and a bias magnetic layer which is disposed on a side of said stack, said side being opposite to an air bearing surface of said stack, wherein said bias magnetic layer is adapted to apply a bias magnetic field to said stack in a direction that is perpendicular to said air bearing surface. Both first and second magnetic layers have bcc crystalline structures, and said non-magnetic spacer layer has a film configuration in which an insulating layer or a semiconductor layer is inserted into a metal layer.
摘要翻译：磁场检测元件具有堆叠，其包括NiCr层，其磁化方向根据外部磁场变化的第一磁性层，非磁性间隔层和其磁化方向根据外部磁场，所述NiCr层，所述第一磁性层，所述间隔层和所述第二磁性层按此顺序设置并且彼此接触，其中感测电流适于沿垂直于所述堆叠的膜表面; 以及偏置磁性层，其设置在所述堆叠的一侧，所述侧面与所述堆叠的空气支承表面相对，其中所述偏置磁性层适于在垂直方向上向所述堆叠施加偏置磁场到所述空气轴承表面。第一和第二磁性层都具有bcc晶体结构，并且所述非磁性间隔层具有绝缘层或半导体层插入到金属层中的膜结构。

8. 发明申请

US20070297104A1 METHOD FOR MANUFACTURING MAGNETIC FIELD DETECTING ELEMENT UTILIZING DIFFUSION AND MIGRATION OF SILVER 有权
标题翻译：利用铁矿石扩散和迁移的磁场检测元件的制造方法
公开(公告)号：US20070297104A1
公开(公告)日：2007-12-27
申请号：US11766926
申请日：2007-06-22
申请人： Tomohito MIZUNO , Yoshihiro TSUCHIYA , Koji SHIMAZAWA , Kei HIRATA , Keita KAWAMORI
发明人： Tomohito MIZUNO , Yoshihiro TSUCHIYA , Koji SHIMAZAWA , Kei HIRATA , Keita KAWAMORI
IPC分类号： G11B5/012
CPC分类号： G01R33/093 , B82Y25/00 , B82Y40/00 , G11B5/3906 , H01F10/1936 , H01F10/3272 , H01F41/304 , H01L43/08 , H01L43/10 , H01L43/12 , Y10T29/49025 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048
摘要： A method for manufacturing a magnetic field detecting element having a free layer whose magnetization direction is variable depending on an external magnetic field and a pinned layer whose magnetization direction is fixed with respect to the external magnetic field, said free layer and said pinned layer being stacked with an electrically conductive, nonmagnetic spacer layer sandwiched therebetween, wherein sense current is configured to flow in a direction that is perpendicular to film planes of the magnetic field detecting element is provided. The method has the steps of: forming a spacer adjoining layer that is adjacent to said spacer layer, Heusler alloy layer, and a metal layer successively in this order; and forming either at least a part of said pinned layer or said free layer by heating said spacer adjoining layer, said Heusler alloy layer, and said metal layer. The spacer adjoining layer has a layer that is chiefly made of cobalt and iron. The Heusler alloy layer includes metal which is silver, gold, copper, palladium, or platinum, or an alloy thereof. The metal layer is made of silver, gold, copper, palladium, or platinum, or an alloy thereof.
摘要翻译：一种制造磁场检测元件的方法，该磁场检测元件具有其磁化方向根据外部磁场而变化的自由层和相对于外部磁场的磁化方向固定的被钉扎层，所述自由层和所述被钉扎层被堆叠其中夹在其间的导电的非磁性间隔层，其中感测电流被配置为在垂直于磁场检测元件的膜平面的方向上流动。该方法具有如下步骤：依次形成与所述间隔层，Heusler合金层和金属层相邻的间隔物邻接层; 以及通过加热所述隔离物邻接层，所述Heusler合金层和所述金属层，形成所述被钉扎层或所述自由层的至少一部分。间隔物邻接层具有主要由钴和铁制成的层。 Heusler合金层包括银，金，铜，钯或铂的金属或其合金。金属层由银，金，铜，钯或铂或其合金制成。

9. 发明申请

US20090061258A1 CPP-TYPE MAGNETORESISTANCE EFFECT ELEMENT HAVING CHARACTERISTIC FREE LAYERS 审中-公开
标题翻译：具有特征自由层的CPP型磁阻效应元件
公开(公告)号：US20090061258A1
公开(公告)日：2009-03-05
申请号：US11847521
申请日：2007-08-30
申请人： Tomohito MIZUNO , Yoshihiro TSUCHIYA , Shinji HARA , Koji SHIMAZAWA , Tsutomu CHOU
发明人： Tomohito MIZUNO , Yoshihiro TSUCHIYA , Shinji HARA , Koji SHIMAZAWA , Tsutomu CHOU
IPC分类号： G11B5/39
CPC分类号： B82Y25/00 , G01R33/093 , G11B5/3932 , Y10T428/1129
摘要： A magnetic field detecting element comprises: a stack which includes first, second and third magnetic layers whose magnetization directions change in accordance with an external magnetic field, a first non-magnetic intermediate layer which is sandwiched between the first magnetic layer and the second magnetic layer, the first non-magnetic intermediate layer producing a magnetoresistance effect between the first magnetic layer and the second magnetic layer, and a second non-magnetic intermediate layer which is sandwiched between the second magnetic layer and the third magnetic layer, the second non-magnetic intermediate layer allowing the second magnetic layer and the third magnetic layer to be exchange-coupled such that magnetization directions thereof are anti-parallel to each other under no magnetic field, the stack being adapted such that sense current flows in a direction that is perpendicular to a film surface thereof; and a bias magnetic layer which is provided on a side of the stack, the side being opposite to an air bearing surface of the stack, the bias magnetic layer applying a bias magnetic field to the stack in a direction that is perpendicular to the air bearing surface.
摘要翻译：磁场检测元件包括：堆叠，其包括其磁化方向根据外部磁场而变化的第一，第二和第三磁性层，夹在第一磁性层和第二磁性层之间的第一非磁性中间层在第一磁性层和第二磁性层之间产生磁阻效应的第一非磁性中间层和夹在第二磁性层和第三磁性层之间的第二非磁性中间层，第二非磁性中间层中间层，允许第二磁性层和第三磁性层交换耦合，使得其磁化方向在没有磁场的情况下彼此反平行，所述堆叠适于使得感测电流沿垂直于其膜表面; 以及偏置磁性层，其设置在所述堆叠的一侧，所述侧面与所述堆叠的空气支承表面相对，所述偏置磁性层沿垂直于所述空气轴承的方向向所述堆叠施加偏置磁场表面。

10. 发明申请

US20080170336A1 MAGNETO-RESISTIVE EFFECT DEVICE AND MAGNETIC DISK SYSTEM 有权
标题翻译：磁电阻效应器和磁盘系统
公开(公告)号：US20080170336A1
公开(公告)日：2008-07-17
申请号：US11968911
申请日：2008-01-03
申请人： Yoshihiro TSUCHIYA , Tomohito Mizuno , Kei Hirata , Koji Shimazawa , Shinji Hara
发明人： Yoshihiro TSUCHIYA , Tomohito Mizuno , Kei Hirata , Koji Shimazawa , Shinji Hara
IPC分类号： G11B5/33
CPC分类号： G01R33/093 , B82Y10/00 , B82Y25/00 , G11B5/3906 , G11B5/3993 , G11B2005/3996 , H01F10/3259 , H01F10/3272 , H01L43/10
摘要： The invention provides a giant magneto-resistive effect device (CPP-GMR device) having the CPP (current perpendicular to plane) structure comprising a spacer layer, and a first ferromagnetic layer and a second ferromagnetic layer stacked one upon another with the spacer layer interposed between them, with a sense current applied in a stacking direction, wherein the spacer layer comprises a first nonmagnetic metal layer and a second nonmagnetic metal layer, each made of a nonmagnetic metal material, and a semiconductor oxide layer interposed between the first nonmagnetic metal layer and the second nonmagnetic metal layer, the semiconductor oxide layer that forms a part of said spacer layer contains zinc oxide as its main component wherein the main component zinc oxide contains an additive metal, and the additive metal is less likely to be oxidized than zinc. It is thus possible to keep the area resistivity of the device low as desired, and make the semiconductor oxide layer forming a part of the spacer layer thick while holding back any noise increase. This makes sure the excellent advantages that any variation of the area resistivity of the device is inhibited while the S/N is prevented from getting worse, and the reliability of film characteristics is much more improved.
摘要翻译：本发明提供了一种具有CPP（垂直于平面的电流）结构的巨磁阻效应器件（CPP-GMR器件），该结构包括间隔层，并且第一铁磁层和第二铁磁层彼此层叠，间隔层插入在它们之间具有沿层叠方向施加的感测电流，其中间隔层包括由非磁性金属材料制成的第一非磁性金属层和第二非磁性金属层，以及介于第一非磁性金属层之间的半导体氧化物层和第二非磁性金属层，形成所述间隔层的一部分的半导体氧化物层含有氧化锌作为主要成分，其中主要成分氧化锌含有添加金属，并且添加金属不太可能被氧化成锌。因此，可以根据需要保持器件的面积电阻率低，并且使得形成间隔层的一部分的半导体氧化物层变厚，同时阻止任何噪声增加。这确保了防止S / N变差的装置的面电阻率的任何变化被抑制的优点，并且膜特性的可靠性得到更大的改善。

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