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    • 8. 发明申请
    • ISOLATION SYSTEM FOR AN OPTICAL ELEMENT OF AN EXPOSURE APPARATUS
    • 曝光装置的光学元件隔离系统
    • US20120127445A1
    • 2012-05-24
    • US12949130
    • 2010-11-18
    • Akimitsu EbiharaYi-Ping HsinKunitomo FukaiHideyuki HashimotoBausan Yuan
    • Akimitsu EbiharaYi-Ping HsinKunitomo FukaiHideyuki HashimotoBausan Yuan
    • G03F7/20G03B27/54G02B7/00
    • G03F7/709G02B27/646G03F7/70258
    • An optical isolation assembly (30) for reducing the transmission of vibration from an optical barrel (25) to an optical element assembly (28) includes an optical mover assembly (256), a first measurement system (258), a second measurement system (260), and a control system (24). The optical mover assembly (256) moves, positions and supports the optical element assembly (28) relative to the optical barrel (25). The first measurement system (258) generates one or more first measurement signals that relate to the relative position between the optical element assembly (28) and the optical barrel (25). The second measurement system (260) generates one or more second measurement signals that relate to the absolute movement of the optical element assembly (28) along the first axis. The control system (24) controls the optical mover assembly (256) utilizing the first measurement signals and the second measurement signals.
    • 用于减少从光学镜筒(25)到光学元件组件(28)的振动传播的光学隔离组件(30)包括光学移动器组件(256),第一测量系统(258),第二测量系统 260)和控制系统(24)。 光学移动器组件(256)相对于光学镜筒(25)移动,定位和支撑光学元件组件(28)。 第一测量系统(258)产生与光学元件组件(28)和光学镜筒(25)之间的相对位置相关的一个或多个第一测量信号。 第二测量系统(260)产生与光学元件组件(28)沿着第一轴线的绝对运动有关的一个或多个第二测量信号。 控制系统(24)利用第一测量信号和第二测量信号来控制光学移动器组件(256)。