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1. 发明申请

US20120127445A1 ISOLATION SYSTEM FOR AN OPTICAL ELEMENT OF AN EXPOSURE APPARATUS 审中-公开
标题翻译：曝光装置的光学元件隔离系统
公开(公告)号：US20120127445A1
公开(公告)日：2012-05-24
申请号：US12949130
申请日：2010-11-18
申请人： Akimitsu Ebihara , Yi-Ping Hsin , Kunitomo Fukai , Hideyuki Hashimoto , Bausan Yuan
发明人： Akimitsu Ebihara , Yi-Ping Hsin , Kunitomo Fukai , Hideyuki Hashimoto , Bausan Yuan
IPC分类号： G03F7/20 , G03B27/54 , G02B7/00
CPC分类号： G03F7/709 , G02B27/646 , G03F7/70258
摘要： An optical isolation assembly (30) for reducing the transmission of vibration from an optical barrel (25) to an optical element assembly (28) includes an optical mover assembly (256), a first measurement system (258), a second measurement system (260), and a control system (24). The optical mover assembly (256) moves, positions and supports the optical element assembly (28) relative to the optical barrel (25). The first measurement system (258) generates one or more first measurement signals that relate to the relative position between the optical element assembly (28) and the optical barrel (25). The second measurement system (260) generates one or more second measurement signals that relate to the absolute movement of the optical element assembly (28) along the first axis. The control system (24) controls the optical mover assembly (256) utilizing the first measurement signals and the second measurement signals.
摘要翻译：用于减少从光学镜筒（25）到光学元件组件（28）的振动传播的光学隔离组件（30）包括光学移动器组件（256），第一测量系统（258），第二测量系统 260）和控制系统（24）。光学移动器组件（256）相对于光学镜筒（25）移动，定位和支撑光学元件组件（28）。第一测量系统（258）产生与光学元件组件（28）和光学镜筒（25）之间的相对位置相关的一个或多个第一测量信号。第二测量系统（260）产生与光学元件组件（28）沿着第一轴线的绝对运动有关的一个或多个第二测量信号。控制系统（24）利用第一测量信号和第二测量信号来控制光学移动器组件（256）。

2. 发明申请

US20070284502A1 Hexapod kinematic mountings for optical elements, and optical systems comprising same 审中-公开
标题翻译：用于光学元件的六足运动学安装件，以及包括该元件的光学系统
公开(公告)号：US20070284502A1
公开(公告)日：2007-12-13
申请号：US11644467
申请日：2006-12-21
申请人： Yi-Ping Hsin , Hideyuki Hashimoto , Jin Nishikawa , Scott Coakley , Kunitomo Fukai , Wen-Hou Ma , Bausan Yuan
发明人： Yi-Ping Hsin , Hideyuki Hashimoto , Jin Nishikawa , Scott Coakley , Kunitomo Fukai , Wen-Hou Ma , Bausan Yuan
IPC分类号： A47G1/24
CPC分类号： G02B7/005
摘要： “Hexapod” mountings are disclosed for use with optical elements. An exemplary mounting includes a base, a platform that is movable relative to the base, and six legs having nominally identical length. Three pairs of legs, having substantially equal stiffness, extend between the base and platform and support the platform relative to the base. In each pair of legs, respective first ends are coupled together in a Λ-shaped manner forming a respective apex. Respective second ends are splayed relative to the apex, desirably forming an angle of substantially 109.5° at the apex. The apices are mounted equidistantly from each other on a circle on the platform. The respective second ends of the pairs of legs are mounted at respective locations on a circle on the base. The axes of each pair of legs define a respective leg plane substantially perpendicular to the base plane. Each leg has an actuator that, when energized, changes a length of the respective leg. Coordinated energization of the actuators in selected legs produces a desired movement of the platform relative to the base in all six degrees of freedom of motion.
摘要翻译： “六足”安装件被公开用于光学元件。示例性的安装包括底座，相对于底座可移动的平台以及具有标称相同长度的六个腿。具有基本上相同刚度的三对腿在基座和平台之间延伸并且相对于基座支撑平台。在每对腿中，相应的第一端以形成相应顶点的L形方式联接在一起。相对于顶点显示相应的第二端，期望在顶点形成大致109.5°的角度。顶点在平台上的圆圈上彼此等距地安装。成对的腿的相应的第二端安装在基座上的圆圈上的相应位置处。每对腿的轴线限定基本上垂直于基础平面的相应腿部平面。每个腿都有一个致动器，当被通电时，改变相应腿部的长度。所选腿中的致动器的协调通电在所有六个运动自由度中产生平台相对于基座的期望运动。

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