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1. 发明申请

US20120127445A1 ISOLATION SYSTEM FOR AN OPTICAL ELEMENT OF AN EXPOSURE APPARATUS 审中-公开
标题翻译：曝光装置的光学元件隔离系统
公开(公告)号：US20120127445A1
公开(公告)日：2012-05-24
申请号：US12949130
申请日：2010-11-18
申请人： Akimitsu Ebihara , Yi-Ping Hsin , Kunitomo Fukai , Hideyuki Hashimoto , Bausan Yuan
发明人： Akimitsu Ebihara , Yi-Ping Hsin , Kunitomo Fukai , Hideyuki Hashimoto , Bausan Yuan
IPC分类号： G03F7/20 , G03B27/54 , G02B7/00
CPC分类号： G03F7/709 , G02B27/646 , G03F7/70258
摘要： An optical isolation assembly (30) for reducing the transmission of vibration from an optical barrel (25) to an optical element assembly (28) includes an optical mover assembly (256), a first measurement system (258), a second measurement system (260), and a control system (24). The optical mover assembly (256) moves, positions and supports the optical element assembly (28) relative to the optical barrel (25). The first measurement system (258) generates one or more first measurement signals that relate to the relative position between the optical element assembly (28) and the optical barrel (25). The second measurement system (260) generates one or more second measurement signals that relate to the absolute movement of the optical element assembly (28) along the first axis. The control system (24) controls the optical mover assembly (256) utilizing the first measurement signals and the second measurement signals.
摘要翻译：用于减少从光学镜筒（25）到光学元件组件（28）的振动传播的光学隔离组件（30）包括光学移动器组件（256），第一测量系统（258），第二测量系统 260）和控制系统（24）。光学移动器组件（256）相对于光学镜筒（25）移动，定位和支撑光学元件组件（28）。第一测量系统（258）产生与光学元件组件（28）和光学镜筒（25）之间的相对位置相关的一个或多个第一测量信号。第二测量系统（260）产生与光学元件组件（28）沿着第一轴线的绝对运动有关的一个或多个第二测量信号。控制系统（24）利用第一测量信号和第二测量信号来控制光学移动器组件（256）。

2. 发明申请

US20070284502A1 Hexapod kinematic mountings for optical elements, and optical systems comprising same 审中-公开
标题翻译：用于光学元件的六足运动学安装件，以及包括该元件的光学系统
公开(公告)号：US20070284502A1
公开(公告)日：2007-12-13
申请号：US11644467
申请日：2006-12-21
申请人： Yi-Ping Hsin , Hideyuki Hashimoto , Jin Nishikawa , Scott Coakley , Kunitomo Fukai , Wen-Hou Ma , Bausan Yuan
发明人： Yi-Ping Hsin , Hideyuki Hashimoto , Jin Nishikawa , Scott Coakley , Kunitomo Fukai , Wen-Hou Ma , Bausan Yuan
IPC分类号： A47G1/24
CPC分类号： G02B7/005
摘要： “Hexapod” mountings are disclosed for use with optical elements. An exemplary mounting includes a base, a platform that is movable relative to the base, and six legs having nominally identical length. Three pairs of legs, having substantially equal stiffness, extend between the base and platform and support the platform relative to the base. In each pair of legs, respective first ends are coupled together in a Λ-shaped manner forming a respective apex. Respective second ends are splayed relative to the apex, desirably forming an angle of substantially 109.5° at the apex. The apices are mounted equidistantly from each other on a circle on the platform. The respective second ends of the pairs of legs are mounted at respective locations on a circle on the base. The axes of each pair of legs define a respective leg plane substantially perpendicular to the base plane. Each leg has an actuator that, when energized, changes a length of the respective leg. Coordinated energization of the actuators in selected legs produces a desired movement of the platform relative to the base in all six degrees of freedom of motion.
摘要翻译： “六足”安装件被公开用于光学元件。示例性的安装包括底座，相对于底座可移动的平台以及具有标称相同长度的六个腿。具有基本上相同刚度的三对腿在基座和平台之间延伸并且相对于基座支撑平台。在每对腿中，相应的第一端以形成相应顶点的L形方式联接在一起。相对于顶点显示相应的第二端，期望在顶点形成大致109.5°的角度。顶点在平台上的圆圈上彼此等距地安装。成对的腿的相应的第二端安装在基座上的圆圈上的相应位置处。每对腿的轴线限定基本上垂直于基础平面的相应腿部平面。每个腿都有一个致动器，当被通电时，改变相应腿部的长度。所选腿中的致动器的协调通电在所有六个运动自由度中产生平台相对于基座的期望运动。

3. 发明授权

US07583361B2 System for controlling a dual mover assembly for an exposure apparatus 有权
标题翻译：用于控制用于曝光装置的双推动器组件的系统
公开(公告)号：US07583361B2
公开(公告)日：2009-09-01
申请号：US11369493
申请日：2006-03-07
申请人： Yi-Ping Hsin , Hideyuki Hashimoto , Jin Nishikawa , Bausan Yuan , Douglas C. Watson
发明人： Yi-Ping Hsin , Hideyuki Hashimoto , Jin Nishikawa , Bausan Yuan , Douglas C. Watson
IPC分类号： G03B27/58
CPC分类号： G03F7/70725
摘要： A precision assembly (210) for positioning a device (226) includes a stage (260) that retains the device (226), a dual mover assembly (228) that moves the stage (260), and the device (226) along a movement axis (266), a measurement system (222) and a control system (224). The dual mover assembly (228) includes a first mover (262) that moves the stage (260) along the movement axis (266) and a second mover (264) that moves the device (226) along the movement axis (266). The second mover (264) is rigidly coupled to the first mover (262) so that movement of the first mover (262) results in movement of the second mover (264). Further, the total output of the dual mover assembly (228) along the movement axis (266) is equal to the sum of the movement of the first mover (262) and the movement of the second mover (264). The measurement system (222) measures a movement position along the movement axis (266). The control system (224) controls the dual mover assembly (228) utilizing the movement position. The control system (224) is designed to effectively decouple the control of the first mover (262) from the control of the second mover (264). Further, the control system (224) includes a quantization feedforward loop.
摘要翻译：用于定位设备（226）的精密组件（210）包括保持所述设备（226）的平台（260），使所述平台（260）移动的所述双推进器组件（228），以及沿着运动轴（266），测量系统（222）和控制系统（224）。双推动器组件（228）包括沿着移动轴线（266）移动平台（260）的第一移动器（262）和沿着移动轴线（266）移动设备（226）的第二移动器（264）。第二移动器（264）刚性地联接到第一移动器（262），使得第一移动器（262）的运动导致第二移动器（264）的运动。此外，沿着移动轴线（266）的双推动器组件（228）的总输出等于第一移动器（262）与第二移动器（264）的运动的总和。测量系统（222）测量沿着移动轴线（266）的移动位置。控制系统（224）利用移动位置控制双推动器组件（228）。控制系统（224）被设计成有效地将第一移动器（262）的控制与第二移动器（264）的控制分离。此外，控制系统（224）包括量化前馈回路。

4. 发明授权

US07989756B2 Active-isolation mounts for optical elements 有权
标题翻译：用于光学元件的主动隔离支架
公开(公告)号：US07989756B2
公开(公告)日：2011-08-02
申请号：US12262115
申请日：2008-10-30
申请人： Shiang-Lung Koo , Yi-Ping Hsin , Hideyuki Hashimoto , Bausan Yuan , Pai-Hsueh Yang
发明人： Shiang-Lung Koo , Yi-Ping Hsin , Hideyuki Hashimoto , Bausan Yuan , Pai-Hsueh Yang
IPC分类号： G02B7/00
CPC分类号： G02B27/646 , G03F7/70825 , G03F7/709
摘要： Disclosed are, inter alia, optical components that include an optical element (e.g., mirror) and at least three active-isolation mounts mounting the optical element to a frame (e.g., optical barrel or optical frame). An active-isolation mount has a non-contacting actuator connecting a respective location on the optical element to the frame and provides movability of the respective location relative to the frame in at least one direction. At least one displacement sensor is associated with each respective location on the optical element. The displacement sensors are sensitive to displacements of the respective locations in at least one respective direction and reference the displacements to an absolute reference. The actuators and sensors are connected to a servo control loop to provide feedback control.
摘要翻译：特别地，公开了包括光学元件（例如，反射镜）和将光学元件安装到框架（例如，光学镜筒或光学框架）的至少三个主动隔离安装件的光学部件。主动隔离安装件具有将光学元件上的相应位置连接到框架的非接触致动器，并且在至少一个方向上提供相对于框架的相应位置的可移动性。至少一个位移传感器与光学元件上的每个相应位置相关联。位移传感器对至少一个相应方向上各个位置的位移敏感，并将位移引用为绝对参考。执行器和传感器连接到伺服控制回路以提供反馈控制。

5. 发明申请

US20070211237A1 System for controlling a dual mover assembly for an exposure apparatus 有权
标题翻译：用于控制用于曝光装置的双推动器组件的系统
公开(公告)号：US20070211237A1
公开(公告)日：2007-09-13
申请号：US11369493
申请日：2006-03-07
申请人： Yi-Ping Hsin , Hideyuki Hashimoto , Jin Nishikawa , Bausan Yuan , Douglas Watson
发明人： Yi-Ping Hsin , Hideyuki Hashimoto , Jin Nishikawa , Bausan Yuan , Douglas Watson
IPC分类号： G03B27/58
CPC分类号： G03F7/70725
摘要： A precision assembly (210) for positioning a device (226) includes a stage (260) that retains the device (226), a dual mover assembly (228) that moves the stage (260), and the device (226) along a movement axis (266), a measurement system (222) and a control system (224). The dual mover assembly (228) includes a first mover (262) that moves the stage (260) along the movement axis (266) and a second mover (264) that moves the device (226) along the movement axis (266). The second mover (264) is rigidly coupled to the first mover (262) so that movement of the first mover (262) results in movement of the second mover (264). Further, the total output of the dual mover assembly (228) along the movement axis (266) is equal to the sum of the movement of the first mover (262) and the movement of the second mover (264). The measurement system (222) measures a movement position along the movement axis (266). The control system (224) controls the dual mover assembly (228) utilizing the movement position. The control system (224) is designed to effectively decouple the control of the first mover (262) from the control of the second mover (264). Further, the control system (224) includes a quantization feedforward loop.
摘要翻译：用于定位设备（226）的精密组件（210）包括保持所述设备（226）的平台（260），使所述平台（260）移动的所述双推进器组件（228），以及沿着运动轴（266），测量系统（222）和控制系统（224）。双推动器组件（228）包括沿着移动轴线（266）移动平台（260）的第一移动器（262）和沿着移动轴线（266）移动设备（226）的第二移动器（264）。第二移动器（264）刚性地联接到第一移动器（262），使得第一移动器（262）的运动导致第二移动器（264）的运动。此外，沿着移动轴线（266）的双推动器组件（228）的总输出等于第一移动器（262）与第二移动器（264）的运动的总和。测量系统（222）测量沿着移动轴线（266）的移动位置。控制系统（224）利用移动位置控制双推动器组件（228）。控制系统（224）被设计成有效地将第一移动器（262）的控制与第二移动器（264）的控制分离。此外，控制系统（224）包括量化前馈回路。

6. 发明申请

US20090237793A1 ACTIVE-ISOLATION MOUNTS FOR OPTICAL ELEMENTS 有权
标题翻译：光学元件的主动隔离装置
公开(公告)号：US20090237793A1
公开(公告)日：2009-09-24
申请号：US12262115
申请日：2008-10-30
申请人： Shiang-Lung Koo , Yi-Ping Hsin , Hideyuki Hashimoto , Bausan Yuan , Pai-Hsueh Yang
发明人： Shiang-Lung Koo , Yi-Ping Hsin , Hideyuki Hashimoto , Bausan Yuan , Pai-Hsueh Yang
IPC分类号： G02B27/64
CPC分类号： G02B27/646 , G03F7/70825 , G03F7/709
摘要： Disclosed are, inter alia, optical components that include an optical element (e.g., mirror) and at least three active-isolation mounts mounting the optical element to a frame (e.g., optical barrel or optical frame). An active-isolation mount has a non-contacting actuator connecting a respective location on the optical element to the frame and provides movability of the respective location relative to the frame in at least one direction. At least one displacement sensor is associated with each respective location on the optical element. The displacement sensors are sensitive to displacements of the respective locations in at least one respective direction and reference the displacements to an absolute reference. The actuators and sensors are connected to a servo control loop to provide feedback control.
摘要翻译：特别地，公开了包括光学元件（例如，反射镜）和将光学元件安装到框架（例如，光学镜筒或光学框架）的至少三个主动隔离安装件的光学部件。主动隔离安装件具有将光学元件上的相应位置连接到框架的非接触式致动器，并且在至少一个方向上提供相对于框架的相应位置的可移动性。至少一个位移传感器与光学元件上的每个相应位置相关联。位移传感器对至少一个相应方向上各个位置的位移敏感，并将位移引用为绝对参考。执行器和传感器连接到伺服控制回路以提供反馈控制。

7. 发明授权

US08767172B2 Projection optical device and exposure apparatus 有权
标题翻译：投影光学装置和曝光装置
公开(公告)号：US08767172B2
公开(公告)日：2014-07-01
申请号：US12926159
申请日：2010-10-28
申请人： Akimitsu Ebihara , Martin E. Lee , Bausan Yuan
发明人： Akimitsu Ebihara , Martin E. Lee , Bausan Yuan
IPC分类号： G03B27/42
CPC分类号： G03F7/709 , G03F7/70808 , G03F7/70833 , G03F7/70891
摘要： A projection optical device includes a projection optical system which projects an image of a pattern, a support member attached to the projection optical system, and a plurality of coupling members connected to the support member. The coupling members suspend and support the projection optical system through the support member from an upper direction of the support member. The projection optical device can include a frame to which one end of each of the coupling members is attached, such that the projection optical system hangs from the frame via the support member and the coupling members. A projection optical device also can include a liquid supply which supplies a temperature-controlled liquid to a side surface of a projection optical system utilizing gravity to cause the temperature-controlled liquid to flow along the side surface of the projection optical system.
摘要翻译：投影光学装置包括投影图案的投影光学系统，附接到投影光学系统的支撑构件和连接到支撑构件的多个联接构件。联接构件从支撑构件的上方通过支撑构件悬挂并支撑投影光学系统。投影光学装置可以包括框架，每个联接构件的一端被附接到框架，使得投影光学系统经由支撑构件和联接构件从框架悬挂。投影光学装置还可以包括液体供应源，其利用重力将温度控制的液体供应到投影光学系统的侧表面，以使温度控制的液体沿着投影光学系统的侧表面流动。

8. 发明申请

US20110043781A1 Projection optical device and exposure apparatus 有权
标题翻译：投影光学装置和曝光装置
公开(公告)号：US20110043781A1
公开(公告)日：2011-02-24
申请号：US12926159
申请日：2010-10-28
申请人： Akimitsu Ebihara , Martin E. Lee , Bausan Yuan
发明人： Akimitsu Ebihara , Martin E. Lee , Bausan Yuan
IPC分类号： G03B27/54 , G03B27/58
CPC分类号： G03F7/709 , G03F7/70808 , G03F7/70833 , G03F7/70891
摘要： A projection optical device includes a projection optical system which projects an image of a pattern, a support member attached to the projection optical system, and a plurality of coupling members connected to the support member. The coupling members suspend and support the projection optical system through the support member from an upper direction of the support member. The projection optical device can include a frame to which one end of each of the coupling members is attached, such that the projection optical system hangs from the frame via the support member and the coupling members. A projection optical device also can include a liquid supply which supplies a temperature-controlled liquid to a side surface of a projection optical system utilizing gravity to cause the temperature-controlled liquid to flow along the side surface of the projection optical system.
摘要翻译：投影光学装置包括投影图案的投影光学系统，附接到投影光学系统的支撑构件和连接到支撑构件的多个联接构件。联接构件从支撑构件的上方通过支撑构件悬挂并支撑投影光学系统。投影光学装置可以包括框架，每个联接构件的一端被附接到框架，使得投影光学系统经由支撑构件和联接构件从框架悬挂。投影光学装置还可以包括液体供应源，其利用重力将温度控制的液体供应到投影光学系统的侧表面，以使温度控制的液体沿着投影光学系统的侧表面流动。

9. 发明申请

US20070030462A1 Low spring constant, pneumatic suspension with vacuum chamber, air bearing, active force compensation, and sectioned vacuum chambers 审中-公开
标题翻译：低弹簧常数，带真空室的气动悬架，空气轴承，主动力补偿和分段真空室
公开(公告)号：US20070030462A1
公开(公告)日：2007-02-08
申请号：US11197576
申请日：2005-08-03
申请人： Bausan Yuan , Martin Lee , Alton Phillips , Ping-Wei Chang , Akimitsu Ebihara
发明人： Bausan Yuan , Martin Lee , Alton Phillips , Ping-Wei Chang , Akimitsu Ebihara
IPC分类号： F16M1/00 , G03B27/00
CPC分类号： G02B7/005
摘要： Embodiments of the present invention are directed to an apparatus for providing a low spring constant, pneumatic suspension using vacuum for the lens in a projection system. In one embodiment, a pneumatic suspension system for a load comprises a frame; and a body movably disposed in the frame and spaced from a side wall of the frame by a gap to define a chamber in the frame above the body, the body being configured to be connected to the load. The frame includes an outlet to draw a gas from the chamber to lower the pressure in the chamber with respect to an ambient pressure outside the frame. An air bearing is formed in the gap between the body and the side wall of the frame to provide non-contact between the body and the frame. The pressure in the chamber is sufficiently lower than the ambient pressure to produce a lift force to lift the body and the load connected thereto with respect to the frame.
摘要翻译：本发明的实施例涉及一种用于在投影系统中为透镜提供使用真空的低弹簧常数气动悬架的装置。在一个实施例中，用于负载的气动悬挂系统包括框架; 以及主体，其可移动地设置在所述框架中并且通过间隙与所述框架的侧壁间隔开以在所述主体中的所述框架中限定室，所述主体被配置为连接到所述负载。该框架包括从腔室抽出气体的出口，以相对于框架外部的环境压力降低腔室中的压力。空气轴承形成在主体和框架的侧壁之间的间隙中，以在主体和框架之间提供非接触。室内的压力足够低于环境压力，以产生升高力以提升主体和相对于框架连接到其上的负载。

10. 发明授权

US08619361B2 Direct derivative feedforward vibration compensation system 有权
标题翻译：直接导数前馈振动补偿系统
公开(公告)号：US08619361B2
公开(公告)日：2013-12-31
申请号：US12750713
申请日：2010-03-31
申请人： Yi-Ping Hsin , Susumu Isago , Kazuo Masaki , Bausan Yuan
发明人： Yi-Ping Hsin , Susumu Isago , Kazuo Masaki , Bausan Yuan
IPC分类号： G02B27/64 , A61N5/00 , G03F7/20 , B82Y10/00
CPC分类号： G03F7/70358 , B82Y10/00 , G02B27/646 , G03F7/709
摘要： Methods and apparatus for providing vibration compensation using position measurements are disclosed. According to one aspect of the present invention, a method of compensating for vibrations of an object includes obtaining a plurality of position measurements associated with the object. The method also includes processing the plurality of position measurements to determine a derivative acceleration, and determining a compensatory force to counteract the vibrations of the object. Determining the compensatory force includes using the derivative acceleration. Finally, the method includes applying the compensatory force to the object.
摘要翻译：公开了使用位置测量提供振动补偿的方法和装置。根据本发明的一个方面，补偿对象的振动的方法包括获得与对象相关联的多个位置测量。该方法还包括处理多个位置测量以确定导数加速度，以及确定补偿力以抵消物体的振动。确定补偿力包括使用导数加速度。最后，该方法包括将补偿力应用于物体。

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