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1. 发明申请

US20060243905A1 Imaging method 有权
公开(公告)号：US20060243905A1
公开(公告)日：2006-11-02
申请号：US11411154
申请日：2006-04-26
申请人： Kohei Yamaguchi , Kazuo Aoki , Kenji Obara
发明人： Kohei Yamaguchi , Kazuo Aoki , Kenji Obara
IPC分类号： G01N23/00
CPC分类号： G01N23/2251
摘要： A method which, while displacing the field-of-view, allows the image in a target area to be acquired without degradations such as out-of-focus of the image. Plural pieces of images are acquired before and after a target area while displacing the field-of-view. Next, these images are grouped into groups each of which includes several pieces of images, and integrated images on each group basis are created. Moreover, a relational expression is calculated which holds between image displacement quantity calculated by comparing the integrated images with each other and the number of the photographed pieces of images. Furthermore, image displacement quantities between the acquired plural pieces of images are calculated from this relational expression. Finally, these images are corrected by the amounts of these displacement quantities, then being integrated. This process allows reconfiguration of the image in the target area.

2. 发明申请

US20090202166A1 SCANNING MICROSCOPE 有权
标题翻译：扫描显微镜
公开(公告)号：US20090202166A1
公开(公告)日：2009-08-13
申请号：US12420263
申请日：2009-04-08
申请人： Kohei YAMAGUCHI , Kazuo Aoki , Kenji Obara
发明人： Kohei YAMAGUCHI , Kazuo Aoki , Kenji Obara
IPC分类号： G06K9/40
CPC分类号： G01N23/2251
摘要： A method which, while displacing the field-of-view, allows the image in a target area to be acquired without degradations such as out-of-focus of the image. Plural pieces of images are acquired before and after a target area while displacing the field-of-view. Next, these images are grouped into groups each of which includes several pieces of images, and integrated images on each group basis are created. Moreover, a relational expression is calculated which holds between image displacement quantity calculated by comparing the integrated images with each other and the number of the photographed pieces of images. Furthermore, image displacement quantities between the acquired plural pieces of images are calculated from this relational expression. Finally, these images are corrected by the amounts of these displacement quantities, then being integrated. This process allows reconfiguration of the image in the target area.
摘要翻译：在移动视野的同时允许获取目标区域中的图像而不降低诸如图像的失焦的方法。在移动视野之前，在目标区域之前和之后获取多张图像。接下来，将这些图像分组成各自包括几个图像的组，并且创建基于每个组的集成图像。此外，计算出通过比较集成图像计算的图像位移量与拍摄的图像数量之间的关系表达式。此外，从该关系表达式计算所获取的多张图像之间的图像位移量。最后，这些图像被这些位移量的量校正，然后被整合。该过程允许重新配置目标区域中的图像。

3. 发明授权

US07526143B2 Imaging method 有权
标题翻译：成像方法
公开(公告)号：US07526143B2
公开(公告)日：2009-04-28
申请号：US11411154
申请日：2006-04-26
申请人： Kohei Yamaguchi , Kazuo Aoki , Kenji Obara
发明人： Kohei Yamaguchi , Kazuo Aoki , Kenji Obara
IPC分类号： G06K9/36
CPC分类号： G01N23/2251
摘要： A method which, while displacing the field-of-view, allows the image in a target area to be acquired without degradations such as out-of-focus of the image. Plural pieces of images are acquired before and after a target area while displacing the field-of-view. Next, these images are grouped into groups each of which includes several pieces of images, and integrated images on each group basis are created. Moreover, a relational expression is calculated which holds between image displacement quantity calculated by comparing the integrated images with each other and the number of the photographed pieces of images. Furthermore, image displacement quantities between the acquired plural pieces of images are calculated from this relational expression. Finally, these images are corrected by the amounts of these displacement quantities, then being integrated. This process allows reconfiguration of the image in the target area.
摘要翻译：在移动视野的同时允许获取目标区域中的图像而不降低诸如图像的失焦的方法。在移动视野之前，在目标区域之前和之后获取多张图像。接下来，将这些图像分组成各自包括几个图像的组，并且创建基于每个组的集成图像。此外，计算出通过比较集成图像计算的图像位移量与拍摄的图像数量之间的关系表达式。此外，从该关系式计算所获取的多张图像之间的图像位移量。最后，这些图像被这些位移量的量校正，然后被整合。该过程允许重新配置目标区域中的图像。

4. 发明授权

US07881558B2 Scanning microscope 有权
标题翻译：扫描显微镜
公开(公告)号：US07881558B2
公开(公告)日：2011-02-01
申请号：US12420263
申请日：2009-04-08
申请人： Kohei Yamaguchi , Kazuo Aoki , Kenji Obara
发明人： Kohei Yamaguchi , Kazuo Aoki , Kenji Obara
IPC分类号： G06K9/36
CPC分类号： G01N23/2251
摘要： A method which, while displacing the field-of-view, allows the image in a target area to be acquired without degradations such as out-of-focus of the image. Plural pieces of images are acquired before and after a target area while displacing the field-of-view. Next, these images are grouped into groups each of which includes several pieces of images, and integrated images on each group basis are created. Moreover, a relational expression is calculated which holds between image displacement quantity calculated by comparing the integrated images with each other and the number of the photographed pieces of images. Furthermore, image displacement quantities between the acquired plural pieces of images are calculated from this relational expression. Finally, these images are corrected by the amounts of these displacement quantities, then being integrated. This process allows reconfiguration of the image in the target area.
摘要翻译：在移动视野的同时允许获取目标区域中的图像而不降低诸如图像的失焦的方法。在移动视野之前，在目标区域之前和之后获取多张图像。接下来，将这些图像分组成各自包括几个图像的组，并且创建基于每个组的集成图像。此外，计算出通过比较集成图像计算的图像位移量与拍摄的图像数量之间的关系表达式。此外，从该关系表达式计算所获取的多张图像之间的图像位移量。最后，这些图像被这些位移量的量校正，然后被整合。该过程允许重新配置目标区域中的图像。

5. 发明授权

US07925367B2 Defect review and classification system 有权
标题翻译：缺陷审查和分类制度
公开(公告)号：US07925367B2
公开(公告)日：2011-04-12
申请号：US12573463
申请日：2009-10-05
申请人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
发明人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32218 , Y02P90/22
摘要： The invention proposes a system that interrupts a processing associated with an ADC having low priority when an ADC processing cannot catch up with ADR by an ADC alone that is not under execution but uses an ADC for an ADR having high priority. To preferentially execute ADR/ADC having high priority, the invention employs an algorithm for serially selecting ADR/ADC in the order of higher processing capacity (in the order of greater numerical values in the expression by a DPH unit) from among ADR/ADCs that have the lowest priority, no matter whether the ADR/DC is now under execution or not.
摘要翻译：本发明提出了一种系统，当ADC处理不能通过一个ADC不能跟踪ADR而不能执行但对具有高优先级的ADR使用ADC时，中断与具有低优先级的ADC相关联的处理的系统。为了优先执行具有高优先级的ADR / ADC，本发明采用一种用于从ADR / ADC中的处理能力较高（按DPH单元的表达式中的较大数值的数量级）的顺序选择ADR / ADC的算法，优先级最低，无论ADR / DC是否在执行中。

6. 发明授权

US07593564B2 Method and apparatus for reviewing defect of subject to be inspected 有权
标题翻译：检查受检对象的缺陷的方法和装置
公开(公告)号：US07593564B2
公开(公告)日：2009-09-22
申请号：US11272897
申请日：2005-11-15
申请人： Kenji Obara , Kazuo Aoki
发明人： Kenji Obara , Kazuo Aoki
IPC分类号： G06K9/00
CPC分类号： G01N21/9501
摘要： Absolute coordinates designate position coordinates of a defect of a calibrating substrate, and inspection coordinates designate position coordinates of the defect of the calibrating substrate detected by an inspection apparatus. A deviation of the inspection coordinates with respect to the absolute coordinates is an error included in the inspection coordinates. When “nonrandom errors” are removed from the inspection coordinates, a “random error” is left in the inspection coordinates. The view size for defect search in a defect reviewing apparatus is set based on the random error. Further, a defect for fine alignment is selected based on the tendency of a detected value of the defect size of the calibrating substrate detected by the inspection apparatus.
摘要翻译：绝对坐标表示校准基板的缺陷的位置坐标，检查坐标表示由检查装置检测出的校准基板的缺陷的位置坐标。检查坐标相对于绝对坐标的偏差是检查坐标中包含的误差。当从检查坐标中移除“非随机错误”时，检查坐标中会留下“随机误差”。基于随机误差设定缺陷检查装置中缺陷检索的视图尺寸。此外，基于由检查装置检测到的校准基板的缺陷尺寸的检测值的趋势，选择精细对准的缺陷。

7. 发明申请

US20070274609A1 Image Search Apparatus, Image Search System, Image Search Method, and Program for Executing Image Search Method 审中-公开
标题翻译：图像搜索装置，图像搜索系统，图像搜索方法和执行图像搜索方法的程序
公开(公告)号：US20070274609A1
公开(公告)日：2007-11-29
申请号：US11751891
申请日：2007-05-22
申请人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
发明人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
IPC分类号： G06K9/54 , G06K9/00
CPC分类号： G06T7/001 , G01R31/307 , G06F16/58 , G06T2207/10056 , G06T2207/30148
摘要： An object of this invention is to realize, in a semiconductor defect review apparatus, a function of easily searching for an image similar to a reference image at high speed. To this end, an embodiment of this invention has a function of saving, as text information, pieces of information accompanying an image such as acquisition date and time, an acquisition condition, the result of analyzing a piece of information other than the image, and a user's comment, in association with the image. The embodiment is configured to narrow down similar image candidates by a keyword search using the pieces of accompanying information, calculate similarity of each image to a search reference image on the basis of the features of the image, and output search results in descending order of similarity.
摘要翻译：本发明的一个目的是在半导体缺陷检查装置中实现一种快速地搜索类似于参考图像的图像的功能。为此，本发明的实施例具有作为文本信息保存伴随诸如获取日期和时间的图像的信息，获取条件，分析图像之外的一条信息的结果的功能，以及用户的评论，与图像相关联。该实施例被配置为通过使用附带信息的关键字搜索来缩小相似图像候选，基于图像的特征来计算每个图像与搜索参考图像的相似度，并以相似度的降序输出搜索结果。

8. 发明申请

US20080004742A1 Automatic defect review and classification system 有权
标题翻译：自动缺陷审查和分类系统
公开(公告)号：US20080004742A1
公开(公告)日：2008-01-03
申请号：US11892583
申请日：2007-08-24
申请人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
发明人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32218 , Y02P90/22
摘要： The invention proposes a system that interrupts a processing associated with an ADC having low priority when an ADC processing cannot catch up with ADR by an ADC alone that is not under execution but uses an ADC for an ADR having high priority. To preferentially execute ADR/ADC having high priority, the invention employs an algorithm for serially selecting ADR/ADC in the order of higher processing capacity (in the order of greater numerical values in the expression by a DPH unit) from among ADR/ADCs that have the lowest priority, no matter whether the ADR/DC is now under execution or not.
摘要翻译：本发明提出了一种系统，当ADC处理不能通过一个ADC不能跟踪ADR而不能执行但对具有高优先级的ADR使用ADC时，中断与具有低优先级的ADC相关联的处理的系统。为了优先执行具有高优先级的ADR / ADC，本发明采用一种用于从ADR / ADC中的处理能力较高（按DPH单元的表达式中的较大数值的数量级）的顺序选择ADR / ADC的算法，优先级最低，无论ADR / DC是否在执行中。

9. 发明申请

US20100021047A1 AUTOMATIC DEFECT REVIEW AND CLASSIFICATION SYSTEM 有权
标题翻译：自动缺陷审查和分类系统
公开(公告)号：US20100021047A1
公开(公告)日：2010-01-28
申请号：US12573463
申请日：2009-10-05
申请人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
发明人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
IPC分类号： G06K9/00
CPC分类号： G05B19/41875 , G05B2219/32218 , Y02P90/22
摘要： The invention proposes a system that interrupts a processing associated with an ADC having low priority when an ADC processing cannot catch up with ADR by an ADC alone that is not under execution but uses an ADC for an ADR having high priority. To preferentially execute ADR/ADC having high priority, the invention employs an algorithm for serially selecting ADR/ADC in the order of higher processing capacity (in the order of greater numerical values in the expression by a DPH unit) from among ADR/ADCs that have the lowest priority, no matter whether the ADR/DC is now under execution or not.
摘要翻译：本发明提出了一种系统，当ADC处理不能通过一个ADC不能跟踪ADR而不能执行但对具有高优先级的ADR使用ADC时，中断与具有低优先级的ADC相关联的处理的系统。为了优先执行具有高优先级的ADR / ADC，本发明采用一种用于从ADR / ADC中的处理能力较高（按DPH单元的表达式中的较大数值的数量级）的顺序选择ADR / ADC的算法，优先级最低，无论ADR / DC是否在执行中。

10. 发明授权

US07584012B2 Automatic defect review and classification system 有权
标题翻译：自动缺陷审查和分类系统
公开(公告)号：US07584012B2
公开(公告)日：2009-09-01
申请号：US11892583
申请日：2007-08-24
申请人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
发明人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
IPC分类号： G06F19/00 , G06K9/00
CPC分类号： G05B19/41875 , G05B2219/32218 , Y02P90/22
摘要： An automatic defect review and classification system including at least one automatic defect review apparatus for specifically observing defect portions of a sample and at least one automatic defect classification apparatus for automatically classifying the defects, the system further comprising a device which outputs a status for combination of the automatic review apparatus and the automatic defect classification apparatus.
摘要翻译：一种自动缺陷检查和分类系统，包括至少一个用于特异性地观察样本的缺陷部分的自动缺陷检查装置和用于自动分类缺陷的至少一个自动缺陷分类装置，所述系统还包括输出状态用于组合的装置自动检查装置和自动缺陷分类装置。

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