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1. 发明授权

US09342878B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US09342878B2
公开(公告)日：2016-05-17
申请号：US13991948
申请日：2011-10-24
申请人： Kohei Yamaguchi , Takehiro Hirai , Fumihiko Fukunaga
发明人： Kohei Yamaguchi , Takehiro Hirai , Fumihiko Fukunaga
IPC分类号： H04N9/47 , H04N7/18 , G06T7/00 , H01J37/22 , H01J37/28
CPC分类号： G06T7/0002 , G06T7/001 , G06T2200/24 , G06T2207/30148 , H01J37/222 , H01J37/28 , H01J2237/221 , H01J2237/24578 , H01J2237/24592 , H01J2237/2817
摘要： For inspection of a pattern such as a semiconductor device, it is useful to selectively detect a defect on the specific pattern in order to estimate the cause of the occurrence of the defect. An object of the invention is to provide a charged particle beam apparatus capable of setting, on the basis of the shape of the pattern on a sample, a region to be inspected. The invention is characterized in that the contour of the pattern on the sample is extracted using a template image obtained on the basis of an image of the sample, the region to be inspected is set on the basis of the contour of the pattern, a defect candidate is detected by comparing the image to be inspected with a comparative image, and the sample is inspected using a positional relationship between the region to be inspected and the defect candidate included in the region to be inspected.
摘要翻译：为了检查诸如半导体器件的图案，有选择地检测特定图案上的缺陷以估计缺陷发生的原因。本发明的目的是提供一种能够根据样品上的图案的形状来设定要检查的区域的带电粒子束装置。本发明的特征在于，使用基于样本的图像获得的模板图像来提取样本上的图案的轮廓，基于图案的轮廓设置待检查的区域，缺陷通过将待检查的图像与比较图像进行比较来检测候选物，并且使用待检查区域和包括在待检查区域中的缺陷候选物之间的位置关系来检查样品。

2. 发明申请

US20130247117A1 COMMUNICATION DEVICE 有权
公开(公告)号：US20130247117A1
公开(公告)日：2013-09-19
申请号：US13989252
申请日：2011-11-25
申请人： Kazunori Yamada , Kohei Yamaguchi , Shigehiro Iida , Mizuho Sakakibara , Toshiaki Ohnishi , Masaru Yamaoka , Mitsuaki Oshima , Tomoaki Ohira , Michihiro Matsumoto , Tsutomu Mukai , Yosuke Matsushita , Shohji Ohtsubo , Hironori Nakae
发明人： Kazunori Yamada , Kohei Yamaguchi , Shigehiro Iida , Mizuho Sakakibara , Toshiaki Ohnishi , Masaru Yamaoka , Mitsuaki Oshima , Tomoaki Ohira , Michihiro Matsumoto , Tsutomu Mukai , Yosuke Matsushita , Shohji Ohtsubo , Hironori Nakae
IPC分类号： G08C17/02
CPC分类号： G08C23/04 , G08C17/02 , G08C2201/32 , G08C2201/70 , G08C2201/91 , G08C2201/93 , H04B5/0031 , H04B5/0062 , H04B5/02 , H04L67/148 , H04L67/34 , H04W4/02 , H04W4/80 , H04W12/02 , H04W12/06
摘要： A mobile device includes a position sensing unit, a remote control information obtainment unit, and a storage unit. Position information obtained by the position sensing unit is stored in the storage unit in association with remote control information. The mobile device further includes a directional space obtainment unit and an apparatus specification unit. The mobile device recognizes a direction pointed by a user using the mobile device, and enables operation of a terminal apparatus existing in the pointing direction.

3. 发明授权

US08108172B2 Defect review apparatus and method of reviewing defects 有权
标题翻译：缺陷检查设备和检查缺陷的方法
公开(公告)号：US08108172B2
公开(公告)日：2012-01-31
申请号：US12953170
申请日：2010-11-23
申请人： Takehiro Hirai , Kenji Obara , Kohei Yamaguchi
发明人： Takehiro Hirai , Kenji Obara , Kohei Yamaguchi
IPC分类号： G01C17/38 , G01N21/86
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/2817 , H01J2237/2826
摘要： A review apparatus for reviewing a specimen by moving the specimen to pre-calculated coordinate includes: a function to measure a deviation amount between the pre-calculated coordinates and coordinates of an actual position of the specimen; a function to optimize a coordinate correcting expression to minimize the measured deviation amount; and a function to determine that the deviation amounts have converged. When the deviation amounts have converged, the measurement for the coordinate-correcting-expression optimization is terminated, and a field of view necessary for the specimen to be within the field of view is set according to a convergence value of the calculated deviation amount.
摘要翻译：用于通过将样本移动到预先计算的坐标来检查样本的检查装置包括：测量预先计算的坐标和样本的实际位置的坐标之间的偏差量的函数; 优化坐标校正表达式以最小化所测量的偏差量的函数; 以及确定偏差量已经收敛的函数。当偏差量已经收敛时，终止坐标校正表达式优化的测量，并且根据计算的偏差量的收敛值来设定样本在视场内所必需的视场。

4. 发明申请

US20090202166A1 SCANNING MICROSCOPE 有权
标题翻译：扫描显微镜
公开(公告)号：US20090202166A1
公开(公告)日：2009-08-13
申请号：US12420263
申请日：2009-04-08
申请人： Kohei YAMAGUCHI , Kazuo Aoki , Kenji Obara
发明人： Kohei YAMAGUCHI , Kazuo Aoki , Kenji Obara
IPC分类号： G06K9/40
CPC分类号： G01N23/2251
摘要： A method which, while displacing the field-of-view, allows the image in a target area to be acquired without degradations such as out-of-focus of the image. Plural pieces of images are acquired before and after a target area while displacing the field-of-view. Next, these images are grouped into groups each of which includes several pieces of images, and integrated images on each group basis are created. Moreover, a relational expression is calculated which holds between image displacement quantity calculated by comparing the integrated images with each other and the number of the photographed pieces of images. Furthermore, image displacement quantities between the acquired plural pieces of images are calculated from this relational expression. Finally, these images are corrected by the amounts of these displacement quantities, then being integrated. This process allows reconfiguration of the image in the target area.
摘要翻译：在移动视野的同时允许获取目标区域中的图像而不降低诸如图像的失焦的方法。在移动视野之前，在目标区域之前和之后获取多张图像。接下来，将这些图像分组成各自包括几个图像的组，并且创建基于每个组的集成图像。此外，计算出通过比较集成图像计算的图像位移量与拍摄的图像数量之间的关系表达式。此外，从该关系表达式计算所获取的多张图像之间的图像位移量。最后，这些图像被这些位移量的量校正，然后被整合。该过程允许重新配置目标区域中的图像。

5. 发明申请

US20090183661A1 COMBUSTION DEVICE 审中-公开
标题翻译：燃烧装置
公开(公告)号：US20090183661A1
公开(公告)日：2009-07-23
申请号：US12355158
申请日：2009-01-16
申请人： Hideo FURUKAWA , Kenji YASUI , Takashi SHINDO , Masashi NAKASHIMA , Kohei YAMAGUCHI
发明人： Hideo FURUKAWA , Kenji YASUI , Takashi SHINDO , Masashi NAKASHIMA , Kohei YAMAGUCHI
IPC分类号： F23J15/02
CPC分类号： F23J15/02 , F23J2215/40 , F23J2219/10
摘要： [Object] To provide a combustion device capable of suppressing poisoning and deterioration of a CO oxidation catalyst due to adhesion of S (sulfur) to the CO oxidation catalyst, which is provided in the combustion device such as a boiler for the purpose of reducing and removing the CO in the combustion gas.[Solving Means] Provided is a combustion device including at least one can body which has a gas flow passage R allowing passage of a combustion gas G1 generated at a burner 16 and which heats a heat medium through heat exchange with the combustion gas G1 passing through the gas flow passage R, in which, in the gas flow passage R, a CO oxidation catalyst C1 is arranged in a region corresponding to a temperature range at the time of passing of the combustion gas G1 where adhesion of S (sulfur) contained in the combustion gas G1 to the CO oxidation catalyst C1 is suppressed.
摘要翻译：本发明提供一种燃烧装置，其能够抑制由于S（硫）与CO氧化催化剂的粘附而引起的CO氧化催化剂的中毒和劣化，CO氧化催化剂设置在锅炉等燃烧装置中，为了还原和去除燃烧气体中的CO。 [解决方案]提供一种燃烧装置，其包括至少一个罐体，该罐体具有允许在燃烧器16处产生的燃烧气体G1通过的气体流路R，并且通过与通过的燃烧气体G1进行热交换来加热热介质气体流路R在气体流路R中配置有CO氧化催化剂C1，其对应于通过燃烧气体G1时的温度范围的区域，其中S（硫）能够抑制向CO氧化催化剂C1的燃烧气体G1。

6. 发明申请

US20070170358A1 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20070170358A1
公开(公告)日：2007-07-26
申请号：US11655167
申请日：2007-01-19
申请人： Kohei Yamaguchi , Kenji Obara
发明人： Kohei Yamaguchi , Kenji Obara
IPC分类号： G21K7/00
CPC分类号： H01J37/28 , G02B21/365 , H01J37/222 , H01J37/244 , H01J2237/24475 , H01J2237/2448 , H01J2237/24495
摘要： There is provided an electron microscope which can clearly detect a microscopic unevenness in a sample. According to a scanning electron microscope, when luminance signals from one pair of backscattered electron detectors are given by L and R, and when a luminance signal from a scattered electron detector is given by S, an adjustment value Lc of L and an adjustment value Rc of R are calculated by using primary homogeneous expressions of L, R, and S.
摘要翻译：提供了可以清楚地检测样品中的微观不均匀性的电子显微镜。根据扫描电子显微镜，当来自一对背散射电子检测器的亮度信号由L和R给出时，当来自散射电子检测器的亮度信号由S给出时，L的调整值Lc和调整值Rc 的R是通过使用L，R和S的初级均匀表达式来计算的。

7. 发明授权

US07075077B2 Method of observing a specimen using a scanning electron microscope 有权
标题翻译：使用扫描电子显微镜观察样品的方法
公开(公告)号：US07075077B2
公开(公告)日：2006-07-11
申请号：US11020265
申请日：2004-12-27
申请人： Hirohito Okuda , Toshifumi Honda , Kazuo Aoki , Kohei Yamaguchi , Masashi Sakamoto
发明人： Hirohito Okuda , Toshifumi Honda , Kazuo Aoki , Kohei Yamaguchi , Masashi Sakamoto
IPC分类号： H01J37/21
CPC分类号： H01J37/21 , H01J37/28 , H01J2237/216 , H01J2237/2817
摘要： A method of observing a specimen using a scanning electron microscope, makes it possible to shorten the time required to perform automatic focusing at the time of semiconductor defect automatic review and improves the throughput in the processing in which the specimen is observed. In the above method, the specimen is imaged at a low resolution by the scanning electron microscope to obtain an image, an area for imaging the specimen at a high resolution is specified from the image acquired at the low resolution, the specimen is imaged at a high resolution by the scanning electron microscope to determine a focus position, a focal point of the scanning electron microscope is set to the determined focus position, and a high resolution image in the specified area is acquired in a state in which the focus position has been set to the determined focus position.
摘要翻译：使用扫描电子显微镜观察样本的方法可以缩短在半导体缺陷自动检查时进行自动聚焦所需的时间，并且提高了观察样本的处理中的通过量。在上述方法中，通过扫描电子显微镜以低分辨率对样本进行成像以获得图像，从以低分辨率获取的图像指定用于以高分辨率成像试样的区域，将样品在通过扫描电子显微镜的高分辨率来确定聚焦位置，将扫描电子显微镜的焦点设置为确定的聚焦位置，并且在聚焦位置已经被处理的状态下获取指定区域中的高分辨率图像设置为确定的焦点位置。

8. 发明授权

US09142122B2 Communication device for performing wireless communication with an external server based on information received via near field communication 有权
标题翻译：基于通过近场通信接收的信息与外部服务器进行无线通信的通信装置
公开(公告)号：US09142122B2
公开(公告)日：2015-09-22
申请号：US13820861
申请日：2011-11-25
申请人： Mitsuaki Oshima , Toshiaki Ohnishi , Masaru Yamaoka , Tomoaki Ohira , Michihiro Matsumoto , Tsutomu Mukai , Yosuke Matsushita , Shohji Ohtsubo , Hironori Nakae , Kazunori Yamada , Mizuho Sakakibara , Kohei Yamaguchi , Shigehiro Iida
发明人： Mitsuaki Oshima , Toshiaki Ohnishi , Masaru Yamaoka , Tomoaki Ohira , Michihiro Matsumoto , Tsutomu Mukai , Yosuke Matsushita , Shohji Ohtsubo , Hironori Nakae , Kazunori Yamada , Mizuho Sakakibara , Kohei Yamaguchi , Shigehiro Iida
IPC分类号： H04B5/00 , G08C17/02 , H04W12/02 , H04B5/02
CPC分类号： G08C23/04 , G08C17/02 , G08C2201/32 , G08C2201/70 , G08C2201/91 , G08C2201/93 , H04B5/0031 , H04B5/0062 , H04B5/02 , H04L67/148 , H04L67/34 , H04W4/02 , H04W4/80 , H04W12/02 , H04W12/06
摘要： A mobile device includes a position sensing unit, a remote control information obtainment unit, and a storage unit. Position information obtained by the position sensing unit is stored in the storage unit in association with remote control information. The mobile device further includes a directional space obtainment unit and an apparatus specification unit. The mobile device recognizes a direction pointed by a user using the mobile device, and enables operation of a terminal apparatus existing in the pointing direction.
摘要翻译：移动设备包括位置感测单元，遥控信息获取单元和存储单元。由位置检测单元获得的位置信息与遥控信息相关联地存储在存储单元中。移动设备还包括定向空间获取单元和设备指定单元。移动设备识别由用户使用移动设备指向的方向，并且能够使存在于指向方向上的终端设备的操作。

9. 发明申请

US20130265408A1 CHARGED PARTICLE BEAM APPARATUS 有权
标题翻译：充电颗粒光束装置
公开(公告)号：US20130265408A1
公开(公告)日：2013-10-10
申请号：US13991948
申请日：2011-10-24
申请人： Kohei Yamaguchi , Takehiro Hirai , Fumihiko Fukunaga
发明人： Kohei Yamaguchi , Takehiro Hirai , Fumihiko Fukunaga
IPC分类号： G06T7/00
CPC分类号： G06T7/0002 , G06T7/001 , G06T2200/24 , G06T2207/30148 , H01J37/222 , H01J37/28 , H01J2237/221 , H01J2237/24578 , H01J2237/24592 , H01J2237/2817
摘要： For inspection of a pattern such as a semiconductor device, it is useful to selectively detect a defect on the specific pattern in order to estimate the cause of the occurrence of the defect. An object of the invention is to provide a charged particle beam apparatus capable of setting, on the basis of the shape of the pattern on a sample, a region to be inspected. The invention is characterized in that the contour of the pattern on the sample is extracted using a template image obtained on the basis of an image of the sample, the region to be inspected is set on the basis of the contour of the pattern, a defect candidate is detected by comparing the image to be inspected with a comparative image, and the sample is inspected using a positional relationship between the region to be inspected and the defect candidate included in the region to be inspected.
摘要翻译：为了检查诸如半导体器件的图案，有选择地检测特定图案上的缺陷以估计缺陷发生的原因。本发明的目的是提供一种能够根据样品上的图案的形状来设定要检查的区域的带电粒子束装置。本发明的特征在于，使用基于样本的图像获得的模板图像来提取样本上的图案的轮廓，基于图案的轮廓设置待检查的区域，缺陷通过将待检查的图像与比较图像进行比较来检测候选物，并且使用待检查区域和包括在待检查区域中的缺陷候选物之间的位置关系来检查样品。

10. 发明授权

US08139847B2 Defect inspection tool and method of parameter tuning for defect inspection tool 有权
标题翻译：缺陷检查工具缺陷检查工具和参数调整方法
公开(公告)号：US08139847B2
公开(公告)日：2012-03-20
申请号：US12370784
申请日：2009-02-13
申请人： Kohei Yamaguchi , Kenji Obara , Takehiro Hirai
发明人： Kohei Yamaguchi , Kenji Obara , Takehiro Hirai
IPC分类号： G06K9/00
CPC分类号： G06T7/0004 , G06T2207/10061 , G06T2207/30148
摘要： An inspection method and an inspection tool are capable of detecting a defect on a specimen. More particularly, the examples relate to an inspection method and an inspection tool for easily setting an inspection condition to be used in a defect inspection of an inspected pattern such as a semiconductor wafer, a liquid crystal display, or a photomask.
摘要翻译：检查方法和检查工具能够检测样本上的缺陷。更具体地说，这些例子涉及一种检查方法和检查工具，用于容易地设置在诸如半导体晶片，液晶显示器或光掩模的检查图案的缺陷检查中使用的检查条件。

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