会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 9. 发明申请
    • THIN-FILM INSPECTION APPARATUS AND INSPECTION METHOD
    • 薄膜检查装置和检查方法
    • US20110194113A1
    • 2011-08-11
    • US13120319
    • 2009-07-02
    • Satoshi SakaiKohei KawazoeKengo YamaguchiAkemi Takano
    • Satoshi SakaiKohei KawazoeKengo YamaguchiAkemi Takano
    • G01N21/47
    • G01N21/8422G01B11/06G01B11/30G01N2021/8928
    • An object is to reduce the effect of a film thickness variation on the substrate surface of a thin film and improve the measuring accuracy. Provided are a light source that radiates single-wavelength light to an inspection-target substrate (W), which is formed by forming a thin film on a glass substrate from the glass substrate side; a light receiving element that is disposed such that the light receiving axis intersects with the optical axis of illumination light emitted from the light source at a predetermined inclination angle and that receives diffused transmitted light that has been transmitted through the inspection-target substrate W; and a computer (7) that obtains a haze ratio of the thin film on the basis of the intensity of the light received by the light receiving element. The computer (7) has a haze ratio characteristic made by associating the haze ratio and the light intensity of the diffused transmitted light and obtains a haze ratio by using the haze ratio characteristic and the light intensity received by the light receiving element.
    • 目的是减少薄膜的薄膜厚度变化对薄膜的基板表面的影响,提高测量精度。 提供了通过从玻璃基板侧在玻璃基板上形成薄膜而将单波长光照射到检查对象基板(W)的光源, 光接收元件被设置为使得光接收轴线以与预定倾斜角度从光源发射的照明光的光轴相交并且接收已经透射通过检查对象基板W的扩散透射光; 以及基于由光接收元件接收的光的强度来获得薄膜的雾度比的计算机(7)。 计算机(7)具有通过使雾化率和扩散透射光的光强度相关联而获得的雾度比特性,并且通过使用由光接收元件接收的雾度比特性和光强度来获得雾度比。