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1. 发明授权

CN102165282B 薄膜的检查装置和检查方法失效
公开(公告)号：CN102165282B
公开(公告)日：2013-07-10
申请号：CN200980138478.8
申请日：2009-07-02
申请人：三菱重工业株式会社
发明人：坂井智嗣 , 川添浩平 , 山口贤刚 , 高野晓巳
IPC分类号： G01B11/30 , G01N21/59 , G01N21/88
CPC分类号： G01N21/8422 , G01B11/06 , G01B11/30 , G01N2021/8928
摘要：本发明目的在于能够降低薄膜的基板面内的膜厚变动的影响，实现计测精度的提高。包括：对在璃基板上形成有薄膜的被检查基板(W)从该玻璃基板侧照射单波长的光的光源；以受光轴相对于从光源射出的照明光的光轴以预定的倾斜角度交叉的方式配置，对透过被检查基板(W)的扩散透过光进行受光的受光元件；和基于由受光元件接受的光的强度求出薄膜的雾度率的计算机(7)。计算机(7)具有将雾度率与扩散透过光的光强度建立关联而成的雾度率特性，利用该雾度率特性和由上述受光元件接受的光强度求出雾度率。

2. 发明公开

CN102165282A 薄膜的检查装置和检查方法失效
公开(公告)号：CN102165282A
公开(公告)日：2011-08-24
申请号：CN200980138478.8
申请日：2009-07-02
申请人：三菱重工业株式会社
发明人：坂井智嗣 , 川添浩平 , 山口贤刚 , 高野晓巳
IPC分类号： G01B11/30 , G01N21/59 , G01N21/88
CPC分类号： G01N21/8422 , G01B11/06 , G01B11/30 , G01N2021/8928
摘要：本发明目的在于能够降低薄膜的基板面内的膜厚变动的影响，实现计测精度的提高。包括：对在璃基板上形成有薄膜的被检查基板(W)从该玻璃基板侧照射单波长的光的光源；以受光轴相对于从光源射出的照明光的光轴以预定的倾斜角度交叉的方式配置，对透过被检查基板(W)的扩散透过光进行受光的受光元件；和基于由受光元件接受的光的强度求出薄膜的雾度率的计算机(7)。计算机(7)具有将雾度率与扩散透过光的光强度建立关联而成的雾度率特性，利用该雾度率特性和由上述受光元件接受的光强度求出雾度率。

3. 发明公开

CN102422148A 用于测量片状材料或其它材料的雾度的装置和方法失效
公开(公告)号：CN102422148A
公开(公告)日：2012-04-18
申请号：CN201080020227.2
申请日：2010-03-02
申请人：霍尼韦尔国际公司
发明人： T.T.莎士比亚 , J.F.莎士比亚
IPC分类号： G01N21/89 , G01N21/86 , B65H7/02 , B65H43/00
CPC分类号： G01N21/47 , G01N21/59 , G01N21/896 , G01N21/958 , G01N2021/8928
摘要：一种方法包括采用第一光(108,208,308,504,604,802)照射(902)材料(102,202,302)并且捕获(904)透射通过所述材料的第二光(114-116,214-216,314-316,804,808,814,816,822)的图像(400,700)。所述方法还包括分析(908)所述图像的多个区(402-406,702)并且基于所述分析确定(910)与所述材料相关联的一个或多个雾度测量结果。所述方法进一步包括存储和/或输出(910)所述一个或多个雾度测量结果。分析所述图像的多个区可以包括计算每个区中的像素值的总和以为该区产生总的像素值。所述图像的多个区可以包括：(i)形成第一圆盘的第一区；(ii)形成环绕所述第一区的第一环形区或大于并且包括所述第一圆盘的第二圆盘的第二区；以及(iii)形成环绕所述第二区的第二环形区或大于并且包括所述第一和第二圆盘的第三圆盘的第三区。

4. 发明授权

CN102422148B 用于测量片状材料或其它材料的雾度的装置和方法失效
公开(公告)号：CN102422148B
公开(公告)日：2015-02-25
申请号：CN201080020227.2
申请日：2010-03-02
申请人：霍尼韦尔国际公司
发明人： T.T.莎士比亚 , J.F.莎士比亚
IPC分类号： G01N21/89 , G01N21/86 , B65H7/02 , B65H43/00
CPC分类号： G01N21/47 , G01N21/59 , G01N21/896 , G01N21/958 , G01N2021/8928
摘要：一种方法包括采用第一光(108,208,308,504,604,802)照射(902)材料(102,202,302)并且捕获(904)透射通过所述材料的第二光(114-116,214-216,314-316,804,808,814,816,822)的图像(400,700)。所述方法还包括分析(908)所述图像的多个区(402-406,702)并且基于所述分析确定(910)与所述材料相关联的一个或多个雾度测量结果。所述方法进一步包括存储和/或输出(910)所述一个或多个雾度测量结果。分析所述图像的多个区可以包括计算每个区中的像素值的总和以为该区产生总的像素值。所述图像的多个区可以包括：(i)形成第一圆盘的第一区；(ii)形成环绕所述第一区的第一环形区或大于并且包括所述第一圆盘的第二圆盘的第二区；以及(iii)形成环绕所述第二区的第二环形区或大于并且包括所述第一和第二圆盘的第三圆盘的第三区。

5. 发明申请

US20110194113A1 THIN-FILM INSPECTION APPARATUS AND INSPECTION METHOD 失效
标题翻译：薄膜检查装置和检查方法
公开(公告)号：US20110194113A1
公开(公告)日：2011-08-11
申请号：US13120319
申请日：2009-07-02
申请人： Satoshi Sakai , Kohei Kawazoe , Kengo Yamaguchi , Akemi Takano
发明人： Satoshi Sakai , Kohei Kawazoe , Kengo Yamaguchi , Akemi Takano
IPC分类号： G01N21/47
CPC分类号： G01N21/8422 , G01B11/06 , G01B11/30 , G01N2021/8928
摘要： An object is to reduce the effect of a film thickness variation on the substrate surface of a thin film and improve the measuring accuracy. Provided are a light source that radiates single-wavelength light to an inspection-target substrate (W), which is formed by forming a thin film on a glass substrate from the glass substrate side; a light receiving element that is disposed such that the light receiving axis intersects with the optical axis of illumination light emitted from the light source at a predetermined inclination angle and that receives diffused transmitted light that has been transmitted through the inspection-target substrate W; and a computer (7) that obtains a haze ratio of the thin film on the basis of the intensity of the light received by the light receiving element. The computer (7) has a haze ratio characteristic made by associating the haze ratio and the light intensity of the diffused transmitted light and obtains a haze ratio by using the haze ratio characteristic and the light intensity received by the light receiving element.
摘要翻译：目的是减少薄膜的薄膜厚度变化对薄膜的基板表面的影响，提高测量精度。提供了通过从玻璃基板侧在玻璃基板上形成薄膜而将单波长光照射到检查对象基板（W）的光源，光接收元件被设置为使得光接收轴线以与预定倾斜角度从光源发射的照明光的光轴相交并且接收已经透射通过检查对象基板W的扩散透射光; 以及基于由光接收元件接收的光的强度来获得薄膜的雾度比的计算机（7）。计算机（7）具有通过使雾化率和扩散透射光的光强度相关联而获得的雾度比特性，并且通过使用由光接收元件接收的雾度比特性和光强度来获得雾度比。

6. 发明授权

US08497991B2 Thin-film inspection apparatus and inspection method 失效
标题翻译：薄膜检验仪器及检验方法
公开(公告)号：US08497991B2
公开(公告)日：2013-07-30
申请号：US13120319
申请日：2009-07-02
申请人： Satoshi Sakai , Kohei Kawazoe , Kengo Yamaguchi , Akemi Takano
发明人： Satoshi Sakai , Kohei Kawazoe , Kengo Yamaguchi , Akemi Takano
IPC分类号： G01N21/47 , G01N21/00
CPC分类号： G01N21/8422 , G01B11/06 , G01B11/30 , G01N2021/8928
摘要： An object is to reduce the effect of a film thickness variation on the substrate surface of a thin film and improve the measuring accuracy. Provided are a light source that radiates single-wavelength light to an inspection-target substrate (W), which is formed by forming a thin film on a glass substrate from the glass substrate side; a light receiving element that is disposed such that the light receiving axis intersects with the optical axis of illumination light emitted from the light source at a predetermined inclination angle and that receives diffused transmitted light that has been transmitted through the inspection-target substrate W; and a computer (7) that obtains a haze ratio of the thin film on the basis of the intensity of the light received by the light receiving element. The computer (7) has a haze ratio characteristic made by associating the haze ratio and the light intensity of the diffused transmitted light and obtains a haze ratio by using the haze ratio characteristic and the light intensity received by the light receiving element.
摘要翻译：目的是减少薄膜的薄膜厚度变化对薄膜的基板表面的影响，提高测量精度。提供了通过从玻璃基板侧在玻璃基板上形成薄膜而将单波长光照射到检查对象基板（W）的光源，光接收元件被设置为使得光接收轴线以与预定倾斜角度从光源发射的照明光的光轴相交并且接收已经透射通过检查对象基板W的扩散透射光; 以及基于由光接收元件接收的光的强度来获得薄膜的雾度比的计算机（7）。计算机（7）具有通过使雾化率和扩散透射光的光强度相关联而获得的雾度比特性，并且通过使用由光接收元件接收的雾度比特性和光强度来获得雾度比。

7. 发明申请

US20100226524A1 APPARATUS AND METHOD FOR MEASURING HAZE OF SHEET MATERIALS OR OTHER MATERIALS 有权
标题翻译：用于测量材料或其他材料的HAZE的装置和方法
公开(公告)号：US20100226524A1
公开(公告)日：2010-09-09
申请号：US12400641
申请日：2009-03-09
申请人： Tarja T. Shakespeare , John F. Shakespeare
发明人： Tarja T. Shakespeare , John F. Shakespeare
IPC分类号： G06K9/00
CPC分类号： G01N21/47 , G01N21/59 , G01N21/896 , G01N21/958 , G01N2021/8928
摘要： A method includes illuminating a material with first light and capturing an image of second light transmitted through the material. The method also includes analyzing multiple regions of the image and determining one or more haze measurements associated with the material based on the analyzing. The method further includes storing and/or outputting the one or more haze measurements. Analyzing the multiple regions of the image may include summing pixel values in each region to produce a total pixel value for that region. The multiple regions of the image may include (i) a first region forming a first disc, (ii) a second region forming either a first annular region around the first region or a second disc larger than and including the first disc, and (iii) a third region forming either a second annular region around the second region or a third disc larger than and including the first and second discs.
摘要翻译：一种方法包括用第一光照射材料并捕获通过材料透射的第二光的图像。该方法还包括基于分析来分析图像的多个区域并确定与材料相关联的一个或多个雾度测量。该方法还包括存储和/或输出一个或多个雾度测量。分析图像的多个区域可以包括对每个区域中的像素值求和以产生该区域的总像素值。图像的多个区域可以包括（i）形成第一盘的第一区域，（ii）形成围绕第一区域的第一环形区域或大于并包括第一盘的第二盘的第二区域，以及（iii））形成围绕第二区域的第二环形区域或大于并包括第一和第二盘的第三盘的第三区域。

8. 发明授权

US07034931B2 Method to grain inspect directionally solidified castings 有权
标题翻译：谷物检查定向凝固铸件的方法
公开(公告)号：US07034931B2
公开(公告)日：2006-04-25
申请号：US10610982
申请日：2003-06-30
申请人： Howard B. Jones , John H. Bluege
发明人： Howard B. Jones , John H. Bluege
IPC分类号： G01N21/00
CPC分类号： G01N21/4788 , G01N21/8806 , G01N21/95 , G01N21/9515 , G01N2021/8918 , G01N2021/8928
摘要： A method for detecting defects in metallic parts, comprising the steps of providing a metallic surface comprising a repeating microstructure and at least one surface defect, redirecting an incident light beam off of an area of the metallic surface comprising the at least one surface defect thereby forming a redirected light beam, observing the redirected light beam, detecting at least a portion of the redirected light beam resulting from redirection off of the at least one surface defect.
摘要翻译：一种用于检测金属部件中的缺陷的方法，包括以下步骤：提供包括重复微结构和至少一个表面缺陷的金属表面，将入射光束从包括所述至少一个表面缺陷的金属表面的区域转向，从而形成重新定向的光束，观察重定向的光束，检测由至少一个表面缺陷的重定向导致的重定向光束的至少一部分。

9. 发明公开

EP2406618A4 APPARATUS AND METHOD FOR MEASURING HAZE OF SHEET MATERIALS OR OTHER MATERIALS 审中-公开
标题翻译：装置和方法用于测量薄膜浊度，或其他材料
公开(公告)号：EP2406618A4
公开(公告)日：2014-01-01
申请号：EP10751185
申请日：2010-03-02
申请人： HONEYWELL INT INC
发明人： SHAKESPEARE TARJA T , SHAKESPEARE JOHN F
IPC分类号： G01N21/89 , B65H7/02 , B65H43/00 , G01N21/47 , G01N21/59 , G01N21/86 , G01N21/892 , G01N21/896 , G01N21/958
CPC分类号： G01N21/47 , G01N21/59 , G01N21/896 , G01N21/958 , G01N2021/8928
摘要： A method includes illuminating a material with first light and capturing an image of second light transmitted through the material. The method also includes analyzing multiple regions of the image and determining one or more haze measurements associated with the material based on the analyzing. The method further includes storing and/or outputting the one or more haze measurements. Analyzing the multiple regions of the image may include summing pixel values in each region to produce a total pixel value for that region. The multiple regions of the image may include (i) a first region forming a first disc, (ii) a second region forming either a first annular region around the first region or a second disc larger than and including the first disc, and (iii) a third region forming either a second annular region around the second region or a third disc larger than and including the first and second discs.

10. 发明公开

EP3159679A1 APPARATUS AND METHOD FOR MEASURING HAZE OF SHEET MATERIALS OR OTHER MATERIALS USING OFF-AXIS DETECTOR 审中-公开
标题翻译：装置和方法，用于测量的膜材料或其他材料的雾度用检测器离轴
公开(公告)号：EP3159679A1
公开(公告)日：2017-04-26
申请号：EP16192960.9
申请日：2016-10-07
申请人： Honeywell International Inc.
发明人： SHAKESPEARE, John F , SHAKESPEARE, Tarja T
IPC分类号： G01N21/896 , G01N21/47 , G01N21/59 , G01N21/958 , G01N21/892
CPC分类号： H04N5/23229 , G01N21/896 , G01N21/958 , G01N2021/4711 , G01N2021/8928 , G06T2207/10004 , H04N5/2256
摘要： A method includes illuminating (902) a material (102, 202, 302) with first light (108, 208, 308, 504, 604, 802) along an optical path. The method also includes capturing (904) an image (400, 450, 480, 700, 750) of second light (114-116, 214-216, 314-316, 804, 808, 814, 816, 822) transmitted through the material using a first detector (118, 218, 318, 806, 812, 820, 826, 830), where a first portion of the second light follows the optical path of the first light and a second portion of the second light diverges from the optical path. The method further includes capturing (906) one or more measurements of third light (126, 226, 326) using a second detector (124, 224, 324, 821). The third light diverges from the optical path by a larger amount than the second portion of the second light, and the second detector is spaced apart from the first detector. In addition, the method includes determining (912) one or more haze values associated with the material based on the image and the one or more measurements and at least one of storing and outputting (912) the one or more haze values.
摘要翻译：一种方法包括沿光路照射（902）的材料（102，202，302）与第一光（108，208，308，504，604，802）。因此，该方法包括：捕获（904）的图像（400， 450，480，700，750）的第二光（114-116，214-216，314-316，804，808，814，816的，822）反式穿过材料mitted使用第一检测器（118，218，318，806 ，812，820，826，830），其中所述第二光的第一部分沿着所述第一光的光路和第二光的第二部分从光路发散。该方法还包括捕获（906）的一个或更多测量使用第二检测器（124，224，324，821）的第三光（126，226，326）的。第三光从由比所述第二光的第二部分大的量的光路发散，并且所述第二检测器从所述第一检测器间隔开。此外，该方法包括基于在图像上的材料和所述一个或多个测量和存储和输出婷中的至少一个（912）所述一个或多个的雾度值相关联的确定性开采（912）一个或一个以上的雾度值。

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