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    • 1. 发明授权
    • Electron microscope
    • 电子显微镜
    • US5001350A
    • 1991-03-19
    • US568639
    • 1990-08-16
    • Kimio OhiTohru Kasai
    • Kimio OhiTohru Kasai
    • H01J37/16H01J37/20
    • H01J37/20
    • An electron microscope equipped with a specimen positioning device for moving specimen holders within a place perpendicular to the optical axis of the electron beam between the upper and lower magnetic pole pieces of the objective lens and bringing the holders onto the optical axis. The microscope has a member extending through the side wall of the yoke of the objective lens, a preliminary chamber connected with the side wall of the yoke via a valve, and an exchange mechanism. The member can mount and dismount the specimen holders. The plural holders are placed in position within the chamber. The exchange mechanism can mount and dismount the specimen holder placed at a certain position within the chamber and can move this holder between the magnetic pole pieces of the objective lens from the chamber to the member or vice versa. Once the inside of the lens is evacuated to a high vacuum, a plurality of specimens can be observed successively.
    • 一种电子显微镜,其具有用于在与物镜的上下磁极片之间垂直于电子束的光轴的位置移动试样保持器并将保持器保持在光轴上的试样定位装置。 显微镜具有延伸穿过物镜的轭的侧壁的构件,经由阀与轭的侧壁连接的预备室和交换机构。 会员可以安装和拆卸样品架。 多个保持器被放置在腔室内的适当位置。 交换机构可以安装和拆卸放置在室内某一位置的样品架,并且可以将该夹持器在物镜的磁极片从腔室移动到构件之间,反之亦然。 一旦透镜内部抽真空到高真空状态,就可以连续观察多个试样。
    • 4. 发明授权
    • Electron microscope equipped with scanning tunneling microscope
    • 电子显微镜配有扫描隧道显微镜
    • US4874945A
    • 1989-10-17
    • US260525
    • 1988-10-21
    • Kimio Ohi
    • Kimio Ohi
    • G01N23/00G01B7/34G01N37/00G01Q30/02G01Q60/10G01Q60/16G01Q70/04H01J37/20H01J37/26
    • G01Q60/16B82Y35/00G01Q30/02H01J37/20H01J37/26Y10S977/861
    • An electron microscope equipped with a scanning tunneling microscope. The electron microscope comprises a holder, a scanning tunneling microscope scanner having a tip, and a shift mechanism. A sample is fixed inside the holder that is mounted between the upper pole piece and the lower pole piece of an objective lens. The shift mechanism moves the scanner in two directions parallel to the surface of the sample and in a direction vertical to the sample surface. The tip is poised above a desired portion of the sample by driving the shift mechanism while observing the tip and either a reflection electron microscope image or a transmission electron microscope image of the sample. Then, the scanner uses the tip to scan the sample surface to obtain a scanning tunneling microscope image.
    • 装有扫描隧道显微镜的电子显微镜。 电子显微镜包括保持器,具有尖端的扫描隧道显微镜扫描器和移位机构。 将样品固定在安装在物镜的上极片和下极片之间的保持器内部。 换档机构使扫描仪在垂直于样品表面的方向上平行于样品表面的两个方向移动。 通过驱动移动机构同时观察尖端以及样品的反射电子显微镜图像或透射电子显微镜图像,将尖端放置在样品的期望部分上方。 然后,扫描仪使用尖端扫描样品表面以获得扫描隧道显微镜图像。
    • 6. 发明授权
    • Transmission-type electron microscope
    • 透射型电子显微镜
    • US4633085A
    • 1986-12-30
    • US722778
    • 1985-04-12
    • Takeshi TomitaYoshiyasu HaradaKimio Ohi
    • Takeshi TomitaYoshiyasu HaradaKimio Ohi
    • H01J37/10H01J37/141H01J37/26H01J37/252
    • H01J37/26H01J37/141
    • An electron microscope having plural stages of focusing lenses between an objective lens and an electron gun. The magnetic pole piece of the focusing lens of the final stage which is on the side of the objective lens takes a conic form which tapers toward the objective lens. The yoke of the objective lens on the side of the focusing lenses is centrally provided with a conic recess. This structure makes it possible to shorten the distance between the position of the magnetic field produced by an auxiliary lens and the front focal point defined by a front objective lens without introducing interference between the focusing lens of the final stage and the object lens proper. Thus, the observation of an electron micrograph covering a wide field of view facilitates accurate analysis of the physical properties of a designated microscopic region on a specimen.
    • 一种具有在物镜和电子枪之间具有多级聚焦透镜的电子显微镜。 位于物镜侧的最后级的聚焦透镜的磁极片呈圆锥形,朝向物镜逐渐变细。 在聚焦透镜一侧的物镜的轭在中央设置有圆锥凹槽。 这种结构使得可以缩短由辅助透镜产生的磁场的位置与由前物镜限定的前焦点之间的距离,而不会引起最终级的聚焦透镜与物镜本体之间的干涉。 因此,观察覆盖宽视野的电子显微镜有助于准确分析样品上指定的微观区域的物理性质。