会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明授权
    • Method and apparatus for reviewing defect
    • 检查缺陷的方法和装置
    • US09342879B2
    • 2016-05-17
    • US14347127
    • 2012-07-06
    • Yohei MinekawaKenji NakahiraMinoru HaradaTakehiro HiraiRyo Nakagaki
    • Yohei MinekawaKenji NakahiraMinoru HaradaTakehiro HiraiRyo Nakagaki
    • G06K9/00G06T7/00
    • G06T7/0004G06T7/001G06T2207/10061G06T2207/20016G06T2207/30148
    • A method for reviewing defect, comprising the steps of: as an image acquisition step, imaging a surface of a sample using arbitrary image acquisition condition selected from a plurality of image acquisition conditions and obtaining a defect image; as a defect position calculation step, proceeding the defect image obtained by the image acquisition step and calculating a defect position on the surface of the sample; as a defect detection accuracy calculation step, obtaining a defect detection accuracy of the defect position calculated by the defect position calculation step; and as a conclusion determination step, determinating whether the defect detection accuracy obtained by the defect detection accuracy calculation step meets a predetermined requirement or not; wherein until it is determined that the defect detection accuracy obtained by the defect detection accuracy calculation step meets a predetermined in the conclusion determination step, the image acquisition condition is selected from the plurality of image acquisition conditions once again and the image acquisition step, the defect position calculation step, the defect detection accuracy calculation step and the conclusion determination step are repeated.
    • 一种检查缺陷的方法,包括以下步骤:作为图像获取步骤,使用从多个图像获取条件中选择的任意图像获取条件对样本的表面进行成像并获得缺陷图像; 作为缺陷位置计算步骤,进行通过图像获取步骤获得的缺陷图像,并计算样本表面上的缺陷位置; 作为缺陷检测精度计算步骤,获得由缺陷位置计算步骤计算的缺陷位置的缺陷检测精度; 以及作为结论确定步骤,确定由缺陷检测精度计算步骤获得的缺陷检测精度是否满足预定要求; 其中直到确定由缺陷检测精度计算步骤获得的缺陷检测精度在结论确定步骤中达到预定值时,再次从多个图像获取条件中选择图像获取条件,并且图像获取步骤,缺陷 位置计算步骤,重复缺陷检测精度计算步骤和结论确定步骤。
    • 10. 发明授权
    • Surface observation apparatus and surface observation method
    • 表面观察装置及表面观察法
    • US09136189B2
    • 2015-09-15
    • US13318718
    • 2010-05-25
    • Takehiro HiraiKenji ObaraNaoma Ban
    • Takehiro HiraiKenji ObaraNaoma Ban
    • G06K9/00H01L21/66G06T7/00
    • H01L22/20G06T7/001G06T2200/24G06T2207/10061G06T2207/30148H01L22/12H01L2924/0002H01L2924/00
    • A surface observation apparatus is achieved, which enables even a beginner to easily select an optimal evaluation indicator for each of various patterns to be evaluated without a trial and error approach. A plurality of images to be evaluated are input from an image processing unit (114) to an evaluation image input unit (113a) (in step 901). The input images to be evaluated are displayed on a display (115). A user rearranges the images in accordance with an evaluation criterion of the user while referencing the display (115), and defines an evaluation criterion (in step 902). Evaluation values are calculated for the input images (to be evaluated) using a plurality of evaluation indicators (in step 903). The evaluation values for each of the evaluation indicators are compared with the evaluation criterion defined by the user, and correlation coefficients are then calculated (in step 904). An evaluation indicator having the maximum absolute value of a correlation coefficient is automatically selected as an evaluation criterion that is closest to the evaluation criterion defined by the user (in step 905). The images are rearranged in order of correlation coefficient and a list of the images is displayed on the display (115) so that the images are arranged in order of evaluation value (in step 906).
    • 实现了表面观察装置,即使初学者也能够在不进行试错法的情况下容易地选择要评估的各种图案中的各种图案的最佳评价指标。 将要评估的多个图像从图像处理单元(114)输入到评估图像输入单元(113a)(在步骤901中)。 待评估的输入图像显示在显示器(115)上。 用户根据用户的评价标准重新排列图像,同时参照显示器(115),并定义评估标准(步骤902)。 使用多个评价指标对输入图像(待评价)计算评价值(步骤903)。 将各评价指标的评价值与用户定义的评价标准进行比较,然后计算相关系数(步骤904)。 自动选择具有相关系数的最大绝对值的评估指标作为最接近用户定义的评估标准的评估标准(在步骤905中)。 按照相关系数的顺序重新排列图像,并且在显示器(115)上显示图像列表,使得以评估值的顺序排列图像(在步骤906中)。