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    • 3. 发明申请
    • Flexible Electrostatic Actuator
    • 柔性静电执行器
    • US20080123171A1
    • 2008-05-29
    • US11578556
    • 2005-04-25
    • David E. DauschScott H. Goodwin
    • David E. DauschScott H. Goodwin
    • G02B26/00
    • H01H59/0009F16K99/0001F16K99/0007F16K99/0051F16K2099/0074F16K2099/008G02B26/0841H01G5/16H01H2059/0081
    • An electrostatic actuator having a base (10) including a first electrode (20), and having a flexible membrane (50) including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode (40) electrically isolated from the first electrode. The flexible membrane includes a fixed end where the flexible membrane connects to the base and a free end opposite the fixed end. In the flexible membrane, the second electrode has at least first and second portions separated by a third portion an in combination defining a step provided in a vicinity of the fixed end. The first step is closest to the fixed end and separated by a shorter distance from the first electrode than the second portion. A stiffening member (310) can be disposed on the flexible membrane toward the free end of the flexible membrane. The electrostatic actuator can include an elongated orifice (420,320) extending through the base and extending along a direction away from the fixed end. The first electrode of the base can extends past an end of the second electrode of the flexible membrane in a direction defined toward the fixed end. The flexible membrane can include a peripheral or side cut out configured to communicate to an interior of the flexible membrane.
    • 一种静电致动器,其具有包括第一电极(20)的基部(10),并且具有柔性膜(50),该柔性膜包括彼此接触的不同材料的至少两个材料层。 至少一个材料层包括与第一电极电隔离的第二电极(40)。 柔性膜包括固定端,柔性膜连接到基部和与固定端相对的自由端。 在柔性膜中,第二电极具有至少第一和第二部分,第一和第二部分由第三部分组合,限定了设置在固定端附近的台阶。 第一步最靠近固定端并与第二电极分开距离第一电极较短的距离。 加强构件(310)可以朝向柔性膜的自由端设置在柔性膜上。 静电致动器可以包括延伸穿过底座并沿着远离固定端的方向延伸的细长孔(420,320)。 基部的第一电极可以沿着朝向固定端限定的方向延伸超过柔性膜的第二电极的端部。 柔性膜可以包括构造成连通到柔性膜的内部的周边或侧面切口。
    • 5. 发明申请
    • ENERGY STORAGE RESERVOIR
    • 能源储存库
    • US20140042753A1
    • 2014-02-13
    • US14002896
    • 2012-03-02
    • Mark BahnerScott H. Goodwin
    • Mark BahnerScott H. Goodwin
    • F03B13/06F15B1/10H02K7/18F15B1/02
    • F03B13/06F03D9/17F03D9/255F03D9/28F05D2260/42F15B1/024F15B1/045F15B1/106H02K7/18Y02E10/22Y02E10/72Y02E60/15Y02E60/17Y02P80/158
    • An energy management system includes an energy storage reservoir and a fluid pump. The reservoir includes a fluid reservoir configured to contain varying quantities of a fluid and to isolate the fluid from the ambient. The fluid reservoir has a top surface, bottom surface, flexible member, and at least one opening for filling or emptying the reservoir. A pressing mass of solid material is positioned above the fluid reservoir with a weight sufficient to press the reservoir and empty the reservoir of fluid when the reservoir opening is open. The pressing mass is supported by the fluid reservoir when the reservoir contains fluid and is closed. The flexible member is disposed around the fluid reservoir to seal the fluid and to facilitate vertical motion of the pressing mass as the reservoir is filled and emptied. The pump supplies fluid to the fluid reservoir via the opening.
    • 能量管理系统包括储能容器和流体泵。 储存器包括流体储存器,其构造成容纳不同数量的流体并将流体与环境隔离。 流体储存器具有顶表面,底表面,柔性构件和用于填充或排空储存器的至少一个开口。 固体材料的按压块位于流体储存器上方,其重量足以在储存器开口打开时按压储存器并清空流体储存器。 当储存器包含流体并且关闭时,压力块由流体储存器支撑。 柔性构件设置在流体储存器周围以密封流体并且当储存器被填充和排空时促进挤压块的垂直运动。 泵通过开口向流体储存器供应流体。
    • 6. 发明授权
    • Micromachined ultrasonic transducer with air-backed cavity and electrical connection
    • 微机械超声波换能器,带空气和电气连接
    • US08624469B2
    • 2014-01-07
    • US13643649
    • 2011-04-22
    • David DauschJim CarlsonChristopher Brewer SandersScott H. Goodwin
    • David DauschJim CarlsonChristopher Brewer SandersScott H. Goodwin
    • H01L41/08A61B8/00
    • A61B8/4494A61B8/4444B06B1/0622G10K11/002H01L41/0475H01L41/0973H01L41/29H01L41/332Y10T29/42
    • A method and associated apparatus directed to a piezoelectric micromachined ultrasonic transducer (pMUT) defining an air-backed cavity are provided. A first via defined by a device substrate and associated dielectric layer, and extending to the first electrode, is substantially filled with a first conductive material. A support member engaged with the device substrate defines a second via extending to the first conductive material. The second via has a second conductive material disposed thereon, forms an electrically-conductive engagement with the first conductive material, and extends outwardly of the second via to be accessible externally to the support member. A connective element extends through a third via defined by a connection support substrate and is in electrically-conductive engagement with the second conductive material, wherein one of the connective element and connection support substrate is bonded to one of the support member and second conductive material by a bonding material engaged therebetween.
    • 提供了一种针对限定空气背腔的压电微加工超声换能器(pMUT)的方法和相关装置。 由器件衬底和相关联的电介质层限定并延伸到第一电极的第一通孔基本上被第一导电材料填充。 与器件衬底接合的支撑构件限定延伸到第一导电材料的第二通孔。 第二通孔具有设置在其上的第二导电材料,与第一导电材料形成导电接合,并且延伸到第二通孔的外部,以便可以从支撑构件的外部进入。 连接元件延伸穿过由连接支撑基板限定的第三通孔,并且与第二导电材料导电接合,其中连接元件和连接支撑基板之一通过以下方式结合到支撑元件和第二导电材料中的一个上: 接合材料之间的接合材料。