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1. 发明申请

US20080123171A1 Flexible Electrostatic Actuator 有权
标题翻译：柔性静电执行器
公开(公告)号：US20080123171A1
公开(公告)日：2008-05-29
申请号：US11578556
申请日：2005-04-25
申请人： David E. Dausch , Scott H. Goodwin
发明人： David E. Dausch , Scott H. Goodwin
IPC分类号： G02B26/00
CPC分类号： H01H59/0009 , F16K99/0001 , F16K99/0007 , F16K99/0051 , F16K2099/0074 , F16K2099/008 , G02B26/0841 , H01G5/16 , H01H2059/0081
摘要： An electrostatic actuator having a base (10) including a first electrode (20), and having a flexible membrane (50) including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode (40) electrically isolated from the first electrode. The flexible membrane includes a fixed end where the flexible membrane connects to the base and a free end opposite the fixed end. In the flexible membrane, the second electrode has at least first and second portions separated by a third portion an in combination defining a step provided in a vicinity of the fixed end. The first step is closest to the fixed end and separated by a shorter distance from the first electrode than the second portion. A stiffening member (310) can be disposed on the flexible membrane toward the free end of the flexible membrane. The electrostatic actuator can include an elongated orifice (420,320) extending through the base and extending along a direction away from the fixed end. The first electrode of the base can extends past an end of the second electrode of the flexible membrane in a direction defined toward the fixed end. The flexible membrane can include a peripheral or side cut out configured to communicate to an interior of the flexible membrane.
摘要翻译：一种静电致动器，其具有包括第一电极（20）的基部（10），并且具有柔性膜（50），该柔性膜包括彼此接触的不同材料的至少两个材料层。至少一个材料层包括与第一电极电隔离的第二电极（40）。柔性膜包括固定端，柔性膜连接到基部和与固定端相对的自由端。在柔性膜中，第二电极具有至少第一和第二部分，第一和第二部分由第三部分组合，限定了设置在固定端附近的台阶。第一步最靠近固定端并与第二电极分开距离第一电极较短的距离。加强构件（310）可以朝向柔性膜的自由端设置在柔性膜上。静电致动器可以包括延伸穿过底座并沿着远离固定端的方向延伸的细长孔（420,320）。基部的第一电极可以沿着朝向固定端限定的方向延伸超过柔性膜的第二电极的端部。柔性膜可以包括构造成连通到柔性膜的内部的周边或侧面切口。

2. 发明授权

US08198974B2 Flexible electrostatic actuator 有权
标题翻译：柔性静电执行器
公开(公告)号：US08198974B2
公开(公告)日：2012-06-12
申请号：US11578556
申请日：2005-04-25
申请人： David E. Dausch , Scott H. Goodwin
发明人： David E. Dausch , Scott H. Goodwin
IPC分类号： H01H71/18 , H01H71/16 , H01H51/22
CPC分类号： H01H59/0009 , F16K99/0001 , F16K99/0007 , F16K99/0051 , F16K2099/0074 , F16K2099/008 , G02B26/0841 , H01G5/16 , H01H2059/0081
摘要： An electrostatic actuator having a base including a first electrode and a flexible membrane including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode electrically isolated from the first electrode. The flexible membrane includes a fixed end connected to the base and a free end opposite the fixed end and spaced apart from the base. The second electrode has at least first and second portions separated by a third portion and in combination defining a first and second step provided in a vicinity of the fixed end.
摘要翻译：一种静电致动器，其具有包括第一电极和柔性膜的基底，所述第一电极和柔性膜包括彼此接触的不同材料的至少两个材料层。材料层中的至少一个包括与第一电极电隔离的第二电极。柔性膜包括连接到基座的固定端和与固定端相对并与基座间隔开的自由端。第二电极具有至少由第三部分隔开的第一和第二部分，并且组合地限定设置在固定端附近的第一和第二台阶。

3. 发明申请

US20100236644A1 Methods of Operating Microvalve Assemblies and Related Structures and Related Devices 审中-公开
标题翻译：微型阀组件及相关结构及相关设备的运行方法
公开(公告)号：US20100236644A1
公开(公告)日：2010-09-23
申请号：US12794157
申请日：2010-06-04
申请人： Kevin R. Douglas , William O. Teach , Paul W. Gibson , Donald C. Harris , Scott H. Goodwin , David E. Dausch , Wayne D. Dettloff
发明人： Kevin R. Douglas , William O. Teach , Paul W. Gibson , Donald C. Harris , Scott H. Goodwin , David E. Dausch , Wayne D. Dettloff
IPC分类号： G05D7/06
CPC分类号： F16K99/0001 , F15C5/00 , F16K99/0007 , F16K99/0028 , F16K99/0051 , F16K2099/0074 , F16K2099/008 , G05D7/0694 , Y10T137/0491 , Y10T137/0497 , Y10T137/2213 , Y10T137/2224 , Y10T137/7761 , Y10T137/86558 , Y10T137/87169 , Y10T137/87217 , Y10T137/87225
摘要： A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.
摘要翻译：阀组件可以包括主壳体和第一和第二静电致动阀。主壳体可以限定至少三个室，其中第一室被配置为联接到高压供应端口，第二室被配置为联接到输出端口，第三室被配置为联接到低压排气港口。第一静电致动阀可以设置在第一和第二室之间，并且第一电动致动阀可以响应于第一电信号而允许或基本上阻挡第一室和第二室之间的流体连通。第二电动致动阀可以设置在第二和第三室之间，并且第二电动致动阀可以响应于第二电信号而允许或基本上阻挡第二室和第三室之间的流体连通。还讨论了相关方法。

4. 发明授权

US07753072B2 Valve assemblies including at least three chambers and related methods 失效
标题翻译：阀组件包括至少三个腔室和相关方法
公开(公告)号：US07753072B2
公开(公告)日：2010-07-13
申请号：US11188139
申请日：2005-07-22
申请人： Kevin R. Douglas , William O. Teach , Paul W. Gibson , Donald C. Harris , Scott H. Goodwin , David E. Dausch , Wayne D. Dettloff
发明人： Kevin R. Douglas , William O. Teach , Paul W. Gibson , Donald C. Harris , Scott H. Goodwin , David E. Dausch , Wayne D. Dettloff
IPC分类号： F15B13/043
CPC分类号： F16K99/0001 , F15C5/00 , F16K99/0007 , F16K99/0028 , F16K99/0051 , F16K2099/0074 , F16K2099/008 , G05D7/0694 , Y10T137/0491 , Y10T137/0497 , Y10T137/2213 , Y10T137/2224 , Y10T137/7761 , Y10T137/86558 , Y10T137/87169 , Y10T137/87217 , Y10T137/87225
摘要： A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.
摘要翻译：阀组件可以包括主壳体和第一和第二静电致动阀。主壳体可以限定至少三个室，其中第一室被配置为联接到高压供应端口，第二室被配置为联接到输出端口，第三室被配置为联接到低压排气港口。第一静电致动阀可以设置在第一和第二室之间，并且第一电动致动阀可以响应于第一电信号而允许或基本上阻挡第一室和第二室之间的流体连通。第二电动致动阀可以设置在第二和第三室之间，并且第二电动致动阀可以响应于第二电信号而允许或基本上阻挡第二室和第三室之间的流体连通。还讨论了相关方法。

5. 发明申请

US20140042753A1 ENERGY STORAGE RESERVOIR 审中-公开
标题翻译：能源储存库
公开(公告)号：US20140042753A1
公开(公告)日：2014-02-13
申请号：US14002896
申请日：2012-03-02
申请人： Mark Bahner , Scott H. Goodwin
发明人： Mark Bahner , Scott H. Goodwin
IPC分类号： F03B13/06 , F15B1/10 , H02K7/18 , F15B1/02
CPC分类号： F03B13/06 , F03D9/17 , F03D9/255 , F03D9/28 , F05D2260/42 , F15B1/024 , F15B1/045 , F15B1/106 , H02K7/18 , Y02E10/22 , Y02E10/72 , Y02E60/15 , Y02E60/17 , Y02P80/158
摘要： An energy management system includes an energy storage reservoir and a fluid pump. The reservoir includes a fluid reservoir configured to contain varying quantities of a fluid and to isolate the fluid from the ambient. The fluid reservoir has a top surface, bottom surface, flexible member, and at least one opening for filling or emptying the reservoir. A pressing mass of solid material is positioned above the fluid reservoir with a weight sufficient to press the reservoir and empty the reservoir of fluid when the reservoir opening is open. The pressing mass is supported by the fluid reservoir when the reservoir contains fluid and is closed. The flexible member is disposed around the fluid reservoir to seal the fluid and to facilitate vertical motion of the pressing mass as the reservoir is filled and emptied. The pump supplies fluid to the fluid reservoir via the opening.
摘要翻译：能量管理系统包括储能容器和流体泵。储存器包括流体储存器，其构造成容纳不同数量的流体并将流体与环境隔离。流体储存器具有顶表面，底表面，柔性构件和用于填充或排空储存器的至少一个开口。固体材料的按压块位于流体储存器上方，其重量足以在储存器开口打开时按压储存器并清空流体储存器。当储存器包含流体并且关闭时，压力块由流体储存器支撑。柔性构件设置在流体储存器周围以密封流体并且当储存器被填充和排空时促进挤压块的垂直运动。泵通过开口向流体储存器供应流体。

6. 发明授权

US08624469B2 Micromachined ultrasonic transducer with air-backed cavity and electrical connection 有权
标题翻译：微机械超声波换能器，带空气和电气连接
公开(公告)号：US08624469B2
公开(公告)日：2014-01-07
申请号：US13643649
申请日：2011-04-22
申请人： David Dausch , Jim Carlson , Christopher Brewer Sanders , Scott H. Goodwin
发明人： David Dausch , Jim Carlson , Christopher Brewer Sanders , Scott H. Goodwin
IPC分类号： H01L41/08 , A61B8/00
CPC分类号： A61B8/4494 , A61B8/4444 , B06B1/0622 , G10K11/002 , H01L41/0475 , H01L41/0973 , H01L41/29 , H01L41/332 , Y10T29/42
摘要： A method and associated apparatus directed to a piezoelectric micromachined ultrasonic transducer (pMUT) defining an air-backed cavity are provided. A first via defined by a device substrate and associated dielectric layer, and extending to the first electrode, is substantially filled with a first conductive material. A support member engaged with the device substrate defines a second via extending to the first conductive material. The second via has a second conductive material disposed thereon, forms an electrically-conductive engagement with the first conductive material, and extends outwardly of the second via to be accessible externally to the support member. A connective element extends through a third via defined by a connection support substrate and is in electrically-conductive engagement with the second conductive material, wherein one of the connective element and connection support substrate is bonded to one of the support member and second conductive material by a bonding material engaged therebetween.
摘要翻译：提供了一种针对限定空气背腔的压电微加工超声换能器（pMUT）的方法和相关装置。由器件衬底和相关联的电介质层限定并延伸到第一电极的第一通孔基本上被第一导电材料填充。与器件衬底接合的支撑构件限定延伸到第一导电材料的第二通孔。第二通孔具有设置在其上的第二导电材料，与第一导电材料形成导电接合，并且延伸到第二通孔的外部，以便可以从支撑构件的外部进入。连接元件延伸穿过由连接支撑基板限定的第三通孔，并且与第二导电材料导电接合，其中连接元件和连接支撑基板之一通过以下方式结合到支撑元件和第二导电材料中的一个上：接合材料之间的接合材料。

7. 发明申请

US20130200753A1 METHODS FOR FORMING A CONNECTION WITH A MICROMACHINED ULTRASONIC TRANSDUCER, AND ASSOCIATED APPARATUSES 有权
标题翻译：用于形成与微机械超声波传感器的连接的方法以及相关的装置
公开(公告)号：US20130200753A1
公开(公告)日：2013-08-08
申请号：US13643649
申请日：2011-04-22
申请人： David Dausch , Jim Carlson , Christopher Brewer Sanders , Scott H. Goodwin
发明人： David Dausch , Jim Carlson , Christopher Brewer Sanders , Scott H. Goodwin
IPC分类号： H01L41/332 , H01L41/047
CPC分类号： A61B8/4494 , A61B8/4444 , B06B1/0622 , G10K11/002 , H01L41/0475 , H01L41/0973 , H01L41/29 , H01L41/332 , Y10T29/42
摘要： A method and associated apparatus directed to a piezoelectric micromachined ultrasonic transducer (pMUT) defining an air-backed cavity are provided. A first via defined by a device substrate and associated dielectric layer, and extending to the first electrode, is substantially filled with a first conductive material. A support member engaged with the device substrate defines a second via extending to the first conductive material. The second via has a second conductive material disposed thereon, forms an electrically-conductive engagement with the first conductive material, and extends outwardly of the second via to be accessible externally to the support member. A connective element extends through a third via defined by a connection support substrate and is in electrically-conductive engagement with the second conductive material, wherein one of the connective element and connection support substrate is bonded to one of the support member and second conductive material by a bonding material engaged therebetween.
摘要翻译：提供了一种针对限定空气背腔的压电微加工超声换能器（pMUT）的方法和相关装置。由器件衬底和相关联的电介质层限定并延伸到第一电极的第一通孔基本上被第一导电材料填充。与器件衬底接合的支撑构件限定延伸到第一导电材料的第二通孔。第二通孔具有设置在其上的第二导电材料，与第一导电材料形成导电接合，并且延伸到第二通孔的外部，以便可以从支撑构件的外部进入。连接元件延伸穿过由连接支撑基板限定的第三通孔，并且与第二导电材料导电接合，其中连接元件和连接支撑基板之一通过以下方式结合到支撑元件和第二导电材料中的一个上：接合材料之间的接合材料。

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