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    • 6. 发明授权
    • Single crystal wafer of lithium tantalate
    • 钽酸锂单晶晶片
    • US4755314A
    • 1988-07-05
    • US804188
    • 1985-12-03
    • Susumu SakaguchiMasaaki Iguchi
    • Susumu SakaguchiMasaaki Iguchi
    • H03H9/17C30B33/00H01L41/18C01G35/00C30B15/00H01L41/22
    • C30B33/00C30B29/30H01L2223/54493
    • The x-cut single crystal wafer of lithium tantalate according to the invention is characterized by the orientation flat formed in a specific crystallographic orientation. The plane of the orientation flat should be (A) in parallel with the (018) plane or a plane which is in parallel with the x-axis and makes an angle of 15.degree. or smaller with the (018) plane or (B) in parallel with a plane which is in parallel with the x-axis and perpendicular to the (018) plane or a plane which is in parallel with the x-axis and makes an angle of 15.degree. or smaller with the plane which is in parallel with the x-axis and perpendicular to the (018) plane. In contrast to conventional lithium tantalate single crystal wafers provided with an orientation flat in a direction parallel to the 112.degree. Y direction, the location of the crystallographic orientation of the orientation flat is very easy and consequently great advantages are obtained in the working efficiency of locating the direction of the orientation flat and improved quality as well as increased yield of acceptable devices, e.g. SAW filters, prepared from the wafers.
    • 根据本发明的钽酸锂的x切割单晶晶片的特征在于以特定的晶体取向形成的取向平面。 取向平面的平面应为与(018)平面平行的(A)平面或与x轴平行的平面,与(018)面成15度或更小的平面或(B) 平行于与x轴平行且垂直于(018)平面的平面或与x轴平行的平面,并且与平行的平面成15度或更小的平面 与x轴垂直于(018)平面。 与常规的钽酸锂单晶晶片相比,在平行于112°Y方向的方向上具有取向平坦的方向,取向平面的晶体取向的位置非常容易,因此在定位的工作效率方面获得了很大的优点 取向平坦的方向和改善的质量以及可接受的装置的增加的产量,例如 SAW滤波器,由晶圆制成。