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1. 发明授权

US08697572B2 Method for forming Cu film and storage medium 失效
标题翻译：形成Cu膜和储存介质的方法
公开(公告)号：US08697572B2
公开(公告)日：2014-04-15
申请号：US13211870
申请日：2011-08-17
申请人： Yasuhiko Kojima , Kenji Hiwa
发明人： Yasuhiko Kojima , Kenji Hiwa
IPC分类号： H01L21/44
CPC分类号： H01L23/53238 , C23C16/0281 , C23C16/18 , C23C16/45557 , H01L21/28556 , H01L21/76844 , H01L21/76846 , H01L21/76876 , H01L23/53295 , H01L2924/0002 , H01L2924/00
摘要： In a method for forming a Cu film, a CVD Cu film is formed on a CVD-Ru film that is formed on a wafer W. In the method, the wafer W having the CVD-Ru film is loaded into a chamber 1, and a film-forming source material in a vapor state is introduced into the chamber 1. The film-forming source material includes Cu(hfac)TMVS that is a Cu complex having a vapor pressure higher than that of Cu(hfac)2 produced as a by-product during the film formation. When the CVD-Cu film is formed, the pressure within the chamber 1 is controlled to a pressure at which the desorption and diffusion of Cu(hfac)2 adsorbed on the surface of the CVD Ru film proceed.
摘要翻译：在形成Cu膜的方法中，在形成在晶片W上的CVD-Ru膜上形成CVD Cu膜。在该方法中，将具有CVD-Ru膜的晶片W装载到室1中，并且将蒸气状态的成膜源材料引入室1中。成膜源材料包括Cu（hfac）TMVS，Cu（Hfac）TMVS是蒸气压高于Cu（hfac）2的蒸气压的Cu配合物，在成膜期间副产品。当形成CVD-Cu膜时，将室1内的压力控制在吸附在CVD Ru膜的表面上的Cu（hfac）2的解吸附扩散的压力。

2. 发明申请

US20120064248A1 METHOD FOR FORMING CU FILM AND STORAGE MEDIUM 审中-公开
标题翻译：形成薄膜和储存介质的方法
公开(公告)号：US20120064248A1
公开(公告)日：2012-03-15
申请号：US13229018
申请日：2011-09-09
申请人： Yasuhiko Kojima , Kenji Hiwa
发明人： Yasuhiko Kojima , Kenji Hiwa
IPC分类号： C23C16/06 , C23C16/44
CPC分类号： C23C16/18 , C23C16/45525
摘要： In a method for forming a Cu film, a substrate is loaded in a processing chamber and a gaseous film-forming source material including monovalent amidinate copper and a gaseous reducing agent including a carboxylic acid are introduced into the processing chamber. Then, a Cu film is deposited on the substrate by reacting the film-forming source material and the reducing agent together on the substrate.
摘要翻译：在形成Cu膜的方法中，将基板装载到处理室中，并且将包含一价脒基铜的气态成膜源材料和包含羧酸的气态还原剂引入处理室。然后，通过使膜形成源材料和还原剂一起在基板上一起在基板上沉积Cu膜。

3. 发明申请

US20120064247A1 METHOD FOR FORMING CU FILM, AND STORAGE MEDIUM 审中-公开
标题翻译：形成薄膜的方法和储存介质
公开(公告)号：US20120064247A1
公开(公告)日：2012-03-15
申请号：US13229142
申请日：2011-09-09
申请人： Kenji Hiwa , Yasuhiko Kojima
发明人： Kenji Hiwa , Yasuhiko Kojima
IPC分类号： C23C16/06 , B05C11/00
CPC分类号： H01L21/28556 , C23C16/0281 , C23C16/18 , H01L21/76876 , H01L23/53238 , H01L2221/1089 , H01L2924/0002 , H01L2924/00
摘要： A film-forming source material composed of a Cu complex is supplied to a wafer, which is kept at a relatively high first temperature and has a Ru film as a film-forming base film, and initial nuclei of Cu are formed on the wafer. Then, the film-forming source material composed of the Cu complex is supplied to the wafer kept at a relatively low second temperature, and Cu is deposited on the wafer having the initial nuclei of Cu formed thereon.
摘要翻译：将由Cu络合物构成的成膜源材料供给到保持在较高的第一温度的晶片，并且具有Ru膜作为成膜基膜，并且在晶片上形成Cu的初始核。然后，将由Cu络合物构成的成膜源材料供给到保持在相对较低的第二温度的晶片，并且在其上形成有初始的Cu核的晶片上沉积Cu。

4. 发明申请

US20140023656A1 PHARMACEUTICAL COMPOSITION FOR TREATMENT AND PREVENTION OF TH3 MARCH-RELATED DISEASES 审中-公开
标题翻译：用于治疗和预防TH3三相关疾病的药物组合物
公开(公告)号：US20140023656A1
公开(公告)日：2014-01-23
申请号：US13824672
申请日：2011-09-26
申请人： Masato Kuwabara , Yasuhiko Kojima , Takashi Oyamada , Michio Honjo , Kazuko Uno , Yukio Yajima , Akina Kuwabara
发明人： Masato Kuwabara , Yasuhiko Kojima , Takashi Oyamada , Michio Honjo , Kazuko Uno , Yukio Yajima , Akina Kuwabara
IPC分类号： A61K33/30 , G01N33/68
CPC分类号： A61K33/30 , A61K33/06 , A61K33/42 , A61K36/42 , A61K36/899 , A61K45/06 , G01N33/6893 , A61K2300/00
摘要： The present invention provides a medicinal agent and a method for each of various testing or the like, which enable the treatment and prevention, particularly preventive treatment, of Th3 march-related diseases. The present invention also provides a pharmaceutical composition for treating and/or preventing Th3 march-related diseases, which comprises zinc, calcium and phosphorus and additionally comprises pumpkin seeds and corn silk, and which preferably can activate the DNA repairing ability of a zinc finger, particularly the ability of repairing defect or mutation of DNA for a filaggrin gene, of a zinc finger.
摘要翻译：本发明提供能够对Th3游行相关疾病进行治疗和预防，特别是预防治疗的各种试验等的药剂和方法。本发明还提供了用于治疗和/或预防Th3游行相关疾病的药物组合物，其包含锌，钙和磷，并且还包括南瓜籽和玉米丝，并且其优选可以激活锌指的DNA修复能力，特别是修复锌指的丝聚蛋白基因的DNA的缺陷或突变的能力。

5. 发明授权

US07815874B2 Reactor 有权
标题翻译：反应堆
公开(公告)号：US07815874B2
公开(公告)日：2010-10-19
申请号：US12125339
申请日：2008-05-22
申请人： Kenji Sakai , Yasuhiko Kojima
发明人： Kenji Sakai , Yasuhiko Kojima
IPC分类号： F28D7/00
CPC分类号： B01J19/02 , B01J19/0013 , B01J19/0053 , B01J19/2425 , B01J2219/00092 , B01J2219/00256 , B01J2219/0286 , F28D7/06 , F28F9/0219 , F28F9/0229 , F28F9/18 , F28F19/06 , F28F2275/20
摘要： A reactor including a reactor vessel and heat exchange tubes provided in the reactor vessel. The reactor vessel includes a tubesheet and is configured to receive a reaction fluid. The tubesheet has a first plate member configured to contact the reaction fluid and a second plate member configured to not contact the reaction fluid. Heat exchange tubes are provided in the reactor vessel and fixed to the first plate member. The heat exchange tubes are configured to receive a heat exchange medium. At least a portion of the first plate member configured to contact the reaction fluid is made of a metal that has a high corrosion-resistance against the reaction liquid, and the second plate member is made of a metal that has a low corrosion-resistance against the reaction liquid. The second plate member is detachably fixed to a remainder of the reactor vessel.
摘要翻译：包括反应器容器和设置在反应器容器中的热交换管的反应器。反应器容器包括管板，并且构造成容纳反应流体。管板具有构造成接触反应流体的第一板构件和构造成不接触反应流体的第二板构件。热交换管设置在反应器容器中并固定到第一板构件。热交换管被构造成接收热交换介质。构成为接触反应流体的第一板状构件的至少一部分由对反应液体具有高耐腐蚀性的金属制成，第二板构件由耐腐蚀性低的金属制成反应液体。第二板构件可拆卸地固定到反应器容器的其余部分。

6. 发明申请

US20100099254A1 SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, STORAGE MEDIUM AND COMPUTER PROGRAM 审中-公开
标题翻译：半导体制造设备，半导体器件制造方法，存储介质和计算机程序
公开(公告)号：US20100099254A1
公开(公告)日：2010-04-22
申请号：US12443983
申请日：2007-10-01
申请人： Masaki Narushima , Yasuhiko Kojima
发明人： Masaki Narushima , Yasuhiko Kojima
IPC分类号： H01L21/768 , H01L21/00
CPC分类号： H01L21/76843 , C23C16/44 , H01L21/67207 , H01L21/68742 , H01L21/76831 , H01L21/76861 , H01L21/76864 , H01L23/53238 , H01L23/53295 , H01L2924/0002 , H01L2924/09701 , H01L2924/12044 , H01L2924/00
摘要： A semiconductor manufacturing apparatus, when a barrier film and a copper film are formed along a recess in an insulating film by using an alloy layer of copper and addictive metal, e.g., Mn, and copper wiring is embedded therein, reduces Mn in the copper film to suppress an increase in wiring resistance. A vacuum transfer module is connected, through a load lock chamber, to a loader module for transferring a wafer with respect to a carrier. A formic acid treatment module supplying formic acid vapor as an organic acid to the wafer and a module forming a film of Cu, e.g., by CVD are connected to the vacuum transfer module to configure an apparatus manufacturing a semiconductor. The wafer W subjected to alloy layer formation and then, e.g., to annealing is transferred into the apparatus, and treatment with formic acid is performed followed by Cu film formation.
摘要翻译：半导体制造装置，通过使用例如Mn的铜和上釉金属的合金层，在绝缘膜中的凹部形成阻挡膜和铜膜，并且嵌入铜布线，从而减少铜膜中的Mn 以抑制布线电阻的增加。真空传递模块通过负载锁定室连接到用于相对于载体传送晶片的加载器模块。向晶片供给作为有机酸的甲酸蒸气的甲酸处理组件和例如通过CVD形成Cu膜的模块连接到真空转印模块以构造制造半导体的装置。进行合金层形成然后例如退火的晶片W被转移到装置中，然后用甲酸处理，然后进行Cu膜形成。

7. 发明授权

US07670753B2 Lithographic printing plate precursor 失效
标题翻译：平版印刷版前体
公开(公告)号：US07670753B2
公开(公告)日：2010-03-02
申请号：US11573733
申请日：2005-08-17
申请人： Yasuhiko Kojima
发明人： Yasuhiko Kojima
IPC分类号： G03F7/00 , G03C1/00
CPC分类号： B41C1/10 , G03F7/11
摘要： To provide a lithographic printing plate precursor which generates no stains in the non-image area and is also excellent in development latitude. Disclosed is a lithographic printing plate precursor comprising a support and a photosensitive layer, said lithographic printing plate precursor further comprising a subbing layer containing a maleamic acid (co)polymer, in which at least one hydrogen atom on a nitrogen atom is substituted with an onium group, provided between the photosensitive layer and the support.
摘要翻译：为了提供在非图像区域中不产生污渍的平版印刷版原版，并且显影性也优异。公开了一种包含支持体和感光层的平版印刷版原版，所述平版印刷版前体还包含含有马来酰胺酸（共）聚合物的底层，其中氮原子上的至少一个氢原子被鎓组，设置在感光层和支撑体之间。

8. 发明申请

US20090134536A1 Granulator and method of granulation using the same 有权
标题翻译：造粒机及造粒方法使用
公开(公告)号：US20090134536A1
公开(公告)日：2009-05-28
申请号：US12290416
申请日：2008-10-30
申请人： Yasuhiko Kojima , Takahiro Yanagawa
发明人： Yasuhiko Kojima , Takahiro Yanagawa
IPC分类号： B29B9/00
CPC分类号： B01J2/16 , B01J2/003 , B01J2/02 , B01J2/04 , Y10T428/12181 , Y10T428/2982 , Y10T428/2991
摘要： A granulator, having: a granulation unit having a bottom floor with a perforated plate as its bottom part; an upper air-supplying pipe for supplying a fluidizing air to the bottom floor of the granulation unit; a lower air-supplying pipe; air-spouting pipes, each of which is branched from the lower air-supplying pipe, and has an opening in the bottom floor of the perforated plate, for jetting the air into the granulation unit; and spray nozzles for spraying a granulation raw material liquid, which each are provided in the center of an air outlet of the air-spouting pipe, or a granulator, having: the bottom floor; the air-supplying pipe; and spray nozzles for spraying a granulation raw material liquid, which each are provided in an opening in the bottom floor of the perforated plate, and use a high-pressure atomizing air as an auxiliary gas, wherein, in each granulator, the spray nozzles are formed in triangular arrangement.
摘要翻译：造粒机，具有：造粒单元，具有底板，多孔板作为底部; 用于向造粒单元的底层供给流化空气的上部供气管; 下供气管; 排气管，其分别从下供气管分支，并且在多孔板的底板中具有用于将空气喷射到造粒单元中的开口; 以及喷射喷嘴，用于喷射造粒原料液体，每个制粒原料液体设置在排气管的出气口的中心，或造粒机，具有：底层; 供气管; 以及喷射喷嘴，用于喷射造粒原料液体，其分别设置在多孔板的底板的开口中，并且使用高压雾化空气作为辅助气体，其中，在每个造粒机中，喷嘴为形成三角形排列。

9. 发明授权

US07498464B2 Method and apparatus for synthesizing urea 有权
标题翻译：尿素合成方法和装置
公开(公告)号：US07498464B2
公开(公告)日：2009-03-03
申请号：US11421002
申请日：2006-05-30
申请人： Yasuhiko Kojima
发明人： Yasuhiko Kojima
IPC分类号： C07C273/04
CPC分类号： C07C273/04 , B01J2219/00006
摘要： In a process and an apparatus for synthesizing urea which synthesize urea from ammonia and carbon dioxide, the operating condition can be grasped easily and with good accuracy. A process for synthesizing urea which includes: a reaction step of obtaining a urea synthesis solution which contains urea, unreacted ammonia, unreacted carbon dioxide and water by causing ammonia and carbon dioxide to react with each other; a stripping step of separating a gas mixture containing the unreacted ammonia and the unreacted carbon dioxide by stripping the urea synthesis solution by using at least a portion of raw material carbon dioxide; a condensing step of obtaining a condensed liquid by condensing the gas mixture in an absorbing medium while cooling the gas mixture; a recycling step of recycling the condensed liquid to the reaction step; and a step of measuring the density of the condensed liquid online. An apparatus for carrying out this process is provided.
摘要翻译：在从氨和二氧化碳合成尿素的合成尿素的方法和装置中，可以容易且准确地掌握操作条件。一种合成尿素的方法，包括：通过使氨和二氧化碳相互反应获得含有尿素，未反应氨，未反应的二氧化碳和水的尿素合成溶液的反应步骤; 通过使用至少一部分原料二氧化碳汽提尿素合成溶液来分离含有未反应氨和未反应二氧化碳的气体混合物的汽提步骤; 冷凝步骤，通过在吸收介质中冷凝气体混合物同时冷却气体混合物来获得冷凝液体; 回收步骤，将冷凝的液体再循环到反应步骤; 以及在线测量浓缩液体的密度的步骤。提供了一种用于执行该过程的装置。

10. 发明申请

US20090036712A1 APPARATUS FOR SYNTHESIZING UREA 有权
标题翻译：用于合成尿素的装置
公开(公告)号：US20090036712A1
公开(公告)日：2009-02-05
申请号：US11909744
申请日：2006-04-24
申请人： Yasuhiko Kojima
发明人： Yasuhiko Kojima
IPC分类号： C07C273/00 , B01J19/00
CPC分类号： B01D3/343 , B01D5/003 , C07C273/04
摘要： It is intended to enable more smooth operation in an apparatus for synthesizing urea by circumventing the downward flow of a urea synthesis solution which is a gas-liquid two-phase flow and stabilizing the flow of the urea synthesis solution still remaining the gas-liquid two-phase flow and to reduce energy loss by giving smaller flow resistance. The present invention provides an apparatus for synthesizing urea including: a synthesis reactor for reacting NH3 with CO2 to obtain a urea synthesis solution containing urea, unreacted NH3, unreacted CO2, and water; a stripper for stripping the urea synthesis solution with use of at least a part of raw material CO2 to separate a gas mixture containing the unreacted NH3 and the unreacted CO2; a vertical submerged condenser having a shell and tube structure for condensing the gas mixture in an absorbing medium on the shell side while cooling the gas mixture with a cooling medium passing through the tube side; and recycling means for recycling a liquid obtained from this condenser to the synthesis reactor, wherein the synthesis reactor is a horizontal type, and wherein piping for sending the urea synthesis solution from the synthesis reactor to the stripper runs substantially horizontally and/or upward.
摘要翻译：旨在通过绕过作为气液两相流的尿素合成溶液的向下流动并使仍然保留气液二的尿素合成溶液的流动稳定化，在用于合成尿素的装置中更加平稳地操作通过提供较小的流动阻力来减少能量损失。本发明提供了一种用于合成尿素的装置，包括：用于使NH 3与CO 2反应的合成反应器，以获得含有尿素，未反应的NH 3，未反应的CO 2和水的尿素合成溶液; 汽提器，用于使用至少一部分原料CO 2来分离含有未反应的NH 3和未反应的CO 2的气体混合物的尿素合成溶液; 具有壳体和管结构的垂直浸没式冷凝器，用于在壳体侧的吸收介质中冷凝气体混合物，同时用通过管侧的冷却介质冷却气体混合物; 以及用于将从该冷凝器获得的液体再循环到合成反应器的再循环装置，其中合成反应器是水平型，并且其中用于将尿素合成溶液从合成反应器输送到汽提器的管道基本上水平和/或向上运行。

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