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    • 1. 发明授权
    • Surface defect inspection method and apparatus
    • 表面缺陷检查方法及装置
    • US08502966B2
    • 2013-08-06
    • US13646066
    • 2012-10-05
    • Kenichi ShitaraHiroshi Nakajima
    • Kenichi ShitaraHiroshi Nakajima
    • G01N21/00
    • G01N21/9501G01N21/47
    • The present invention provides an apparatus and method which enable detecting a microscopic defect sensitively by efficiently collecting and detecting scattering light from a defect in a wider region without enlarging the apparatus. In the apparatus for inspecting a defect on a surface of a sample, including illumination means which irradiates a surface of a sample with laser, reflected light detection means which detects reflected light from the sample, and signal processing means which processes a detected signal and detecting a defect on the sample, the reflected light detection means is configured to include a scattering light detection unit which collects scattering light components of the reflected light from the sample by excluding specularly reflected light components by using an aspheric flannel lens and detecting the scattering light components.
    • 本发明提供了一种能够通过在不扩大设备的情况下有效地收集和检测来自较宽区域的缺陷的散射光而敏感地检测微观缺陷的装置和方法。 在用于检查样品表面上的缺陷的装置中,包括用激光照射样品表面的照射装置,检测来自样品的反射光的反射光检测装置和处理检测信号的信号处理装置, 反射光检测装置被配置为包括:散射光检测单元,其通过使用非球面法兰绒透镜排除镜面反射光分量并且检测散射光分量来收集来自样品的反射光的散射光分量 。
    • 2. 发明授权
    • Surface defect inspection method and apparatus
    • 表面缺陷检查方法及装置
    • US08294888B2
    • 2012-10-23
    • US12855873
    • 2010-08-13
    • Kenichi ShitaraHiroshi Nakajima
    • Kenichi ShitaraHiroshi Nakajima
    • G01N21/00
    • G01N21/9501G01N21/47
    • The present invention provides an apparatus and method which enable detecting a microscopic defect sensitively by efficiently collecting and detecting scattering light from a defect in a wider region without enlarging the apparatus. In the apparatus for inspecting a defect on a surface of a sample, including illumination means which irradiates a surface of a sample with laser, reflected light detection means which detects reflected light from the sample, and signal processing means which processes a detected signal and detecting a defect on the sample, the reflected light detection means is configured to include a scattering light detection unit which collects scattering light components of the reflected light from the sample by excluding specularly reflected light components by using an aspheric flannel lens and detecting the scattering light components.
    • 本发明提供了一种能够通过在不扩大设备的情况下有效地收集和检测来自较宽区域的缺陷的散射光而敏感地检测微观缺陷的装置和方法。 在用于检查样品表面上的缺陷的装置中,包括用激光照射样品表面的照射装置,检测来自样品的反射光的反射光检测装置和处理检测信号的信号处理装置, 反射光检测装置被配置为包括:散射光检测单元,其通过使用非球面法兰绒透镜排除镜面反射光分量并且检测散射光分量来收集来自样品的反射光的散射光分量 。
    • 3. 发明授权
    • Optical surface defect inspection apparatus and optical surface defect inspection method
    • 光学表面缺陷检查装置和光学表面缺陷检查方法
    • US08547547B2
    • 2013-10-01
    • US13213116
    • 2011-08-19
    • Shintaro TamuraMasanori FukawaAyumu IshiharaKenichi ShitaraHiroshi Nakajima
    • Shintaro TamuraMasanori FukawaAyumu IshiharaKenichi ShitaraHiroshi Nakajima
    • G01N21/00
    • G01N21/00G01N21/8806G01N21/9501G01N21/9506G01N2201/0833
    • The present invention is to provide an optical surface defect inspection apparatus or an optical surface defect inspection method that can improve a signal-to-noise ratio according to a multi-segmented cell method without performing autofocus operations, and can implement highly sensitive inspection. The present invention is an optical surface defect inspection apparatus or an optical surface defect inspection method in which an inspection beam is applied onto a test subject, an image of a scattered light from the surface of the test subject is formed on a photo-detector, and a defect on the surface of the test subject is inspected based on an output from the photo-detector. The photo-detector has an optical fiber bundle. One end thereof forms a circular light receiving surface to receive the scattered light. The other end thereof is connected to a plurality of light receiving devices. The optical fiber bundle is divided into a plurality of fan-shaped cells in the light receiving surface, and connected to the light emitting devices in units of the cells for performing the inspection based on the outputs of the plurality of cells.
    • 本发明提供一种光学表面缺陷检查装置或光学表面缺陷检查方法,其可以在不进行自动对焦操作的情况下,根据多分段单元法提高信噪比,并且可以实现高度敏感的检查。 本发明是一种光学表面缺陷检查装置或光学表面缺陷检查方法,其中将检查光束施加到测试对象上,在光检测器上形成来自受检者表面的散射光的图像, 并且基于光电检测器的输出来检查测试对象的表面上的缺陷。 光检测器具有光纤束。 其一端形成圆形光接收表面以接收散射光。 其另一端连接到多个光接收装置。 光纤束在光接收表面被分成多个扇形单元,并且以基于多个单元的输出执行检查的单元为单位连接到发光器件。
    • 5. 发明申请
    • OPTICAL SURFACE DEFECT INSPECTION APPARATUS AND OPTICAL SURFACE DEFECT INSPECTION METHOD
    • 光学表面缺陷检查装置和光学表面缺陷检查方法
    • US20120075625A1
    • 2012-03-29
    • US13213116
    • 2011-08-19
    • Shintaro TAMURAMasanori FukawaAyumu IshiharaKenichi ShitaraHiroshi Nakajima
    • Shintaro TAMURAMasanori FukawaAyumu IshiharaKenichi ShitaraHiroshi Nakajima
    • G01N21/88
    • G01N21/00G01N21/8806G01N21/9501G01N21/9506G01N2201/0833
    • The present invention is to provide an optical surface defect inspection apparatus or an optical surface defect inspection method that can improve a signal-to-noise ratio according to a multi-segmented cell method without performing autofocus operations, and can implement highly sensitive inspection. The present invention is an optical surface defect inspection apparatus or an optical surface defect inspection method in which an inspection beam is applied onto a test subject, an image of a scattered light from the surface of the test subject is formed on a photo-detector, and a defect on the surface of the test subject is inspected based on an output from the photo-detector. The photo-detector has an optical fiber bundle. One end thereof forms a circular light receiving surface to receive the scattered light. The other end thereof is connected to a plurality of light receiving devices. The optical fiber bundle is divided into a plurality of fan-shaped cells in the light receiving surface, and connected to the light emitting devices in units of the cells for performing the inspection based on the outputs of the plurality of cells.
    • 本发明提供一种光学表面缺陷检查装置或光学表面缺陷检查方法,其可以在不进行自动对焦操作的情况下,根据多分段单元法提高信噪比,并且可以实现高度敏感的检查。 本发明是一种光学表面缺陷检查装置或光学表面缺陷检查方法,其中将检查光束施加到测试对象上,在光检测器上形成来自受检者表面的散射光的图像, 并且基于光电检测器的输出来检查测试对象的表面上的缺陷。 光检测器具有光纤束。 其一端形成圆形光接收表面以接收散射光。 其另一端连接到多个光接收装置。 光纤束在光接收表面被分成多个扇形单元,并且以基于多个单元的输出执行检查的单元为单位连接到发光器件。
    • 7. 发明授权
    • Impeller manufacturing method
    • 叶轮制造方法
    • US08590150B2
    • 2013-11-26
    • US13805021
    • 2011-10-25
    • Khanhson PhamHiroshi Nakajima
    • Khanhson PhamHiroshi Nakajima
    • B21D51/16
    • B23K31/02B23K2101/001F04D29/023F04D29/284F05D2230/232Y10T29/49316Y10T29/49968
    • The present invention relates to a method of joining a hub 11 and a shroud 12 of an impeller 10, either one of which has blades 13 integrally formed thereon, by welding. During the welding, in an upright state in which the hub 11 is placed to face a mount surface, the hub 11 and the shroud 12 are placed on top of each other to form an assembled body 10. Welding is performed on the assembled body 10 covered with a heat insulating jacket 30(a to g), the jacket 30 covering the assembled body 10 except an open region (OP) and an inflow port 14IN required for welding. When welding of one open region OP is completed, a new open region OP is formed by moving the heat insulating jacket 30 with respect to the assembled body, and then the next welding is performed.
    • 本发明涉及一种将叶轮10的轮毂11和护罩12连接起来的方法,叶轮10中的任一个具有通过焊接一体形成的叶片13。 在焊接期间,在轮毂11被放置成面向安装表面的直立状态下,轮毂11和护罩12被放置在彼此的顶部以形成组装体10.在组装体10上进行焊接 覆盖有隔热护套30(a至g),除了开放区域(OP)和焊接所需的流入端口14IN之外,护套30覆盖组装体10。 当一个开放区域OP的焊接完成时,通过相对于组装体移动隔热套30而形成新的开放区域OP,然后进行下一次焊接。