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1. 发明授权

US07550180B2 Plasma treatment method 失效
标题翻译：等离子体处理方法
公开(公告)号：US07550180B2
公开(公告)日：2009-06-23
申请号：US12055431
申请日：2008-03-26
申请人： Toshiyasu Shirasuna , Tatsuyuki Aoike , Kazuyoshi Akiyama , Hitoshi Murayama , Takashi Otsuka , Daisuke Tazawa , Kazuto Hosoi , Yukihiro Abe
发明人： Toshiyasu Shirasuna , Tatsuyuki Aoike , Kazuyoshi Akiyama , Hitoshi Murayama , Takashi Otsuka , Daisuke Tazawa , Kazuto Hosoi , Yukihiro Abe
IPC分类号： H01L21/00 , C23C16/00
CPC分类号： C23C16/24 , C23C16/505 , H01J37/32082 , H01J37/32183 , H05H1/46
摘要： In a plasma treatment method of and apparatus for treating the surface of a treatment target substrate by utilizing glow discharge produced by supplying high-frequency power into an inside-evacuated reactor through a high-frequency power supply means, a plurality of impedance regulation means for regulating impedances on the side of the reactor and on the side of the high-frequency power supply means are provided correspondingly to the impedances of a plurality of reactors, and the high-frequency power is supplied into the reactors via the impedance regulation means corresponding to the reactors. Plasma treatment can be made in a good efficiency and a low cost on a plurality of reactors having different impedances.
摘要翻译：在通过利用通过高频电源装置将高频电力提供给内部抽真空电抗器而产生的辉光放电来处理目标衬底表面的等离子体处理方法和装置中，多个阻抗调节装置对应于多个电抗器的阻抗设置在电抗器一侧和高频电源装置一侧上的调节阻抗，并且高频电力通过对应于反应堆。可以在具有不同阻抗的多个反应器中以高效率和低成本进行等离子体处理。

2. 发明申请

US20080271676A1 PLASMA TREATMENT METHOD AND PLASMA TREATMENT APPARATUS 失效
标题翻译：等离子体处理方法和等离子体处理装置
公开(公告)号：US20080271676A1
公开(公告)日：2008-11-06
申请号：US12055431
申请日：2008-03-26
申请人： Toshiyasu Shirasuna , Tatsuyuki Aoike , Kazuyoshi Akiyama , Hitoshi Murayama , Takashi Otsuka , Daisuke Tazawa , Kazuto Hosoi , Yukihiro Abe
发明人： Toshiyasu Shirasuna , Tatsuyuki Aoike , Kazuyoshi Akiyama , Hitoshi Murayama , Takashi Otsuka , Daisuke Tazawa , Kazuto Hosoi , Yukihiro Abe
IPC分类号： C23C16/00
CPC分类号： C23C16/24 , C23C16/505 , H01J37/32082 , H01J37/32183 , H05H1/46
摘要： In a plasma treatment method of and apparatus for treating the surface of a treatment target substrate by utilizing glow discharge produced by supplying high-frequency power into an inside-evacuated reactor through a high-frequency power supply means, a plurality of impedance regulation means for regulating impedances on the side of the reactor and on the side of the high-frequency power supply means are provided correspondingly to the impedances of a plurality of reactors, and the high-frequency power is supplied into the reactors via the impedance regulation means corresponding to the reactors. Plasma treatment can be made in a good efficiency and a low cost on a plurality of reactors having different impedances.
摘要翻译：在通过利用通过高频电源装置将高频电力提供给内部抽真空电抗器而产生的辉光放电来处理目标衬底表面的等离子体处理方法和装置中，多个阻抗调节装置对应于多个电抗器的阻抗设置在电抗器一侧和高频电源装置一侧上的调节阻抗，并且高频电力通过对应于反应堆。可以在具有不同阻抗的多个反应器中以高效率和低成本进行等离子体处理。

3. 发明授权

US06486045B2 Apparatus and method for forming deposited film 失效
标题翻译：用于形成沉积膜的装置和方法
公开(公告)号：US06486045B2
公开(公告)日：2002-11-26
申请号：US09851552
申请日：2001-05-10
申请人： Takashi Otsuka , Tatsuyuki Aoike , Toshiyasu Shirasuna , Kazuyoshi Akiyama , Hitoshi Murayama , Daisuke Tazawa , Kazuto Hosoi
发明人： Takashi Otsuka , Tatsuyuki Aoike , Toshiyasu Shirasuna , Kazuyoshi Akiyama , Hitoshi Murayama , Daisuke Tazawa , Kazuto Hosoi
IPC分类号： H01L2120
CPC分类号： H01J37/32082 , C23C16/24 , C23C16/507
摘要： In order to make possible formation of a deposited film of a relatively large area at a treatment rate which could not accomplished by the plasma process of the prior art, and in order to make possible stable production of the deposited film without variation in film quality, in an apparatus and a method for forming a deposited film, a part of a reaction vessel is formed of a dielectric member, at least one high-frequency electrode is arranged so as to face at least one substrate with interposition of the dielectric member, an earth shield is arranged so as to cover the reaction vessel and the high-frequency electrode, plasma is generated between the high-frequency electrode and the substrate, and a deposited film is formed under the conditions in which the following equation: 0.8×(&egr;2/d3)
摘要翻译：为了可能以现有技术的等离子体处理不能实现的处理速率形成相对较大面积的沉积膜，为了使膜的质量不变，可以稳定地生产沉积膜，在用于形成沉积膜的装置和方法中，反应容器的一部分由电介质构成，至少一个高频电极布置成面对至少一个具有电介质构件的衬底，布置覆盖反应容器和高频电极的接地屏蔽层，在高频电极和基板之间产生等离子体，并且在满足以下等式的条件下形成沉积膜：其中d1 是介电部件的厚度，d2是从高频电极表面到电介质部件的距离，d3是与高频电极表面的距离 ncy电极到接地屏蔽的内表面，epsi1是电介质构件的介电常数，epsi2是反应容器和接地屏蔽之间的空间的介电常数。

4. 发明授权

US06761128B2 Plasma treatment apparatus 失效
标题翻译：等离子体处理装置
公开(公告)号：US06761128B2
公开(公告)日：2004-07-13
申请号：US09899188
申请日：2001-07-06
申请人： Toshiyasu Shirasuna , Tatsuyuki Aoike , Kazuyoshi Akiyama , Hitoshi Murayama , Takashi Otsuka , Daisuke Tazawa , Kazuto Hosoi , Yukihiro Abe
发明人： Toshiyasu Shirasuna , Tatsuyuki Aoike , Kazuyoshi Akiyama , Hitoshi Murayama , Takashi Otsuka , Daisuke Tazawa , Kazuto Hosoi , Yukihiro Abe
IPC分类号： H01L2100
CPC分类号： C23C16/24 , C23C16/505 , H01J37/32082 , H01J37/32183 , H05H1/46
摘要： In a plasma treatment method of and apparatus for treating the surface of a treatment target substrate by utilizing glow discharge produced by supplying high-frequency power into an inside-evacuated reactor through a high-frequency power supply means, a plurality of impedance regulation means for regulating impedances on the side of the reactor and on the side of the high-frequency power supply means are provided correspondingly to the impedances of a plurality of reactors, and the high-frequency power is supplied into the reactors via the impedance regulation means corresponding to the reactors. Plasma treatment can be made in a good efficiency and a low cost on a plurality of reactors having different impedances.
摘要翻译：在通过利用通过高频电源装置将高频电力提供给内部抽真空电抗器而产生的辉光放电来处理目标衬底表面的等离子体处理方法和装置中，多个阻抗调节装置对应于多个电抗器的阻抗设置在电抗器一侧和高频电源装置一侧上的调节阻抗，并且高频电力通过对应于反应堆。可以在具有不同阻抗的多个反应器中以高效率和低成本进行等离子体处理。

5. 发明授权

US06250251B1 Vacuum processing apparatus and vacuum processing method 有权
标题翻译：真空加工设备和真空加工方法
公开(公告)号：US06250251B1
公开(公告)日：2001-06-26
申请号：US09282462
申请日：1999-03-31
申请人： Kazuyoshi Akiyama , Tatsuyuki Aoike , Toshiyasu Shirasuna , Hitoshi Murayama , Takashi Otsuka , Daisuke Tazawa , Kazuto Hosoi
发明人： Kazuyoshi Akiyama , Tatsuyuki Aoike , Toshiyasu Shirasuna , Hitoshi Murayama , Takashi Otsuka , Daisuke Tazawa , Kazuto Hosoi
IPC分类号： C23C1600
CPC分类号： H01J37/32431 , C23C16/24 , C23C16/4404
摘要： An object of the present invention is to provide a vacuum processing apparatus and a vacuum processing method capable of effectively preventing film peeling generated in a reaction vessel to provide a deposited film of excellent quality with reduced spherical projections. The present invention provides a vacuum processing apparatus or method utilizing a vessel, means for supplying a gas into the vessel and means for supplying an electric power and in which the gas is decomposed by the electric power to generate a discharge, wherein the surface of a member confronted with the discharge satisfies the conditions of (1) the ten-point mean roughness Rz with respect to a reference length of 2.5 mm according to the JIS standard being in a range of not smaller than 5 &mgr;m and not larger than 200 &mgr;m, and (2) the mean spacing S of adjacent local peaks according to the JIS standard being in a range of not smaller than 5 &mgr;m and not larger than 100 &mgr;m.
摘要翻译：本发明的目的是提供一种真空处理装置和真空处理方法，其能够有效地防止在反应容器中产生的膜剥离，从而提供具有减小的球形突起的优质的沉积膜。本发明提供了一种使用容器的真空处理装置或方法，用于向容器供给气体的装置和用于供给电力的装置，其中气体被电力分解以产生排放，其中，面对放电的构件满足以下条件：（1）根据JIS标准的十点平均粗糙度Rz相对于2.5mm的参考长度在不小于5μm且不大于200μm的范围内，和（2）根据JIS标准的相邻局部峰的平均间隔S在不小于5μm且不大于100μm的范围内。

6. 发明申请

US20120052409A1 METHOD FOR GENERATING AN ELECTRIC POWER WITH USE OF A FUEL CELL AND A FUEL CELL 有权
标题翻译：使用燃料电池和燃料电池产生电力的方法
公开(公告)号：US20120052409A1
公开(公告)日：2012-03-01
申请号：US13219303
申请日：2011-08-26
申请人： Tomoyuki KOMORI , Takashi Otsuka , Atsushi Omote
发明人： Tomoyuki KOMORI , Takashi Otsuka , Atsushi Omote
IPC分类号： H01M8/04 , H01M8/10
CPC分类号： H01M4/9016 , H01M8/0293 , H01M8/086 , H01M8/1016
摘要： A fuel cell capable of operating under a high temperature environment and under a low humidity environment and a method for generating an electric power with use of the fuel cell. The fuel cell comprises an electrolyte membrane, an anode electrode, and an cathode electrode. In each of the anode electrode and the cathode electrode, a catalyst is held on a catalyst support, and an electrolyte covers the catalyst and the catalyst support. The cathode electrolyte is composed of SnO2, NH3, H2O, and H3PO4. A molar ratio X represented by X═NH3/SnO2 is not less than 0.2 and not more than 5, and a molar ratio Y represented by Y═P/Sn is not less than 1.6 and not more than 3.
摘要翻译：一种能够在高温环境下和低湿度环境下工作的燃料电池和使用该燃料电池产生电力的方法。燃料电池包括电解质膜，阳极电极和阴极电极。在阳极电极和阴极电极中，催化剂保持在催化剂载体上，并且电解质覆盖催化剂和催化剂载体。阴极电解质由SnO2，NH3，H2O和H3PO4组成。由X = NH 3 / SnO 2表示的摩尔比X不小于0.2且不大于5，由Y = P / Sn表示的摩尔比Y不小于1.6且不大于3。

7. 发明申请

US20110053044A1 PROTON-CONDUCTING STRUCTURE AND METHOD FOR MANUFACTURING THE SAME 有权
公开(公告)号：US20110053044A1
公开(公告)日：2011-03-03
申请号：US12871266
申请日：2010-08-30
申请人： Yuji Zenitani , Takashi Otsuka , Tomoko Suzuki , Tomoyuki Komori
发明人： Yuji Zenitani , Takashi Otsuka , Tomoko Suzuki , Tomoyuki Komori
IPC分类号： H01M8/10 , H01M8/02
CPC分类号： H01M8/04701 , G01N27/4074 , H01B1/122 , H01M8/04089 , H01M8/1016 , H01M8/12 , H01M2300/0068 , H01M2300/0094 , Y02P70/56
摘要： A proton-conducting structure that exhibits favorable proton conductivity in the temperature range of not lower than 100° C., and a method for manufacturing the same are provided. After a pyrophosphate salt containing Sn, Zr, Ti or Si is mixed with phosphoric acid, the mixture is maintained at a temperature of not less than 80° C. and not more than 150° C., and thereafter maintained at a temperature of not less than 200° C. and not more than 400° C. to manufacture a proton-conducting structure. The proton-conducting structure of the present invention has a core made of tin pyrophosphate, and a coating layer formed on the surface of the core, the coating layer containing Sn and O, and having a coordination number of O with respect to Sn of grater than 6.

8. 发明申请

US20080238561A1 PIEZOELECTRIC OSCILLATOR 审中-公开
标题翻译：压电振荡器
公开(公告)号：US20080238561A1
公开(公告)日：2008-10-02
申请号：US12058231
申请日：2008-03-28
申请人： Takashi Otsuka , Hisato Takeuchi
发明人： Takashi Otsuka , Hisato Takeuchi
IPC分类号： H03B5/32 , H03B5/36
CPC分类号： H03B5/364
摘要： For a piezoelectric oscillator according to the present invention, an oscillator circuit includes: a piezoelectric vibrator; an NMOS transistor and a PMOS transistor that constitute an amplifier connected in parallel to the piezoelectric vibrator; and load capacitors connected in parallel to the piezoelectric vibrator. The gate terminals of the NMOS transistor and the PMOS transistor, which are constituents of the amplifier, are connected by a DC cut capacitor, and the gate terminal of the NMOS transistor and the output terminal of the amplifier are connected by a feedback resistor. An arbitrary bias voltage, to be applied to the gate terminal of the PMOS transistor via a high-frequency elimination resistor, is generated by a circuit provided by a diode-connected, second PMOS transistor.
摘要翻译：对于根据本发明的压电振荡器，振荡器电路包括：压电振动器; 构成与压电振子并联连接的放大器的NMOS晶体管和PMOS晶体管; 并将负载电容并联连接到压电振动器。作为放大器的组成部分的NMOS晶体管和PMOS晶体管的栅极端子由直流切断电容器连接，NMOS晶体管的栅极端子和放大器的输出端子通过反馈电阻器连接。通过由二极管连接的第二PMOS晶体管提供的电路产生经由高频消除电阻施加到PMOS晶体管的栅极端子的任意偏置电压。

9. 发明授权

US07313980B2 Operating position select device for automatic transmission 失效
标题翻译：自动变速箱的操作位置选择装置
公开(公告)号：US07313980B2
公开(公告)日：2008-01-01
申请号：US11248609
申请日：2005-10-13
申请人： Takashi Otsuka , Yukitsugu Hirota , Kensuke Osamura , Masaharu Nagano , Shinya Kobayashi
发明人： Takashi Otsuka , Yukitsugu Hirota , Kensuke Osamura , Masaharu Nagano , Shinya Kobayashi
IPC分类号： F16H59/00 , F16H61/00 , F16H63/00 , B60K17/04 , B60K17/12
CPC分类号： F16H59/10 , F16H61/12 , F16H61/2807 , F16H2061/301 , F16H2061/323 , F16H2061/326 , Y10T74/19251 , Y10T74/2003 , Y10T74/20085
摘要： An operating position select device has a select lever unit, a mode shift unit to shift operation modes of the automatic transmission, and an assist actuator controlled by a control unit. A first connecting member of the select lever and a second connecting member of the mode shift unit are relatively movable to a limit amount to each other and integrally movable beyond the limit amount with each other. The positions of the members are detected by an operating position sensor and an assist position sensor, respectively. The actuator is driven so that a difference between an operating position and an assist position may be reduced, but prohibited from driving when the difference is kept out of a permissible range for a predetermined period during rest of the actuator.
摘要翻译：操作位置选择装置具有选择杆单元，用于移动自动变速器的操作模式的模式换档单元和由控制单元控制的辅助致动器。选择杆的第一连接构件和模式换档单元的第二连接构件相对于彼此相对移动到极限量并且能够彼此超过极限量一体地移动。构件的位置分别由操作位置传感器和辅助位置传感器检测。致动器被驱动，使得可以减小操作位置和辅助位置之间的差异，但是当在致动器的休息期间将差超过允许范围达预定时间段时禁止驱动。

10. 发明申请

US20050066759A1 Operating position select device for automatic transmission 审中-公开
标题翻译：自动变速箱的操作位置选择装置
公开(公告)号：US20050066759A1
公开(公告)日：2005-03-31
申请号：US10950628
申请日：2004-09-28
申请人： Yukitsugu Hirota , Takashi Otsuka
发明人： Yukitsugu Hirota , Takashi Otsuka
IPC分类号： B60K20/00 , B60K20/02 , F16H59/00 , F16H59/10 , F16H61/24 , F16H61/28
CPC分类号： F16H61/32 , F16H59/105 , F16H2061/323 , F16H2061/326 , Y10T74/20018 , Y10T74/2003
摘要： An operating position select device for an automatic transmission has a select lever unit having a select lever, a mode shift unit mounted on the automatic transmission to shift operation modes of the automatic transmission, a first and second control cables and others for mechanically connecting the select lever and the mode shift unit, and an actuator for outputting assist torque to shift the mode shift unit. An operating angle sensor detects an operating angle of the select lever and an assist angle sensor detects an assist angle of the assist actuator. A control unit computes a non-coupling amount of the control cables and others to determine a compensation amount and controls drive current supplied to the assist actuator based on the operating angle, the assist angle, and the compensation amount.
摘要翻译：用于自动变速器的操作位置选择装置具有选择杆单元，其具有选择杆，安装在自动变速器上的换档单元以移动自动变速器的操作模式，第一和第二控制线等，用于机械地连接选择杠杆和模式换档单元，以及用于输出辅助转矩以移动模式换档单元的致动器。操作角度传感器检测选择杆的操作角度，辅助角度传感器检测辅助致动器的辅助角度。控制单元计算控制电缆等的非耦合量，以确定补偿量，并根据操作角度，辅助角度和补偿量来控制提供给辅助致动器的驱动电流。

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