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1. 发明授权

US07105902B2 Optical device having movable portion and method for manufacturing the same 失效
标题翻译：具有可动部的光学装置及其制造方法
公开(公告)号：US07105902B2
公开(公告)日：2006-09-12
申请号：US10752588
申请日：2004-01-08
申请人： Kazushi Asami , Kazuhiko Kano , Tetsuo Y Shioka
发明人： Kazushi Asami , Kazuhiko Kano , Tetsuo Y Shioka
IPC分类号： H01L29/82
CPC分类号： G02B26/0841
摘要： An optical device includes a semiconductor substrate having an opening, a support member disposed on the substrate, and a movable portion disposed on the opening of the substrate. The movable portion is supported by the support member so that the movable portion is movable. The device has a large scanning angle. Further, the device can scan widely at any frequency.
摘要翻译：光学装置包括具有开口的半导体衬底，设置在衬底上的支撑构件和设置在衬底的开口上的可移动部分。可移动部分由支撑构件支撑，使得可移动部分是可移动的。该装置具有较大的扫描角度。此外，该设备可以以任何频率广泛扫描。

2. 发明授权

US07900512B2 Angular rate sensor 有权
标题翻译：角速度传感器
公开(公告)号：US07900512B2
公开(公告)日：2011-03-08
申请号：US11878441
申请日：2007-07-24
申请人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
发明人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
IPC分类号： G01P9/04
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.
摘要翻译：角速率传感器包括具有形成x-y平面的第一和第二表面的压电膜，并且当角速率传感器经历围绕x方向的旋转运动时，利用科里奥利力作用的扰动质量相干振动的弹性声波。第一弹性声波通过驱动传感器在压电膜中激发，并且由与角速率传感器本身的旋转运动的角速度成比例的科里奥利力产生的第二弹性声波由检测换能器检测。角速率传感器还包括至少第一电极，其设置在压电膜的第一表面上，用于在其中激发第一弹性声波的膜的下表面处排出由于压电效应引起的表面电荷。

3. 发明申请

US20110041605A1 Angular rate sensor 有权
公开(公告)号：US20110041605A1
公开(公告)日：2011-02-24
申请号：US12923971
申请日：2010-10-19
申请人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
发明人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
IPC分类号： G01C19/56
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

4. 发明申请

US20110041604A1 Angular rate sensor 审中-公开
公开(公告)号：US20110041604A1
公开(公告)日：2011-02-24
申请号：US12923970
申请日：2010-10-19
申请人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
发明人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
IPC分类号： G01C19/56
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

5. 发明申请

US20080028855A1 Angular rate sensor 有权
标题翻译：角速度传感器
公开(公告)号：US20080028855A1
公开(公告)日：2008-02-07
申请号：US11878441
申请日：2007-07-24
申请人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
发明人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
IPC分类号： G01C19/00
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.
摘要翻译：角速率传感器包括具有形成x-y平面的第一和第二表面的压电膜，并且当角速率传感器经历围绕x方向的旋转运动时，利用科里奥利力作用的扰动质量相干振动的弹性声波。第一弹性声波通过驱动传感器在压电膜中激发，并且由与角速率传感器本身的旋转运动的角速度成比例的科里奥利力产生的第二弹性声波由检测换能器检测。角速率传感器还包括至少第一电极，其设置在压电膜的第一表面上，用于在其中激发第一弹性声波的膜的下表面处排出由于压电效应引起的表面电荷。

6. 发明授权

US08256289B2 Angular rate sensor 有权
标题翻译：角速度传感器
公开(公告)号：US08256289B2
公开(公告)日：2012-09-04
申请号：US12923971
申请日：2010-10-19
申请人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
发明人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
IPC分类号： G01P9/04
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.
摘要翻译：角速率传感器包括具有形成x-y平面的第一和第二表面的压电膜，并且当角速率传感器经历围绕x方向的旋转运动时，利用科里奥利力作用的扰动质量相干振动的弹性声波。第一弹性声波通过驱动传感器在压电膜中激发，并且由与角速率传感器本身的旋转运动的角速度成比例的科里奥利力产生的第二弹性声波由检测换能器检测。角速率传感器还包括至少第一电极，其设置在压电膜的第一表面上，用于在其中激发第一弹性声波的膜的下表面处排出由于压电效应引起的表面电荷。

7. 发明授权

US09246461B2 Manufacturing method of piezoelectric-body film, and piezoelectric-body film manufactured by the manufacturing method 有权
标题翻译：压电体膜的制造方法以及由该制造方法制造的压电体膜
公开(公告)号：US09246461B2
公开(公告)日：2016-01-26
申请号：US13380995
申请日：2010-06-30
申请人： Morito Akiyama , Kazuhiko Kano , Akihiko Teshigahara
发明人： Morito Akiyama , Kazuhiko Kano , Akihiko Teshigahara
IPC分类号： C23C14/00 , H03H3/02 , C23C14/06
CPC分类号： H03H3/02 , C23C14/0036 , C23C14/0617 , C23C14/0641 , H01L41/316 , Y10T428/24355
摘要： A method for manufacturing a piezoelectric thin film including an aluminum nitride thin film containing scandium on a substrate, the method includes: sputtering step for sputtering aluminum and scandium under an atmosphere containing at least a nitrogen gas. In the sputtering step in the method according to the present invention, a scandium content rate falls within the range from 0.5% by atom to 50% by atom when a temperature of the substrate falls within the range from 5° C. to 450° C. during the sputtering step.
摘要翻译：一种制造包括在基板上含有钪的氮化铝薄膜的压电薄膜的方法，所述方法包括：在至少含有氮气的气氛下溅射铝和钪的溅射步骤。在根据本发明的方法的溅射步骤中，当基板的温度在5℃至450℃的范围内时，钪含量率在0.5原子％至50原子的范围内在溅射步骤期间。

8. 发明申请

US20120000766A1 METHOD FOR MANUFACTURING SCANDIUM ALUMINUM NITRIDE FILM 审中-公开
标题翻译：制造氮化铝薄膜的方法
公开(公告)号：US20120000766A1
公开(公告)日：2012-01-05
申请号：US13171806
申请日：2011-06-29
申请人： Akihiko Teshigahara , Kazuhiko Kano , Morito Akiyama , Tatsuo Tabaru , Keiko Nishikubo
发明人： Akihiko Teshigahara , Kazuhiko Kano , Morito Akiyama , Tatsuo Tabaru , Keiko Nishikubo
IPC分类号： C23C14/34
CPC分类号： C23C14/0641 , C23C14/0036 , C23C14/3414
摘要： A method for manufacturing a scandium aluminum nitride film includes: sputtering a scandium aluminum alloy target under atmosphere including nitrogen gas so that a thin film is deposited on a substrate. Since the scandium aluminum nitride film is manufactured with using one alloy target, a composition of the film is maintained even when the sputtering time is long. Further, the above method is capable of being performed by a mass production sputtering apparatus.
摘要翻译：制造氮化钪膜的方法包括：在包括氮气的气氛下溅射钪铝合金靶，使得在基板上沉积薄膜。由于使用一种合金靶来制造氮化钪膜，所以即使在溅射时间长的情况下也能够保持膜的组成。此外，上述方法能够通过大规模生产溅射装置进行。

9. 发明申请

US20100219910A1 Surface acoustic wave device 有权
标题翻译：表面声波装置
公开(公告)号：US20100219910A1
公开(公告)日：2010-09-02
申请号：US12659197
申请日：2010-02-26
申请人： Hideaki Yamada , Kazuhiko Kano
发明人： Hideaki Yamada , Kazuhiko Kano
IPC分类号： H03H9/25
CPC分类号： H03H9/14547
摘要： A surface acoustic wave device is disclosed. The surface acoustic wave device includes: a substrate having a plane surface; multiple first electrodes formed on the plane surface of the substrate; and multiple second electrodes formed on the plane surface of the substrate. Each of the first and second electrodes has a predetermined closed ring shape. The first and second electrodes are concentric. The second electrodes are located radially inside or radially outside of the first electrodes.
摘要翻译：公开了一种表面声波装置。声表面波装置包括：具有平面的基板; 在基板的平面上形成多个第一电极; 以及形成在基板的平面上的多个第二电极。第一和第二电极中的每一个具有预定的闭环形状。第一和第二电极是同心的。第二电极位于第一电极的径向内侧或径向外侧。

10. 发明授权

US07129176B2 Optical device having micro lens array and method for manufacturing the same 有权
标题翻译：具有微透镜阵列的光学装置及其制造方法
公开(公告)号：US07129176B2
公开(公告)日：2006-10-31
申请号：US10759025
申请日：2004-01-20
申请人： Junji Oohara , Kazuhiko Kano , Yoshitaka Noda , Yukihiro Takeuchi , Toshiyuki Morishita
发明人： Junji Oohara , Kazuhiko Kano , Yoshitaka Noda , Yukihiro Takeuchi , Toshiyuki Morishita
IPC分类号： H01L21/027
CPC分类号： H01L27/14625 , G02B6/4249 , H01L27/14627 , H01L27/14685
摘要： An optical device includes a semiconductor substrate and an optical part having a plurality of columnar members disposed on the substrate. Each columnar member is disposed in a standing manner and adhered each other so that the optical part is provided. The optical part is integrated with the substrate. This optical part has high design freedom.
摘要翻译：光学器件包括半导体衬底和具有设置在衬底上的多个柱状构件的光学部件。每个柱状构件以立式的方式设置并彼此粘合，从而设置光学部件。光学部件与基板一体化。该光学部件具有高设计自由度。

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