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    • 1. 发明申请
    • ELECTROMAGNETIC WAVE DETECTION DEVICE
    • 电磁波检测装置
    • US20130075597A1
    • 2013-03-28
    • US13614431
    • 2012-09-13
    • Kazunori SHIOTAAkiyoshi IRISAWA
    • Kazunori SHIOTAAkiyoshi IRISAWA
    • G01J5/08G01J1/04
    • G02F1/3534G01J9/02G01J9/04G01J11/00G02B6/34G02F1/3544
    • According to the present invention, an electromagnetic wave detection device includes an optical waveguide, an electromagnetic wave input unit, and a phase difference measurement unit. According to the thus constructed electromagnetic wave detection device, an optical waveguide is a nonlinear crystal, and includes a branching portion for receiving a probe light pulse, and causing the probe light pulse to branch into two beams of branching light, and two branching light transmission portions for receiving the branching light from the branching portion, and transmitting the branching light. An electromagnetic wave input unit inputs an electromagnetic wave having a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] tilted by an angle generating Cherenkov phase matching with respect to a travel direction of the branching light into one of the two branching light transmission portions.
    • 根据本发明,电磁波检测装置包括光波导,电磁波输入单元和相位差测量单元。 根据这样构成的电磁波检测装置,光波导是非线性晶体,并且包括用于接收探测光脉冲的分支部分,并使探测光脉冲分支成两束分支光,以及两个分支光透射 用于从分支部分接收分支光并传送分支光的部分。 一个电磁波输入单元输入一个频率等于或大于0.01 [THz]并且等于或小于100 [THz]的频率的电磁波,其倾斜角相对于分支光的行进方向产生切伦科夫相位匹配的角度进入 两个分支光透射部分中的一个。
    • 2. 发明申请
    • ELECTROMAGNETIC WAVE MEASUREMENT DEVICE, MEASUREMENT METHOD, AND RECORDING MEDIUM
    • 电磁波测量装置,测量方法和记录介质
    • US20120286797A1
    • 2012-11-15
    • US13458274
    • 2012-04-27
    • Eiji KATOAkiyoshi IRISAWA
    • Eiji KATOAkiyoshi IRISAWA
    • G01R31/02
    • G01N21/8422G01N21/3563G01N21/3581G01N21/9508
    • According to the present invention, an electromagnetic wave measurement device includes an electromagnetic wave output device, an electromagnetic wave detector and a measurement unit. The electromagnetic wave output device outputs an electromagnetic wave having a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] toward a device under test including at least two layers, and the electromagnetic wave detector detects reflected electromagnetic waves which are the electromagnetic waves reflected by the respective at least two layers. The measurement unit measures the device under test based on one or both of extreme values of electric fields of the respective reflected electromagnetic waves and a time difference between timings in which the electric fields of the respective reflected electromagnetic waves take the extreme values.
    • 根据本发明,电磁波测量装置包括电磁波输出装置,电磁波检测器和测量单元。 电磁波输出装置向具有至少两层的被测设备输出频率等于或大于0.01 [THz]且等于或小于100 [THz]的电磁波,并且电磁波检测器检测反射电磁 是由相应的至少两层反射的电磁波的波。 测量单元基于各反射电磁波的电场的极值中的一个或两个以及反射电磁波的电场的极值的极值之间的时间差来测量被测设备。
    • 3. 发明申请
    • REPETITION FREQUENCY CONTROL DEVICE
    • 重复频率控制装置
    • US20120163404A1
    • 2012-06-28
    • US13310130
    • 2011-12-02
    • Tomoyu YAMASHITAAkiyoshi IRISAWA
    • Tomoyu YAMASHITAAkiyoshi IRISAWA
    • H01S3/13
    • H01S3/10046H01S3/1394
    • According to the repetition frequency control device, a master laser outputs a master laser light pulse the repetition frequency of which is controlled to a predetermined value. A slave laser outputs a slave laser light pulse. A reference comparator compares a voltage of a reference electric signal the repetition frequency of which is the predetermined value and a predetermined voltage with each other, thereby outputting a result thereof. A measurement comparator compares a voltage based on a light intensity of the slave laser light pulse and the predetermined voltage with each other, thereby outputting a result thereof. A phase difference detector detects a phase difference between the output from the reference comparator and the output from the measurement comparator. A loop filter removes a high-frequency component of an output from the phase difference detector.
    • 根据重复频率控制装置,主激光器将重复频率被控制为预定值的主激光光脉冲输出。 从激光器输出从激光脉冲。 参考比较器将重复频率为预定值的参考电信号的电压与预定电压进行比较,从而输出其结果。 测量比较器将基于从激光光脉冲的光强度和预定电压的电压彼此进行比较,从而输出其结果。 相位差检测器检测来自参考比较器的输出与测量比较器的输出之间的相位差。 环路滤波器去除相位差检测器的输出的高频分量。
    • 4. 发明申请
    • REPETITION FREQUENCY CONTROL DEVICE
    • 重复频率控制装置
    • US20120155500A1
    • 2012-06-21
    • US13299568
    • 2011-11-18
    • Tomoyu YAMASHITAAkiyoshi IRISAWA
    • Tomoyu YAMASHITAAkiyoshi IRISAWA
    • H01S3/13
    • H01S3/10046H01S3/1394
    • A repetition frequency control device includes a slave photoelectric conversion unit which converts a slave laser light pulse into a slave electrical signal, a master photoelectric conversion unit which converts a master laser light pulse into a master electrical signal, a frequency change unit which changes the repetition frequency of the master electric signal by a predetermined value, a phase comparator which detects a phase difference between the slave electric signal and the output from the frequency change unit, and a loop filter which removes a high frequency component of an output from the phase comparator, where the repetition frequency of the master laser does not undergo control based on one or both of the master electric signal and the slave electric signal.
    • 重复频率控制装置包括将从属激光光脉冲转换为从属电信号的从光电转换单元,将主激光光脉冲转换成主电信号的主光电转换单元,改变重复的频率改变单元 主电信号的频率达预定值,检测从电信号与频率改变单元的输出之间的相位差的相位比较器,以及从相位比较器去除输出的高频分量的环路滤波器 ,其中主激光器的重复频率不基于主电信号和从电信号中的一个或两个进行控制。
    • 5. 发明申请
    • SIGNAL OUTPUT DEVICE, AND OUTPUT APPARATUS OF SIGNAL SOURCE OF SIGNALS AND OF LASER BEAM PULSES
    • 信号输出装置和信号源和激光束脉冲信号源的输出装置
    • US20110170875A1
    • 2011-07-14
    • US12940131
    • 2010-11-05
    • Tomoyu YAMASHITAAkiyoshi IRISAWA
    • Tomoyu YAMASHITAAkiyoshi IRISAWA
    • H04B10/04H04L27/00
    • H03L7/22
    • A frequency converter includes a first direct digital synthesizer that receives a signal having a predetermined frequency f_master as a clock signal and further an internal frequency setting signal, and outputs an internal signal having a frequency based on the internal frequency setting signal, and a second direct digital synthesizer that receives the internal signal as a clock signal, and further an output frequency setting signal, and outputs an output signal having a frequency f_slave (=f_master−Δ) based on the output frequency setting signal. A difference between the predetermined frequency f_master and the frequency of the internal signal is larger than a difference between the predetermined frequency f_master and the frequency f_slave of the output signal.
    • 频率转换器包括:第一直接数字合成器,其接收具有预定频率f_master的信号作为时钟信号,并且还具有内部频率设置信号,并输出具有基于内部频率设置信号的频率的内部信号;以及第二直接 接收内部信号作为时钟信号的数字合成器,以及输出频率设定信号,并根据输出频率设定信号输出具有频率f_slave(= f_master-&Dgr))的输出信号。 预定频率f_master与内部信号的频率之间的差异大于预定频率f_master与输出信号的频率f_slave之差。
    • 6. 发明申请
    • ELECTROMAGNETIC WAVE MEASURING APPARATUS, MEASURING METHOD, PROGRAM, AND RECORDING MEDIUM
    • 电磁波测量装置,测量方法,程序和记录介质
    • US20110001048A1
    • 2011-01-06
    • US12731617
    • 2010-03-25
    • Shigeki NISHINAMotoki IMAMURAAkiyoshi IRISAWATomoyu YAMASHITAEiji KATO
    • Shigeki NISHINAMotoki IMAMURAAkiyoshi IRISAWATomoyu YAMASHITAEiji KATO
    • G01J5/28
    • G01N21/3581G01N21/3563
    • According to the present invention, an electromagnetic wave measurement device includes an electromagnetic wave output device, an electromagnetic wave detector, a relative position changing unit, a delay period recording unit, a phase deriving unit, a delay-corrected phase deriving unit, a sinogram deriving unit, and an image deriving unit. The electromagnetic wave output device outputs an electromagnetic wave having a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] toward a device under test and a container storing at least a part of the device under test. The electromagnetic wave detector detects the electromagnetic wave which has transmitted through the device under test. The relative position changing unit changes a relative position of an intersection at which an optical path of the electromagnetic wave transmitting through the device under test and the device under test intersect with respect to the device under test. The delay period recording unit records a delay period of the electromagnetic wave caused by a transmission of the electromagnetic wave through the container. The phase deriving unit that derives, based on a detected result by the electromagnetic wave detector, a phase in the frequency domain of the electromagnetic wave which has transmitted through the device under test. The delay-corrected phase deriving unit that derives a delay-corrected phase obtained by subtracting an integral of the delay period with respect to the frequency from the phase. The sinogram deriving unit that derives a sinogram based on a derived result by the delay-corrected phase deriving unit. The image deriving unit derives, based on the sinogram, an image of a cross section of the device under test including the intersection.
    • 根据本发明,电磁波测量装置包括电磁波输出装置,电磁波检测器,相对位置改变单元,延迟周期记录单元,相位导出单元,延迟校正相位导出单元,正弦图 导出单元和图像导出单元。 电磁波输出装置向受试装置输出频率等于或大于0.01 [THz]且等于或小于100 [THz]的电磁波,以及容纳至少部分被测器件的容器。 电磁波检测器检测已通过被测器件传输的电磁波。 相对位置改变单元改变通过被测设备传输的电磁波的光路与被测设备相对于被测设备相交的交点的相对位置。 延迟周期记录单元记录由电磁波的发射引起的电磁波的延迟时间通过容器。 基于电磁波检测器检测结果的相位导出单元,通过被测设备传输的电磁波的频域中的相位。 延迟校正相位导出单元,其导出通过从该相位减去相对于频率的延迟周期的积分而获得的延迟校正相位。 基于经延迟校正的相位导出单元的导出结果导出正弦图的正弦图导出单元。 图像导出单元基于正弦图导出被测设备的横截面的图像,包括交点。
    • 7. 发明申请
    • ELECTROMAGNETIC WAVE MEASURING APPARATUS, MEASURING METHOD, PROGRAM, AND RECORDING MEDIUM
    • 电磁波测量装置,测量方法,程序和记录介质
    • US20100295534A1
    • 2010-11-25
    • US12731483
    • 2010-03-25
    • Shigeki NISHINAMotoki IMAMURAAkiyoshi IRISAWATomoyu YAMASHITAEiji KATOKodo KAWASE
    • Shigeki NISHINAMotoki IMAMURAAkiyoshi IRISAWATomoyu YAMASHITAEiji KATOKodo KAWASE
    • G01R23/02
    • G01J5/0285G01N21/3563G01N21/3581G01N21/8806
    • According to the electromagnetic wave measurement device of the present invention, an electromagnetic wave output device outputs an electromagnetic wave having a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] toward a device under test. An electromagnetic wave detector detects the electromagnetic wave which has transmitted through the device under test. A relative position changing unit changes a relative position of an intersection across which an optical path of the electromagnetic wave transmitting through the device under test and the device under test intersect with respect to the device under test. A characteristic value deriving unit derives a characteristic value of the electromagnetic wave based on a detection result of the electromagnetic wave detector while the characteristic value is associated with an assumed relative position which is the relative position if it is assumed that the electromagnetic wave is not refracted by the device under test. A first association correction unit changes the assumed relative position to an actual relative position, which is the relative position if the refraction of the electromagnetic wave by the device under test is considered, thereby associating the result derived by the characteristic value deriving unit with the actual relative position. A corrected characteristic value deriving unit that derives the characteristic value associated with a predetermined relative position based on an output from the first association correction unit.
    • 根据本发明的电磁波测量装置,电磁波输出装置向被测设备输出等于或大于0.01 [THz]且等于或小于100 [THz]的频率的电磁波。 电磁波检测器检测已经通过被测设备的电磁波。 相对位置改变单元改变通过被测器件发送的电磁波的光路与被测器件相对于被测器件相交的相交位置的相对位置。 特征值导出单元基于电磁波检测器的检测结果导出电磁波的特征值,而如果假设电磁波未被折射,则特征值与作为相对位置的假定相对位置相关联 由被测设备 第一关联校正单元将所假定的相对位置改变为实际相对位置,如果考虑被测设备的电磁波的折射,则该相对位置是相对位置,从而将由特征值导出单元导出的结果与实际相对位置 相对位置。 校正特征值导出单元,其基于来自第一关联校正单元的输出导出与预定相对位置相关联的特征值。
    • 8. 发明申请
    • LIGHT MEASUREMENT APPARATUS AND A TRIGGER SIGNAL GENERATOR
    • 光测量装置和触发信号发生器
    • US20100294934A1
    • 2010-11-25
    • US12487876
    • 2009-06-19
    • Masaichi HASHIMOTOAkiyoshi IRISAWA
    • Masaichi HASHIMOTOAkiyoshi IRISAWA
    • G01J5/00G01R23/00
    • G01N21/3581
    • The present invention can restrain a jitter from being generated in a measurement result of light such as terahertz light which has transmitted through a device under test. A trigger signal generation device includes a first photoelectric conversion unit that applies photoelectric conversion to a probe light pulse, a second photoelectric conversion unit that applies photoelectric conversion to a pump light pulse, a first amplification unit that amplifies an output from the first photoelectric conversion unit, a second amplification unit that amplifies an output from the second photoelectric conversion unit, a trigger signal output unit that outputs a cross-correlation of outputs of the first amplification unit and the second amplification unit as a trigger signal, and a period difference adjustment unit that adjusts a difference in period between a period T3 from the output of the probe light pulse from a probe light source until the probe light pulse is fed, as the output from the first amplification unit, to the trigger signal output unit, and a period T4 from the output of the pump light pulse from a pump light source until the pump light pulse is fed, as the output of the second amplification unit, to the trigger signal output unit.
    • 本发明可以抑制在通过被测器件传输的太赫兹光等的光的测量结果中产生抖动。 触发信号生成装置具有对探测光脉冲进行光电转换的第一光电转换部,对泵浦光脉冲进行光电转换的第二光电转换部,放大第一光电转换部的输出的第一放大部 ,放大来自第二光电转换单元的输出的第二放大单元,输出第一放大单元和第二放大单元的输出的互相关作为触发信号的触发信号输出单元,以及周期差调整单元 调整从探测光源的探测光脉冲的输出到送入探测光脉冲的周期T3之间的周期的差,作为从第一放大单元的输出到触发信号输出单元的周期,以及周期 T4从输出的泵浦光脉冲从泵浦光源直到泵浦光脉冲进给, 作为第二放大单元的输出到触发信号输出单元。
    • 10. 发明申请
    • ELECTROMAGNETIC WAVE MEASURING APPARATUS, MEASUREMENT METHOD, A PROGRAM, AND A RECORDING MEDIUM
    • 电磁波测量装置,测量方法,程序和记录介质
    • US20100271001A1
    • 2010-10-28
    • US12487177
    • 2009-06-18
    • Eiji KATOShigeki NISHINAMotoki IMAMURAAkiyoshi IRISAWATomoyu YAMASHITA
    • Eiji KATOShigeki NISHINAMotoki IMAMURAAkiyoshi IRISAWATomoyu YAMASHITA
    • G01R23/16
    • G01N21/3581
    • According to the present invention, the CT is carried out based on parameters other than the absorption rate. An electromagnetic wave measurement device includes an electromagnetic wave output device 2 which outputs an electromagnetic wave at a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] toward a device under test 1, an electromagnetic wave detector 4 which detects the electromagnetic wave which has transmitted through the device under test 1, a relative position changing unit 6 which changes a relative position of an intersection 100 at which an optical path of the electromagnetic wave transmitting through the device under test 1 and the device under test 1 intersect with respect to the device under test 1, a phase deriving unit 12 which derives, based on a detected result by the electromagnetic wave detector 4, a phase in the frequency domain of the electromagnetic wave which has transmitted through the device under test 1, a sinogram deriving unit 16 which derives a sinogram based on a derived result by the phase deriving unit 12, and a cross sectional image deriving unit 18 that derives, based on the sinogram, an image of a cross section of the device under test 1 including a trajectory of the intersection 100.
    • 根据本发明,根据吸收速度以外的参数进行CT。 电磁波测量装置包括电磁波输出装置2,其以等于或大于0.01 [THz]且等于或小于100 [THz]的频率朝向被测设备1输出电磁波,电磁波检测器 4,其检测通过被测试装置1发送的电磁波;相对位置改变单元6,其改变通过被测试设备1发送的电磁波的光路和设备的相交位置100; 测试1相对于被测设备1相交,相位导出单元12基于电磁波检测器4的检测结果,导出已经通过设备传输的电磁波的频域中的相位 测试1,基于相位导出单元12的导出结果导出正弦图的正弦图导出单元16,以及横截面ima ge导出单元18基于正弦图得出包括交会100的轨迹的被测设备1的横截面的图像。