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    • 1. 发明申请
    • ELECTROMAGNETIC WAVE MEASURING APPARATUS, MEASURING METHOD, PROGRAM, AND RECORDING MEDIUM
    • 电磁波测量装置,测量方法,程序和记录介质
    • US20110001048A1
    • 2011-01-06
    • US12731617
    • 2010-03-25
    • Shigeki NISHINAMotoki IMAMURAAkiyoshi IRISAWATomoyu YAMASHITAEiji KATO
    • Shigeki NISHINAMotoki IMAMURAAkiyoshi IRISAWATomoyu YAMASHITAEiji KATO
    • G01J5/28
    • G01N21/3581G01N21/3563
    • According to the present invention, an electromagnetic wave measurement device includes an electromagnetic wave output device, an electromagnetic wave detector, a relative position changing unit, a delay period recording unit, a phase deriving unit, a delay-corrected phase deriving unit, a sinogram deriving unit, and an image deriving unit. The electromagnetic wave output device outputs an electromagnetic wave having a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] toward a device under test and a container storing at least a part of the device under test. The electromagnetic wave detector detects the electromagnetic wave which has transmitted through the device under test. The relative position changing unit changes a relative position of an intersection at which an optical path of the electromagnetic wave transmitting through the device under test and the device under test intersect with respect to the device under test. The delay period recording unit records a delay period of the electromagnetic wave caused by a transmission of the electromagnetic wave through the container. The phase deriving unit that derives, based on a detected result by the electromagnetic wave detector, a phase in the frequency domain of the electromagnetic wave which has transmitted through the device under test. The delay-corrected phase deriving unit that derives a delay-corrected phase obtained by subtracting an integral of the delay period with respect to the frequency from the phase. The sinogram deriving unit that derives a sinogram based on a derived result by the delay-corrected phase deriving unit. The image deriving unit derives, based on the sinogram, an image of a cross section of the device under test including the intersection.
    • 根据本发明,电磁波测量装置包括电磁波输出装置,电磁波检测器,相对位置改变单元,延迟周期记录单元,相位导出单元,延迟校正相位导出单元,正弦图 导出单元和图像导出单元。 电磁波输出装置向受试装置输出频率等于或大于0.01 [THz]且等于或小于100 [THz]的电磁波,以及容纳至少部分被测器件的容器。 电磁波检测器检测已通过被测器件传输的电磁波。 相对位置改变单元改变通过被测设备传输的电磁波的光路与被测设备相对于被测设备相交的交点的相对位置。 延迟周期记录单元记录由电磁波的发射引起的电磁波的延迟时间通过容器。 基于电磁波检测器检测结果的相位导出单元,通过被测设备传输的电磁波的频域中的相位。 延迟校正相位导出单元,其导出通过从该相位减去相对于频率的延迟周期的积分而获得的延迟校正相位。 基于经延迟校正的相位导出单元的导出结果导出正弦图的正弦图导出单元。 图像导出单元基于正弦图导出被测设备的横截面的图像,包括交点。
    • 2. 发明申请
    • ELECTROMAGNETIC WAVE MEASURING APPARATUS, MEASURING METHOD, PROGRAM, AND RECORDING MEDIUM
    • 电磁波测量装置,测量方法,程序和记录介质
    • US20100295534A1
    • 2010-11-25
    • US12731483
    • 2010-03-25
    • Shigeki NISHINAMotoki IMAMURAAkiyoshi IRISAWATomoyu YAMASHITAEiji KATOKodo KAWASE
    • Shigeki NISHINAMotoki IMAMURAAkiyoshi IRISAWATomoyu YAMASHITAEiji KATOKodo KAWASE
    • G01R23/02
    • G01J5/0285G01N21/3563G01N21/3581G01N21/8806
    • According to the electromagnetic wave measurement device of the present invention, an electromagnetic wave output device outputs an electromagnetic wave having a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] toward a device under test. An electromagnetic wave detector detects the electromagnetic wave which has transmitted through the device under test. A relative position changing unit changes a relative position of an intersection across which an optical path of the electromagnetic wave transmitting through the device under test and the device under test intersect with respect to the device under test. A characteristic value deriving unit derives a characteristic value of the electromagnetic wave based on a detection result of the electromagnetic wave detector while the characteristic value is associated with an assumed relative position which is the relative position if it is assumed that the electromagnetic wave is not refracted by the device under test. A first association correction unit changes the assumed relative position to an actual relative position, which is the relative position if the refraction of the electromagnetic wave by the device under test is considered, thereby associating the result derived by the characteristic value deriving unit with the actual relative position. A corrected characteristic value deriving unit that derives the characteristic value associated with a predetermined relative position based on an output from the first association correction unit.
    • 根据本发明的电磁波测量装置,电磁波输出装置向被测设备输出等于或大于0.01 [THz]且等于或小于100 [THz]的频率的电磁波。 电磁波检测器检测已经通过被测设备的电磁波。 相对位置改变单元改变通过被测器件发送的电磁波的光路与被测器件相对于被测器件相交的相交位置的相对位置。 特征值导出单元基于电磁波检测器的检测结果导出电磁波的特征值,而如果假设电磁波未被折射,则特征值与作为相对位置的假定相对位置相关联 由被测设备 第一关联校正单元将所假定的相对位置改变为实际相对位置,如果考虑被测设备的电磁波的折射,则该相对位置是相对位置,从而将由特征值导出单元导出的结果与实际相对位置 相对位置。 校正特征值导出单元,其基于来自第一关联校正单元的输出导出与预定相对位置相关联的特征值。
    • 3. 发明申请
    • ELECTROMAGNETIC WAVE MEASURING APPARATUS, MEASUREMENT METHOD, A PROGRAM, AND A RECORDING MEDIUM
    • 电磁波测量装置,测量方法,程序和记录介质
    • US20100271001A1
    • 2010-10-28
    • US12487177
    • 2009-06-18
    • Eiji KATOShigeki NISHINAMotoki IMAMURAAkiyoshi IRISAWATomoyu YAMASHITA
    • Eiji KATOShigeki NISHINAMotoki IMAMURAAkiyoshi IRISAWATomoyu YAMASHITA
    • G01R23/16
    • G01N21/3581
    • According to the present invention, the CT is carried out based on parameters other than the absorption rate. An electromagnetic wave measurement device includes an electromagnetic wave output device 2 which outputs an electromagnetic wave at a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] toward a device under test 1, an electromagnetic wave detector 4 which detects the electromagnetic wave which has transmitted through the device under test 1, a relative position changing unit 6 which changes a relative position of an intersection 100 at which an optical path of the electromagnetic wave transmitting through the device under test 1 and the device under test 1 intersect with respect to the device under test 1, a phase deriving unit 12 which derives, based on a detected result by the electromagnetic wave detector 4, a phase in the frequency domain of the electromagnetic wave which has transmitted through the device under test 1, a sinogram deriving unit 16 which derives a sinogram based on a derived result by the phase deriving unit 12, and a cross sectional image deriving unit 18 that derives, based on the sinogram, an image of a cross section of the device under test 1 including a trajectory of the intersection 100.
    • 根据本发明,根据吸收速度以外的参数进行CT。 电磁波测量装置包括电磁波输出装置2,其以等于或大于0.01 [THz]且等于或小于100 [THz]的频率朝向被测设备1输出电磁波,电磁波检测器 4,其检测通过被测试装置1发送的电磁波;相对位置改变单元6,其改变通过被测试设备1发送的电磁波的光路和设备的相交位置100; 测试1相对于被测设备1相交,相位导出单元12基于电磁波检测器4的检测结果,导出已经通过设备传输的电磁波的频域中的相位 测试1,基于相位导出单元12的导出结果导出正弦图的正弦图导出单元16,以及横截面ima ge导出单元18基于正弦图得出包括交会100的轨迹的被测设备1的横截面的图像。
    • 4. 发明申请
    • REPETITION FREQUENCY CONTROL DEVICE
    • 重复频率控制装置
    • US20120163404A1
    • 2012-06-28
    • US13310130
    • 2011-12-02
    • Tomoyu YAMASHITAAkiyoshi IRISAWA
    • Tomoyu YAMASHITAAkiyoshi IRISAWA
    • H01S3/13
    • H01S3/10046H01S3/1394
    • According to the repetition frequency control device, a master laser outputs a master laser light pulse the repetition frequency of which is controlled to a predetermined value. A slave laser outputs a slave laser light pulse. A reference comparator compares a voltage of a reference electric signal the repetition frequency of which is the predetermined value and a predetermined voltage with each other, thereby outputting a result thereof. A measurement comparator compares a voltage based on a light intensity of the slave laser light pulse and the predetermined voltage with each other, thereby outputting a result thereof. A phase difference detector detects a phase difference between the output from the reference comparator and the output from the measurement comparator. A loop filter removes a high-frequency component of an output from the phase difference detector.
    • 根据重复频率控制装置,主激光器将重复频率被控制为预定值的主激光光脉冲输出。 从激光器输出从激光脉冲。 参考比较器将重复频率为预定值的参考电信号的电压与预定电压进行比较,从而输出其结果。 测量比较器将基于从激光光脉冲的光强度和预定电压的电压彼此进行比较,从而输出其结果。 相位差检测器检测来自参考比较器的输出与测量比较器的输出之间的相位差。 环路滤波器去除相位差检测器的输出的高频分量。
    • 5. 发明申请
    • REPETITION FREQUENCY CONTROL DEVICE
    • 重复频率控制装置
    • US20120155500A1
    • 2012-06-21
    • US13299568
    • 2011-11-18
    • Tomoyu YAMASHITAAkiyoshi IRISAWA
    • Tomoyu YAMASHITAAkiyoshi IRISAWA
    • H01S3/13
    • H01S3/10046H01S3/1394
    • A repetition frequency control device includes a slave photoelectric conversion unit which converts a slave laser light pulse into a slave electrical signal, a master photoelectric conversion unit which converts a master laser light pulse into a master electrical signal, a frequency change unit which changes the repetition frequency of the master electric signal by a predetermined value, a phase comparator which detects a phase difference between the slave electric signal and the output from the frequency change unit, and a loop filter which removes a high frequency component of an output from the phase comparator, where the repetition frequency of the master laser does not undergo control based on one or both of the master electric signal and the slave electric signal.
    • 重复频率控制装置包括将从属激光光脉冲转换为从属电信号的从光电转换单元,将主激光光脉冲转换成主电信号的主光电转换单元,改变重复的频率改变单元 主电信号的频率达预定值,检测从电信号与频率改变单元的输出之间的相位差的相位比较器,以及从相位比较器去除输出的高频分量的环路滤波器 ,其中主激光器的重复频率不基于主电信号和从电信号中的一个或两个进行控制。
    • 6. 发明申请
    • SIGNAL OUTPUT DEVICE, AND OUTPUT APPARATUS OF SIGNAL SOURCE OF SIGNALS AND OF LASER BEAM PULSES
    • 信号输出装置和信号源和激光束脉冲信号源的输出装置
    • US20110170875A1
    • 2011-07-14
    • US12940131
    • 2010-11-05
    • Tomoyu YAMASHITAAkiyoshi IRISAWA
    • Tomoyu YAMASHITAAkiyoshi IRISAWA
    • H04B10/04H04L27/00
    • H03L7/22
    • A frequency converter includes a first direct digital synthesizer that receives a signal having a predetermined frequency f_master as a clock signal and further an internal frequency setting signal, and outputs an internal signal having a frequency based on the internal frequency setting signal, and a second direct digital synthesizer that receives the internal signal as a clock signal, and further an output frequency setting signal, and outputs an output signal having a frequency f_slave (=f_master−Δ) based on the output frequency setting signal. A difference between the predetermined frequency f_master and the frequency of the internal signal is larger than a difference between the predetermined frequency f_master and the frequency f_slave of the output signal.
    • 频率转换器包括:第一直接数字合成器,其接收具有预定频率f_master的信号作为时钟信号,并且还具有内部频率设置信号,并输出具有基于内部频率设置信号的频率的内部信号;以及第二直接 接收内部信号作为时钟信号的数字合成器,以及输出频率设定信号,并根据输出频率设定信号输出具有频率f_slave(= f_master-&Dgr))的输出信号。 预定频率f_master与内部信号的频率之间的差异大于预定频率f_master与输出信号的频率f_slave之差。
    • 7. 发明申请
    • OPTICAL MEASURING APPARATUS
    • 光学测量装置
    • US20100014079A1
    • 2010-01-21
    • US12480042
    • 2009-06-08
    • Tomoyu YAMASHITAMotoki IMAMURA
    • Tomoyu YAMASHITAMotoki IMAMURA
    • G01J3/40
    • G01N21/3581G01J3/42G01J11/00
    • An object of the present invention is to enable a change in a frequency for which an electric signal based on an optical signal is measured by a spectrum analyzer. An optical measurement device 1 includes a photoconductive switch 18 which receives predetermined pulse light from a first laser light source 11, and outputs terahertz light L1 having the same repetition frequency frep1 as the repetition frequency of the predetermined pulse light, a photoconductive switch 21 which receives the terahertz light L1 and a sampling light pulse L2, and outputs signal corresponding to a power of the terahertz light L1 at a time point when the sampling light pulse L2 is received, an RF spectrum analyzer 26 which measures a magnitude of the signal corresponding to a measured frequency which changes over time, an optical coupler 32 which outputs a simultaneous light pulse when the predetermined pulse light and the sampling light pulse L2 are simultaneously input, a photo detector 36 which converts the simultaneous light pulse into an electric signal as a trigger signal EXT, and an optical delay circuit 34 which delays the trigger signal EXT.
    • 本发明的目的是能够通过频谱分析仪来测量基于光信号的电信号的频率的变化。 光学测量装置1包括接收来自第一激光光源11的预定脉冲光的光电导开关18,并输出具有与预定脉冲光的重复频率相同的重复频率frep1的太赫兹光L1,光接收开关21接收 太赫兹光L1和采样光脉冲L2,在接收采样光脉冲L2的时间点输出与太赫兹光L1的功率相对应的信号; RF频谱分析器26,其测量对应于 随时间变化的测量频率,当同时输入预定脉冲光和采样光脉冲L2时输出同时光脉冲的光耦合器32,将同步光脉冲转换为电信号作为触发器的光电检测器36 信号EXT以及延迟触发信号EXT的光学延迟电路34。
    • 8. 发明申请
    • PHASE CONTROL DEVICE FOR LASER LIGHT PULSE
    • 激光灯脉冲相控装置
    • US20110216791A1
    • 2011-09-08
    • US12960841
    • 2010-12-06
    • Tomoyu YAMASHITA
    • Tomoyu YAMASHITA
    • H01S3/13
    • H01S3/1312H01S3/09415H01S3/1024H01S3/1305H01S3/1307
    • According to the present inventions, a phase control device for laser light pulse includes a laser, a reference comparator, a measurement comparator, a phase difference detector and a loop filter. The laser outputs a laser light pulse. The reference comparator compares a voltage of a reference electric signal having a predetermined frequency and a predetermined voltage with each other, thereby outputting a result thereof. The measurement comparator compares a voltage based on a light intensity of the laser light pulse and a voltage of a measurement electric signal having the predetermined frequency, with a voltage of a phase control signal, thereby outputting a result thereof. The phase difference detector detects a phase difference between the output from the reference comparator and the output from the measurement comparator. The loop filter removes a high frequency component of an output from the phase difference detector. Further, the voltage of the phase control signal is different from the predetermined voltage. Furthermore, the laser changes the phase of the laser light pulse according to the output from the loop filter.
    • 根据本发明,用于激光脉冲的相位控制装置包括激光器,参考比较器,测量比较器,相位差检测器和环路滤波器。 激光输出激光脉冲。 参考比较器将具有预定频率和预定电压的参考电信号的电压彼此进行比较,从而输出其结果。 测量比较器将基于激光光脉冲的光强度的电压和具有预定频率的测量电信号的电压与相位控制信号的电压进行比较,从而输出其结果。 相位差检测器检测来自参考比较器的输出与测量比较器的输出之间的相位差。 环路滤波器从相位差检测器去除输出的高频分量。 此外,相位控制信号的电压与预定电压不同。 此外,激光根据环路滤波器的输出改变激光脉冲的相位。