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    • 1. 发明授权
    • Automatic disc changer for a disc reproducing system
    • 用于光盘重放系统的自动换碟机
    • US5615202A
    • 1997-03-25
    • US368912
    • 1995-01-05
    • Kazuhisa EnomotoTakao YamazakiTaiki AzumaShinji TarutaniHidetoshi Gokita
    • Kazuhisa EnomotoTakao YamazakiTaiki AzumaShinji TarutaniHidetoshi Gokita
    • G11B17/28G11B17/30G11B17/22G11B17/04
    • G11B17/28G11B17/30
    • An automatic disc changer has a casing for the automatic disc changer, and a plurality of disc holders arranged in the casing. The disc holder stores a plurality of discs in vertical position so that each disc can be removed from the disc holder. A plurality of reproducing devices are provided in the casing to be moved along the disc holder. The reproducing device has an opening at a side confronting the disc holder. A loading arm is provided for loading the disc passing through the opening. A wire is connected to opposite sides of the casing along the disc holders so as to prevent the disc stored in the disc holder from removing. A plurality of rollers are disposed in the reproducing device around the opening. The wire is engaged with the rollers so as not to obstruct the opening and to allow each reproducing device to be independently moved from the other reproducing device.
    • 自动换盘装置具有用于自动换盘装置的壳体和布置在壳体中的多个盘保持架。 盘保持器将多个盘存储在垂直位置,使得每个盘可以从盘保持器移除。 多个再现装置设置在壳体中以沿着盘保持器移动。 再现装置在与盘保持器相对的一侧具有开口。 提供装载臂以装载穿过开口的盘。 线沿着盘保持器连接到壳体的相对侧,以防止存储在盘保持器中的盘移除。 多个辊子围绕开口设置在再现装置中。 电线与辊接合,以便不妨碍开口并且允许每个再现装置独立地从另一个再现装置移动。
    • 8. 发明申请
    • Positive resist composition and pattern forming method using the same
    • 正型抗蚀剂组合物和使用其的图案形成方法
    • US20060194148A1
    • 2006-08-31
    • US11356051
    • 2006-02-17
    • Hideaki TsubakiShinji Tarutani
    • Hideaki TsubakiShinji Tarutani
    • G03C1/76
    • G03F7/0046G03F7/0045G03F7/039G03F7/0395G03F7/0397
    • The invention provides a positive resist composition suitably usable at the time of using an ArF excimer laser light as the exposure light, source, assured of excellent performance in view of resist profile, sensitivity, resolution and line edge roughness, and free from occurrence of pattern falling and development defect, and a pattern forming method using the composition, which are a positive resist composition comprising (A) a compound capable of generating an acid upon irradiation with actinic rays or radiation, (B) a resin having an alicyclic hydrocarbon structure, which decomposes under the action of an acid to increase the solubility in an alkali, and (C) a chain compound having one or two group(s) selected from a hydroxyl group and a group where the hydrogen atom of a hydroxyl group is substituted with an organic group, in which the chain compound is a solid at ordinary temperature under atmospheric pressure, and a pattern forming method using the composition.
    • 本发明提供了在使用ArF准分子激光作为曝光光源时适当使用的正性抗蚀剂组合物,鉴于抗蚀剂轮廓,灵敏度,分辨率和线边缘粗糙度,并且不发生图案,确保了优异的性能 以及使用该组合物的图案形成方法,其为正型抗蚀剂组合物,其包含(A)在通过光化射线或辐射照射时能够产生酸的化合物,(B)具有脂环族烃结构的树脂, 其在酸的作用下分解以增加在碱中的溶解度,和(C)具有一个或两个选自羟基和羟基的氢原子被取代基的基团的链化合物 链状化合物在常压下为固体的有机基团和使用该组合物的图案形成方法。