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    • 2. 发明授权
    • Method for manufacturing substrate
    • 基板制造方法
    • US07014534B2
    • 2006-03-21
    • US10857841
    • 2004-06-02
    • Yoshiaki OshimaKazuhiko NishimotoKenichi SuenagaToshiya Hagihara
    • Yoshiaki OshimaKazuhiko NishimotoKenichi SuenagaToshiya Hagihara
    • B24B1/00
    • C09K3/1463B24B37/044C09G1/02
    • A method for manufacturing a substrate, a polishing process for a substrate, a method of reducing microwaviness for a substrate, each including the step of polishing a substrate to be polished with a polishing composition containing an abrasive and water with a polishing pad of which surface member has an average pore size of from 1 to 35 μm; and a method of reducing scratches for a substrate, comprising the step of polishing a substrate to be polished with a polishing composition comprising an abrasive, an oxidizing agent, an acid, a salt thereof, or a mixture thereof and water, with a polishing pad of which surface member has an average pore size of from 1 to 35 μm. The method for manufacturing a substrate can be used for finish polishing of a memory hard disk or for polishing of a semiconductor element.
    • 一种基板的制造方法,基板的研磨工序,降低基板的微波的方法,其特征在于,具备:研磨用抛光组合物研磨待研磨基板的步骤,所述抛光组合物的表面 成员的平均孔径为1至35μm; 以及减少基材划痕的方法,包括用抛光组合物抛光待抛光基材的步骤,抛光组合物包括研磨剂,氧化剂,酸,其盐或其混合物和水,抛光垫 其表面成员的平均孔径为1〜35μm。 用于制造基板的方法可以用于存储硬盘的精抛光或半导体元件的抛光。
    • 3. 发明授权
    • Cutting oil composition
    • 切割油组成
    • US06383991B1
    • 2002-05-07
    • US09647592
    • 2000-11-27
    • Jiro HashimotoToshiya HagiharaKazuhiko Nishimoto
    • Jiro HashimotoToshiya HagiharaKazuhiko Nishimoto
    • C10M10508
    • C10M107/34C10M125/26C10M169/04C10M2201/087C10M2201/10C10M2201/102C10M2201/105C10M2209/1033C10M2209/1045C10M2209/1055C10M2209/1065C10M2209/107C10M2209/1075C10M2209/1085C10M2209/1095C10M2215/042C10M2215/224C10N2240/401
    • The present invention relates to a cutting oil comprising (a) a polyether compound represented by the formula (I): R1O(EO)m(AO)nR2  (I) wherein each of R1 and R2, which may be identical or different, is hydrogen atom or a hydrocarbon group having 1 to 24 carbon atoms, at least one of which is a hydrocarbon group; EO is oxyethylene group; AO is an oxyalkylene group having 3 or 4 carbon atoms; and each of m and n is 1 to 50, wherein a sum of m and n is from 4 to 100; a cutting oil composition comprising the above cutting oil and an abrasive; a cutting method using the above cutting oil composition; and a process of cleaning a wafer, comprising the steps of cleaning a wafer obtainable by cutting an ingot with a wire saw using the above cutting oil composition; heating the resulting waste water to a temperature equal to or higher than a cloud point of a polyether compound represented by the formula (I) contained in the waste water, to allow separation into an oil phase and an aqueous phase; and removing the oil phase comprising the polyether compound from the waste water. According to the present invention, there can be obtained excellent dispersibility of the abrasive, and excellent re-dispersibility, cutting performance and workability when sedimented, and the object to be cut obtained after cutting can be easily cleaned.
    • 本发明涉及一种切削油,其包含(a)由式(I)表示的聚醚化合物:其中可以相同或不同的R 1和R 2各自为氢原子或具有1至24个碳原子的烃基 ,其中至少一个是烃基; EO是氧乙烯基; AO是具有3或4个碳原子的氧化烯基团; m和n分别为1〜50,m和n的和为4〜100; 包含上述切削油和磨料的切削油组合物; 使用上述切削油组合物的切削方法; 以及清洁晶片的方法,包括以下步骤:使用上述切削油组合物清洁通过用线锯切割锭块可获得的晶片; 将得到的废水加热至与废水中所含的式(I)所示的聚醚化合物的浊点相同或更高的温度,使其分离成油相和水相。 并从废水中除去包含聚醚化合物的油相。 根据本发明,可以获得磨料的优异的分散性,并且当沉降时优异的再分散性,切割性能和可加工性,并且可以容易地清洁切割后获得的待切割物体。
    • 8. 发明申请
    • Polishing composition for glass substrate
    • 玻璃基材抛光组合物
    • US20080006057A1
    • 2008-01-10
    • US11808738
    • 2007-06-12
    • Kazuhiko NishimotoToshiaki Oi
    • Kazuhiko NishimotoToshiaki Oi
    • B24B1/00C09K3/14
    • C09G1/02
    • The present invention provides a polishing composition for a glass substrate having a pH of from 1 to 5 and containing silica particles having an average particle size of from 5 to 100 nm, wherein, in a projected image of the silica particles obtainable by an image analysis of electron photomicrographs, an average of an area ratio R of a projected area of the silica particles (A1) to an area of a maximum inscribed circle of the silica particles (A), i.e. (A1/A), is in the range of from 1.2 to 3.0, and the silica particles have an average of 2.0 to 10 projection portions having a curvature radius of from ⅕ to ½ of a radius of the maximum inscribed circle of the silica particles (r) on the outline of the silica particles in the projected image, and a method for manufacturing a glass substrate, including the step of polishing a substrate to be polished with a polishing load of from 3 to 12 kPa and at a pH of from 1 to 5 while allowing the polishing composition to be present between a polishing pad and the substrate to be polished. The polishing composition for a glass substrate of the present invention can be suitably used, for example, in the manufacture of glass hard disks, aluminosilicate glass for reinforced glass substrates, glass ceramic substrates (crystallized glass substrates), and the like.
    • 本发明提供一种pH为1〜5的玻璃基板用的研磨用组合物,其含有平均粒径为5〜100nm的二氧化硅粒子,其中,在通过图像分析得到的二氧化硅粒子的投影图像中, 的电子显微照片,二氧化硅粒子(A1)的投影面积与二氧化硅粒子(A)的最大内接圆面积的平均面​​积比R(即(A1 / A))在 1.2〜3.0,二氧化硅粒子的二氧化硅粒子(r)的最大内切圆的半径的曲率半径为二分之一的1/10至1/2的平均值为2.0〜10个, 投影图像中的粒子,以及玻璃基板的制造方法,其特征在于,包括以3〜12kPa的抛光负荷和1〜5的pH值抛光抛光用基板的工序, 在ap之间存在 衬垫和待抛光的基材。 本发明的玻璃基板用抛光组合物可以适用于例如制造玻璃硬盘,强化玻璃基板用硅铝酸盐玻璃,玻璃陶瓷基板(结晶玻璃基板)等。
    • 9. 发明授权
    • Polishing composition for glass substrate
    • 玻璃基材抛光组合物
    • US07972398B2
    • 2011-07-05
    • US11808738
    • 2007-06-12
    • Kazuhiko NishimotoToshiaki Oi
    • Kazuhiko NishimotoToshiaki Oi
    • C03C19/00C09G1/02
    • C09G1/02
    • The present invention provides a polishing composition for a glass substrate having a pH of from 1 to 5 and containing silica particles having an average particle size of from 5 to 100 nm, wherein, in a projected image of the silica particles obtainable by an image analysis of electron photomicrographs, an average of an area ratio R of a projected area of the silica particles (A1) to an area of a maximum inscribed circle of the silica particles (A), i.e. (A1/A), is in the range of from 1.2 to 3.0, and the silica particles have an average of 2.0 to 10 projection portions having a curvature radius of from ⅕ to ½ of a radius of the maximum inscribed circle of the silica particles (r) on the outline of the silica particles in the projected image, and a method for manufacturing a glass substrate, including the step of polishing a substrate to be polished with a polishing load of from 3 to 12 kPa and at a pH of from 1 to 5 while allowing the polishing composition to be present between a polishing pad and the substrate to be polished. The polishing composition for a glass substrate of the present invention can be suitably used, for example, in the manufacture of glass hard disks, aluminosilicate glass for reinforced glass substrates, glass ceramic substrates (crystallized glass substrates), and the like.
    • 本发明提供一种pH为1〜5的玻璃基板用的研磨用组合物,其含有平均粒径为5〜100nm的二氧化硅粒子,其中,在通过图像分析得到的二氧化硅粒子的投影图像中, 的电子显微照片,二氧化硅粒子(A1)的投影面积与二氧化硅粒子(A)的最大内接圆面积的平均面​​积比R(即(A1 / A))在 1.2至3.0,二氧化硅颗粒平均具有2.0至10个凸起部分,其具有二氧化硅颗粒(r)的二氧化硅颗粒(r)的最大内接圆的半径的半径为⅕至1/2的二氧化硅颗粒轮廓的半径 投影图像和玻璃基板的制造方法,包括以3〜12kPa的抛光负荷和1〜5的pH值抛光抛光用基板的步骤,同时使抛光组合物存在 在ap之间 衬垫和待抛光的基材。 本发明的玻璃基板用抛光组合物可以适用于例如制造玻璃硬盘,强化玻璃基板用硅铝酸盐玻璃,玻璃陶瓷基板(结晶玻璃基板)等。
    • 10. 发明授权
    • Polishing composition
    • 抛光组成
    • US07147682B2
    • 2006-12-12
    • US10726581
    • 2003-12-04
    • Yoshiaki OshimaKazuhiko NishimotoToshiya Hagihara
    • Yoshiaki OshimaKazuhiko NishimotoToshiya Hagihara
    • C09G1/02C09G1/04B24B1/00
    • C09K3/1463C09G1/02
    • A polishing composition for a substrate for memory hard disk comprising water and silica particles, wherein the silica particles have a particle size distribution in which the relationship of a particle size (R) and a cumulative volume frequency (V) in a graph of particle size-cumulative volume frequency obtained by plotting a cumulative volume frequency (%) of the silica particles counted from a small particle size side against a particle size (nm) of the silica particles satisfies the above formula (1) and the above formula (2), and wherein a particle size at 90% of a cumulative volume frequency (D90) is within the range of 65 nm or more and less than 105 nm. By using the polishing composition of the present invention, there can be efficiently manufactured an Ni—P plated substrate for a disk polished to have an excellent surface smoothness, in which the micropits are effectively reduced.
    • 一种包含水和二氧化硅颗粒的用于存储硬盘的基底的抛光组合物,其中二氧化硅颗粒具有粒度分布,其中颗粒尺寸(R)和颗粒尺寸图中的累积体积频率(V)的关系 通过绘制从小粒径方向计数的二氧化硅粒子的累积体积频率(%)与二氧化硅粒子的粒径(nm)相对应的累积体积频率满足上述式(1)和上述式(2) ,其中累积体积频率(D90)的90%处的粒径在65nm以上且小于105nm的范围内。 通过使用本发明的抛光组合物,可以有效地制造用于盘抛光的Ni-P镀覆基板,以具有优异的表面平滑度,其中微型点被有效地减小。