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    • 3. 发明申请
    • Polishing composition
    • 抛光组成
    • US20050221726A1
    • 2005-10-06
    • US11095564
    • 2005-04-01
    • Yuichi HonmaKouji TairaShigeaki Takashina
    • Yuichi HonmaKouji TairaShigeaki Takashina
    • B24B1/00B24B37/00B24D3/02C09G1/02C09K3/14
    • C09K3/1463C09G1/02C09K3/1409
    • The present invention relates to a polishing composition containing an abrasive having an average particle size of from 1 to 30 nm and water, wherein the abrasive has a packing ratio of from 79 to 90% by weight; a method for manufacturing a substrate, including the steps of introducing the above polishing composition between a substrate and a polishing pad, and polishing the substrate, while contacting the substrate with the polishing composition; and a method for reducing scratches of a substrate to be polished, including the step of polishing the substrate to be polished with the above polishing composition. The polishing composition is suitable for polishing substrates for precision parts including, for example, substrates for magnetic recording media, such as magnetic disks, and opto-magnetic disks, photomask substrates, optical disks, optical lenses, optical mirrors, optical prisms and semiconductor substrates, and the like.
    • 本发明涉及一种含有平均粒径为1〜30nm的研磨剂和水的抛光组合物,其中研磨剂的填充率为79〜90重量% 一种制造基板的方法,包括以下步骤:在基板和抛光垫之间引入上述抛光组合物,并在将基板与抛光组合物接触的同时研磨基板; 以及减少待研磨的基板的划痕的方法,包括用上述抛光组合物抛光待抛光的基板的步骤。 抛光组合物适用于抛光用于精密部件的基板,例如磁记录介质如磁盘,光磁盘,光掩模基板,光盘,光学透镜,光学镜,光学棱镜和半导体基板 ,等等。
    • 4. 发明授权
    • Polishing composition
    • 抛光组成
    • US07267702B2
    • 2007-09-11
    • US11095564
    • 2005-04-01
    • Yuichi HonmaKouji TairaShigeaki Takashina
    • Yuichi HonmaKouji TairaShigeaki Takashina
    • B24B1/00B24B37/00C09G1/02C09G1/04C09K3/14
    • C09K3/1463C09G1/02C09K3/1409
    • A polishing composition is provided containing an abrasive having an average particle size of from 1 to 30 nm and water, wherein the abrasive has a packing ratio of from 79 to 90% by weight; a method for manufacturing a substrate, including the steps of introducing the above polishing composition between a substrate and a polishing pad, and polishing the substrate, while contacting the substrate with the polishing composition; and a method for reducing scratches of a substrate to be polished, including the step of polishing the substrate to be polished with the above polishing composition. The polishing composition is suitable for polishing substrates for precision parts including, for example, substrates for magnetic recording media, such as magnetic disks, and opto-magnetic disks, photomask substrates, optical disks, optical lenses, optical mirrors, optical prisms and semiconductor substrates, and the like.
    • 提供了含有平均粒度为1〜30nm的研磨剂和水的抛光组合物,其中研磨剂的填充率为79〜90重量% 一种制造基板的方法,包括以下步骤:在基板和抛光垫之间引入上述抛光组合物,并在将基板与抛光组合物接触的同时研磨基板; 以及减少待研磨的基板的划痕的方法,包括用上述抛光组合物抛光待抛光的基板的步骤。 抛光组合物适用于抛光用于精密部件的基板,例如磁记录介质如磁盘,光磁盘,光掩模基板,光盘,光学透镜,光学镜,光学棱镜和半导体基板 ,等等。