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    • 5. 发明授权
    • Magnetic recording head and method for manufacturing
    • 磁记录头及制造方法
    • US07333301B2
    • 2008-02-19
    • US10650832
    • 2003-08-29
    • Kimitoshi EtohNobuo YoshidaMoriaki FuyamaMakoto MorijiriKenichi MeguroIchiro OodakeKazue KudoYohji MaruyamaKatsuro Watanabe
    • Kimitoshi EtohNobuo YoshidaMoriaki FuyamaMakoto MorijiriKenichi MeguroIchiro OodakeKazue KudoYohji MaruyamaKatsuro Watanabe
    • G11B5/127
    • B82Y25/00B82Y10/00G11B5/3136G11B5/3909G11B5/3912Y10T29/49044
    • A thin-film magnetic head having little temperature rise in the element, good heat dissipation and a short magnetic path length (narrow coil pitch) and manufacturing method for same is provided. To form the coil of the thin-film magnetic head, a lower coil is first formed and after forming alumina and an inorganic compound containing alumina, a trench is formed for the upper coil by reactive ion etching. The lower coil allows uniform etching at this time and functions as a film to prevent loading effects occurring during reactive ion etching. This trench is then plated in copper and chemical mechanical planarization performed to form the upper layer coil as the dual-layer coil of the present invention. Heat from the coil is efficiently radiated towards the substrate by alumina and an inorganic compound containing alumina with good heat propagation. The ratio of alumina or inorganic compound containing alumina in the lower coil can be selected by reactive ion etching so that an upper coil trench functioning as an etching stopper can be securely formed to allow forming a stable coil film thickness and a short magnetic path length.
    • 提供元件温度上升较小,散热好,磁路长度短(窄线圈间距)及其制造方法的薄膜磁头。 为了形成薄膜磁头的线圈,首先形成下线圈,在形成氧化铝和含有氧化铝的无机化合物之后,通过反应离子蚀刻形成用于上部线圈的沟槽。 此时,下线圈允许均匀刻蚀,起到膜的作用,以防止在反应离子蚀刻期间发生的负载效应。 然后将该沟槽镀铜并进行化学机械平面化以形成上层线圈作为本发明的双层线圈。 来自线圈的热量通过氧化铝和含有良好热传播的氧化铝的无机化合物有效地朝向基板辐射。 可以通过反应离子蚀刻来选择下层线圈中的氧化铝或含有氧化铝的无机化合物的比例,从而可以可靠地形成用作蚀刻停止层的上部线圈沟槽,以形成稳定的线圈膜厚度和短的磁路长度。
    • 6. 发明授权
    • Perpendicular magnetic recording head and method for manufacturing the same
    • 垂直磁记录头及其制造方法
    • US08064161B2
    • 2011-11-22
    • US12231246
    • 2008-08-28
    • Kazue KudoHiromi ShiinaGen OikawaYohji MaruyamaNoriyuki Saiki
    • Kazue KudoHiromi ShiinaGen OikawaYohji MaruyamaNoriyuki Saiki
    • H04R31/00G11B5/147
    • G11B5/3146G11B5/1278G11B5/315G11B5/3163Y10T29/49044Y10T29/4906
    • Embodiments of the present invention help to provide a perpendicular magnetic recording head capable of writing a signal in a track having a small width. According to one embodiment, a perpendicular magnetic recording head includes an auxiliary pole, a main pole, a yoke, a coil, a first soft magnetic film and a second soft magnetic film. The yoke is in contact with the main pole. The coil is wound around a magnetic circuit composed of the auxiliary and main poles and the yoke. The first soft magnetic film is provided on both sides of the main pole with a non-magnetic film provided between the first soft magnetic film and the main pole. The second soft magnetic film is provided on the trailing side of the main pole with the non-magnetic film provided between the second soft magnetic film and the main pole. The first and second soft magnetic films are two types of plated magnetic films. One type of the plated magnetic films have respective thicknesses of 0.5 nm to 20 nm and respective body centered cubic lattice crystal structures. The other types of the plated magnetic films have respective thicknesses of 0.5 nm to 20 nm and respective face centered cubic lattice crystal structures. The two types of the plated magnetic films are alternately laminated with four or more layers. This can achieve the magnetic disk drive capable of reducing a possibility to erroneously delete a signal after the signal being written and preventing degradation of characteristics of a high frequency signal.
    • 本发明的实施例有助于提供一种能够在具有小宽度的轨迹中写入信号的垂直磁记录头。 根据一个实施例,垂直磁记录头包括辅助极,主极,磁轭,线圈,第一软磁膜和第二软磁膜。 轭与主极接触。 线圈缠绕在由辅助和主极和轭构成的磁路上。 第一软磁膜设置在主极的两侧,设置在第一软磁膜和主极之间的非磁性膜。 第二软磁膜设置在主极的后侧,设置在第二软磁膜和主极之间的非磁性膜。 第一和第二软磁膜是两种类型的镀覆磁性膜。 一种类型的电镀磁性膜具有0.5nm至20nm的各自的厚度和相应的体心立方晶格结构。 其他类型的镀膜磁性膜具有0.5nm至20nm的各自的厚度和各自的面心立方晶格结构。 两种类型的镀覆磁性膜交替地层压有四层或更多层。 这可以实现能够降低信号被写入之后错误地删除信号的可能性的磁盘驱动器,并且防止高频信号的特性的劣化。
    • 7. 发明申请
    • Magnetic film, manufacturing method thereof and thin film magnetic head
    • 磁膜,其制造方法和薄膜磁头
    • US20080075977A1
    • 2008-03-27
    • US11820598
    • 2007-06-19
    • Kazue KudoGen OikawaYohji MaruyamaNoriyuki SaikiHiromi Shiina
    • Kazue KudoGen OikawaYohji MaruyamaNoriyuki SaikiHiromi Shiina
    • G11B5/33H04R31/00
    • G11B5/3116G11B5/1278G11B5/147G11B5/313Y10T29/49032Y10T428/115
    • Embodiments of the present invention provide a magnetic disk drive capable of allowing higher data transfer rates and higher recording densities. According to one embodiment, an upper magnetic core and lower magnetic core comprise a multi-layered magnetic film formed by alternately stacking a face-centered cubic (fcc) crystalline magnetic thin layer and a body-centered cubic (bcc) crystalline magnetic thin layer by plating. The plating bath is such that the temperature is about 30±1° C., pH is about 2.0−1.0 to 2.0+0.5, metal ion concentrations are about 5 to 25 (g/l) for Ni2+ and 5 to 15 (g/l) for Fe2+, saccharin sodium concentration is about 1.5±1.0 (g/l), sodium chloride concentration is about 25±5 (g/l), and boric acid concentration is about 25±5 (g/l). Since each layer's crystal structure is different from that of its adjacent lower layer, epitaxial growth is broken within each layer. Thus, since crystal grains are reduced in size, it is possible to lessen the decrease of the permeability μ at higher frequencies.
    • 本发明的实施例提供一种能够允许更高数据传输速率和更高记录密度的磁盘驱动器。 根据一个实施例,上磁芯和下磁芯包括通过交替地将面心立方(fcc)晶体磁性薄层和体心立方(bcc)结晶磁性薄层交替堆叠而形成的多层磁性膜, 电镀。 电镀浴温度为约30±1℃,pH为约2.0-1.0至2.0 + 0.5,Ni2 +和5至15(g / l)的金属离子浓度为约5至25(g / l) l)对于Fe2 +,糖精钠浓度约为1.5±1.0(g / l),氯化钠浓度约为25±5(g / l),硼酸浓度约为25±5(g / l)。 由于每个层的晶体结构与其相邻的下层的晶体结构不同,所以在每个层内外延生长被破坏。 因此,由于晶粒尺寸减小,因此能够降低高频率下的磁导率μμ的降低。
    • 8. 发明申请
    • PERPENDICULAR MAGNETIC RECORDING HEAD
    • 全能磁记录头
    • US20100157476A1
    • 2010-06-24
    • US12638911
    • 2009-12-15
    • Kazue KudoHiromi ShiinaYohji MaruyamaTetsuya OkaiGen OikawaShouji Tokutake
    • Kazue KudoHiromi ShiinaYohji MaruyamaTetsuya OkaiGen OikawaShouji Tokutake
    • G11B5/147
    • G11B5/1278G11B5/3116
    • A perpendicular magnetic recording head according to one embodiment includes a main pole; first magnetic films arranged on both sides of the main pole in a track width direction via nonmagnetic films; and a second magnetic film arranged on a trailing side of the main pole via a nonmagnetic film; wherein the depths of the first magnetic films from an air bearing surface are smaller than the depth of the second magnetic film from the air bearing surface at least at a periphery of the main pole. A perpendicular magnetic recording head according to another embodiment includes a main pole; first magnetic films arranged on both sides of the main pole in a track width direction via nonmagnetic films; and a second magnetic film arranged on a trailing side of the main pole via a nonmagnetic film; wherein the main pole and the first magnetic films have respective tapered portions whose thicknesses become larger toward the side opposite to an air bearing surface, and the tapered portions are in contact with the second magnetic film. Additional embodiments are also presented.
    • 根据一个实施例的垂直磁记录头包括主极; 通过非磁性膜在磁道宽度方向上布置在主极两侧的第一磁膜; 以及通过非磁性膜布置在所述主极的后侧的第二磁性膜; 其中来自空气支承表面的第一磁性膜的深度至少在主极的周边处小于来自空气支承表面的第二磁性膜的深度。 根据另一实施例的垂直磁记录头包括主极; 通过非磁性膜在磁道宽度方向上布置在主极两侧的第一磁膜; 以及通过非磁性膜布置在所述主极的后侧的第二磁性膜; 其中,所述主极和所述第一磁性膜具有各自的锥形部分,所述锥形部分的厚度朝着与空气支承表面相对的一侧变大,并且所述锥形部分与所述第二磁性膜接触。 还提供了另外的实施例。
    • 9. 发明授权
    • Magnetic shield, manufacturing method thereof and thin film magnetic head employing the same
    • 磁屏蔽,其制造方法和使用该磁屏蔽的薄膜磁头
    • US07995311B2
    • 2011-08-09
    • US11820554
    • 2007-06-19
    • Kazue KudoGen OikawaYohji MaruyamaNoriyuki SaikiHiromi Shiina
    • Kazue KudoGen OikawaYohji MaruyamaNoriyuki SaikiHiromi Shiina
    • G11B5/147
    • G11B5/3116G11B5/1278G11B5/3912G11B5/3967
    • Embodiments of the present invention provide a magnetic shield composed of size-controlled small crystal grains and provide a more after-write read noise free thin film magnetic head. According to one embodiment of the present invention, an upper magnetic shield uses a multi-layered magnetic film formed by alternately stacking a face-centered cubic (fcc) crystalline magnetic thin layer and a body-centered cubic (bcc) crystalline magnetic thin layer by plating. The plating bath is such that the temperature is 30±1° C., pH is about 2.0−1.0 to 2.0+0.5, metal ion concentrations are about 5 to 25 (g/l) for Ni2+ and 5 to 15 (g/l) for Fe2+, saccharin sodium concentration is about 1.5±1.0 (g/l), sodium chloride concentration is about 25±5 (g/l), and boric acid concentration is about 25±5 (g/l). Each layer's crystal structure is different from that of its upper and lower layers, which results in size-controlled small crystal grains since the epitaxial growth is broken. Since crystal grains are reduced in size, it is possible to suppress the after-write read noise and therefore attain a read head which allows recording at higher frequencies.
    • 本发明的实施例提供一种由尺寸控制的小晶粒组成的磁屏蔽,并提供更多的后写入无噪声薄膜磁头。 根据本发明的一个实施例,上磁屏蔽使用通过交替层叠面心立方(fcc)结晶磁性薄膜和体心立方(bcc)结晶磁性薄膜而形成的多层磁性膜, 电镀。 电镀浴温度为30±1℃,pH为约2.0-1.0〜2.0 + 0.5,Ni2 +和5〜15(g / l)的金属离子浓度约为5〜25(g / l) )对于Fe2 +,糖精钠浓度约为1.5±1.0(g / l),氯化钠浓度约为25±5(g / l),硼酸浓度约为25±5(g / l)。 每层的晶体结构与其上层和下层的晶体结构不同,这导致尺寸控制的小晶粒,因为外延生长破裂。 由于晶粒尺寸减小,因此可以抑制写入后的读取噪声,从而获得允许以较高频率记录的读取头。
    • 10. 发明授权
    • Perpendicular magnetic recording head having a main pole and first and second magnetic films peripheral to the main pole and having different depths from an air bearing surface
    • 垂直磁记录头具有主极和在主极周围的第一和第二磁膜,并且具有与空气支承表面不同的深度
    • US08351156B2
    • 2013-01-08
    • US12638911
    • 2009-12-15
    • Kazue KudoHiromi ShiinaYohji MaruyamaTetsuya OkaiGen OikawaShouji Tokutake
    • Kazue KudoHiromi ShiinaYohji MaruyamaTetsuya OkaiGen OikawaShouji Tokutake
    • G11B5/127G11B5/187
    • G11B5/1278G11B5/3116
    • A perpendicular magnetic recording head according to one embodiment includes a main pole; first magnetic films arranged on both sides of the main pole in a track width direction via nonmagnetic films; and a second magnetic film arranged on a trailing side of the main pole via a nonmagnetic film; wherein the depths of the first magnetic films from an air bearing surface are smaller than the depth of the second magnetic film from the air bearing surface at least at a periphery of the main pole. A perpendicular magnetic recording head according to another embodiment includes a main pole; first magnetic films arranged on both sides of the main pole in a track width direction via nonmagnetic films; and a second magnetic film arranged on a trailing side of the main pole via a nonmagnetic film; wherein the main pole and the first magnetic films have respective tapered portions whose thicknesses become larger toward the side opposite to an air bearing surface, and the tapered portions are in contact with the second magnetic film. Additional embodiments are also presented.
    • 根据一个实施例的垂直磁记录头包括主极; 通过非磁性膜在磁道宽度方向上布置在主极两侧的第一磁膜; 以及通过非磁性膜布置在所述主极的后侧的第二磁性膜; 其中来自空气支承表面的第一磁性膜的深度至少在主极的周边处小于来自空气支承表面的第二磁性膜的深度。 根据另一实施例的垂直磁记录头包括主极; 通过非磁性膜在磁道宽度方向上布置在主极两侧的第一磁膜; 以及通过非磁性膜布置在所述主极的后侧的第二磁性膜; 其中,所述主极和所述第一磁性膜具有各自的锥形部分,所述锥形部分的厚度朝着与空气支承表面相对的一侧变大,并且所述锥形部分与所述第二磁性膜接触。 还提供了另外的实施例。