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1. 发明专利

JP2008073644A Pure water production method and apparatus 有权
标题翻译：纯水生产方法和设备
公开(公告)号：JP2008073644A
公开(公告)日：2008-04-03
申请号：JP2006257650
申请日：2006-09-22
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： YAMAZAKI SACHIKO , FURUKAWA MASAHIRO
IPC分类号： C02F1/42
摘要： PROBLEM TO BE SOLVED: To provide a pure water production method and apparatus which, even in the case of detergent drain with a high neutral salt concentration, can efficiently decompose and remove neutral salts by using a small amount of a strongly acidic cation exchange resin and a strongly basic anion exchange resin to produce a large amount of pure water, and carry out the treatment by using a conventional apparatus as it is.
SOLUTION: High-purity detergent drain of a wet process is supplied, and pretreated with activated carbon AC in an activated carbon tower 1. The treated detergent drain is brought into contact with a weakly basic anion exchange resin WA in a weak anion exchange tower 2 to remove anions, and then brought into contact with a strongly basic anion exchange resin SA in a strong anion exchange tower 3 to decompose the neutral salts. Anions generated by the decomposition is exchanged and adsorbed to be removed. Subsequently, the detergent drain is brought into contact with a strongly acidic cation exchange resin SC in a strong cation exchange tower 4 to remove cations, producing pure water.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种纯水生产方法和装置，即使在具有高中性盐浓度的洗涤剂排出物的情况下，也可以通过使用少量的强酸性阳离子来有效地分解和除去中性盐交换树脂和强碱性阴离子交换树脂以产生大量的纯水，并且使用常规装置进行处理。
解决方案：提供湿法生产的高纯度洗涤剂排放液，并在活性碳塔1中用活性炭AC进行预处理。处理后的清洁剂排放液与弱阴离子中的弱碱性阴离子交换树脂WA接触交换塔2去除阴离子，然后在强阴离子交换塔3中与强碱性阴离子交换树脂SA接触以分解中性盐。由分解产生的阴离子被交换和吸附以除去。随后，使去污剂排出物与强阳离子交换塔4中的强酸性阳离子交换树脂SC接触以除去阳离子，产生纯水。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2007229718A Washing apparatus for membrane separator for ultrapure water production 有权
标题翻译：用于超声波水生产的膜分离器的洗涤装置
公开(公告)号：JP2007229718A
公开(公告)日：2007-09-13
申请号：JP2007161033
申请日：2007-06-19
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： FURUKAWA MASAHIRO , KAWAKAMI TSUNEO , KITAMI KATSUNOBU , OKUMURA MASATAKE
IPC分类号： B01D65/02
摘要： PROBLEM TO BE SOLVED: To provide a washing apparatus for a membrane separator for ultrapure water production which can effectively prevent the elution of amine into ultrapure water used, for example, in a manufacturing plant for silicon wafers, system LSIs and the like and can stably supply ultrapure water having very high purity. SOLUTION: The washing apparatus for a membrane separator for ultrapure water production comprises a washing water supply pipe having a joint detachable from a water supply port in a membrane separator, a permeate discharge pipe having a joint detachable from a permeate outlet in the membrane separator, and a retentate discharge pipe having a joint detachable from a retentate outlet in the membrane separator. A valve and a flow rate regulating means are provided in the washing water supply pipe. A valve is provided in the permeate discharge pipe. A valve is provided in the retentate discharge pipe. A blow water pipe with a valve is connected to a branch of the washing water supply pipe. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决的问题：提供一种用于超纯水生产的膜分离器的洗涤装置，其可以有效地防止胺在例如用于硅晶片的制造工厂，系统LSI等中的超纯水中的洗脱可以稳定地提供纯度非常高的超纯水。解决方案：用于超纯水生产的膜分离器的洗涤装置包括：洗涤水供应管，其具有可从膜分离器中的供水口可拆卸的接头;渗透物排出管，其具有可从所述渗滤出口膜分离器和具有可从膜分离器中的滞留物出口分离的接头的滞留物排出管。在洗涤水供给管中设置有阀和流量调节机构。在渗透物排出管中设置有阀。在滞留物排出管中设置有阀。具有阀的吹水管连接到洗涤水供给管的分支。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2007083152A Method and apparatus for recovering water from cmp waste water containing high toc 有权
标题翻译：用于从含有高TOC的CMP废水中回收水的方法和装置
公开(公告)号：JP2007083152A
公开(公告)日：2007-04-05
申请号：JP2005274155
申请日：2005-09-21
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： FURUKAWA MASAHIRO
IPC分类号： C02F1/44 , B01D61/02 , B01D61/04 , B01D61/14 , B01D61/58
摘要： PROBLEM TO BE SOLVED: To efficiently recover water having excellent quality by treating CMP (Chemical Mechanical Polishing) waste water containing high TOC (Total Organic Carbon).
SOLUTION: The method for recovering water from CMP waste water containing high TOC comprises the steps of: subjecting CMP waste water containing high TOC to UF (Ultra-Filtration) membrane separation; subjecting the obtained filtrate to first RO (Reverse Osmosis) membrane separation at pH11-12; and subjecting the filtrate obtained by the first RO membrane separation to second RO membrane separation at pH6.5-7.5. When the filtrate is subjected to the first RO membrane separation, the decrease of a membrane flux and the generation of slime are restrained since TOC is concentrated under the strongly alkaline condition. When the filtrate is subjected to the second RO membrane separation, the quality of the water to be recovered is improved.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过处理含有高TOC（总有机碳）的CMP（化学机械抛光）废水，有效地回收具有优良品质的水。解决方案：从含有高TOC的CMP废水中回收水的方法包括以下步骤：对含有高TOC的CMP废水进行UF（超滤）膜分离; 将获得的滤液在pH11-12下进行第一次RO（反渗透）膜分离; 并将通过第一RO膜分离获得的滤液在pH6.5-7.5下进行第二次RO膜分离。当滤液进行第一次RO膜分离时，由于TOC在强碱性条件下浓缩，所以抑制了膜通量的降低和粘液的产生。当滤液进行第二次RO膜分离时，回收水的质量得到改善。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2006192354A Non-regenerative type ion exchange vessel and ultrapure water production apparatus 审中-公开
标题翻译：非再生型离子交换器和超声波水生产设备
公开(公告)号：JP2006192354A
公开(公告)日：2006-07-27
申请号：JP2005005413
申请日：2005-01-12
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： FURUKAWA MASAHIRO
IPC分类号： C02F1/42 , C02F1/32 , C02F1/70 , C02F1/72
摘要： PROBLEM TO BE SOLVED: To provide a non-regenerative type ion exchange vessel and an ultrapure water production apparatus which can reduce the number of vessels, incidental equipment, and an installation area, and save time for maintenance when producing the ultrapure water that keeps the dissolved oxygen concentration down to a very low level, by oxidizing water to be treated by UV irradiation, and then bringing the water into contact with a palladium catalyst to filtered out DO to a very low level concentration.
SOLUTION: In the non-regenerative type ion exchange vessel, its inside has an anion-exchange resin layer or a mixed resin layer in which anion-exchange resin and cation-exchange resin exist in a mixed state, and a palladium catalyst layer is accumulated on the upper surface of the anion-exchange resin layer or the mixed resin layer. In the ultrapure production apparatus having an ultraviolet irradiation and oxidation device into which water to be treated is introduced, and the non-regenerative type ion exchange vessel into which outflow water from the ultraviolet irradiation and oxidation device is supplied, the non-regenerative type ion exchange vessel is installed in such a manner, and the water to be treated is irradiated with ultraviolet light to be oxidized, then brought into contact with the palladium catalyst to remove dissolved oxygen, and brought into contact with anion-exchange resin or mixed resin to obtain ultrapure water from which ionic substances have been removed.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够减少容器数量，附带设备和安装面积的非再生型离子交换容器和超纯水生产装置，并且在制造超纯水时节省维护时间通过用UV照射氧化待处理的水，然后使水与钯催化剂接触以将DO过滤掉至非常低的浓度，使溶解氧浓度降至非常低的水平。解决方案：在非再生型离子交换容器中，其内部具有阴离子交换树脂层或混合树脂层，其中阴离子交换树脂和阳离子交换树脂以混合状态存在，钯催化剂层叠在阴离子交换树脂层或混合树脂层的上表面上。在引入了被处理水的紫外线照射和氧化装置的超纯生产装置以及供给来自紫外线照射和氧化装置的流出水的非再生型离子交换容器中，非再生型离子以这种方式安装交换容器，并将待处理的水照射紫外线进行氧化，然后与钯催化剂接触以除去溶解的氧，并与阴离子交换树脂或混合树脂接触获得已经从中除去离子物质的超纯水。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2006192352A Ultrapure water production apparatus and ultrapure water production method 有权
标题翻译：超声波水生产设备和超声波水生产方法
公开(公告)号：JP2006192352A
公开(公告)日：2006-07-27
申请号：JP2005005411
申请日：2005-01-12
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： FURUKAWA MASAHIRO , KAWAKAMI TSUNEO
IPC分类号： C02F1/32 , C02F1/58 , C02F1/70 , C02F1/72
摘要： PROBLEM TO BE SOLVED: To enable early sampling of ultrapure water with a low dissolved oxygen concentration by reducing a start-up period of an apparatus at the restart of operation after stopping the operation of the apparatus when producing the ultrapure water that keeps the dissolved oxygen concentration down to a very low level by irradiating water to be treated with ultraviolet light to be oxidized, and then bringing the water into contact with a palladium catalyst.
SOLUTION: In an ultrapure water production apparatus having an ultraviolet irradiation and oxidation device and a container filled with the palladium catalyst, and obtaining the ultrapure water free of the dissolved oxygen by irradiating the water to be treated with the ultraviolet light to be oxidized, and then bringing the water into contact with the palladium catalyst, the inside of the container filled with the palladium catalyst is kept under pressure during stopping water supply to the container.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了能够在生产保持超纯水的装置停止操作之后，通过减少重新开始操作时的装置的启动周期来使得具有低溶解氧浓度的超纯水早期取样通过用待氧化的紫外线照射待处理的水，然后使水与钯催化剂接触，将溶解氧浓度降低到非常低的水平。解决方案：在具有紫外线照射和氧化装置的超纯水生产装置和装有钯催化剂的容器中，通过用紫外线照射待处理的水来获得不含溶解氧的超纯水氧化，然后使水与钯催化剂接触，在停止向容器供水期间，填充有钯催化剂的容器内部保持压力。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2000288935A METHOD AND DEVICE FOR RECOVERING NON-COLLOIDAL ABRASIVE MATERIAL 失效
公开(公告)号：JP2000288935A
公开(公告)日：2000-10-17
申请号：JP10034699
申请日：1999-04-07
申请人： KURITA WATER IND LTD
发明人： HAYASHI KAZUKI , MIWA RYOHEI , FURUKAWA MASAHIRO , KOIZUMI MOTOMU
IPC分类号： B24B57/02 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To efficiently recover the easily reusable slurry of abrasive grains as abrasive material slurry from the waste water of a polishing process. SOLUTION: This method for recovering a non-colloidal abrasive material includes the processes of microfiltering the waster water of a polishing process, condensing the filtrate by centrifugal separation, and washing the condensed liquid with water. This device for recovering the non-colloidal abrasive material is provided with a microfilter membrane means 1 for introducing the waste water of the polishing process, a centrifugal separating means 2 for introducing the filtrate of the microfiltering means, and a washing means 3 for water- washing the condensed liquid obtained by the centrifugal separating means 2.

7. 发明专利

JP2000246246A METHOD FOR RECOVERING AMMONIA WATER 失效
公开(公告)号：JP2000246246A
公开(公告)日：2000-09-12
申请号：JP5734499
申请日：1999-03-04
申请人： KURITA WATER IND LTD
发明人： OBATA KASHU , FURUKAWA MASAHIRO , MIWA RYOHEI , KAWAKAMI TSUNEO
IPC分类号： C02F1/44 , C02F1/28
摘要： PROBLEM TO BE SOLVED: To recycle ammonia by a method in which RCA cleaning drainage containing ammonia and hydrogen peroxide, after being contacted with active carbon or a platinum catalyst to decompose the hydrogen peroxide, is passed through a reverse osmosis membrane. SOLUTION: RCA cleaning drainage containing ammonia and hydrogen peroxide is treated with active carbon or a platinum catalyst to decompose/remove the hydrogen peroxide. A method in which the drainage is passed through a contact column filled with active carbon and others is simple and efficient. The content of hydrogen peroxide is preferably about 1.0 ppm or below. Water after the treatment, after being subjected to ion exchange treatment using an NH4-replaced cation exchange resin to remove heavy metal ions, is passed through a reverse osmosis membrane. In this way, the load of the membrane is reduced, impurities can be removed safely without causing a phase change, and ammonia can be recycled.

8. 发明专利

JPH09234466A ION EXCHANGE DEVICE AND PURIFIED WATER MANUFACTURING DEVICE 失效
公开(公告)号：JPH09234466A
公开(公告)日：1997-09-09
申请号：JP4494796
申请日：1996-03-01
申请人： KURITA WATER IND LTD
发明人： FURUKAWA MASAHIRO
IPC分类号： B01D61/02 , B01J47/02 , C02F1/42
摘要： PROBLEM TO BE SOLVED: To provide an ion exchange device enabling to omit a separation process of a resin, being easy in the regeneration and short in a rising time after the regeneration and enabling to obtain treated water with a high resistance value and a lower concentration of silica, and a purified water manufacturing device using this device. SOLUTION: An ion exchange tower 30 is partitioned with partitioning plates 1-34 each enabling to pass through water, and a lower part room 35 is filled with a cation exchange resin layer 41 in a fluidizable state and an intermediate room 36 is filled with a first anion exchange resin layer 42 in a fluidizable state and an upper part room 37 is filled with a second anion exchange resin layer 43 in a non-fluidizable state due to its swelled state. RO treated water is allowed to flow toward to undergo ion exchange and produce purified water. The regeneration of the anion exchange resin is carried out by introducing a regenerant from a regenerant path 53 and regenerating it with its downward flow, and waste liquid is taken out from a liquid collection and distribution device 54 in an inactive resin layer 44.

9. 发明专利

JPH08103670A ION EXCHANGER 失效
公开(公告)号：JPH08103670A
公开(公告)日：1996-04-23
申请号：JP26444394
申请日：1994-10-05
申请人： KURITA WATER IND LTD
发明人： FURUKAWA MASAHIRO , SATO KAZUICHI , KAMETANI SHIGEJI , ISHII SEIICHI , MOTOMURA TAKAHITO
IPC分类号： C02F1/42 , B01J47/00 , B01J49/00
摘要： PURPOSE: To facilitate the exchange of an ion-exchange resin. CONSTITUTION: A resin-packed part 4 separated by a first screen 2 provided at the upper part and a second screen 3 fixed at the lower part is formed in a vessel 1. The raw water inlet 5, treated water outlet 7 and resin inlet 6 are provided at the upper part of the vessel 1 piercing the first screen, and a resin outlet 9 is furnished at the lower part of the vessel piercing the second screen.

10. 发明专利

JPH04193314A FILTER FOR PURIFYING AIR 失效
公开(公告)号：JPH04193314A
公开(公告)日：1992-07-13
申请号：JP32107590
申请日：1990-11-27
申请人： TOSHIBA CORP , KURITA WATER IND LTD
发明人： SHUDO TOSHIAKI , FURUKAWA MASAHIRO , KUROKI KATSUNORI
IPC分类号： B01D39/16 , B01D39/14 , B01D46/10
摘要： PURPOSE:To effectively remove chlorine in air or other volatile salts and to improve cleanness of air in a clean room by using both an ion exchange fiber and moisture absorbing resin to form an air purifying filter. CONSTITUTION:The air purifying filter consists of both of ion exchange fiber comprising cation fiber and anion fiber and an moisture absorbing resin. The use amt. of the moisture absorbing resin is determined so that the water content of the ion exchange fiber is kept to >=60%. Thereby, the filter becomes wet itself with water in air, which effectively remove chlorine in air or other volatile salts such as NH3, F, etc. Thus, the content of salts in a clean room of a semiconductor production factory, etc., can be reduced by one order and the cleanness of air in the clean room is improved.

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