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    • 4. 发明授权
    • Device for measuring temperature of object in vacuum environment
    • 真空环境下物体温度测量装置
    • US5092680A
    • 1992-03-03
    • US527307
    • 1990-05-23
    • Kazuo KobayashiAyahiko SatoYuji UeharaShigetomo Sawada
    • Kazuo KobayashiAyahiko SatoYuji UeharaShigetomo Sawada
    • G01J5/04G01J5/08
    • G01J5/0003G01J5/041G01J5/061G01J5/08G01J5/0806G01J5/0809G01J5/0821G01J5/084G01J5/0868G01J5/0875G01J5/046
    • A device for the measurement of a temperature in a relatively low range having the lower limit of below 100.degree. C. is proposed. The device is suitably used for measuring a temperature of a substrate 4 during a sputtering treatment in a vacuum environment. Infrared rays radiated from the substrate 4 in a vacuum chamber 1 are collected by an optical lens 13 mounted in a freely movable probe 10 via a mirror (15) provided in a hood 14 attached to a front end of the probe (10) for deflecting the incident rays to the lens 13. The collected rays are led outside the chamber 1 to a sensor through a fluoride fiber 8 optically connected to the lens 13. The fiber 8 is enveloped in an air-tight manner within a metal bellows 9. A pipe 20, 24 for feeding a coolant extends in a circulating manner through the interior of the bellows 9 between a coolant source 30 and the probe 10, to suppress the radiation of infrared rays from the probe 10, hood 14 and mirror 15, and to reduce disturbance to the detected substrate temperature value. A combination of an MCT sensor composed of Hg, Cd and Te and a chalcogen fiber composed of Ge, As, Se and Te is also proposed for the measurement of relatively low temperature ranges. A system for controlling a substrate temperature during the sputtering process while using the above device is also proposed.
    • 提出了用于测量具有低于100℃的下限的较低范围内的温度的装置。 该装置适用于在真空环境中的溅射处理期间测量基板4的温度。 在真空室1中从基板4辐射的红外线通过安装在可自由移动的探针10中的光学透镜13收集,所述光学透镜13经由设置在附接到探针(10)的前端的罩14中的反射镜(15) 入射到透镜13的光线。收集的光线通过光学连接到透镜13的氟化纤维8被引导到室1外面到传感器。光纤8以气密的方式包围在金属波纹管9内。 用于供给冷却剂的管20,24以循环的方式延伸穿过冷却剂源30和探针10之间的波纹管9的内部,以抑制来自探针10,罩14和反射镜15的红外线的辐射,并且 减少对检测到的基板温度值的干扰。 还提出了由Hg,Cd和Te组成的MCT传感器和由Ge,As,Se和Te组成的硫族元素纤维的组合,用于测量相对较低的温度范围。 还提出了一种用于在使用上述装置的溅射过程中控制衬底温度的系统。