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1. 发明授权

US07473859B2 Gating voltage control system and method for electrostatically actuating a micro-electromechanical device 有权
标题翻译：门电压控制系统和静电驱动微机电装置的方法
公开(公告)号：US07473859B2
公开(公告)日：2009-01-06
申请号：US11622483
申请日：2007-01-12
申请人： Joshua Isaac Wright , Kanakasabapathi Subramanian , William James Premerlani , John Norton Park , Christopher Keimel , Long Que , Kuna Venkat Satya Rama Kishore , Abhijeet Dinkar Sathe , Xuefeng Wang , Edward Keith Howell
发明人： Joshua Isaac Wright , Kanakasabapathi Subramanian , William James Premerlani , John Norton Park , Christopher Keimel , Long Que , Kuna Venkat Satya Rama Kishore , Abhijeet Dinkar Sathe , Xuefeng Wang , Edward Keith Howell
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H47/22 , Y10T307/937
摘要： A gating voltage control system and method are provided for electrostatically actuating a micro-electromechanical systems (MEMS) device, e.g., a MEMS switch. The device may comprise an electrostatically responsive actuator movable through a gap for actuating the device to a respective actuating condition corresponding to one of a first actuating condition (e.g., a closed switching condition) and a second actuating condition (e.g., an open switching condition). The gating voltage control system may comprise a drive circuit electrically coupled to a gate terminal of the device to apply a gating voltage. The gating voltage control system may further comprise a controller electrically coupled to the drive circuit to control the gating voltage applied to the gating terminal in accordance with a gating voltage control sequence. The gating voltage control sequence may comprise a first interval for ramping up the gating voltage to a voltage level for producing an electrostatic force sufficient to accelerate the actuator through a portion of the gap to be traversed by the actuator to reach a respective actuating condition. The gating voltage control sequence may further comprise a second interval for ramping down the gating voltage to a level sufficient to reduce the electrostatic force acting on the movable actuator. This allows reducing the amount of force at which the actuator engages a contact for establishing the first actuating condition, or avoiding an overshoot position of the actuator while reaching the second actuating condition.
摘要翻译：提供了门控电压控制系统和方法，用于静电致动微机电系统（MEMS）装置，例如MEMS开关。该装置可以包括静电响应致动器，其可通过间隙移动，以将装置致动到对应于第一致动状态（例如，闭合开关状态）和第二致动状态（例如，开启状态）之一的相应致动状态，。门控电压控制系统可以包括电耦合到该器件的栅极端子以施加选通电压的驱动电路。门控电压控制系统还可以包括电耦合到驱动电路的控制器，以根据门控电压控制顺序控制施加到门控端子的门控电压。门控电压控制序列可以包括用于将门控电压升高到电压电平的第一间隔，用于产生足以通过由致动器穿过的间隙的一部分来加速致动器以达到相应的致动状态的静电力。门控电压控制序列还可以包括用于将门控电压降低到足以减小作用在可移动致动器上的静电力的水平的第二间隔。这允许减小致动器接合接触件以建立第一致动条件的力的量，或者避免致动器在达到第二致动状态时的过冲位置。

2. 发明申请

US20080169707A1 Gating Voltage Control System And Method For Electrostatically Actuating A Micro-Electromechanical Device 有权
标题翻译：静电驱动微机电装置门控电压控制系统及方法
公开(公告)号：US20080169707A1
公开(公告)日：2008-07-17
申请号：US11622483
申请日：2007-01-12
申请人： Joshua Isaac Wright , Kanakasabapathi Subramanian , William James Premerlani , John Norton Park , Christopher Keimel , Long Que , Kuna Venkat Satya Rama Kishore , Abhijeet Dinkar Sathe , Xuefeng Wang , Edward Keith Howell
发明人： Joshua Isaac Wright , Kanakasabapathi Subramanian , William James Premerlani , John Norton Park , Christopher Keimel , Long Que , Kuna Venkat Satya Rama Kishore , Abhijeet Dinkar Sathe , Xuefeng Wang , Edward Keith Howell
IPC分类号： H01H9/54
CPC分类号： H01H59/0009 , H01H47/22 , Y10T307/937
摘要： A gating voltage control system and method are provided for electrostatically actuating a micro-electromechanical systems (MEMS) device, e.g., a MEMS switch. The device may comprise an electrostatically responsive actuator movable through a gap for actuating the device to a respective actuating condition corresponding to one of a first actuating condition (e.g., a closed switching condition) and a second actuating condition (e.g., an open switching condition). The gating voltage control system may comprise a drive circuit electrically coupled to a gate terminal of the device to apply a gating voltage. The gating voltage control system may further comprise a controller electrically coupled to the drive circuit to control the gating voltage applied to the gating terminal in accordance with a gating voltage control sequence. The gating voltage control sequence may comprise a first interval for ramping up the gating voltage to a voltage level for producing an electrostatic force sufficient to accelerate the actuator through a portion of the gap to be traversed by the actuator to reach a respective actuating condition. The gating voltage control sequence may further comprise a second interval for ramping down the gating voltage to a level sufficient to reduce the electrostatic force acting on the movable actuator. This allows reducing the amount of force at which the actuator engages a contact for establishing the first actuating condition, or avoiding an overshoot position of the actuator while reaching the second actuating condition.
摘要翻译：提供了门控电压控制系统和方法，用于静电致动微机电系统（MEMS）装置，例如MEMS开关。该装置可以包括静电响应致动器，其可通过间隙移动，以将装置致动到对应于第一致动状态（例如，闭合开关状态）和第二致动状态（例如，开启状态）之一的相应致动状态，。门控电压控制系统可以包括电耦合到该器件的栅极端子以施加选通电压的驱动电路。门控电压控制系统还可以包括电耦合到驱动电路的控制器，以根据门控电压控制顺序控制施加到门控端子的门控电压。门控电压控制序列可以包括用于将门控电压升高到电压电平的第一间隔，用于产生足以通过由致动器穿过的间隙的一部分来加速致动器以达到相应的致动状态的静电力。门控电压控制序列还可以包括用于将门控电压降低到足以减小作用在可移动致动器上的静电力的水平的第二间隔。这允许减小致动器接合接触件以建立第一致动条件的力的量，或者避免致动器在达到第二致动状态时的过冲位置。

3. 发明申请

US20070127019A1 Collection probe for use in a Raman spectrometer system and methods of making and using the same 有权
标题翻译：用于拉曼光谱仪系统的收集探针及其制作和使用方法
公开(公告)号：US20070127019A1
公开(公告)日：2007-06-07
申请号：US11400863
申请日：2006-04-10
申请人： Anis Zribi , Ayan Banerjee , Shivappa Goravar , Shankar Chandrasekaran , Sandip Maity , Glenn Claydon , Stacey Kennerly , Todd Tolliver , David Hays , Sheila Tandon , Long Que , Christopher Keimel
发明人： Anis Zribi , Ayan Banerjee , Shivappa Goravar , Shankar Chandrasekaran , Sandip Maity , Glenn Claydon , Stacey Kennerly , Todd Tolliver , David Hays , Sheila Tandon , Long Que , Christopher Keimel
IPC分类号： G01J3/44 , G01N21/65
CPC分类号： G01J3/44 , G01J3/02 , G01J3/0291 , G01N21/65
摘要： A photonic crystal based collection probe is provided. The probe includes a photonic crystal configured to guide and condition a beam of Raman scattered photons. Further, the device includes a spectrograph in optical communication with the photonic crystal and configured to receive Raman scattering from the photonic crystal. The device may be employed in a Raman spectrometer system.
摘要翻译：提供了一种基于光子晶体的收集探针。探针包括配置成引导和调节拉曼散射光子束的光子晶体。此外，该装置包括与光子晶体光学通信并被配置为从光子晶体接收拉曼散射的光谱仪。该装置可以用在拉曼光谱仪系统中。

4. 发明申请

US20100220331A1 Micro-electromechanical system fabry-perot filter cavity 审中-公开
标题翻译：微机电系统fabry-perot过滤器腔
公开(公告)号：US20100220331A1
公开(公告)日：2010-09-02
申请号：US11447779
申请日：2006-06-06
申请人： Anis Zribi , Glenn S. Claydon , David C. Hays , Stacey Kennerly , Long Que , Shankar Chandrasekaran , Shivappa Goravar , Ayan Banerjee
发明人： Anis Zribi , Glenn S. Claydon , David C. Hays , Stacey Kennerly , Long Que , Shankar Chandrasekaran , Shivappa Goravar , Ayan Banerjee
IPC分类号： G01J3/45 , G02B26/00
CPC分类号： G01J3/26 , G01J3/06 , G02B26/001
摘要： According to some embodiments, a micro-electrical mechanical system apparatus includes an actuator within a plane and at least one movable mirror oriented substantially normal to the plane. The actuator may move the movable mirror with respect to a fixed mirror oriented substantially normal to the plane and substantially parallel to the movable mirror. The space between the fixed and movable mirrors might comprise, for example, a Fabry-Perot filter cavity for a spectrometer.
摘要翻译：根据一些实施例，微电机械系统装置包括在平面内的致动器和基本上垂直于该平面定向的至少一个可移动镜。致动器可以相对于基本上垂直于平面定向并且基本上平行于可移动镜的固定镜移动可移动镜。固定镜和可移动镜之间的空间可以包括例如用于光谱仪的法布里 - 珀罗滤光腔。

5. 发明申请

US20100182608A1 IRREGULARLY SHAPED ACTUATOR FINGERS FOR A MICRO-ELECTROMECHANICAL SYSTEM FABRY-PEROT FILTER 失效
标题翻译：用于微电子机械系统的不规则形状的致动器指示器
公开(公告)号：US20100182608A1
公开(公告)日：2010-07-22
申请号：US11502187
申请日：2006-08-10
申请人： Anis Zribi , Glenn S. Claydon , Long Que , Stacey Kennerly , Shankar Chandrasekaran , Shivappa Goravar , David C. Hays , Ayan Banerjee
发明人： Anis Zribi , Glenn S. Claydon , Long Que , Stacey Kennerly , Shankar Chandrasekaran , Shivappa Goravar , David C. Hays , Ayan Banerjee
IPC分类号： G01J3/45 , G02B26/00
CPC分类号： G01J3/26 , G01J3/06 , G02B26/001
摘要： According to one embodiment, a micro-electrical mechanical system apparatus includes (i) a comb drive actuator having at least one irregularly shaped finger and (ii) a movable Fabry-Perot filter cavity mirror coupled to the comb drive actuator. According to some embodiments, a relationship between a voltage applied to the comb drive actuator and an amount of displacement associated with the movable mirror is substantially linear.
摘要翻译：根据一个实施例，微电机械系统装置包括（i）具有至少一个不规则形状的指状物的梳状驱动致动器和（ii）耦合到梳状驱动致动器的可移动的法布里 - 珀罗滤光镜反射镜。根据一些实施例，施加到梳状驱动致动器的电压与与可移动镜相关联的位移量之间的关系基本上是线性的。

6. 发明授权

US07586603B2 Method and apparatus for improved signal to noise ratio in Raman signal detection for MEMS based spectrometers 失效
标题翻译：用于基于MEMS的光谱仪的拉曼信号检测中改善信噪比的方法和装置
公开(公告)号：US07586603B2
公开(公告)日：2009-09-08
申请号：US12104471
申请日：2008-04-17
申请人： Sandip Maity , Ayan Banerjee , Anis Zribi , Stacey Kennerly , Long Que , Glenn Claydon , Shankar Chandrasekaran , Shivappa Goravar
发明人： Sandip Maity , Ayan Banerjee , Anis Zribi , Stacey Kennerly , Long Que , Glenn Claydon , Shankar Chandrasekaran , Shivappa Goravar
IPC分类号： G01J3/44
CPC分类号： G01J3/44 , G01J1/44 , G01J3/02 , G01J3/0229 , G01J3/0232 , G01J3/0256 , G01J3/0264 , G01J3/0272 , G01J3/0286 , G01J3/0297 , G01J3/1895 , G01J3/4338 , G02B26/04 , H01L31/107
摘要： A method of Raman detection for a portable, integrated spectrometer instrument includes directing Raman scattered photons by a sample to an avalanche photodiode (APD), the APD configured to generate an output signal responsive to the intensity of the Raman scattered photons incident thereon. The output signal of the APD is amplified and passed through a discriminator so as to reject at least one or more of amplifier noise and dark noise. A number of discrete output pulses within a set operational range of the discriminator is counted so as to determine a number of photons detected by the APD.
摘要翻译：用于便携式，集成光谱仪器的拉曼检测方法包括将样品的拉曼散射光子引导到雪崩光电二极管（APD），APD被配置为响应入射在其上的拉曼散射光子的强度产生输出信号。 APD的输出信号被放大并通过鉴频器，以便抑制至少一个或多个放大器噪声和暗噪声。对鉴别器的设定操作范围内的多个离散输出脉冲进行计数，以便确定APD检测到的光子数量。

7. 发明授权

US07573578B2 Micro-electromechanical system Fabry-Perot filter mirrors 失效
标题翻译：微机电系统法布里 - 珀罗滤镜
公开(公告)号：US07573578B2
公开(公告)日：2009-08-11
申请号：US11502189
申请日：2006-08-10
申请人： Anis Zribi , Glenn S. Claydon , David C. Hays , Stacey Kennerly , Long Que , Shankar Chandrasekaran , Shivappa Goravar , Ayan Banerjee
发明人： Anis Zribi , Glenn S. Claydon , David C. Hays , Stacey Kennerly , Long Que , Shankar Chandrasekaran , Shivappa Goravar , Ayan Banerjee
IPC分类号： G01B9/02
CPC分类号： G02B26/001
摘要： According to one embodiment, a micro-electrical mechanical system apparatus includes first and second mirrors that define a cavity. Moreover, a photonic band-gap structure coats a surface of at least one of the first or second mirrors to improve reflectivity. Another embodiment includes a third mirror, wherein the second and third mirrors form a second cavity. The spaces between the mirrors might comprise, for example, a pair of Fabry-Perot filter cavities for a spectrometer.
摘要翻译：根据一个实施例，微机电系统装置包括限定空腔的第一和第二反射镜。此外，光子带隙结构涂覆第一或第二反射镜中的至少一个的表面以提高反射率。另一个实施例包括第三反射镜，其中第二和第三反射镜形成第二腔。反射镜之间的空间可以包括例如用于光谱仪的一对法布里 - 珀罗滤光器空腔。

8. 发明申请

US20080204743A1 METHOD AND APPARATUS FOR IMPROVED SIGNAL TO NOISE RATIO IN RAMAN SIGNAL DETECTION FOR MEMS BASED SPECTROMETERS 失效
公开(公告)号：US20080204743A1
公开(公告)日：2008-08-28
申请号：US12104471
申请日：2008-04-17
申请人： Sandip Maity , Ayan Banerjee , Anis Zribi , Stacey Kennerly , Long Que , Glenn Claydon , Shankar Chandrasekaran , Shivappa Goravar
发明人： Sandip Maity , Ayan Banerjee , Anis Zribi , Stacey Kennerly , Long Que , Glenn Claydon , Shankar Chandrasekaran , Shivappa Goravar
IPC分类号： G01J3/44
CPC分类号： G01J3/44 , G01J1/44 , G01J3/02 , G01J3/0229 , G01J3/0232 , G01J3/0256 , G01J3/0264 , G01J3/0272 , G01J3/0286 , G01J3/0297 , G01J3/1895 , G01J3/4338 , G02B26/04 , H01L31/107
摘要： A method of Raman detection for a portable, integrated spectrometer instrument includes directing Raman scattered photons by a sample to an avalanche photodiode (APD), the APD configured to generate an output signal responsive to the intensity of the Raman scattered photons incident thereon. The output signal of the APD is amplified and passed through a discriminator so as to reject at least one or more of amplifier noise and dark noise. A number of discrete output pulses within a set operational range of the discriminator is counted so as to determine a number of photons detected by the APD.

9. 发明授权

US07142303B2 Micro-discharge optical source apparatus and method and system for analyzing a sample 有权
标题翻译：微放电光源装置及分析样品的方法和系统
公开(公告)号：US07142303B2
公开(公告)日：2006-11-28
申请号：US10937918
申请日：2004-09-10
申请人： Yogesh B. Gianchandani , Ghester G. Wilson , Long Que , Bhaskar Mitra , Ponnambalam Selvaganapathy
发明人： Yogesh B. Gianchandani , Ghester G. Wilson , Long Que , Bhaskar Mitra , Ponnambalam Selvaganapathy
IPC分类号： G01J3/10 , G01N21/64
CPC分类号： H01J61/58 , G01N21/645 , G01N21/67 , G01N21/69 , G01N2021/6417
摘要： A micro-discharge optical source apparatus and a method and system which utilizes the apparatus to analyze a sample are provided. The apparatus includes a substrate and an anode electrode and a cathode electrode supported on the substrate. One of the electrodes, such as the cathode, is preferably a liquid electrode. The electrodes are spaced apart to define an inter-electrode gap therebetween. The apparatus further includes a voltage source for applying a voltage between the electrodes sufficient to generate a glow micro-discharge in the gap to cause a first emission having a first desired excitation spectrum. An optical element is integrated with the substrate to direct the first emission to travel along an optical path including an axis. In one embodiment, the system detects the direct fluorescence of a sample such as tryptophan and other amino acids. In another embodiment, the system detects fluorescence of dye-labeled biochemicals.
摘要翻译：提供一种微放电光源装置以及利用该装置分析样品的方法和系统。该装置包括基板和支撑在基板上的阳极电极和阴极电极。诸如阴极的电极之一优选为液体电极。电极间隔开以限定它们之间的电极间间隙。该装置还包括用于在电极之间施加足以在间隙中产生辉光微放电以产生具有第一期望激发光谱的第一发射的电压的电压源。光学元件与衬底集成以引导第一发射沿着包括轴的光路行进。在一个实施方案中，系统检测样品如色氨酸和其它氨基酸的直接荧光。在另一个实施方案中，该系统检测染料标记的生物化学物质的荧光。

10. 发明授权

US06549107B2 Latching mechanism for MEMS actuator and method of fabrication 失效
标题翻译： MEMS致动器的锁定机构及其制造方法
公开(公告)号：US06549107B2
公开(公告)日：2003-04-15
申请号：US09793307
申请日：2001-02-26
申请人： Martin Lim , Robert Fan , Long Que
发明人： Martin Lim , Robert Fan , Long Que
IPC分类号： H01H5122
CPC分类号： H01H1/0036 , G02B26/0866 , H01H61/0107 , H01H2001/0042 , H01H2061/006
摘要： A latching mechanism for a MEMS actuator as, for example, a mirror in an N×N fiber optic switch, maintains a thermally actuated mirror in its actuated position even in the event of a power interruption by a pair of clamps, which clamp against an actuator arm. Such actuator arm is thermally actuated by a bent beam type of thermal actuator. To provide for effective fabrication using the MEMS technique (microelectromechanical system), on for example, a silicon substrate where the entire moveable structure is a suspended mechanism, the clamps are fabricated in a normally closed position. In this position they typically interfere with the line of motion of an enlarged portion of an actuator arm being directly in the line of motion or with a post and slot technique.
摘要翻译：用于MEMS致动器的闩锁机构，例如NxN光纤开关中的反射镜，即使在通过一对夹持器的电力中断的情况下，也将热致动反射镜保持在其致动位置，夹钳紧贴致动器臂。这种致动器臂由弯曲梁式的热致动器热致动。为了提供使用MEMS技术（微机电系统）的有效制造，例如，整个可移动结构是悬挂机构的硅衬底，夹具被制造在常闭位置。在这个位置上，它们通常干扰直接位于运动线中的致动器臂的放大部分的运动线，或者通过柱和槽技术。

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