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1. 发明申请

US20080204743A1 METHOD AND APPARATUS FOR IMPROVED SIGNAL TO NOISE RATIO IN RAMAN SIGNAL DETECTION FOR MEMS BASED SPECTROMETERS 失效
公开(公告)号：US20080204743A1
公开(公告)日：2008-08-28
申请号：US12104471
申请日：2008-04-17
申请人： Sandip Maity , Ayan Banerjee , Anis Zribi , Stacey Kennerly , Long Que , Glenn Claydon , Shankar Chandrasekaran , Shivappa Goravar
发明人： Sandip Maity , Ayan Banerjee , Anis Zribi , Stacey Kennerly , Long Que , Glenn Claydon , Shankar Chandrasekaran , Shivappa Goravar
IPC分类号： G01J3/44
CPC分类号： G01J3/44 , G01J1/44 , G01J3/02 , G01J3/0229 , G01J3/0232 , G01J3/0256 , G01J3/0264 , G01J3/0272 , G01J3/0286 , G01J3/0297 , G01J3/1895 , G01J3/4338 , G02B26/04 , H01L31/107
摘要： A method of Raman detection for a portable, integrated spectrometer instrument includes directing Raman scattered photons by a sample to an avalanche photodiode (APD), the APD configured to generate an output signal responsive to the intensity of the Raman scattered photons incident thereon. The output signal of the APD is amplified and passed through a discriminator so as to reject at least one or more of amplifier noise and dark noise. A number of discrete output pulses within a set operational range of the discriminator is counted so as to determine a number of photons detected by the APD.

2. 发明申请

US20080070338A1 MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED CURRENT & MAGNETIC FIELD SENSOR HAVING CAPACITIVE SENSE COMPONENTS 有权
标题翻译：基于微电子系统（MEMS）的电流和具有电容感测元件的磁场传感器
公开(公告)号：US20080070338A1
公开(公告)日：2008-03-20
申请号：US11939589
申请日：2007-11-14
申请人： Anis Zribi , Glenn Claydon , Christopher Kapusta , Laura Meyer , Ertugal Berkcan , Wei-Cheng Tian
发明人： Anis Zribi , Glenn Claydon , Christopher Kapusta , Laura Meyer , Ertugal Berkcan , Wei-Cheng Tian
IPC分类号： H01L21/02
CPC分类号： G01R33/0283 , G01R15/148 , G01R33/0286
摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.
摘要翻译：基于微机电系统（MEMS）的电流和磁场传感器包括具有电容式磁MEMS组件的基于MEMS的磁场感测部件，补偿器和用于感测磁场的输出部件，并且响应于此而提供当前存在于待测量的导体中的指示。在一个实施例中，第一和第二机械感测部件是导电的并且用于响应于来自磁 - 机械转换器的机械指示器感测机械感测部件之间的电容的变化。

3. 发明申请

US20070236697A1 Compact, hand-held Raman spectrometer microsystem on a chip 有权
标题翻译：紧凑的手持拉曼光谱仪微系统在芯片上
公开(公告)号：US20070236697A1
公开(公告)日：2007-10-11
申请号：US11400948
申请日：2006-04-10
申请人： Anis Zribi , Stacey Kennerly , Glenn Claydon , Long Que , Ayan Banerjee , Shankar Chandrasekaran , Shivappa Goravar , David Hays
发明人： Anis Zribi , Stacey Kennerly , Glenn Claydon , Long Que , Ayan Banerjee , Shankar Chandrasekaran , Shivappa Goravar , David Hays
IPC分类号： G01B9/02 , G01J3/45
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/0256 , G01J3/0272 , G01J3/0291 , G01J3/26 , G01J3/44 , G01N21/65 , G01N21/658 , G01N2201/0221
摘要： An integrated spectrometer instrument, including an optical source formed on a chip, the optical source configured to generate an incident optical beam upon a sample to be measured. Collection optics formed on the chip are configured to receive a scattered optical beam from the sample, and filtering optics formed on the chip are configured to remove elastically scattered light from the scattered optical beam at a wavelength corresponding to the optical source. A tunable filter formed on the chip is configured to pass selected wavelengths of the scattered optical beam, and a photo detector device formed on the chip is configured to generate an output signal corresponding to the intensity of photons passed through the tunable filter.
摘要翻译：一种集成光谱仪器，包括形成在芯片上的光源，所述光源被配置为在待测样品上产生入射光束。形成在芯片上的采集光学元件被配置为接收来自样品的散射光束，并且形成在芯片上的滤光光学元件被配置为以对应于光源的波长去除来自散射光束的弹性散射光。形成在芯片上的可调滤波器被配置为通过散射光束的选定波长，并且形成在芯片上的光检测器装置被配置为产生对应于通过可调谐滤波器的光子的强度的输出信号。

4. 发明申请

US20070127019A1 Collection probe for use in a Raman spectrometer system and methods of making and using the same 有权
标题翻译：用于拉曼光谱仪系统的收集探针及其制作和使用方法
公开(公告)号：US20070127019A1
公开(公告)日：2007-06-07
申请号：US11400863
申请日：2006-04-10
申请人： Anis Zribi , Ayan Banerjee , Shivappa Goravar , Shankar Chandrasekaran , Sandip Maity , Glenn Claydon , Stacey Kennerly , Todd Tolliver , David Hays , Sheila Tandon , Long Que , Christopher Keimel
发明人： Anis Zribi , Ayan Banerjee , Shivappa Goravar , Shankar Chandrasekaran , Sandip Maity , Glenn Claydon , Stacey Kennerly , Todd Tolliver , David Hays , Sheila Tandon , Long Que , Christopher Keimel
IPC分类号： G01J3/44 , G01N21/65
CPC分类号： G01J3/44 , G01J3/02 , G01J3/0291 , G01N21/65
摘要： A photonic crystal based collection probe is provided. The probe includes a photonic crystal configured to guide and condition a beam of Raman scattered photons. Further, the device includes a spectrograph in optical communication with the photonic crystal and configured to receive Raman scattering from the photonic crystal. The device may be employed in a Raman spectrometer system.
摘要翻译：提供了一种基于光子晶体的收集探针。探针包括配置成引导和调节拉曼散射光子束的光子晶体。此外，该装置包括与光子晶体光学通信并被配置为从光子晶体接收拉曼散射的光谱仪。该装置可以用在拉曼光谱仪系统中。

5. 发明申请

US20060076947A1 Micro-electromechanical system (MEMS) based current & magnetic field sensor having improved sensitivities 有权
标题翻译：基于微机电系统（MEMS）的电流和磁场传感器具有改进的灵敏度
公开(公告)号：US20060076947A1
公开(公告)日：2006-04-13
申请号：US11289910
申请日：2005-11-30
申请人： Ertugrul Berkcan , Shankar Chandrasekaran , Christopher Kapusta , Laura Meyer , Glenn Claydon , Debbie Jones , Anis Zribi
发明人： Ertugrul Berkcan , Shankar Chandrasekaran , Christopher Kapusta , Laura Meyer , Glenn Claydon , Debbie Jones , Anis Zribi
IPC分类号： G01R1/20
CPC分类号： G01R15/207 , G01R15/148 , G01R33/0283 , G01R33/0286 , G01R35/005 , Y10T29/49002
摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.
摘要翻译：基于微机电系统（MEMS）的电流和磁场传感器包括基于MEMS的磁场感测部件，包括硅衬底的结构部件和包括选自二氧化硅和氮化硅的材料的柔性层，耦合到所述结构部件以提供所述磁场的机械指示的磁 - 机械转换器，以及耦合到所述结构部件以感测所述机械指示并且提供所述载流导体中的电流的指示的应变响应部件回应。

6. 发明申请

US20050262943A1 Apparatus, methods, and systems to detect an analyte based on changes in a resonant frequency of a spring element 审中-公开
标题翻译：基于弹簧元件的谐振频率的变化来检测分析物的装置，方法和系统
公开(公告)号：US20050262943A1
公开(公告)日：2005-12-01
申请号：US10854845
申请日：2004-05-27
申请人： Glenn Claydon , Stacey Goodwin , Anis Zribi , Wei-Cheng Tian , Aaron Knobloch , Walter Cicha , Patrick Malenfant
发明人： Glenn Claydon , Stacey Goodwin , Anis Zribi , Wei-Cheng Tian , Aaron Knobloch , Walter Cicha , Patrick Malenfant
IPC分类号： G01N29/02 , G01N29/036 , G01N29/04 , G01N29/24
CPC分类号： G01N29/036 , G01N29/022 , G01N29/2418 , G01N2291/0215 , G01N2291/0255 , G01N2291/0256
摘要： According to some embodiments, a Microelectromechanical System (MEMS) sensor includes a sensing material on a spring element. The sensor may also include a detector adapted to determine a resonant frequency associated with the spring element, wherein the resonant frequency changes upon the exposure of the sensing material to an analyte.
摘要翻译：根据一些实施例，微机电系统（MEMS）传感器包括弹簧元件上的感测材料。传感器还可以包括适于确定与弹簧元件相关联的谐振频率的检测器，其中当检测材料暴露于分析物时，谐振频率发生变化。

7. 发明申请

US20050098749A1 METHOD FOR PROTECTING THE DIAPHRAGM AND EXTENDING THE LIFE OF SIC AND/OR SI MEMS MICROVALVES 有权
标题翻译：保护膜片并延长SIC和/或SI MEMS微孔的寿命的方法
公开(公告)号：US20050098749A1
公开(公告)日：2005-05-12
申请号：US10876072
申请日：2004-06-24
申请人： Glenn Claydon , Ernest Balch
发明人： Glenn Claydon , Ernest Balch
IPC分类号： B81C1/00 , F15C5/00 , F16K99/00 , F16K31/12
CPC分类号： B81C1/00492 , F15C5/00 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0048 , F16K2099/0074 , F16K2099/008
摘要： A microvalve and a method of forming a diaphragm stop for a microvalve. The microvalve includes a first layer and a diaphragm member to control the flow of fluid through the microvalve. The method comprises the step of forming a contoured shaped recess extending inward from a surface of the layer by using a laser to remove material in a series of areas, at successively greater depths extending inward from said surface. Preferably, the recess has a dome shape, and may be formed by a direct-write laser operated via a computer aided drawing program running on a computer. For example, CAD artwork files, comprising a set of concentric polygons approximating circles, may be generated to create the dome structure. The laser ablation depth can be controlled by modifying the offset step distance of the polygons and equating certain line widths to an equivalent laser tool definition. Preferably, the laser tool definition is combined with the CAD artwork, which defines a laser path such that the resulting geometry has no sharp edges that could cause the diaphragm of the valve to tear or rupture.
摘要翻译：微型阀和形成用于微型阀的隔膜止动件的方法。微型阀包括第一层和隔膜构件，以控制通过微型阀的流体流动。该方法包括以下步骤：在从所述表面向内延伸的连续更大的深度处，通过使用激光来形成从层的表面向内延伸的轮廓形状的凹槽，以移除一系列区域中的材料。优选地，凹部具有圆顶形状，并且可以通过在计算机上运行的计算机辅助绘图程序来操作的直写激光器形成。例如，可以生成包括近似圆的一组同心多边形的CAD图形文件，以创建圆顶结构。可以通过修改多边形的偏移步距并将某些线宽等同于等效的激光工具定义来控制激光烧蚀深度。优选地，激光工具定义与CAD图形组合，其限定激光路径，使得所得到的几何形状没有尖锐边缘，其可能导致阀的隔膜撕裂或破裂。

8. 发明授权

US07586603B2 Method and apparatus for improved signal to noise ratio in Raman signal detection for MEMS based spectrometers 失效
标题翻译：用于基于MEMS的光谱仪的拉曼信号检测中改善信噪比的方法和装置
公开(公告)号：US07586603B2
公开(公告)日：2009-09-08
申请号：US12104471
申请日：2008-04-17
申请人： Sandip Maity , Ayan Banerjee , Anis Zribi , Stacey Kennerly , Long Que , Glenn Claydon , Shankar Chandrasekaran , Shivappa Goravar
发明人： Sandip Maity , Ayan Banerjee , Anis Zribi , Stacey Kennerly , Long Que , Glenn Claydon , Shankar Chandrasekaran , Shivappa Goravar
IPC分类号： G01J3/44
CPC分类号： G01J3/44 , G01J1/44 , G01J3/02 , G01J3/0229 , G01J3/0232 , G01J3/0256 , G01J3/0264 , G01J3/0272 , G01J3/0286 , G01J3/0297 , G01J3/1895 , G01J3/4338 , G02B26/04 , H01L31/107
摘要： A method of Raman detection for a portable, integrated spectrometer instrument includes directing Raman scattered photons by a sample to an avalanche photodiode (APD), the APD configured to generate an output signal responsive to the intensity of the Raman scattered photons incident thereon. The output signal of the APD is amplified and passed through a discriminator so as to reject at least one or more of amplifier noise and dark noise. A number of discrete output pulses within a set operational range of the discriminator is counted so as to determine a number of photons detected by the APD.
摘要翻译：用于便携式，集成光谱仪器的拉曼检测方法包括将样品的拉曼散射光子引导到雪崩光电二极管（APD），APD被配置为响应入射在其上的拉曼散射光子的强度产生输出信号。 APD的输出信号被放大并通过鉴频器，以便抑制至少一个或多个放大器噪声和暗噪声。对鉴别器的设定操作范围内的多个离散输出脉冲进行计数，以便确定APD检测到的光子数量。

9. 发明授权

US07586602B2 Method and apparatus for improved signal to noise ratio in Raman signal detection for MEMS based spectrometers 失效
公开(公告)号：US07586602B2
公开(公告)日：2009-09-08
申请号：US11459449
申请日：2006-07-24
申请人： Sandip Maity , Ayan Banerjee , Anis Zribi , Stacey Kennerly , Long Que , Glenn Claydon , Shankar Chandrasekaran , Shivappa Goravar
发明人： Sandip Maity , Ayan Banerjee , Anis Zribi , Stacey Kennerly , Long Que , Glenn Claydon , Shankar Chandrasekaran , Shivappa Goravar
IPC分类号： G01J3/44
CPC分类号： G01J3/44 , G01J1/44 , G01J3/02 , G01J3/0229 , G01J3/0232 , G01J3/0256 , G01J3/0264 , G01J3/0272 , G01J3/0286 , G01J3/0297 , G01J3/1895 , G01J3/4338 , G02B26/04 , H01L31/107
摘要： A method of Raman detection for a portable, integrated spectrometer instrument includes directing Raman scattered photons by a sample to an avalanche photodiode (APD), the APD configured to generate an output signal responsive to the intensity of the Raman scattered photons incident thereon. The output signal of the APD is amplified and passed through a discriminator so as to reject at least one or more of amplifier noise and dark noise. A number of discrete output pulses within a set operational range of the discriminator is counted so as to determine a number of photons detected by the APD.

10. 发明申请

US20070181963A1 MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED CURRENT AND MAGNETIC FIELD SENSOR USING TUNNELING CURRENT SENSING 有权
标题翻译：基于微机电系统（MEMS）的电流和使用隧道式电流传感器的磁场传感器
公开(公告)号：US20070181963A1
公开(公告)日：2007-08-09
申请号：US11736678
申请日：2007-04-18
申请人： Ertugrul Berkcan , Christopher Kapusta , Marco Aimi , Shankar Chandrasekaran , Glenn Claydon
发明人： Ertugrul Berkcan , Christopher Kapusta , Marco Aimi , Shankar Chandrasekaran , Glenn Claydon
IPC分类号： H01L29/84
CPC分类号： G01R15/207 , G01R15/148 , G01R33/0283 , G01R33/0286 , G01R35/005
摘要： A micro-electro-mechanical system (MEMS) current sensor for sensing a magnetic field produced by an electrical current flowing in a conductor includes a first fixed element and a moving element. The moving element is spaced away from the first fixed element and is movable relative to the fixed element responsive to a magnetic field produced by an electrical current flowing in a conductor for providing a mechanical indication of a strength of the magnetic field. The sensor also includes a tunneling current generator for generating a tunneling current between the first fixed element and the moving element and a tunneling current monitor for monitoring a change in the tunneling current responsive to the mechanical indication to provide an indication of a value of the electrical current in the conductor.
摘要翻译：用于感测由在导体中流动的电流产生的磁场的微机电系统（MEMS）电流传感器包括第一固定元件和移动元件。移动元件与第一固定元件间隔开，并且可响应于在导体中流动的电流产生的磁场相对于固定元件移动，以提供磁场强度的机械指示。传感器还包括用于在第一固定元件和移动元件之间产生隧道电流的隧道电流发生器，以及隧道电流监视器，用于响应于机械指示监视隧道电流的变化，以提供电气值的指示电流在导体中。

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