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    • 1. 发明申请
    • Electrical x-talk shield for MEMs micromirrors
    • 用于MEMs微镜的电气x对讲屏蔽
    • US20060210218A1
    • 2006-09-21
    • US11431665
    • 2006-05-11
    • John MillerYuan MaBarrie KeyworthMohiuddin MalaGraham McKinnon
    • John MillerYuan MaBarrie KeyworthMohiuddin MalaGraham McKinnon
    • G02B6/26
    • G02B6/357G02B6/3518G02B6/356G02B6/3584
    • A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.
    • 公开了一种用于光开关的微机电(MEMs)镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度,由此,这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于枢转地安装在同一轴线上,仅具有相对的 两者之间的空气间隙较小。 在为波长切换应用专门设计的本发明的优选实施例中,通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。 根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜,这确保了多个相邻的反射镜装置具有高的填充因子, 而不必依靠复杂而昂贵的制造工艺。 为了限制相邻反射镜之间的电串扰量,屏蔽可以位于电极之间。 屏蔽可以从基板向上延伸和/或从反射镜的下表面向下延伸。 当提供两种类型的屏蔽时,一组彼此偏移以防止其邻接,并且能够实现重叠效果,这增强了保护。
    • 2. 发明申请
    • Electrical x-talk shield for MEMS micromirrors
    • 用于MEMS微镜的电气x对讲屏蔽
    • US20050041916A1
    • 2005-02-24
    • US10850424
    • 2004-05-21
    • John MillerYuan MaBarrie KeyworthMohiuddin MalaGraham McKinnon
    • John MillerYuan MaBarrie KeyworthMohiuddin MalaGraham McKinnon
    • G02B6/26
    • G02B6/357G02B6/3518G02B6/356G02B6/3584
    • A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.
    • 公开了一种用于光开关的微机电(MEMs)镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度,由此,这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于枢转地安装在同一轴线上,仅具有相对的 两者之间的空气间隙较小。 在为波长切换应用专门设计的本发明的优选实施例中,通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。 根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜,这确保了多个相邻的反射镜装置具有高的填充因子, 而不必依靠复杂而昂贵的制造工艺。 为了限制相邻反射镜之间的电串扰量,屏蔽可以位于电极之间。 屏蔽可以从基板向上延伸和/或从反射镜的下表面向下延伸。 当提供两种类型的屏蔽时,一组彼此偏移以防止其邻接,并且能够实现重叠效果,这增强了保护。
    • 4. 发明申请
    • Two-step electrode for MEMs micromirrors
    • 用于MEMs微镜的两步电极
    • US20050089267A1
    • 2005-04-28
    • US10944840
    • 2004-09-21
    • Yuan MaMohiuddin MalaJohn Miller
    • Yuan MaMohiuddin MalaJohn Miller
    • G02B6/26G02B6/35
    • B81B3/0062B81B2201/042G02B6/3518G02B6/3544G02B6/356G02B6/357G02B6/3584
    • A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment the range of angular motion of a MEMs device's platform is increased by reducing the field strength, i.e. the force per unit area, that is sensed at the outer free ends of the platform. Ideally two-step electrodes are provided with a lower step positioned beneath the outer free end of the platform.
    • “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度,由此,这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于相同的轴线枢转地安装,仅具有相对的 两者之间的空气间隙较小。 在优选实施例中,通过减小在平台的外部自由端处感测到的场强(即每单位面积的力)来增加MEMs装置平台的角运动范围。 理想地,两级电极设置有位于平台的外部自由端下方的下部台阶。
    • 5. 发明申请
    • ELECTRODE CONFIGURATION FOR PIANO MEMS MICROMIRROR
    • 用于PIANO MEMS微机的电极配置
    • US20060008201A1
    • 2006-01-12
    • US11220552
    • 2005-09-08
    • John MillerYuan MaBarrie KeyworthWenlin JinDavid Hess
    • John MillerYuan MaBarrie KeyworthWenlin JinDavid Hess
    • G02B6/26
    • G02B6/3584B81B3/0062B81B2201/042G02B6/3518G02B6/3544G02B6/356G02B6/357G02B26/0841Y10S359/904
    • A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.
    • 公开了一种用于光开关的微机电(MEMs)镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度,由此,这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于相同的轴线枢转地安装,仅具有相对的 两者之间的空气间隙较小。 在为波长切换应用专门设计的本发明的优选实施例中,通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。 根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜,这确保了多个相邻的反射镜装置具有高的填充因子, 而不必依靠复杂而昂贵的制造工艺。
    • 6. 发明申请
    • Sunken electrode configuration for MEMs micromirror
    • MEMs微镜的沉没电极配置
    • US20060210238A1
    • 2006-09-21
    • US11437652
    • 2006-05-22
    • Yuan MaGraham McKinnonJohn Miller
    • Yuan MaGraham McKinnonJohn Miller
    • G02B6/00
    • G02B6/357G02B6/3518G02B6/356G02B6/3584G02B26/0841Y10S359/904
    • A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention electrostatic charges, which build up on exposed dielectric surfaces causing the mirror's angular position to drift over time, are minimized by positioning the hot and ground electrodes at different levels separated by a vertical surface, and placing the dielectric material on the vertical surface.
    • 公开了一种用于光开关的微机电(MEMs)镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度,由此,这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于枢转地安装在同一轴线上,仅具有相对的 两者之间的空气间隙较小。 在本发明的优选实施例中,通过将热电极和接地电极定位在由垂直表面分开的不同水平处,使暴露的电介质表面上积聚的导致反射镜的角位置随时间漂移的静电电荷被最小化,并且将电介质 材料在垂直面上。
    • 7. 发明申请
    • Sunken electrode configuration for MEMs micromirror
    • MEMs微镜的沉没电极配置
    • US20050089266A1
    • 2005-04-28
    • US10944838
    • 2004-09-21
    • Yuan MaGraham McKinnonJohn Miller
    • Yuan MaGraham McKinnonJohn Miller
    • G02B6/26G02B6/35
    • G02B6/357G02B6/3518G02B6/356G02B6/3584G02B26/0841Y10S359/904
    • A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention electrostatic charges, which build up on exposed dielectric surfaces causing the mirror's angular position to drift over time, are minimized by positioning the hot and ground electrodes at different levels separated by a vertical surface, and placing the dielectric material on the vertical surface.
    • 公开了一种用于光开关的微机电(MEMs)镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度,由此,这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于相同的轴线枢转地安装,仅具有相对的 两者之间的空气间隙较小。 在本发明的优选实施例中,通过将热电极和接地电极定位在由垂直表面分开的不同水平处,使暴露的电介质表面上积聚的导致反射镜的角位置随时间漂移的静电电荷被最小化,并且将电介质 材料在垂直面上。
    • 8. 发明申请
    • Interlaced array of piano MEMs micromirrors
    • 隔音阵列钢琴MEMs微镜
    • US20050180685A1
    • 2005-08-18
    • US11075650
    • 2005-03-10
    • John MillerWenlin JinBarrie KeyworthPierre Wall
    • John MillerWenlin JinBarrie KeyworthPierre Wall
    • B81B3/00G02B6/35G02B26/08G02B6/26
    • B81B3/0062B81B2201/042G02B6/3518G02B6/3544G02B6/356G02B6/357G02B6/3584G02B26/0841Y10S359/904
    • A micro-electro-mechanical (MEMS) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention the spacing between electrodes is increased without effecting the fill factor of the mirrors by interlacing two sets of tilting platforms, whereby the reflecting portions of both sets of tilting platforms are adjacent one another, while the non-reflecting portions of adjacent platforms are remote from each other.
    • 公开了一种用于光开关的微机电(MEMS)镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度,由此,这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于枢转地安装在同一轴线上,仅具有相对的 两者之间的空气间隙较小。 在本发明的一个优选实施例中,电极之间的间距增加,而不会通过交织两组倾斜平台而影响反射镜的填充系数,由此两组倾斜平台的反射部分彼此相邻,而不反射 相邻平台的部分彼此远离。