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1. 发明申请

US20050180685A1 Interlaced array of piano MEMs micromirrors 有权
标题翻译：隔音阵列钢琴MEMs微镜
公开(公告)号：US20050180685A1
公开(公告)日：2005-08-18
申请号：US11075650
申请日：2005-03-10
申请人： John Miller , Wenlin Jin , Barrie Keyworth , Pierre Wall
发明人： John Miller , Wenlin Jin , Barrie Keyworth , Pierre Wall
IPC分类号： B81B3/00 , G02B6/35 , G02B26/08 , G02B6/26
CPC分类号： B81B3/0062 , B81B2201/042 , G02B6/3518 , G02B6/3544 , G02B6/356 , G02B6/357 , G02B6/3584 , G02B26/0841 , Y10S359/904
摘要： A micro-electro-mechanical (MEMS) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention the spacing between electrodes is increased without effecting the fill factor of the mirrors by interlacing two sets of tilting platforms, whereby the reflecting portions of both sets of tilting platforms are adjacent one another, while the non-reflecting portions of adjacent platforms are remote from each other.
摘要翻译：公开了一种用于光开关的微机电（MEMS）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此，这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于枢转地安装在同一轴线上，仅具有相对的两者之间的空气间隙较小。在本发明的一个优选实施例中，电极之间的间距增加，而不会通过交织两组倾斜平台而影响反射镜的填充系数，由此两组倾斜平台的反射部分彼此相邻，而不反射相邻平台的部分彼此远离。

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