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1. 发明申请

US20080078233A1 Apparatus and method for measuring an environmental condition 有权
标题翻译：用于测量环境条件的装置和方法
公开(公告)号：US20080078233A1
公开(公告)日：2008-04-03
申请号：US11526948
申请日：2006-09-25
申请人： John D. Larson , Storrs T. Hoen , Annette C. Grot , Richard C. Ruby , Graham M. Flower
发明人： John D. Larson , Storrs T. Hoen , Annette C. Grot , Richard C. Ruby , Graham M. Flower
IPC分类号： G01H13/00
CPC分类号： G01N29/022 , G01N29/036 , G01N2291/0253 , G01N2291/0256 , G01N2291/02845 , G01N2291/0426
摘要： A sensor senses an environmental condition. The sensor includes a film bulk acoustic resonator that includes a layer of material that causes resonant frequency and/or quality factor shifts of the film bulk acoustic resonator in response to changes in the environmental condition. The environmental condition may be relative humidity and the layer of material may be a moisture absorptive material.
摘要翻译：传感器感测环境条件。传感器包括膜体声波谐振器，其包括响应于环境条件的变化而引起膜体声波谐振器的谐振频率和/或质量因子偏移的材料层。环境条件可以是相对湿度，并且材料层可以是吸湿材料。

2. 发明授权

US07795997B2 Apparatus and method for measuring an environmental condition 有权
标题翻译：用于测量环境条件的装置和方法
公开(公告)号：US07795997B2
公开(公告)日：2010-09-14
申请号：US11526948
申请日：2006-09-25
申请人： John D. Larson, III , Storrs T. Hoen , Annette C. Grot , Richard C. Ruby , Graham M. Flower
发明人： John D. Larson, III , Storrs T. Hoen , Annette C. Grot , Richard C. Ruby , Graham M. Flower
IPC分类号： H03H9/00
CPC分类号： G01N29/022 , G01N29/036 , G01N2291/0253 , G01N2291/0256 , G01N2291/02845 , G01N2291/0426
摘要： A sensor senses an environmental condition. The sensor includes a film bulk acoustic resonator that includes a layer of material that causes resonant frequency and/or quality factor shifts of the film bulk acoustic resonator in response to changes in the environmental condition. The environmental condition may be relative humidity and the layer of material may be a moisture absorptive material.
摘要翻译：传感器感测环境条件。传感器包括膜体声波谐振器，其包括响应于环境条件的变化而引起膜体声波谐振器的谐振频率和/或质量因子偏移的材料层。环境条件可以是相对湿度，并且材料层可以是吸湿材料。

3. 发明授权

US07427819B2 Film-bulk acoustic wave resonator with motion plate and method 有权
标题翻译：具有运动板和方法的膜 - 体声波谐振器
公开(公告)号：US07427819B2
公开(公告)日：2008-09-23
申请号：US11073345
申请日：2005-03-04
申请人： Storrs T. Hoen , Mark A. Unkrich , William R. Trutna , John D. Larson, III , Richard C Ruby , Graham M. Flower , Annette Grot
发明人： Storrs T. Hoen , Mark A. Unkrich , William R. Trutna , John D. Larson, III , Richard C Ruby , Graham M. Flower , Annette Grot
IPC分类号： H01L41/08 , G01R27/04
CPC分类号： G01P15/097 , G01L1/165
摘要： An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode is formed on the surface of the acoustic reflector and has a surface. A piezoelectric layer is formed on the surface of the first electrode and has a surface. A second electrode is formed on the surface of the piezoelectric layer. A motion plate is suspended in space at a predetermined distance relative to the surface of the second electrode and is capacitively coupled to the FBAR.
摘要翻译：一种用于测量采用具有运动板的膜 - 体声波谐振器的目标环境变量（TEV）的装置和方法。膜 - 体声波谐振器（FBAR）包括形成在FBAR晶片和表面中的声反射器。第一电极形成在声反射体的表面上并具有表面。在第一电极的表面上形成压电层并具有表面。第二电极形成在压电层的表面上。运动板相对于第二电极的表面以预定距离悬挂在空间中，并且电容耦合到FBAR。

4. 发明授权

US07683634B2 Micromachined capacitive sensor and linkage 失效
标题翻译：微机电容传感器和联动
公开(公告)号：US07683634B2
公开(公告)日：2010-03-23
申请号：US11538732
申请日：2006-10-04
申请人： Storrs T. Hoen
发明人： Storrs T. Hoen
IPC分类号： G01R27/26
CPC分类号： G01D5/2412
摘要： In accordance with the invention, a surface capacitive sensor is mechanically coupled to a conventional macrostructure actuator to measure the displacement of the actuator along a measurement axis with high accuracy.
摘要翻译：根据本发明，表面电容传感器机械耦合到常规宏观结构致动器，以高精度测量致动器沿测量轴的位移。

5. 发明授权

US07421899B2 Resonance method for determining the spring constant of scanning probe microscope cantilevers using MEMS actuators 失效
标题翻译：使用MEMS执行器确定扫描探针显微镜悬臂弹簧常数的共振方法
公开(公告)号：US07421899B2
公开(公告)日：2008-09-09
申请号：US11458000
申请日：2006-07-17
申请人： Richard K. Workman , Storrs T. Hoen
发明人： Richard K. Workman , Storrs T. Hoen
IPC分类号： G01H13/00
CPC分类号： G01H13/00 , G01Q40/00
摘要： In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a microelectromechanical system (MEMS) actuator may be determined in-situ using a frequency resonance method.
摘要翻译：根据本发明，可以使用频率共振方法原位确定机械耦合到微机电系统（MEMS）致动器的扫描探针显微镜悬臂的弹簧常数。

6. 发明申请

US20080011044A1 Force method for Determining the Spring Constant of Scanning Probe Microscope Cantilevers using MEMS Actuators 失效
标题翻译：使用MEMS执行器确定扫描探针显微镜悬臂弹簧常数的力法
公开(公告)号：US20080011044A1
公开(公告)日：2008-01-17
申请号：US11458017
申请日：2006-07-17
申请人： Richard K. Workman , Storrs T. Hoen , George M. Clifford
发明人： Richard K. Workman , Storrs T. Hoen , George M. Clifford
IPC分类号： G12B21/00 , G12B21/20
CPC分类号： G01Q40/00 , G01Q10/04
摘要： In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a MEMs actuator may be determined in-situ by application of a force to the scanning probe microscope cantilever.
摘要翻译：根据本发明，机械耦合到MEM致动器的扫描探针显微镜悬臂的弹簧常数可以通过向扫描探针显微镜悬臂施加力来原位确定。

7. 发明授权

US06398850B1 Gas extraction device for extracting gas from a microfluidics system 失效
标题翻译：用于从微流体系统中提取气体的气体提取装置
公开(公告)号：US06398850B1
公开(公告)日：2002-06-04
申请号：US09892203
申请日：2001-06-25
申请人： Leslie A. Field , David K. Donald , Phillip W. Barth , Jonathan Servaites , Storrs T. Hoen
发明人： Leslie A. Field , David K. Donald , Phillip W. Barth , Jonathan Servaites , Storrs T. Hoen
IPC分类号： B41J219
CPC分类号： B41J2/19
摘要： A thermally-activated gas extraction device that comprises a bubble capture chamber, an exhaust manifold, a tapered extraction chamber and an extraction heater associated with the tapered extraction chamber. The tapered extraction chamber extends from the bubble capture chamber towards the exhaust manifold and has a cross-sectional area that increases towards the exhaust manifold. A gas removal method in which the gas extraction device is provided, a bubble of gas is accumulated in the bubble capture chamber, a portion of the liquid in the tapered extraction chamber heated to nucleate a bubble of vapor, and the bubble of vapor is heated to explosively expand the bubble of vapor into contact with the walls of the tapered extraction chamber and into contact with the bubble of gas to form a composite bubble. Contact with the walls of the tapered extraction moves the composite bubble towards the exhaust manifold. Finally, heating of the composite bubble is discontinued to condense the vapor in the composite bubble.
摘要翻译：一种热活化气体提取装置，其包括气泡捕获室，排气歧管，锥形抽出室和与锥形抽出室相关联的抽出加热器。锥形抽出室从气泡捕获室朝向排气歧管延伸并且具有朝向排气歧管增加的横截面面积。一种气体去除方法，其中提供气体提取装置，气体的气泡积聚在气泡捕获室中，锥形抽出室中的一部分液体被加热以使蒸汽的气泡成核，并且蒸气的气泡被加热以将爆炸性地膨胀蒸汽气泡与锥形抽出室的壁接触并与气泡接触以形成复合气泡。与锥形提取物的壁接触将复合气泡朝向排气歧管移动。最后，中止复合气泡的加热以冷凝复合气泡中的蒸汽。

8. 发明授权

US06215222B1 Optical cross-connect switch using electrostatic surface actuators 失效
标题翻译：使用静电表面致动器的光交叉开关
公开(公告)号：US06215222B1
公开(公告)日：2001-04-10
申请号：US09281698
申请日：1999-03-30
申请人： Storrs T. Hoen
发明人： Storrs T. Hoen
IPC分类号： G02B2608
CPC分类号： G02B6/3584 , G02B6/3518 , G02B6/3546 , G02B6/3566 , G02B6/357 , H02N1/006
摘要： A system and a method of steering optical beams utilize a surface electrostatic actuator to mechanically pivot a micromirror to selectively redirect a received optical beam to a predetermined destination. In a preferred application, the system is an optical switch that can optically couple a number of first optical fibers to a number of second optical fibers in one of many configurations. As an optical switch, the system includes a number of switching devices that operate to couple the optical fibers. Each switching device includes a surface electrostatic actuator and a micromirror to reflect a received optical signal to a selected optical fiber. The electrostatic actuator includes a translator and a stator that are separated by a short distance. The opposing surfaces of the translator and stator include a number of drive electrodes. These electrodes generate electrostatic forces between the translator and the stator. The translator is laterally displaced when the electrostatic forces are modified. The modification of the electrostatic forces is accomplished by reconfiguring a voltage pattern of the drive electrodes on the translator and/or the stator. The lateral displacement of the translator pivots the micromirror, which is mechanically attached to the translator. Pivoting the micromirror from a non-reflective orientation to a reflective orientation equates to activating the switching device. When activated, the micromirror of the switching device reflects the received optical signal to the selected optical fiber. In the preferred embodiment, the translator and the stator further include levitator electrodes that generate repulsive forces to negate any attractive forces between the translator and the stator.
摘要翻译：一种用于转向光束的系统和方法利用表面静电致动器来机械地枢转微镜以选择性地将接收到的光束重定向到预定的目的地。在一个优选的应用中，该系统是一种光学开关，其可以将许多第一光纤光学地耦合到许多配置之一的多个第二光纤。作为光开关，该系统包括多个用于耦合光纤的开关装置。每个开关装置包括表面静电致动器和微镜，以将接收到的光信号反射到所选择的光纤。静电致动器包括被短距离分离的平移器和定子。转子和定子的相对表面包括多个驱动电极。这些电极在平移器和定子之间产生静电力。当静电力被修改时，转换器被横向移位。通过重新配置转换器和/或定子上的驱动电极的电压模式来实现静电力的修改。翻转器的横向位移使微反射镜机械地附接到转换器。将微镜从非反射取向枢转到反射取向等于启动开关装置。当激活时，开关装置的微反射镜将接收到的光信号反射到所选择的光纤。在优选实施例中，平移器和定子进一步包括产生排斥力以抵消翻译器和定子之间的任何吸引力的浮动器电极。

9. 发明申请

US20080011083A1 Resonance Method for Determining the Spring Constant of Scanning Probe Microscope Cantilevers using MEMS Actuators 失效
标题翻译：使用MEMS执行器确定扫描探针显微镜悬臂弹簧常数的共振方法
公开(公告)号：US20080011083A1
公开(公告)日：2008-01-17
申请号：US11458000
申请日：2006-07-17
申请人： Richard K. Workman , Storrs T. Hoen
发明人： Richard K. Workman , Storrs T. Hoen
IPC分类号： G01H13/00
CPC分类号： G01H13/00 , G01Q40/00
摘要： In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a microelectromechanical system (MEMS) actuator may be determined in-situ using a frequency resonance method.
摘要翻译：根据本发明，可以使用频率共振方法原位确定机械耦合到微机电系统（MEMS）致动器的扫描探针显微镜悬臂的弹簧常数。

10. 发明申请

US20080011046A1 Displacement Method for Determining the Spring Constant of Scanning Probe Microscope Cantileers using MEMS Actuators 审中-公开
标题翻译：使用MEMS执行器确定扫描探针显微镜悬臂弹簧常数的位移法
公开(公告)号：US20080011046A1
公开(公告)日：2008-01-17
申请号：US11458012
申请日：2006-07-17
申请人： Richard K. Workman , Storrs T. Hoen , George M. Clifford
发明人： Richard K. Workman , Storrs T. Hoen , George M. Clifford
IPC分类号： G12B21/00
CPC分类号： G01Q10/04 , G01Q40/00
摘要： In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a MEMs actuator may be determined in-situ using a displacement method.
摘要翻译：根据本发明，机械耦合到MEM致动器的扫描探针显微镜悬臂的弹簧常数可以使用位移法原位确定。

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