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    • 8. 发明授权
    • Quickly replaceable processing-laser modules and subassemblies
    • 快速更换加工 - 激光模块和组件
    • US08126028B2
    • 2012-02-28
    • US12059426
    • 2008-03-31
    • George M. Clifford, Jr.
    • George M. Clifford, Jr.
    • H01S3/02F16M11/00
    • B23K26/0604B23K26/046B23K26/21B23K26/364B23K26/38H01S3/025H01S3/2383Y10T29/49826Y10T29/49895Y10T29/49904
    • Pre-aligned, kinematically mounted modules including processing lasers, beam trains, and individually calibrated control beams are quickly and easily replaced on subassembly bases with minimal in situ alignment, and can maintain working-spot position to micron tolerances over ambient temperature variations of ±10° C. Subassembly bases, with features for kinematically mating to a plurality of pre-aligned laser modules and to a platform base incorporated in the laser processing tool, enable multi-module subassemblies to be quickly replaced with spare subassemblies of the same type, or swapped for subassemblies of a different type. The mating features and reversible locks are designed to mitigate thermal effects that are often a dominant cause of alignment drift in processing lasers.
    • 预先对准的运动安装模块,包括处理激光器,光束列车和单独校准的控制光束,在组装基座上可以快速轻松地更换,并且可以将工件位置保持在微米公差的环境温度变化±10° 具有用于与多个预对准激光器模块运动学配合的特征以及结合在激光加工工具中的平台基座的子组件基座使多模块组件能够被相同类型的备用子组件快速更换,或 交换为不同类型的子组件。 配合特征和可逆锁被设计为减轻热效应,这些热效应通常是加工激光器中对准漂移的主要原因。
    • 9. 发明申请
    • Autofocus for Ablation Laser
    • 自动对焦消融激光
    • US20090212030A1
    • 2009-08-27
    • US12036977
    • 2008-02-25
    • George M. Clifford, JR.
    • George M. Clifford, JR.
    • B23K26/073
    • B23K26/046
    • A laser ablation system is controlled by an autofocus subsystem particularly optimized for precision ablation of large workpieces, in an open factory environment where temperatures are not tightly controlled, where the workpieces may have high-spatial-frequency features that affect the focus condition of the working beam. The autofocus operates at a high bandwidth to support high process speed. The autofocus beam shares most of its optical path with the working beam, so its measurements account for thermal effects in the beam train as well as the workpiece. The autofocus beam measures target or adjacent areas just before, or during, ablation, so that temperature drifts do not have time to change the effective focus error. The autofocus spot is substantially the same size as the working spot, so its measurements account for workpiece features of the same spatial frequencies that affect the working beam.
    • 激光烧蚀系统由自动聚焦子系统控制,该自动对焦子系统在温度不受严格控制的开放工厂环境中特别优化用于大型工件的精密烧蚀,其中工件可能具有影响工作焦点状态的高空间频率特征 光束。 自动对焦以高带宽工作,以支持高处理速度。 自动对焦光束与工作光束共享其大部分光路,因此其测量结果表明光束列和工件中的热效应。 自动对焦光束在消融之前或期间测量目标或相邻区域,使得温度漂移没有时间改变有效聚焦误差。 自动对焦点的大小与工作点大致相同,因此其测量结果影响到影响工作光束的相同空间频率的工件特征。