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1. 发明授权

US06684523B2 Particle removal apparatus 失效
标题翻译：除尘装置
公开(公告)号：US06684523B2
公开(公告)日：2004-02-03
申请号：US10006023
申请日：2001-12-06
申请人： Joel Brad Bailey , Reginald W. Hunter , Steven Gianoulakis
发明人： Joel Brad Bailey , Reginald W. Hunter , Steven Gianoulakis
IPC分类号： F26B1900
CPC分类号： H01L21/6875 , B08B7/00 , H01L21/67017 , H01L21/67051 , H01L21/67069
摘要： Embodiments of the invention generally provide an apparatus for removing particles from a substrate surface, wherein the apparatus includes a substrate support member configured to support a substrate thereon, and a broadband actuator in mechanical communication with the substrate support member. Additionally, an air knife assembly may be positioned proximate a perimeter of the substrate surface, and is configured to deliver a laminar stream of air across the substrate surface in order to remove the dislodged contamination particles therefrom. Alternatively, a plasma source may be used to remove dislodged particles from the area proximate the substrate surface.
摘要翻译：本发明的实施例通常提供一种用于从衬底表面去除颗粒的设备，其中该设备包括被配置为在其上支撑衬底的衬底支撑构件和与衬底支撑构件机械连通的宽带致动器。另外，气刀组件可以被定位在基板表面的周边附近，并且被配置成将层流的空气流输送到基板表面上，以便从其移除排出的污染颗粒。或者，可以使用等离子体源来从邻近衬底表面的区域去除移出的颗粒。

2. 发明授权

US06725564B2 Processing platform with integrated particle removal system 失效
标题翻译：具有集成颗粒去除系统的加工平台
公开(公告)号：US06725564B2
公开(公告)日：2004-04-27
申请号：US10006020
申请日：2001-12-06
申请人： Reginald W. Hunter , Joel Brad Bailey
发明人： Reginald W. Hunter , Joel Brad Bailey
IPC分类号： F26B1900
CPC分类号： H01L21/67196 , B08B7/00 , H01L21/67017 , H01L21/67051 , H01L21/67069 , H01L21/6875 , H01L21/68792 , Y10S134/902
摘要： Embodiments of the invention generally provide a multistage semiconductor processing tool, wherein the processing tool includes a first transfer chamber having a first substrate transfer robot positioned therein and at least one load lock chamber in communication with the first transfer chamber. The at least one load lock is generally configured to communicate substrates into and out of the first transfer chamber. Further, the processing tool includes at least one substrate cleaning chamber positioned in communication with the first transfer chamber. The at least one substrate cleaning chamber generally includes a substrate support member, a broadband actuation device in communication with the substrate support member, and a particle removal device configured to sweep away dislodged particles from an area proximate the substrate surface. The processing tool further includes a second transfer chamber having a second substrate transfer robot positioned therein, the second transfer chamber being in selective communication with the first transfer chamber, and at least one substrate processing chamber in communication with the second transfer chamber.
摘要翻译：本发明的实施例通常提供一种多级半导体处理工具，其中该处理工具包括一第一传送室，该第一传送室具有位于其中的第一衬底传送机器人和与第一传送室连通的至少一个装载锁定室。所述至少一个加载锁通常被配置为将基板传送到第一传送室和从第一传送室传出。此外，处理工具包括至少一个与第一传送室连通的基板清洁室。所述至少一个衬底清洗室通常包括衬底支撑构件，与衬底支撑构件连通的宽带致动装置，以及被配置为从靠近衬底表面的区域扫除移出的颗粒的颗粒去除装置。所述处理工具还包括第二传送室，其具有位于其中的第二基板传送机械手，所述第二传送室与所述第一传送室选择性连通，以及至少一个与所述第二传送室连通的基板处理室。

3. 发明授权

US06805137B2 Method for removing contamination particles from substrates 失效
标题翻译：从基材去除污染颗粒的方法
公开(公告)号：US06805137B2
公开(公告)日：2004-10-19
申请号：US10006019
申请日：2001-12-06
申请人： Joel Brad Bailey , Reginald W. Hunter
发明人： Joel Brad Bailey , Reginald W. Hunter
IPC分类号： B08B704
CPC分类号： H01L21/6875 , B08B7/00 , H01L21/67017 , H01L21/67051 , H01L21/67069 , H01L21/68792 , Y10S134/902
摘要： Embodiments of the invention provide a method for removing contaminant particles from a substrate surface, where the method includes supporting a substrate in a face up position on a substrate support member and imparting a broadband impulse to the substrate support member in a direction that is substantially perpendicular to a surface of the substrate. The broadband impulse applied to the substrate support is calculated to be of sufficient magnitude to dislodge contamination particles from the surface of the substrate. The method further includes removing dislodged particles from an area proximate the substrate surface.
摘要翻译：本发明的实施方案提供了一种从衬底表面去除污染物颗粒的方法，其中所述方法包括将衬底支撑在衬底支撑构件上的面朝上位置，并在基本垂直的方向上向衬底支撑构件施加宽带脉冲到基板的表面。计算施加到衬底支撑件的宽带脉冲具有足够的量级以从衬底的表面移除污染颗粒。该方法还包括从靠近衬底表面的区域去除脱落的颗粒。

4. 发明授权

US06779226B2 Factory interface particle removal platform 失效
标题翻译：工厂界面颗粒去除平台
公开(公告)号：US06779226B2
公开(公告)日：2004-08-24
申请号：US10006187
申请日：2001-12-06
申请人： Reginald W. Hunter , Joel Brad Bailey
发明人： Reginald W. Hunter , Joel Brad Bailey
IPC分类号： B08B1100
CPC分类号： H01L21/6875 , B08B7/00 , H01L21/67017 , H01L21/67051 , H01L21/67069 , H01L21/68792
摘要： Embodiments of the invention generally provide a processing system for removing contaminant particles from substrates. The processing system generally includes at least one processing enclosure having a particle removal assembly positioned therein. The particle removal assembly generally includes a substrate support member, a broadband actuator in communication with the substrate support member, and an air knife assembly positioned proximate the substrate support member. The air knife assembly is generally configured to generate a high pressure laminar flow of gas across the surface of the substrate. The processing system further includes a substrate transfer enclosure in communication with each of the at least one processing enclosures, at least one substrate supply source in communication with the substrate transfer chamber, and at least one transfer robot positioned in the substrate transfer enclosure, the transfer robot being configured to transfer substrates between the at least one substrate supply source and the at least one processing enclosure.
摘要翻译：本发明的实施例通常提供用于从基底去除污染物颗粒的处理系统。处理系统通常包括至少一个具有定位在其中的颗粒去除组件的处理外壳。颗粒去除组件通常包括衬底支撑构件，与衬底支撑构件连通的宽带致动器以及靠近衬底支撑构件定位的气刀组件。气刀组件通常构造成在衬底的表面上产生高压的气流层流。所述处理系统还包括与所述至少一个处理外壳中的每一个连通的基板传送外壳，与所述基板传送室连通的至少一个基板供应源以及位于所述基板传送外壳中的至少一个传送机器人，所述传送机器人被配置为在所述至少一个基板供应源和所述至少一个处理外壳之间传送基板。

5. 发明申请

US20110050124A1 Replaceable Illumination Module 审中-公开
标题翻译：可更换照明模块
公开(公告)号：US20110050124A1
公开(公告)日：2011-03-03
申请号：US12869990
申请日：2010-08-27
申请人： Joel Brad Bailey , Stephen J. Barcik , William J. Kernion
发明人： Joel Brad Bailey , Stephen J. Barcik , William J. Kernion
IPC分类号： H05B37/02 , H01J61/52
CPC分类号： B29C48/92 , F21K9/23 , F21K9/232 , F21V3/00 , F21V15/01 , F21V19/001 , F21V19/0055 , F21V19/04 , F21V23/0442 , F21V23/0457 , F21V29/54 , F21V29/673 , F21V29/713 , F21V29/74 , F21V29/75 , F21V29/81 , F21V29/83 , F21Y2105/00 , F21Y2107/20 , F21Y2115/10 , F21Y2115/15
摘要： A lighting system is presented that includes a replaceable illumination module removably coupled to a base module. The replaceable illumination module includes one or more solid state lighting elements on a printed circuit board electrically and thermally connected to the base module. The base module may include a heat sink, where the heat sink is in thermal contact with the replaceable illumination module, and dissipates heat generated by the one or more solid state lighting elements during operation of the lighting system. The replaceable illumination module may also include one or more beam conditioning elements for generating a specified beam. The lighting system may be connected to an automated control network and may be automatically controlled thereby, or may be used to control some other system. The heat sink may be generated via a dynamically controllable extrusion die.
摘要翻译：提出了一种照明系统，其包括可拆卸地耦合到基座模块的可更换照明模块。可替换照明模块包括在印刷电路板上电和热连接到基本模块的一个或多个固态照明元件。基座模块可以包括散热器，其中散热器与可更换的照明模块热接触，并且在照明系统的操作期间散发由一个或多个固态照明元件产生的热量。可替换照明模块还可以包括用于产生指定光束的一个或多个光束调节元件。照明系统可以连接到自动化控制网络并且可以被自动控制，或者可以用于控制一些其他系统。可以通过可动态控制的挤出模头来产生散热器。

6. 发明申请

US20110050101A1 Controllable Lighting System 审中-公开
标题翻译：可控照明系统
公开(公告)号：US20110050101A1
公开(公告)日：2011-03-03
申请号：US12870043
申请日：2010-08-27
申请人： Joel Brad Bailey , Stephen J. Barcik , William J. Kernion
发明人： Joel Brad Bailey , Stephen J. Barcik , William J. Kernion
IPC分类号： H01J13/46 , H05B37/02 , H01J13/32
CPC分类号： B29C48/92 , F21K9/23 , F21K9/232 , F21V3/00 , F21V15/01 , F21V19/001 , F21V19/0055 , F21V19/04 , F21V23/0442 , F21V23/0457 , F21V29/54 , F21V29/673 , F21V29/713 , F21V29/74 , F21V29/75 , F21V29/81 , F21V29/83 , F21Y2105/00 , F21Y2107/20 , F21Y2115/10 , F21Y2115/15
摘要： A lighting system is presented that includes a replaceable illumination module removably coupled to a base module. The replaceable illumination module includes one or more solid state lighting elements on a printed circuit board electrically and thermally connected to the base module. The base module may include a heat sink, where the heat sink is in thermal contact with the replaceable illumination module, and dissipates heat generated by the one or more solid state lighting elements during operation of the lighting system. The replaceable illumination module may also include one or more beam conditioning elements for generating a specified beam. The lighting system may be connected to an automated control network and may be automatically controlled thereby, or may be used to control some other system. The heat sink may be generated via a dynamically controllable extrusion die.
摘要翻译：提出了一种照明系统，其包括可拆卸地耦合到基座模块的可更换照明模块。可替换照明模块包括在印刷电路板上电和热连接到基本模块的一个或多个固态照明元件。基座模块可以包括散热器，其中散热器与可更换的照明模块热接触，并且在照明系统的操作期间散发由一个或多个固态照明元件产生的热量。可替换照明模块还可以包括用于产生指定光束的一个或多个光束调节元件。照明系统可以连接到自动化控制网络并且可以被自动控制，或者可以用于控制一些其他系统。可以通过可动态控制的挤出模头来产生散热器。

7. 发明申请

US20110051414A1 Lighting System with Beam Conditioning 审中-公开
标题翻译：光束照明系统
公开(公告)号：US20110051414A1
公开(公告)日：2011-03-03
申请号：US12870012
申请日：2010-08-27
申请人： Joel Brad Bailey , Stephen J. Barcik , William J. Kernion
发明人： Joel Brad Bailey , Stephen J. Barcik , William J. Kernion
IPC分类号： F21V11/00
CPC分类号： B29C48/92 , F21K9/23 , F21K9/232 , F21V3/00 , F21V15/01 , F21V19/001 , F21V19/0055 , F21V19/04 , F21V23/0442 , F21V23/0457 , F21V29/54 , F21V29/673 , F21V29/713 , F21V29/74 , F21V29/75 , F21V29/81 , F21V29/83 , F21Y2105/00 , F21Y2107/20 , F21Y2115/10 , F21Y2115/15
摘要： A lighting system is presented that includes a replaceable illumination module removably coupled to a base module. The replaceable illumination module includes one or more solid state lighting elements on a printed circuit board electrically and thermally connected to the base module. The base module may include a heat sink, where the heat sink is in thermal contact with the replaceable illumination module, and dissipates heat generated by the one or more solid state lighting elements during operation of the lighting system. The replaceable illumination module may also include one or more beam conditioning elements for generating a specified beam. The lighting system may be connected to an automated control network and may be automatically controlled thereby, or may be used to control some other system. The heat sink may be generated via a dynamically controllable extrusion die.
摘要翻译：提出了一种照明系统，其包括可拆卸地耦合到基座模块的可更换照明模块。可替换照明模块包括在印刷电路板上电和热连接到基本模块的一个或多个固态照明元件。基座模块可以包括散热器，其中散热器与可更换的照明模块热接触，并且在照明系统的操作期间散发由一个或多个固态照明元件产生的热量。可替换照明模块还可以包括用于产生指定光束的一个或多个光束调节元件。照明系统可以连接到自动化控制网络并且可以被自动控制，或者可以用于控制一些其他系统。可以通过可动态控制的挤出模头来产生散热器。

8. 发明申请

US20110050100A1 Thermal Management of a Lighting System 审中-公开
标题翻译：照明系统的热管理
公开(公告)号：US20110050100A1
公开(公告)日：2011-03-03
申请号：US12869970
申请日：2010-08-27
申请人： Joel Brad Bailey , Stephen J. Barcik , William J. Kernion
发明人： Joel Brad Bailey , Stephen J. Barcik , William J. Kernion
IPC分类号： H01J13/46 , H01J61/52 , H05B37/02 , H01J9/50
CPC分类号： B29C48/92 , F21K9/23 , F21K9/232 , F21V3/00 , F21V15/01 , F21V19/001 , F21V19/0055 , F21V19/04 , F21V23/0442 , F21V23/0457 , F21V29/54 , F21V29/673 , F21V29/713 , F21V29/74 , F21V29/75 , F21V29/81 , F21V29/83 , F21Y2105/00 , F21Y2107/20 , F21Y2115/10 , F21Y2115/15
摘要： A lighting system is presented that includes a replaceable illumination module removably coupled to a base module. The replaceable illumination module includes one or more solid state lighting elements on a printed circuit board electrically and thermally connected to the base module. The base module may include a heat sink, where the heat sink is in thermal contact with the replaceable illumination module, and dissipates heat generated by the one or more solid state lighting elements during operation of the lighting system. The replaceable illumination module may also include one or more beam conditioning elements for generating a specified beam. The lighting system may be connected to an automated control network and may be automatically controlled thereby, or may be used to control some other system. The heat sink may be generated via a dynamically controllable extrusion die.
摘要翻译：提出了一种照明系统，其包括可拆卸地耦合到基座模块的可更换照明模块。可替换照明模块包括在印刷电路板上电和热连接到基本模块的一个或多个固态照明元件。基座模块可以包括散热器，其中散热器与可更换的照明模块热接触，并且在照明系统的操作期间散发由一个或多个固态照明元件产生的热量。可替换照明模块还可以包括用于产生指定光束的一个或多个光束调节元件。照明系统可以连接到自动化控制网络并且可以被自动控制，或者可以用于控制一些其他系统。可以通过可动态控制的挤出模头来产生散热器。

9. 发明授权

US5993500A Flux management system 失效
标题翻译：助焊剂管理系统
公开(公告)号：US5993500A
公开(公告)日：1999-11-30
申请号：US951364
申请日：1997-10-16
申请人： Joel Brad Bailey , Donald P. Cudmore , Tadeusz Formella , Sabi Avramescu , Anthony Prem
发明人： Joel Brad Bailey , Donald P. Cudmore , Tadeusz Formella , Sabi Avramescu , Anthony Prem
IPC分类号： B23K1/00 , B23K1/008 , H05K3/34 , B01D53/26
CPC分类号： B23K1/008 , B23K2201/42
摘要： Volatile organic components are controlled in electronic component assembly processes to prevent deposits on finished circuit boards and the like. The method of controlling the components in a machine having a plurality of enclosed heating zones followed by at least one cooling zone containing gas, and a conveyor for passing circuit boards therethrough on a conveyor path, comprises the steps of removing a portion of gas from at least one of the heating zones, cooling and filtering the portion of gas remote from the heating zones and the cooling zone to condense at least some of the volatile components in the portion of gas, and returning the cooled and filtered portion of gas to at least one other zone of the heating zones and the cooling zone.
摘要翻译：在电子部件组装过程中控制挥发性有机组分以防止成品电路板等上的沉积物。控制具有多个封闭加热区域，随后至少一个含有气体的冷却区域的机器中的组件的控制方法以及用于在输送路径上通过电路板的输送机包括以下步骤：至少一个加热区域，冷却和过滤远离加热区域和冷却区域的气体部分，以冷凝气体部分中的至少一些挥发性组分，并将冷却和过滤的气体部分返回到至少加热区域和冷却区域的另一个区域。

10. 发明申请

US20110049749A1 Dynamically Controlled Extrusion 审中-公开
标题翻译：动态控制挤压
公开(公告)号：US20110049749A1
公开(公告)日：2011-03-03
申请号：US12870001
申请日：2010-08-27
申请人： Joel Brad Bailey , Stephen J. Barcik , William J. Kernion
发明人： Joel Brad Bailey , Stephen J. Barcik , William J. Kernion
IPC分类号： B29C47/92
CPC分类号： B29C48/92 , F21K9/23 , F21K9/232 , F21V3/00 , F21V15/01 , F21V19/001 , F21V19/0055 , F21V19/04 , F21V23/0442 , F21V23/0457 , F21V29/54 , F21V29/673 , F21V29/713 , F21V29/74 , F21V29/75 , F21V29/81 , F21V29/83 , F21Y2105/00 , F21Y2107/20 , F21Y2115/10 , F21Y2115/15
摘要： A lighting system is presented that includes a replaceable illumination module removably coupled to a base module. The replaceable illumination module includes one or more solid state lighting elements on a printed circuit board electrically and thermally connected to the base module. The base module may include a heat sink, where the heat sink is in thermal contact with the replaceable illumination module, and dissipates heat generated by the one or more solid state lighting elements during operation of the lighting system. The replaceable illumination module may also include one or more beam conditioning elements for generating a specified beam. The lighting system may be connected to an automated control network and may be automatically controlled thereby, or may be used to control some other system. The heat sink may be generated via a dynamically controllable extrusion die.
摘要翻译：提出了一种照明系统，其包括可拆卸地耦合到基座模块的可更换照明模块。可替换照明模块包括在印刷电路板上电和热连接到基本模块的一个或多个固态照明元件。基座模块可以包括散热器，其中散热器与可更换的照明模块热接触，并且在照明系统的操作期间散发由一个或多个固态照明元件产生的热量。可替换照明模块还可以包括用于产生指定光束的一个或多个光束调节元件。照明系统可以连接到自动化控制网络并且可以被自动控制，或者可以用于控制一些其他系统。可以通过可动态控制的挤出模头来产生散热器。

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