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    • 4. 发明授权
    • Flash EEPROM array with floating substrate erase operation
    • 闪存EEPROM阵列具有浮动衬底擦除操作
    • US5598369A
    • 1997-01-28
    • US484252
    • 1995-06-07
    • Jian ChenNader Radjy
    • Jian ChenNader Radjy
    • G11C17/00G11C16/04G11C16/14H01L27/115
    • G11C16/14H01L27/115
    • A flash EEPROM cell array is erased by applying a relatively high positive voltage to the source region of the cell and a ground potential to the control gate of the cell while allowing the voltage of the drain region and the substrate region of the cell to float. By floating the substrate, the source current during erase is greatly reduced since the only DC current path is between the control gate and the source region. Since the source current is small, a double-diffused junction is not required so that the cell can occupy a minimum area for a given design rule and the cell fabrication process is simplified. In addition, the generation of high energy holes is suppressed and improved performance may be obtained. Because the source current is small during the erase operation, the high positive voltage at the source region can be generated by an on chip charge pump from a supply voltage as low as +3 V. This simplifies the design of memory boards on which many flash EEPROM chips are to be placed. Moreover, the after erase Vt distribution of the memory cell is tightened since a relatively high positive voltage is applied to the source region during erasure. Finally, there is no issue of yield sensitivity to defects in the channel, since during the erasure operation, electrons trapped in the floating gate pass through the overlap region between the source region and the control gate, instead of through the channel.
    • 通过向单元的源极区域施加相对高的正电压,并且使单元的漏极区域和衬底区域的电压浮动,从而将电池的接地电位施加到电池的控制栅极,擦除快闪EEPROM单元阵列。 通过浮置衬底,由于唯一的直流电流路径在控制栅极和源极区域之间,擦除期间的源电流大大降低。 由于源极电流很小,所以不需要双扩散结,使得电池可以占用给定设计规则的最小面积,并且简化了电池制造工艺。 此外,抑制了高能量孔的产生,并且可以获得改善的性能。 由于在擦除操作期间源极电流较小,源极区域的高正电压可以通过片上电荷泵从低至+3V的电源电压产生。这简化了许多闪存的存储器板的设计 EEPROM芯片将被放置。 此外,由于在擦除期间将相对较高的正电压施加到源极区域,所以存储单元的后擦除Vt分布被紧固。 最后,由于在擦除操作期间,捕获在浮置栅极中的电子通过源极区域和控制栅极之间的重叠区域而不是通过沟道,所以对通道中的缺陷的产量灵敏度没有任何问题。
    • 5. 发明授权
    • Flash EEPROM array with floating substrate erase operation
    • 闪存EEPROM阵列具有浮动衬底擦除操作
    • US5561620A
    • 1996-10-01
    • US508425
    • 1995-07-31
    • Jian ChenNader Radjy
    • Jian ChenNader Radjy
    • G11C17/00G11C16/04G11C16/14H01L27/115G11C7/00
    • G11C16/14H01L27/115
    • A flash EEPROM cell array is erased by applying a relatively high positive voltage to the source region of the cell and a ground potential to the control gate of the cell while allowing the voltage of the drain region and the substrate region of the cell to float. By floating the substrate, the source current during erase is greatly reduced since the only DC current path is between the control gate and the source region. Since the source current is small, a double-diffused junction is not required so that the cell can occupy a minimum area for a given design rule and the cell fabrication process is simplified. In addition, the generation of high energy holes is suppressed and improved performance may be obtained. Because the source current is small during the erase operation, the high positive voltage at the source region can be generated by an on chip charge pump from a supply voltage as low as +3 V. This simplifies the design of memory boards on which many flash EEPROM chips are to be placed. Moreover, the after erase Vt distribution of the memory cell is tightened since a relatively high positive voltage is applied to the source region during erasure. Finally, there is no issue of yield sensitivity to defects in the channel, since during the erasure operation, electrons trapped in the floating gate pass through the overlap region between the source region and the control gate, instead of through the channel.
    • 通过向单元的源极区域施加相对高的正电压,并且使单元的漏极区域和衬底区域的电压浮动,从而将电池的接地电位施加到电池的控制栅极,擦除快闪EEPROM单元阵列。 通过浮置衬底,由于唯一的直流电流路径在控制栅极和源极区域之间,擦除期间的源电流大大降低。 由于源极电流很小,所以不需要双扩散结,使得电池可以占用给定设计规则的最小面积,并且简化了电池制造工艺。 此外,抑制了高能量孔的产生,并且可以获得改善的性能。 由于在擦除操作期间源极电流较小,源极区域的高正电压可以通过片上电荷泵从低至+3V的电源电压产生。这简化了许多闪存的存储器板的设计 EEPROM芯片将被放置。 此外,由于在擦除期间将相对较高的正电压施加到源极区域,所以存储单元的后擦除Vt分布被紧固。 最后,由于在擦除操作期间,捕获在浮置栅极中的电子通过源极区域和控制栅极之间的重叠区域而不是通过沟道,所以对通道中的缺陷的产量灵敏度没有任何问题。
    • 6. 发明授权
    • Nonvolatile memory structure for programmable logic devices
    • 用于可编程逻辑器件的非易失性存储器结构
    • US5978272A
    • 1999-11-02
    • US871589
    • 1997-06-06
    • Hao FangSameer HaddadNader Radjy
    • Hao FangSameer HaddadNader Radjy
    • G11C16/04H01L29/423H01L29/788G11C11/34
    • G11C16/0416H01L29/42324H01L29/7886G11C2216/10
    • A nonvolatile memory structure is disclosed. The nonvolatile memory structure includes a substrate, a heavily doped drain junction disposed in the substrate, and a lightly doped source junction disposed in the substrate. The source junction is diffused more deeply than the drain junction. The nonvolatile memory structure also includes a gate structure. The gate structure has a floating gate capacitively coupled to the substrate and a control gate capacitively coupled to the floating gate. The heavily doped drain junction has a central portion proximate to the gate structure. The lightly doped source junction also has a central portion proximate to the gate structure. At least the central portion of the lightly doped source junction is more lightly doped than the central portion of the heavily doped drain junction.
    • 公开了非易失性存储器结构。 非易失性存储器结构包括衬底,设置在衬底中的重掺杂漏极结,以及设置在衬底中的轻掺杂源极结。 源极结比漏极结扩散更深。 非易失性存储器结构还包括栅极结构。 栅极结构具有电容耦合到衬底的浮动栅极和与浮动栅极电容耦合的控制栅极。 重掺杂漏极结具有靠近栅极结构的中心部分。 轻掺杂源极结还具有靠近栅极结构的中心部分。 至少轻掺杂源结的中心部分比重掺杂漏极结的中心部分更轻掺杂。
    • 9. 发明授权
    • Silicided shallow junction formation and structure with high and low
breakdown voltages
    • 硅化浅结结形结构具有高和低击穿电压
    • US6011272A
    • 2000-01-04
    • US986284
    • 1997-12-06
    • Farrokh Omid-ZohoorNader Radjy
    • Farrokh Omid-ZohoorNader Radjy
    • H01L21/285H01L21/329H01L21/822H01L27/06H01L27/08H01L29/861H01L23/48H01L23/52H01L29/40
    • H01L27/0814H01L21/28518H01L21/822H01L29/6609H01L29/8611H01L27/0629
    • A method, and structure resulting therefrom, of forming a metal silicide at a shallow junction of a diode in a single crystalline substrate without encroaching on the shallow junction by forming a metal layer on the substrate over the junction followed by forming a layer of a silicon material which reacts with the metal faster than the silicon in the single crystal substrate. Titanium is the preferred metal and amorphous silicon is the preferred silicon layer and is of a thickness to react with most of the titanium. The two layers are rapid thermal annealed to form titanium silicide. A second rapid thermal anneal is performed which converts the majority of the C49 phase of the titanium silicide to a less resistive and a more stable and conductive C54 phase and causes a silicon epitaxial layer to form between silicon substrate and the titanium silicide. The method and resulting structure can be used with a conventional method of fabricating diodes with different or varying breakdown voltages and leakage currents.
    • 一种由此形成的方法及其结构,在单晶衬底中的二极管的浅结处形成金属硅化物,而不会通过在该结上的衬底上形成金属层而不侵入浅结,接着形成一层硅 与单晶衬底中的硅比金属更快地反应的材料。 钛是优选的金属,非晶硅是优选的硅层,并且具有与大部分钛反应的厚度。 两层快速热退火以形成硅化钛。 进行第二快速热退火,其将硅化钛的大多数C49相转换成较小电阻和更稳定且更导电的C54相,并且在硅衬底和硅化钛之间形成硅外延层。 该方法和结果可用于制造具有不同或变化的击穿电压和漏电流的二极管的常规方法。