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    • 5. 发明申请
    • QUARTZ GUARD RING CENTERING FEATURES
    • QUARTZ GUARD戒指中心特点
    • US20110083318A1
    • 2011-04-14
    • US12967717
    • 2010-12-14
    • Dean J. LarsonDaniel BrownKeith ComendantVictor Wang
    • Dean J. LarsonDaniel BrownKeith ComendantVictor Wang
    • B23P11/00
    • H01J37/3255H01J37/32009H01J37/32568Y10T29/49002
    • An electrode assembly and method of centering an outer ring around an electrode assembly in a plasma reaction chamber used in semiconductor substrate processing. The method includes positioning the outer ring around an outer surface of a backing member of the electrode assembly, and inserting at least one centering element between the outer ring and the backing member. The centering element can be a plurality of spring-loaded centering elements received in a cavity on the outer surface of the backing member, the centering elements having a first end adapted to contact the outer ring and a second end adapted to receive a spring. The outer ring surrounds an outer surface of the backing member, such that the plurality of spring-loaded centering elements are positioned between the outer surface of the backing member and an inner surface of the outer ring.
    • 一种电极组件和使外环围绕用于半导体衬底处理的等离子体反应室中的电极组件对中的方法。 该方法包括将外环围绕电极组件的背衬构件的外表面定位,并且在外环和背衬构件之间插入至少一个定心元件。 定心元件可以是容纳在背衬构件的外表面上的空腔中的多个弹簧加载的定心元件,定心元件具有适于接触外圈的第一端和适于容纳弹簧的第二端。 外环围绕背衬构件的外表面,使得多个弹簧加载的定心元件位于背衬构件的外表面和外环的内表面之间。
    • 6. 发明授权
    • Quartz guard ring centering features
    • 石英护环中心功能
    • US07875824B2
    • 2011-01-25
    • US11701507
    • 2007-02-02
    • Dean J. LarsonDaniel BrownKeith ComendantVictor Wang
    • Dean J. LarsonDaniel BrownKeith ComendantVictor Wang
    • B23K10/00
    • H01J37/3255H01J37/32009H01J37/32568Y10T29/49002
    • An electrode assembly and method of centering an outer ring around an electrode assembly in a plasma reaction chamber used in semiconductor substrate processing. The method includes positioning the outer ring around an outer surface of a backing member of the electrode assembly, and inserting at least one centering element between the outer ring and the backing member. The centering element can be a plurality of spring-loaded centering elements received in a cavity on the outer surface of the backing member, the centering elements having a first end adapted to contact the outer ring and a second end adapted to receive a spring. The outer ring surrounds an outer surface of the backing member, such that the plurality of spring-loaded centering elements are positioned between the outer surface of the backing member and an inner surface of the outer ring.
    • 一种电极组件和使外环围绕用于半导体衬底处理的等离子体反应室中的电极组件对中的方法。 该方法包括将外环围绕电极组件的背衬构件的外表面定位,并且在外环和背衬构件之间插入至少一个定心元件。 定心元件可以是容纳在背衬构件的外表面上的空腔中的多个弹簧加载的定心元件,定心元件具有适于接触外圈的第一端和适于容纳弹簧的第二端。 外环围绕背衬构件的外表面,使得多个弹簧加载的定心元件位于背衬构件的外表面和外环的内表面之间。
    • 8. 发明申请
    • Elliptic curve random number generation
    • 椭圆曲线随机数生成
    • US20070189527A1
    • 2007-08-16
    • US11336814
    • 2006-01-23
    • Daniel BrownScott Vanstone
    • Daniel BrownScott Vanstone
    • H04L9/00
    • H04L9/0869G06F7/582G06F7/588G06F7/725H04L9/0662H04L9/0816H04L9/0894H04L9/3066H04L2209/20H04L2209/24H04L2209/26
    • An elliptic curve random number generator avoids escrow keys by choosing a point Q on the elliptic curve as verifiably random. An arbitrary string is chosen and a hash of that string computed. The hash is then converted to a field element of the desired field, the field element regarded as the x-coordinate of a point Q on the elliptic curve and the x-coordinate is tested for validity on the desired elliptic curve. If valid, the x-coordinate is decompressed to the point Q, wherein the choice of which is the two points is also derived from the hash value. Intentional use of escrow keys can provide for back up functionality. The relationship between P and Q is used as an escrow key and stored by for a security domain. The administrator logs the output of the generator to reconstruct the random number with the escrow key.
    • 椭圆曲线随机数发生器通过选择椭圆曲线上的点Q可以无限次地避免代管钥匙。 选择一个任意的字符串,并计算该字符串的散列。 然后将散列转换为所需场的场元素,将该场元素视为椭圆曲线上的点Q的x坐标,并且在期望的椭圆曲线上测试x坐标的有效性。 如果有效,则将x坐标解压缩到点Q,其中,从哈希值导出哪个是两点的选择。 意向使用代管键可以提供备份功能。 P和Q之间的关系用作托管密钥,并由安全域存储。 管理员记录生成器的输出,用代管密钥重构随机数。