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1. 发明申请

US20060000494A1 Self-draining edge wheel system and method 审中-公开
标题翻译：自排水轮系统及方法
公开(公告)号：US20060000494A1
公开(公告)日：2006-01-05
申请号：US10882934
申请日：2004-06-30
申请人： James Garcia , Fritz Redeker
发明人： James Garcia , Fritz Redeker
IPC分类号： B08B3/02
CPC分类号： H01L21/67051 , B08B3/02 , B08B11/02 , B08B2203/0229 , H01L21/67023 , H01L21/67028 , H01L21/67034 , H01L21/6704 , H01L21/68707
摘要： Provided is a system and method to prevent the transfer of accumulated fluid to wafers during cleaning operations. Specifically, when a wafer is secured by a plurality of self-draining edge wheels, any fluid contacting the self-draining edge wheels is channeled away from the wafer towards a bottom surface of each of the self-draining edge wheels. The channeling occurs by manufacturing the bottom portions of the self-draining edge wheels to have different configurations. The different configurations enhance fluid channeling away from the wafer. To further prevent fluid from wetting a bottom surface of the self-draining edge wheels, an edge wheel dryer can be positioned proximately adjacent to at least one self-draining edge wheel to suction fluid away from the bottom surface by using a vacuum channel of the edge wheel dryer.
摘要翻译：提供了一种在清洁操作期间防止积聚的流体转移到晶片的系统和方法。具体地说，当晶片被多个自排水边缘轮固定时，接触自排水边缘轮的任何流体被引导离开晶片朝向每个自排水边缘轮的底表面。通过制造自排水边缘轮的底部以具有不同的构造而发生沟槽。不同的配置增强了远离晶片的流体通道。为了进一步防止流体润湿自排水边缘轮的底部表面，边缘轮干燥器可以被定位成邻近至少一个自排水边缘轮，以通过使用真空通道从底部表面抽吸流体边缘烘干机。

2. 发明申请

US20070218653A1 METHODS FOR DRYING SEMICONDUCTOR WAFER SURFACES USING A PLURALITY OF INLETS AND OUTLETS HELD IN CLOSE PROXIMITY TO THE WAFER SURFACES 失效
标题翻译：使用大量入口和出口将半导体波形表面干燥的方法保持在接近于波长表面的距离
公开(公告)号：US20070218653A1
公开(公告)日：2007-09-20
申请号：US11750960
申请日：2007-05-18
申请人： John de Larios , Mike Ravkin , Carl Woods , Fritz Redeker , James Garcia
发明人： John de Larios , Mike Ravkin , Carl Woods , Fritz Redeker , James Garcia
IPC分类号： H01L21/02
CPC分类号： H01L21/67051 , B08B3/04 , G03F7/30 , H01L21/67028 , H01L21/67034 , Y10S134/902
摘要： Methods for processing substrate through a head that is configured to be placed in close non-contact proximity to a surface of a substrate are provided. One method includes applying a first fluid onto the surface of the substrate from conduits in the head when the head is in close proximity to the surface of the substrate and removing the first fluid from the surface of the substrate. The removing is processed just as first fluid is applied to the surface of the substrate, and the removing ensures that the applied first fluid is contained between a surface of the head and the surface of the substrate and the first fluid being applied and removed defines a controlled meniscus. The method further includes moving the controlled meniscus over different regions of the surface of the substrate when movement of the head or the substrate is dictated. The moving of the controlled meniscus enables processing of part or all of the surface of the substrate using the first fluid.
摘要翻译：提供了通过头部处理基板的方法，该头被配置为与基板的表面紧密非接触地放置。一种方法包括当头部紧邻衬底的表面并从衬底的表面去除第一流体时，将第一流体施加到衬底表面上的管道中。当第一流体被施加到基板的表面上时，移除被处理，并且移除确保所施加的第一流体被包含在头部的表面和基底的表面之间，并且被施加和移除的第一流体限定了受控半月板所述方法还包括当限制头部或基底的运动时，将受控弯液面移动到衬底的表面的不同区域上。受控弯液面的移动使得能够使用第一流体处理基板的部分或全部表面。

3. 发明申请

US20070107756A1 MENISCUS PROXIMITY SYSTEM FOR CLEANING SEMICONDUCTOR SUBSTRATE SURFACES 有权
标题翻译：用于清洁半导体基板表面的MENISCUS接近系统
公开(公告)号：US20070107756A1
公开(公告)日：2007-05-17
申请号：US11619599
申请日：2007-01-03
申请人： Carl Woods , James Garcia , John de Larios
发明人： Carl Woods , James Garcia , John de Larios
IPC分类号： B08B3/00 , B08B3/12
CPC分类号： H01L21/67051 , C25D5/22 , C25D17/001 , H01L21/02041 , H01L21/02052 , H01L21/67028 , H01L21/67034 , H01L21/67046 , Y10S134/902
摘要： A system and apparatus for cleaning a substrate is provided. The system includes a first head configured as a bar shape that extends approximately a diameter of the substrate. The first head is configured for placement on a first side of the substrate. A second head is also provided, and is configured as a bar shape that extends approximately the diameter of the wafer, and the second head is configured for placement on a second side of the substrate, such that the second side is opposite the first side. In this example, each of the first head and the second head have conduits formed therein along the diameter of the substrate for delivering and removing fluids so that a meniscus is capable of being contained between each of the first head and a substrate surface of the first side of the substrate and the second head and a substrate surface of the second side of the substrate.
摘要翻译：提供了一种清洁基板的系统和装置。该系统包括构造为棒状的第一头部，其大致延伸到基底的直径。第一头被配置为放置在基底的第一侧上。还提供了第二头，并且被配置为大致延伸晶片的直径的棒状，并且第二头构造成用于放置在衬底的第二侧上，使得第二侧与第一侧相对。在该示例中，第一头部和第二头部中的每一个具有沿着基底的直径形成在其中的导管，用于输送和移除流体，使得弯液面能够容纳在第一头部和第一头部的基底表面之间基板和第二头部的一侧以及基板的第二侧的基板表面。

4. 发明授权

US4197358A Flexible statue 失效
标题翻译：灵活的雕像
公开(公告)号：US4197358A
公开(公告)日：1980-04-08
申请号：US31406
申请日：1979-04-19
申请人： James Garcia
发明人： James Garcia
IPC分类号： A63H3/04
CPC分类号： A63H3/04
摘要： A figurine which can be flexed into different animated positions, and including a soft wire frame imbedded inside a body of flexible material, the figurine being removably mounted on a base, and the present invention further including various garments for being removably fitted on the figurine.
摘要翻译：可以弯曲成不同动画位置的小雕像，并且包括嵌入在柔性材料体内的软线框架，小雕像可拆卸地安装在基座上，并且本发明还包括用于可拆卸地安装在雕像上的各种衣服。

5. 发明申请

US20070023070A1 Meniscus, vacuum, IPA vapor, drying manifold 失效
标题翻译：半月板，真空，IPA蒸气，干燥歧管
公开(公告)号：US20070023070A1
公开(公告)日：2007-02-01
申请号：US11542700
申请日：2006-10-03
申请人： Carl Woods , James Garcia , John de Larios
发明人： Carl Woods , James Garcia , John de Larios
IPC分类号： B08B5/04 , B08B3/00
CPC分类号： H01L21/67051 , C25D5/22 , C25D17/001 , H01L21/02041 , H01L21/02052 , H01L21/67028 , H01L21/67034 , H01L21/67046 , Y10S134/902
摘要： A head is provided which includes a first surface of the head capable of being in close proximity to the wafer surface, and includes a first conduit region on the head where the first conduit region is defined for delivery of a first fluid to wafer of the surface and the first conduit region is defined in a center portion of the head. The head further includes a second conduit region on the head which surrounds the first conduit region, and includes a third conduit region on the head which is defined for delivery of a second fluid to the wafer surface. The third conduit region semi-encloses the first conduit region and the second conduit region. The second conduit region enables a removal of the first fluid and the second fluid. The delivery of the first fluid and the second fluid combined with the removal by the third conduit region of the head defines a controllable meniscus.
摘要翻译：提供了一种头部，其包括能够靠近晶片表面的头部的第一表面，并且包括头部上的第一导管区域，其中限定第一导管区域以将第一流体输送到表面的晶片并且第一管道区域被限定在头部的中心部分中。头部还包括在头部上的围绕第一管道区域的第二管道区域，并且包括头部上的第三管道区域，其被限定用于将第二流体输送到晶片表面。第三管道区域半封闭第一管道区域和第二管道区域。第二管道区域能够移除第一流体和第二流体。第一流体和第二流体的输送与头部的第三导管区域的移除相结合，限定了可控弯液面。

6. 发明申请

US20050139318A1 Proximity meniscus manifold 失效
标题翻译：近似弯液面歧管
公开(公告)号：US20050139318A1
公开(公告)日：2005-06-30
申请号：US10817133
申请日：2004-04-01
申请人： Carl Woods , Michael Smith , John Parks , James Garcia , John de Larios
发明人： Carl Woods , Michael Smith , John Parks , James Garcia , John de Larios
IPC分类号： B05C9/02 , B05D1/00 , B05D3/12 , H01L21/00 , H01L21/02 , H01L21/027 , H01L21/304 , H01L21/306
CPC分类号： H01L21/67063 , B05C9/02 , H01L21/02052 , H01L21/67023 , H01L21/67028 , H01L21/67034 , H01L21/6704 , H01L21/67051 , H01L21/6708 , Y10S134/902
摘要： An apparatus for processing a substrate is provided which includes a first manifold module to generate a fluid meniscus on a substrate surface. The apparatus also includes a second manifold module to connect with the first manifold module and also to move the first manifold module into close proximity to the substrate surface to generate the fluid meniscus.
摘要翻译：提供了一种用于处理衬底的设备，其包括用于在衬底表面上产生流体弯液面的第一歧管模块。该装置还包括与第一歧管模块连接并且还将第一歧管模块移动到靠近衬底表面以产生流体弯液面的第二歧管模块。

7. 发明授权

US5047653A Device on board a moving vehicle to obtain signals representative of the relative speed of the vehicle with respect to an ambient fluid 失效
标题翻译：装置在移动车辆上以获得代表相对于环境流体的车辆的相对速度的信号
公开(公告)号：US5047653A
公开(公告)日：1991-09-10
申请号：US543081
申请日：1990-06-25
申请人： James Garcia , Gerard Beigbeder
发明人： James Garcia , Gerard Beigbeder
IPC分类号： G01C21/10 , G01C21/00 , G01P5/00 , G01P5/26
CPC分类号： G01P5/26
摘要： A device uses fringe laser diode anemometers which, from the beams coming from one or more laser diodes, form measuring volumes having interference fringes. The component of the relative speed of an aircraft in a direction perpendicular to the plane of these fringes is deduced from the modulation of light reflected by particles moving through the measuring volume to cause modulation of the signal of the photodetector of each anemometer during their passage in the measuring volume of this anemometer. By joining two anemometers with the measuring volumes whose planes of the associated fringes are, for example, orthogonal, it is possible to determine two components of the relative speed vector and determine, for example, this relative speed in the longitudinal vertical plane of the aircraft, and to deduce from it the angle of incidence of the aircraft.
摘要翻译：器件使用边缘激光二极管风速计，其来自一个或多个激光二极管的光束形成具有干涉条纹的测量体积。飞行器在与这些边缘平面垂直的方向上的相对速度的分量是从粒子移动通过测量体积反射的光的调制推导的，以便在每个风速计通过期间对每个风速计的光电检测器的信号进行调制该风速计的测量体积。通过连接两个具有相关边缘的平面的测量体积的风速计例如正交，可以确定相对速度矢量的两个分量，并且确定例如飞行器的纵向垂直平面中的相对速度，并从中推断出飞机的发生角度。

8. 发明授权

US11044998B1 Foldable stadium seat and cooler apparatus 有权
公开(公告)号：US11044998B1
公开(公告)日：2021-06-29
申请号：US16854526
申请日：2020-04-21
申请人： James Garcia
发明人： James Garcia
IPC分类号： A47C1/16 , A47C7/62 , B65D81/18 , A47C7/40
摘要： A foldable stadium seat and cooler apparatus for comfortable and convenient seating and beverage storage includes a cooler housing having a cooler drawer to store ice and beverages. A pair of leg receptacles is coupled to the cooler top side. Each of a pair of chair legs has a lower attachment portion, a riser portion, and a support portion. The lower attachment portion is selectively engageable with the pair of leg receptacles. The pair of chair legs receives a stadium bench or seat between the lower attachment portion and the support portion of each chair leg. A chair bottom is coupled to the support portion of each chair leg and a chair back is coupled to the pair of chair legs.

9. 发明申请

US20070011905A1 Methods and systems for processing a substrate using a dynamic liquid meniscus 失效
标题翻译：使用动态液体弯月面处理衬底的方法和系统
公开(公告)号：US20070011905A1
公开(公告)日：2007-01-18
申请号：US11525278
申请日：2006-09-21
申请人： James Garcia , John de Larios , Michael Ravkin , Fred Redeker , Carl Woods
发明人： James Garcia , John de Larios , Michael Ravkin , Fred Redeker , Carl Woods
IPC分类号： F26B7/00 , F26B5/04
CPC分类号： C25D5/22 , C25D7/12 , H01L21/67028 , H01L21/67034 , H01L21/67051 , H01L21/68707 , Y10S134/902
摘要： A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.
摘要翻译：将弯液面从第一表面移动到第二表面的系统和方法包括在头部和第一表面之间形成弯液面。弯液面可以从第一表面移动到相邻的第二表面，相邻的第二表面平行于第一表面。移动弯液面的系统和方法也可以用于沿着基板的边缘移动弯月面。

10. 发明申请

US20060150435A1 Methods and systems for processing a substrate using a dynamic liquid meniscus 有权
公开(公告)号：US20060150435A1
公开(公告)日：2006-07-13
申请号：US11318019
申请日：2005-12-22
申请人： James Garcia , John de Larios , Michael Ravkin , Fred Redeker , Carl Woods
发明人： James Garcia , John de Larios , Michael Ravkin , Fred Redeker , Carl Woods
IPC分类号： F26B7/00 , F26B17/30 , F26B5/04
CPC分类号： C25D5/22 , C25D7/12 , H01L21/67028 , H01L21/67034 , H01L21/67051 , H01L21/68707 , Y10S134/902
摘要： A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.

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