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    • 1. 发明申请
    • MEMS MICROPHONE
    • MEMS麦克风
    • US20120139066A1
    • 2012-06-07
    • US13252733
    • 2011-10-04
    • Chang Han JEJaewoo LeeWoo Seok YangJongdae Kim
    • Chang Han JEJaewoo LeeWoo Seok YangJongdae Kim
    • H01L29/84
    • H04R19/005H04R1/222H04R19/04H04R31/00
    • Disclosed is a micro electro mechanical system (MEMS) microphone including: a substrate; an acoustic chamber formed by processing the substrate; a lower electrode formed on the acoustic chamber and fixed to the substrate; a diaphragm formed over the lower electrode so as to be spaced apart from the lower electrode by a predetermined interval; and a diaphragm discharge hole formed at a central portion of the diaphragm. According to an exemplary embodiment of the present disclosure, attenuation generated by an air layer between the diaphragm and the lower electrode in a MEMS microphone may be effectively reduced, thereby making it possible to obtain high sensitivity characteristics and reduce a time and a cost required for removing a sacrificial layer between the diaphragm and the lower electrode.
    • 公开了一种微机电系统(MEMS)麦克风,包括:基板; 通过处理衬底形成的声学室; 形成在所述声室上并固定到所述基板的下电极; 隔膜,形成在所述下电极上,以与所述下电极隔开预定间隔; 以及形成在隔膜的中心部分处的隔膜排出孔。 根据本公开的示例性实施例,可以有效地减少由MEMS麦克风中的隔膜和下电极之间的空气层产生的衰减,从而使得可以获得高灵敏度特性并减少所需的时间和成本 去除隔膜和下电极之间的牺牲层。
    • 2. 发明申请
    • ACOUSTIC SENSOR AND METHOD OF MANUFACTURING THE SAME
    • 声学传感器及其制造方法
    • US20120098076A1
    • 2012-04-26
    • US13012489
    • 2011-01-24
    • Jaewoo LEEChang Han JeWoo Seok YangJongdae Kim
    • Jaewoo LEEChang Han JeWoo Seok YangJongdae Kim
    • H01L29/84H01L21/02
    • H04R31/00H04R19/005H04R19/02
    • Provided is an acoustic sensor. The acoustic sensor includes: a substrate including sidewall portions and a bottom portion extending from a bottom of the sidewall portions; a lower electrode fixed at the substrate and including a concave portion and a convex portion, the concave portion including a first hole on a middle region of the bottom, the convex portion including a second hole on an edge region of the bottom; diaphragms facing the concave portion of the lower electrode, with a vibration space therebetween; diaphragm supporters provided on the lower electrode at a side of the diaphragm and having a top surface having the same height as the diaphragm; and an acoustic chamber provided in a space between the bottom portion and the sidewall portions below the lower electrode.
    • 提供了一种声学传感器。 声学传感器包括:基底,其包括侧壁部分和从侧壁部分的底部延伸的底部部分; 固定在所述基板上的下部电极,具有凹部和凸部,所述凹部包括在所述底部的中间区域的第一孔,所述凸部包括在所述底部的边缘区域上的第二孔; 隔膜面向下电极的凹部,其间具有振动空间; 隔膜支撑体设置在隔膜侧面的下电极上,具有与隔膜相同高度的顶表面; 以及设置在下部电极下方的底部和侧壁部之间的空间中的声学室。
    • 4. 发明授权
    • Acoustic sensor
    • 声传感器
    • US08415717B2
    • 2013-04-09
    • US13012489
    • 2011-01-24
    • Jaewoo LeeChang Han JeWoo Seok YangJongdae Kim
    • Jaewoo LeeChang Han JeWoo Seok YangJongdae Kim
    • H01L29/84
    • H04R31/00H04R19/005H04R19/02
    • Provided is an acoustic sensor. The acoustic sensor includes: a substrate including sidewall portions and a bottom portion extending from a bottom of the sidewall portions; a lower electrode fixed at the substrate and including a concave portion and a convex portion, the concave portion including a first hole on a middle region of the bottom, the convex portion including a second hole on an edge region of the bottom; diaphragms facing the concave portion of the lower electrode, with a vibration space therebetween; diaphragm supporters provided on the lower electrode at a side of the diaphragm and having a top surface having the same height as the diaphragm; and an acoustic chamber provided in a space between the bottom portion and the sidewall portions below the lower electrode.
    • 提供了一种声学传感器。 声学传感器包括:基底,其包括侧壁部分和从侧壁部分的底部延伸的底部部分; 固定在所述基板上的下部电极,具有凹部和凸部,所述凹部包括在所述底部的中间区域的第一孔,所述凸部包括在所述底部的边缘区域上的第二孔; 隔膜面向下电极的凹部,其间具有振动空间; 隔膜支撑体设置在隔膜侧面的下电极上,具有与隔膜相同高度的顶表面; 以及设置在下部电极下方的底部和侧壁部之间的空间中的声学室。
    • 6. 发明授权
    • Analog-digital converter and converting method using clock delay
    • 模数转换器和使用时钟延迟的转换方法
    • US08659464B2
    • 2014-02-25
    • US13593301
    • 2012-08-23
    • Young-deuk JeonWoo Seok YangTae Moon RohJong-Kee KwonJongdae Kim
    • Young-deuk JeonWoo Seok YangTae Moon RohJong-Kee KwonJongdae Kim
    • H03M1/34
    • H03M1/462
    • The present inventive concept relates to an analog-digital converter. The analog-digital converter includes a clock generating unit generating a clock signal; a clock delay adjusting unit outputting one of a first clock signal to a Kth clock signal according to a control signal; a capacitive digital-analog converting unit outputting a difference between the analog signal and a reference signal; a comparison unit judging whether an output of the capacitive digital-analog converting unit is 0, a positive number, or a negative number, in response to an output of the clock delay adjusting unit; and an SAR logic unit transferring an output of the comparison unit to the capacitive digital-analog converting unit in response to an output of the clock delay adjusting unit and performing a successive approximation operation to output the N-bit digital signal.
    • 本发明构思涉及一种模数转换器。 模拟数字转换器包括产生时钟信号的时钟产生单元; 时钟延迟调整单元,根据控制信号将第一时钟信号中的一个输出到第K个时钟信号; 输出模拟信号和参考信号之间的差的电容数字 - 模拟转换单元; 比较单元,响应于时钟延迟调整单元的输出,判定电容数字 - 模拟转换单元的输出是0,正数还是负数; 以及SAR逻辑单元,响应于时钟延迟调整单元的输出,将比较单元的输出传送到电容数字 - 模拟转换单元,并执行逐次逼近操作以输出N位数字信号。
    • 7. 发明申请
    • PROCESS INDEPENDENT TEMPERATURE SENSOR BASED ON OSCILLATOR
    • 基于振荡器的过程独立温度传感器
    • US20130156069A1
    • 2013-06-20
    • US13620594
    • 2012-09-14
    • Seok Ju YunYoung-deuk JeonTae Moon RohJong-Kee KwonWoo Seok YangJongdae Kim
    • Seok Ju YunYoung-deuk JeonTae Moon RohJong-Kee KwonWoo Seok YangJongdae Kim
    • G01K7/00
    • G01K7/32
    • The inventive concept discloses a new temperature sensor structure based on oscillator which is insensitive to a process change and improves an error rate of temperature output. The temperature sensor based on oscillator compares an oscillator circuit structure insensitive to a temperature change with an oscillator circuit structure having a frequency change in proportion to a temperature change to output a relative difference between the two oscillator circuit structures and thereby it is compensated itself. In the temperature sensor based on oscillator, a problem of performance reduction due to an external environment and a process deviation of temperature sensor is improved and an output distortion and temperature nonlinearity are effectively improved. Thus, since the temperature sensor based on oscillator has a structure of high performance, low power and low cost, it can be variously used in a detection equipment of temperature environment.
    • 本发明的概念公开了一种基于振荡器的新型温度传感器结构,其对过程变化不敏感并且提高了温度输出的误差率。 基于振荡器的温度传感器将对温度变化不敏感的振荡器电路结构与具有与温度变化成比例的频率变化的振荡器电路结构进行比较,以输出两个振荡器电路结构之间的相对差,由此自身进行补偿。 在基于振荡器的温度传感器中,提高了由于外部环境导致的性能降低和温度传感器的工艺偏差的问题,并且有效地提高了输出失真和温度非线性。 因此,由于基于振荡器的温度传感器具有高性能,低功率和低成本的结构,因此可以被多种用于温度环境的检测设备中。
    • 9. 发明授权
    • Process independent temperature sensor based on oscillator
    • 基于振荡器的独立温度传感器
    • US09068896B2
    • 2015-06-30
    • US13620594
    • 2012-09-14
    • Seok Ju YunYoung-deuk JeonTae Moon RohJong-Kee KwonWoo Seok YangJongdae Kim
    • Seok Ju YunYoung-deuk JeonTae Moon RohJong-Kee KwonWoo Seok YangJongdae Kim
    • G01K11/00G01K7/32
    • G01K7/32
    • The inventive concept discloses a new temperature sensor structure based on oscillator which is insensitive to a process change and improves an error rate of temperature output. The temperature sensor based on oscillator compares an oscillator circuit structure insensitive to a temperature change with an oscillator circuit structure having a frequency change in proportion to a temperature change to output a relative difference between the two oscillator circuit structures and thereby it is compensated itself. In the temperature sensor based on oscillator, a problem of performance reduction due to an external environment and a process deviation of temperature sensor is improved and an output distortion and temperature nonlinearity are effectively improved. Thus, since the temperature sensor based on oscillator has a structure of high performance, low power and low cost, it can be variously used in a detection equipment of temperature environment.
    • 本发明的概念公开了一种基于振荡器的新型温度传感器结构,其对过程变化不敏感并且提高了温度输出的误差率。 基于振荡器的温度传感器将对温度变化不敏感的振荡器电路结构与具有与温度变化成比例的频率变化的振荡器电路结构进行比较,以输出两个振荡器电路结构之间的相对差,由此自身进行补偿。 在基于振荡器的温度传感器中,提高了由于外部环境导致的性能降低和温度传感器的工艺偏差的问题,并且有效地提高了输出失真和温度非线性。 因此,由于基于振荡器的温度传感器具有高性能,低功率和低成本的结构,因此可以被多种用于温度环境的检测设备中。
    • 10. 发明授权
    • Security monitoring system using beamforming acoustic imaging and method using the same
    • 使用波束成形声学成像的安全监控系统及其使用方法
    • US09103908B2
    • 2015-08-11
    • US13289392
    • 2011-11-04
    • Kang-Ho ParkSung Q LeeWoo Seok YangJongdae KimSemyung WangDaesung KimKihyun Kim
    • Kang-Ho ParkSung Q LeeWoo Seok YangJongdae KimSemyung WangDaesung KimKihyun Kim
    • G01S15/00G01S15/04G01S7/52G01S15/89
    • G01S15/04G01S7/52003G01S15/89
    • Disclosed is a security monitoring method determining whether a trespasser is detected and a position of the trespasser in a set security space and monitoring sound generated at the position of the trespasser by using an acoustic image generated from acoustic signals generated by an acoustic generating device and an acoustic measuring device in an array type. An exemplary embodiment of the present disclosure provides a security monitoring system including: an acoustic generating device that generates acoustic signals; a plurality of acoustic measuring devices that receive the acoustic signals; and an acoustic image processing device that generates an acoustic image using a beamforming algorithm from the acoustic signals received in the plurality of acoustic measuring devices and determines a position of a trespasser by comparing the acoustic image after the trespasser is detected with the acoustic image before the trespasser is detected.
    • 公开了一种安全监控方法,其通过使用由声发生装置产生的声信号产生的声像来确定是否检测到侵入者以及在设定的安全空间中的侵入者的位置以及在侵入者的位置处产生的监听声音, 阵列式声学测量装置。 本公开的示例性实施例提供了一种安全监控系统,包括:产生声信号的声产生装置; 多个声学测量装置,其接收声学信号; 以及声学图像处理装置,其使用来自在所述多个声学测量装置中接收的声学信号的波束形成算法生成声学图像,并且通过将侵入侵入者之后的声学图像与所述声学图像进行比较来确定侵入者的位置, 检测到侵入者。